TWD191627S - Crystal boat side wall - Google Patents

Crystal boat side wall

Info

Publication number
TWD191627S
TWD191627S TW106305511F TW106305511F TWD191627S TW D191627 S TWD191627 S TW D191627S TW 106305511 F TW106305511 F TW 106305511F TW 106305511 F TW106305511 F TW 106305511F TW D191627 S TWD191627 S TW D191627S
Authority
TW
Taiwan
Prior art keywords
side wall
boat side
crystal boat
design
wafer boat
Prior art date
Application number
TW106305511F
Other languages
Chinese (zh)
Inventor
陳宜萱
陳慧貞
王國富
Original Assignee
強友企業有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 強友企業有限公司 filed Critical 強友企業有限公司
Priority to TW106305511F priority Critical patent/TWD191627S/en
Publication of TWD191627S publication Critical patent/TWD191627S/en

Links

Abstract

【物品用途】;本設計是有關於一種晶舟側牆之設計，特別是有關於一種基板處理裝置用之晶舟側牆。;【設計說明】;無。[Use of article]; This design is related to the design of a wafer boat side wall, especially a wafer boat side wall for a substrate processing device. ;[Design description];None.

Description

晶舟側牆Crystal boat side wall

本設計是有關於一種晶舟側牆之設計，特別是有關於一種基板處理裝置用之晶舟側牆。This design relates to the design of a side wall of a boat, in particular to a side wall of a boat for a substrate processing apparatus.

無。no.

TW106305511F 2017-09-18 2017-09-18 Crystal boat side wall TWD191627S (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW106305511F TWD191627S (en) 2017-09-18 2017-09-18 Crystal boat side wall

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW106305511F TWD191627S (en) 2017-09-18 2017-09-18 Crystal boat side wall

Publications (1)

Publication Number Publication Date
TWD191627S true TWD191627S (en) 2018-07-11

Family

ID=89071078

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106305511F TWD191627S (en) 2017-09-18 2017-09-18 Crystal boat side wall

Country Status (1)

Country Link
TW (1) TWD191627S (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM288430U (en) 2005-11-07 2006-03-01 Ju-Feng Peng Wafer cassette with multiple variance and combination
TWM423913U (en) 2011-08-12 2012-03-01 Chen Hsuan Technology Co Ltd Crystal boat

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM288430U (en) 2005-11-07 2006-03-01 Ju-Feng Peng Wafer cassette with multiple variance and combination
TWM423913U (en) 2011-08-12 2012-03-01 Chen Hsuan Technology Co Ltd Crystal boat

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