TWD163179S - Part of substrate cleaning equipment - Google Patents

Part of substrate cleaning equipment

Info

Publication number
TWD163179S
TWD163179S TW102305744F TW102305744F TWD163179S TW D163179 S TWD163179 S TW D163179S TW 102305744 F TW102305744 F TW 102305744F TW 102305744 F TW102305744 F TW 102305744F TW D163179 S TWD163179 S TW D163179S
Authority
TW
Taiwan
Prior art keywords
article
design
substrate cleaning
cleaning equipment
view
Prior art date
Application number
TW102305744F
Other languages
Chinese (zh)
Inventor
Kento Kurusu
Original Assignee
東京威力科創股份有限公司
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司, Tokyo Electron Ltd filed Critical 東京威力科創股份有限公司
Publication of TWD163179S publication Critical patent/TWD163179S/en

Links

Abstract

【物品用途】;本設計的物品是基板洗淨具，作為例如：與半導體基板和液晶基板之表面接觸，進行基板表面洗淨用之基板洗淨具。;【設計說明】;實線部分為本物品主張設計之範圍，虛線部分非本物品主張設計之範圍。;右側視圖與左側視圖對稱、仰視圖與俯視圖對稱，均省略之。[Purpose of the article]; The article of this design is a substrate cleaning tool, which is used, for example, to clean the surface of a semiconductor substrate or a liquid crystal substrate by contacting the surface. ; [Design description]; The solid line part is the scope of the claimed design of this article, and the dotted line part is not the scope of the claimed design of this article. ; The right view is symmetrical to the left view, and the bottom view is symmetrical to the top view, which are omitted.

TW102305744F 2013-04-17 2013-08-28 Part of substrate cleaning equipment TWD163179S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013008651 2013-04-17

Publications (1)

Publication Number Publication Date
TWD163179S true TWD163179S (en) 2014-09-21

Family

ID=52002109

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102305744F TWD163179S (en) 2013-04-17 2013-08-28 Part of substrate cleaning equipment

Country Status (2)

Country Link
US (1) USD719199S1 (en)
TW (1) TWD163179S (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD738178S1 (en) * 2014-05-16 2015-09-08 Nomis Llc Tool adaptor plate
JP1581087S (en) * 2016-12-16 2017-07-10
USD817736S1 (en) * 2017-02-21 2018-05-15 Jui-Chien Kao Tool mount
USD898879S1 (en) * 2017-05-01 2020-10-13 Norgren Automation Solutions, Llc Modular tooling coupler
USD871877S1 (en) * 2018-04-24 2020-01-07 Hole Dynamics, LLC Hole saw arbor
USD907156S1 (en) * 2018-11-30 2021-01-05 Leatherman Tool Group, Inc. Sight adjustment tool
USD982407S1 (en) * 2019-10-31 2023-04-04 Dino Paoli S.R.L. Impact tool component

Also Published As

Publication number Publication date
USD719199S1 (en) 2014-12-09

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