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Application filed by 東京威力科創股份有限公司, Tokyo Electron LtdfiledCritical東京威力科創股份有限公司
Publication of TWD162592SpublicationCriticalpatent/TWD162592S/en
【物品用途】;本設計的物品是基板保持具安裝用基座材，可供安裝：基板保持具，該基板保持具是可更換的設置於用來保持與搬運例如：半導體晶圓之類的圓形基板之基板搬運臂上。;【設計說明】;右側視圖與左側視圖對稱，右側視圖省略。[Item Usage];The item of this design is a base material for mounting a substrate holder, which can be used to mount a substrate holder, which is replaceably arranged on a substrate transport arm for holding and transporting a round substrate such as a semiconductor wafer. ;[Design Description];The right side view is symmetrical to the left side view, and the right side view is omitted.
TW102305249F2013-02-132013-08-01
Base material for mounting substrate holder
TWD162592S
(en)