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Application filed by 東京威力科創股份有限公司, Tokyo Electron LtdfiledCritical東京威力科創股份有限公司
Publication of TWD164362SpublicationCriticalpatent/TWD164362S/en
【物品用途】;本設計的物品是基板保持具，可更換的設置於用來保持與搬運例如：半導體晶圓之類的圓形基板之基板搬運臂上。;【設計說明】;與原設計的差異在於：本設計之保持爪部較為圓弧，且未設有墊部；該等差異細微，不影響兩案之近似。;右側視圖與左側視圖對稱，右側視圖省略。[Item Purpose];The item of this design is a substrate holder, which can be replaced and installed on a substrate transfer arm used to hold and transfer round substrates such as semiconductor wafers. ;[Design Description];The difference from the original design is that the holding claw of this design is more arc-shaped and does not have a pad; these differences are subtle and do not affect the similarity between the two designs. ;The right side view is symmetrical to the left side view, and the right side view is omitted.