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Application filed by 東京威力科創股份有限公司, Tokyo Electron LtdfiledCritical東京威力科創股份有限公司
Publication of TWD162591SpublicationCriticalpatent/TWD162591S/en
【物品用途】;本設計的物品是基板保持具，可更換的設置於用來保持與搬運例如：半導體晶圓之類的圓形基板之基板搬運臂上。;【設計說明】;右側視圖與左側視圖對稱，右側視圖省略。[Item Purpose];The item in this design is a substrate holder, which can be replaced and installed on a substrate transport arm used to hold and transport round substrates such as semiconductor wafers. ;[Design Description];The right view is symmetrical to the left view, and the right view is omitted.