TWD192485S - Rotator for substrate processing apparatus - Google Patents

Rotator for substrate processing apparatus

Info

Publication number
TWD192485S
TWD192485S TW106306961F TW106306961F TWD192485S TW D192485 S TWD192485 S TW D192485S TW 106306961 F TW106306961 F TW 106306961F TW 106306961 F TW106306961 F TW 106306961F TW D192485 S TWD192485 S TW D192485S
Authority
TW
Taiwan
Prior art keywords
substrate processing
rotator
processing apparatus
article
processing device
Prior art date
Application number
TW106306961F
Other languages
Chinese (zh)
Inventor
藤井悟史
Original Assignee
日商日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日立國際電氣股份有限公司 filed Critical 日商日立國際電氣股份有限公司
Publication of TWD192485S publication Critical patent/TWD192485S/en

Links

Abstract

【物品用途】;本設計的物品是基板處理裝置用旋轉器，本物品是安裝在用來處理晶圓的基板處理裝置，是經由凸緣來安裝使用的旋轉具，用以將保持晶圓的晶舟載置在旋轉部，並使晶舟旋轉。;【設計說明】;(無)[Use of article]; The article designed is a spinner for a substrate processing device. This article is installed in a substrate processing device used to process wafers. It is a rotary tool installed through a flange to hold the wafer. The wafer boat is placed on the rotating part, and the wafer boat is rotated. ;[Design description];(none)

Description

基板處理裝置用旋轉器 Rotator for substrate processing apparatus

本設計的物品是基板處理裝置用旋轉器，本物品是安裝在用來處理晶圓的基板處理裝置，是經由凸緣來安裝使用的旋轉具，用以將保持晶圓的晶舟載置在旋轉部，並使晶舟旋轉。 The article of the present design is a rotator for a substrate processing apparatus, and the article is mounted on a substrate processing apparatus for processing a wafer, and is a rotating tool mounted via a flange for placing a wafer boat holding the wafer thereon. Rotate the part and rotate the boat.

TW106306961F 2017-07-25 2017-11-28 Rotator for substrate processing apparatus TWD192485S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2017-16038F JP1596897S (en) 2017-07-25 2017-07-25
JP2017-016038 2017-07-25

Publications (1)

Publication Number Publication Date
TWD192485S true TWD192485S (en) 2018-08-21

Family

ID=61066136

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106306961F TWD192485S (en) 2017-07-25 2017-11-28 Rotator for substrate processing apparatus

Country Status (3)

Country Link
US (1) USD884757S1 (en)
JP (1) JP1596897S (en)
TW (1) TWD192485S (en)

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US11536029B2 (en) 2019-11-20 2022-12-27 Hubbell Incorporated Adjustable electrical fixture mounting assembly
USD927963S1 (en) 2019-11-20 2021-08-17 Hubbell Incorporated Adjustable fixture mounting assembly
USD980299S1 (en) * 2020-04-30 2023-03-07 Lamiflex Group Ab Industrial robot tool
SE545823C2 (en) 2020-04-30 2024-02-13 Lamiflex Group Ab Robot Tool, Robot System and Method for Coil Packaging
SE547304C2 (en) 2020-12-23 2025-06-24 Lamiflex Group Ab Robot System and Method for Coil Packaging
CA203910S (en) * 2021-06-03 2023-05-30 Macdonald Dettwiler & Associates Inc Robotic end effector and end of arm tool
CA203911S (en) * 2021-06-03 2023-05-31 Macdonald Dettwiler & Associates Inc Robotic end effector and end of arm tool

Citations (1)

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Publication number Priority date Publication date Assignee Title
TWI270435B (en) 2004-10-15 2007-01-11 Sankyo Seisakusho Kk Rotary table apparatus

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USD349710S (en) * 1989-04-28 1994-08-16 Kazuo Moro Gear pump
USD384674S (en) * 1995-02-13 1997-10-07 Applied Power Inc. Hydraulic pump unit
USD654092S1 (en) * 2010-03-16 2012-02-14 Motovario S.P.A. Gear casing
USD654524S1 (en) * 2011-01-26 2012-02-21 Linak A/S Linear actuator
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USD817569S1 (en) * 2015-03-23 2018-05-08 Tennant Company Interchangeable scrub brush or scrub pad for a floor maintenance vehicle
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Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI270435B (en) 2004-10-15 2007-01-11 Sankyo Seisakusho Kk Rotary table apparatus

Also Published As

Publication number Publication date
USD884757S1 (en) 2020-05-19
JP1596897S (en) 2018-02-05

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