TW535292B - Method for manufacturing a thin-film transistor - Google Patents

Method for manufacturing a thin-film transistor Download PDF

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Publication number
TW535292B
TW535292B TW089123915A TW89123915A TW535292B TW 535292 B TW535292 B TW 535292B TW 089123915 A TW089123915 A TW 089123915A TW 89123915 A TW89123915 A TW 89123915A TW 535292 B TW535292 B TW 535292B
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layer
insulating layer
electrode
steps
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TW089123915A
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Jeong-No Lee
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Samsung Sdi Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259—Multistep manufacturing methods
    • H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259—Multistep manufacturing methods
    • H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66742—Thin film unipolar transistors
    • H01L29/6675—Amorphous silicon or polysilicon transistors
    • H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
    • H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Description

535292 ___案號 89123915 五、發明說明（1) 年 月 日 _修正 本創作是有關一種薄膜電晶體（TFT)，尤其是有關TFT 的一種製造法，該法能減少光刻處理次數、容易調整一個 輕微摻雜汲極區寬度並使膜表面變平。 TFT通常廣泛地被使用為用以旋轉一個單調顯示器， 如一種主動矩陣液晶顯示器〇n/0ff像素之一種開關元件， 該開關得附設CMOS。欲以TFT為一開關元件時，TFT應有一 種高電壓電阻及高On/Of f電流比。 如吾人所知，該TFT是以若干光刻處理法製成，各包 括許多步驟，如一種光阻步驟、一種曝光步驟與蝕刻步 驟’處理程序的增加會損壞生產力及以了品質。 此外’在傳統的TFT中，由於源極與没極與一個閘極 是在不同步驟中形成，因此很難調整輕微掺雜（LDD)區之 寬度’同時也會增加堆積層數與光刻處理次數，堆積層數 會導致TFT表面不平，也會破壞反射效率。 因此’本創作已盡力解決前述問題。 、，本創作的一個目的在提供一種TFT製造法，該法能減 少光刻處理次數、容易調整一個輕微摻雜汲極區寬度並 膜表面變平。 道 絕 形 部 種 區 緣 層 成 相 為了達 製造法 ’在覆 層成形 矽層， 源極、 關部位 到該 ，包 蓋通 ，使 在矽 汲極 上， S 括 道 通 層 與 在 的， 以下 區之 道區 上沈 閘極 覆蓋 本創作提 步驟：在 時在基座 一部被暴 積一層金 。將正
供製造一個薄膜電晶體的 一個基座表面形成一個通 表面沈積一層絕緣層並使 露出來，在絕緣層上沈# 屬層並蝕刻矽與金屬層q 離子摻雜於一個M0S電路 極與閘極部之時，在金^
第6頁 535292 --189123915
五、發明說明（2) 層上沈積—層中間絕 接觸孔，在中間絕緣 料成型以形成一個像 該法還包括摻雜 正離子前在通道區的 換雜正離子步驟 上的步驟，同時摻雜 刪s電路部上的步驟 現在將詳細討論 所附圖示加以說明， 零件將使用相同的編 在以下實施例中 個電線部、一個PMOS 第1 a至1 g圖以橫 驟時，CMOS TFT的一 沈積於一個基座2〇上 2 4模型。欲形成通道 一個有效層沈積於緩 雷射器使該有效層結 層2 2步驟。 =層並使巾間絕緣層成型以形 :上沈積-種電極材料，並使ΐ極： 素電極部與一個電線部。 枉材 f離子摻雜負離子的步驟，以在摻雜 暴露部形成一個LDD區。 ^雜 ，括將n+離子摻雜於一侧 負離子步驟包括將p+離子摻雜於 本創作之最佳實施 <列，纟實施例將依 :可能時’在所有圖示中相同或類似 就。 ，一個CMOS TFT包括一個像素部、一 電路部及一個NM〇S電路部。 斷面顯示CMOS TFT在進行順序處理步 部。在第la圖，一個緩衝層22首先被 ’然後在緩衝層22上形成一個通道區 區2 4模型時，利用一種非晶矽，先將 衝層22上，然後以準分子（excimer) 晶並以光刻法使其成型，可省略緩衝 在通道區24形成後，在覆蓋通道區24之時，在緩衝層 22上沈積一層絕緣層，然後該絕緣層被成型使通道區24被 暴露出來’但不包括如圖1 b所示之邊緣及中間部。 其次，在絕緣層26及通道區24上沈積n+或p+石夕層28， 並在η+或Ρ+矽層28上沈積一層金屬層33，然後矽與金屬層
第7 535292
案號 89123915 五、發明說明（3) 34 30 層 28與33同時被蝕刻以形成沒極、源極與閘極區3〇、32與 石夕層28在此被充當為通道區24與汲極、源極與閘^區 32與34間電阻接點。 在此處，形成於一個NMOS電路部下方之矽層“為“矽 同時形成於一個PMOS閘極下方之矽層“為口+石夕層。 其次’利用充當一個罩蓋之閘極區34，將n—或p—離子 換雜於通道區24上，使通道區24的暴露部成為一個LDI) 〇 然後使用如第Id圖所示之一個罩蓋35，以一種光刻法 將n+離子掺雜於和NM0S電路有關的一部，同時如圖^所 示p+離子被摻雜於電路的一部。倘一個被成型 時，只有NMOS電路或PMOS電路，則只有有關的離子被摻 雜。 在電路被摻雜後，沈積一層中間絕緣層3缺 該絕緣層，以形成許多接觸孔38，如圖lf所示者：後纽 接著在中間絕緣層36上沈積一種電極材料，並以一個 盍成型該材料，使分別和電極3〇與32接觸之一個像素電 極40與:個電線部42能被形成於中間絕緣層“上。 刚所述，由於源極、汲極和閘極同步形成，能減少 I kTFT的光刻步驟，因此能改善生產力與產量。 此外，由於源極、汲極與閘極間之間隙可在罩蓋上加 極凋整，、因此容易調整LDD區與減少tft厚度。同時因為閘 y形成一層矽層，因此閘極與通道區間的工異 减少並能降低臨界電壓。 而·__刪删
^以本創作疋以最實際與最佳實施例加以說明，但吾
第8頁 535292
535292 _案號89123915_年月曰 修正_ 圖式簡單說明 第1 a至1 g圖是根據本創作一個實施例，以橫斷面顯示在進 行順序處理步驟之TFT —部份。 【圖式標號說明】 20------基座 22------緩衝層 24------通道區 26------絕緣層 28------矽層 30------汲極 32 ------源極 33 ------金屬層 34 ------問極區 35 ------罩蓋 3 6------絕緣層 38------接觸孔 40------像素電極 42------電線部
第10頁

Claims (1)

  1. 535292 曰 修正 A 號89123训 六、申請專利範圍 :種製造薄膜電晶體的方法，包括以下步驟： 在基座表面形成一個通道區·， 在覆蓋通道區之時在基座矣 m. ^ ^ ^ 使絕緣層成型，使通道區—部被暴露出沈來n、e緣層並 屬層並/,ΓΛ層金上:二7二 Τ Μ ^ 44, θ形成，原極、汲極與閘極部。 在m Γ雜於一個_電路部相關部； 在覆盍源極、汲極與閘極部之 積一層中間絕緣層並使中 ^在金屬層上沈 孔；盘 中間、、、巴緣層成型以形成許多接觸 在中間絕緣層上沈積 亚便電極材 料成型以形成一個像夸一裡电極材料 2如申& i y素電極部與一個電線部。 Z ·如甲凊專利範圍筮】#、+、> 負離子的步驟，以在换 、;L 方法，其還包括摻雜 一個LDD區。 乡’'正離子如在通道區的暴露部形成 3 ·如申請專利範η窜 步驟包括將η+離子换私弟1項所述之方法，其摻雜正離子 4.如申請專利圖於—個題⑽電路部上的步驟。 步驟包括將p+離子摻第1項所述之方法，其摻雜負離子 5·如申請專利矿於個1^03電路部上的步驟。 步驟包括將將n+離子&第1項所述之方法，其摻雜正離子 摻雜於一個PM〇s電:雜於一個NMOS電路部上與將p+離子 上的步驟。
    第11頁
TW089123915A 1999-12-08 2000-11-13 Method for manufacturing a thin-film transistor TW535292B (en)

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KR1019990055686A KR100307456B1 (ko) 1999-12-08 1999-12-08 박막 트랜지스터의 제조 방법

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KR100525437B1 (ko) * 2002-04-19 2005-11-02 엘지.필립스 엘시디 주식회사 액정표시소자 및 그 제조방법
CN1322372C (zh) * 2003-04-08 2007-06-20 鸿富锦精密工业（深圳）有限公司 光罩工艺及薄膜晶体管的制造方法
KR100595456B1 (ko) * 2003-12-29 2006-06-30 엘지.필립스 엘시디 주식회사 액정표시소자의 제조방법
KR101043991B1 (ko) * 2004-07-28 2011-06-24 엘지디스플레이 주식회사 액정표시소자 및 그 제조방법
KR101056013B1 (ko) * 2004-08-03 2011-08-10 엘지디스플레이 주식회사 액정표시장치용 어레이기판 제조방법
KR101043992B1 (ko) 2004-08-12 2011-06-24 엘지디스플레이 주식회사 액정표시소자 및 그 제조방법
KR101037322B1 (ko) 2004-08-13 2011-05-27 엘지디스플레이 주식회사 액정표시소자 및 그 제조방법
KR101048998B1 (ko) 2004-08-26 2011-07-12 엘지디스플레이 주식회사 액정표시소자 및 그 제조방법
KR101048903B1 (ko) 2004-08-26 2011-07-12 엘지디스플레이 주식회사 액정표시소자 및 그 제조방법
KR101050899B1 (ko) * 2004-09-09 2011-07-20 엘지디스플레이 주식회사 액정표시소자 및 그 제조방법
KR101073403B1 (ko) 2004-09-09 2011-10-17 엘지디스플레이 주식회사 액정표시소자 및 그 제조방법
KR101146418B1 (ko) * 2004-11-08 2012-05-17 엘지디스플레이 주식회사 폴리 실리콘형 액정 표시 장치용 어레이 기판 및 그 제조방법
KR101192746B1 (ko) 2004-11-12 2012-10-18 엘지디스플레이 주식회사 폴리형 박막 트랜지스터 기판의 제조방법
KR101066489B1 (ko) 2004-11-12 2011-09-21 엘지디스플레이 주식회사 폴리형 박막 트랜지스터 기판 및 그 제조 방법
KR101078360B1 (ko) 2004-11-12 2011-10-31 엘지디스플레이 주식회사 폴리형 액정 표시 패널 및 그 제조 방법
KR101146522B1 (ko) * 2004-12-08 2012-05-25 엘지디스플레이 주식회사 액정표시장치용 어레이기판 제조방법
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