TW533482B - Method of manufacturing a semiconductor device - Google Patents

Method of manufacturing a semiconductor device Download PDF

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TW533482B
TW533482B TW090109425A TW90109425A TW533482B TW 533482 B TW533482 B TW 533482B TW 090109425 A TW090109425 A TW 090109425A TW 90109425 A TW90109425 A TW 90109425A TW 533482 B TW533482 B TW 533482B
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Peter A Stolk
Pierre H Woerlee
Mathijs J Knitel
Brandenburg Anja C M C Van
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Koninkl Philips Electronics Nv
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66568—Lateral single gate silicon transistors
    • H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26586—Bombardment with radiation with high-energy radiation producing ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823814—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66568—Lateral single gate silicon transistors
    • H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
    • H01L29/6659—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/107—Substrate region of field-effect devices
    • H01L29/1075—Substrate region of field-effect devices of field-effect transistors
    • H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
    • H01L29/1083—Substrate region of field-effect devices of field-effect transistors with insulated gate with an inactive supplementary region, e.g. for preventing punch-through, improving capacity effect or leakage current

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  • Condensed Matter Physics & Semiconductors (AREA)
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  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)

Description

533482 修正 案號 90109425 五、發明說明（1) 技術領域 本發明係關於半導體裝置之製造，特別是關於提供工具俾 減少積體電路（I C s )内金屬氧化物半導體場效電晶體 (MOSFETs)最小特徵之大小。尤其是，本發明係關於一項 科技使源極/汲極（S/D)接合與M0S電晶體内袖珍反滲吸收 劑區之單獨形成致能而不需額外施加隱蔽罩之步驟。 先前技術 半導體工業不斷努力以減少積體電路内M0SFET最小特徵大 小。驅使此等企圖主要是由於需要產生較低成本之I C s， 同時保持或改良電路功能性與速率。例如藉減少在此等 I C s上現用電晶體之特性大小，特別是閘極長度，閘極氧 化厚度和接合深度，且藉增加通道摻吸收劑準位即可達成 此項向下調整。 短Μ 0 S電晶體一般遭受到所謂短通道效應（S C Ε ):當減少閘 極長度時源極與汲極會相互接近。此在某種意義上對電晶 體之切換多少有點相反效果，即由閘極較少可控制切換， 此可導致不需要之減少截限電壓。此相反效應可由一使在 源極和汲極周圍之空虛區佔用縫道區之漸增大分數，如此 即需要閘極上有較低電位以達成縫道内之逆增。 按習用M0SFET調整想定，藉減少接合深度與增加縫道滲雜 劑濃度即可保持S C Ε在可接受限度以内。但此等想定不再 可以工作在次級-0.18微米裝置，因為在此等裝置内SCE之 抑制在通道内需要太高之摻吸收劑準位，此可引起接合上 之破壞。 建議此問題之解決辦法係使用腔洞或光環反滲吸收劑植入
70739-920312.ptc 第5頁 533482 案號 90109425 年/月6 曰 修正 五、發明說明（2) 物。在PMOS電晶體内之腔洞可使用燐光質，砷或銻離子， 在N Μ 0 S電晶體内之腔洞可使用硼或銦離子。腔洞移植物可 有助於提高在直接靠近S/D區之通道滲吸收劑準位。當減 少閘極長度時此可導致淨增加通道滲吸收劑區，因而抑制 短通道裝置之S/D空虛區之影響。 , 按標準Μ 0 S處理，特別是按習用互補Μ 0 S處理，腔洞移植步 驟，亦稱為光環移植步驟，係與S / D (延伸）移植步驟聯 合。在此聯合移植步驟中，矽晶圓某些面積係涵蓋一定型 之抵抗層以便避免此等面積内不需要之移植。例如，在 NM0S電晶體形成中即涵盖PMOS電晶體’反之亦然。在拆除 該抵抗層以後在一單獨韌煉步驟内可致動此等腔洞移植物 和S / D移植物。在此韌煉步驟中摻雜劑擴散可決定腔洞摻 雜劑和S / D摻雜劑兩者之分配。 在U S - A - 5，2 2 7，3 2 1專利内可提供一製程之範例其中由韌煉 作用可調整一主要摻雜劑第一擴散區與一光環擴散區之大 小 。 本方法之一缺點，其中可使用一種韌煉步驟以擴散摻雜 劑，係不能單獨地調整腔洞和S / D區之摻吸收劑側面以便 改進裝置性能。 因之應產生可能性以分開而單獨地移植和韌煉腔洞區和 S / D區。此可提供可能性以便摻雜劑分配且因而使短通道 性能達最佳情況。 但問題存在於此事實：在移植中可涵蓋部分晶圓之抵抗層 係不能受2 5 0 °C以上之溫度。此即表示完全分開之腔洞和 S/D形成即需要使用額外抵抗加蔽罩步驟。對於CMOS製
70739-920312.ptc 第6頁 533482 案號 90109425 年之月 曰 修正 五、發明說明（3) 程，此可表示需要兩種額外平板印刷步驟。本發明之方法 不需額外加蔽罩或平板印刷步驟，因此種步驟可延長及使 製程複·雜且因而顯著提高製造成本。 發明内容 本發明意欲克服為習用Μ 0 S電晶體技術所域之問題。 藉使用硬蔽罩使腔洞和S / D區單獨形成致能即可達成此目 的〇 更詳言之，本發明係關於製造包括一 PMOS電晶體和一 NMOS 電晶體之半導體裝置之方法包括以下步驟：
(a) 提供一半導體基材具有係被供有NMOS電晶體之Ρ-井 區，和係被供有PM 0 S電晶體之N -井區； (b) 在P -井區和N -井區上形成閘極； (c) 施加一硬蔽罩，可涵蓋P -井區或者N -井區； (d )在未被硬蔽罩所涵蓋之該區内移植一源極及一汲 極，隨後即為熱作用； (e )在未被硬蔽罩所涵蓋之該區内移植腔洞移植物，隨 後即為熱作用； (ί )拆除硬蔽罩。
較佳地，藉加一硬蔽罩即可實行步驟（c )，以一防止層涵 蓋該硬蔽罩，使此防止層定型，且使用該定型之防止層為 使硬蔽罩層定型之一蔽罩以形成硬蔽罩。 硬蔽罩應有足夠厚度以避免移植之摻雜劑滲透，且因此有 利地有一至少0 . 0 5微米之厚度。該硬蔽罩厚度之上限緊要 性不大。有時厚度係由經濟考量決定之，由於硬蔽罩並非 很厚。一般言，硬蔽罩所需之厚度視用以形成硬蔽罩之該
70739-920312.ptc 第7頁 533482 修正 案號 90109425 五、發明說明（4) 層之化學成分而定。使用並不太厚之硬蔽罩，例如SiGe -硬蔽罩有厚度在0.25微米以下，較佳在0.20微米以下，有 額外優·點是可減少在傾斜腔洞移植物中會發生之離子遮蔽 之效果。藉使用如有厚度約0 . 1 5微米之S i G e硬蔽罩即可獲 得甚良好結果。 / 雖然硬蔽罩可使用幾種材料，特別是幾種氧化物，氮化物 及氧氮化物，但硬蔽罩有益地包括G e _摻雜劑碎，特別是 G e _摻雜劑多結晶矽（多-S i h G ex在溫度約4 5 0 °C時對X > 0 . 3 可沉澱其材料，且可承受迅速熱韌煉情況）。藉化學蒸氣 沉澱可施加此等材料且由原形質侵蝕可使其定型。藉習用 溫侵蝕自氧化物及矽很選擇性地消除此等材料。 實施方式 參考圖1至5更詳細說明本發明，圖内可闡述本發明之適用 方法。 按圖1顯示一矽基材1 ，提供有一 N -井區2和P-井區3，由一 場隔離區4予以分開。P -井區3係被供有N Μ 0 S電晶體5，而 Ν-井區2係被供有PMOS電晶體6 -井區3和Ν-井區2兩者均 備有一閘極氧化物7在其上即形成多矽閘極8。在多矽閘極 8形成以後，即可有利地實行相等於少數毫微米氧化成長 之一短氧化步驟以一氧化層9來涵蓋矽基材與多晶矽閘極
然後，在4 5 0 °C時藉由化學蒸汽沈澱即可施加G e -摻雜劑多 結晶（多S i 〇 65 G eG 35)之硬面罩層1 0 (圖2 )。施加此層厚度約 0 · 1 5微米。施加一習用光阻層1 1 (厚度約0 · 5微米）在硬面 罩層1 0頂部且使用習用平板印刷術予以定型。使用定型之
70739-920312.ptc 第8頁 533482 _案號 90109425 夕么年么月么 曰 修正 五、發明說明（5) 光阻層1 1為一隱蔽罩藉原形質侵蝕俾使硬面罩層1 〇定型， 圖3顯示其最後結果。 圖4顯示一步驟，其中砷離子被移植入p —井區3内在能量範 圍自5至15 KeV和用量範圍在1E15與5E15 cnr2之間，較佳 在3E1 4與1E1 5 cm—2之間，此移植步驟之後為習用韌煉，因 而形成一源極與一汲極1 2。圖5顯示腔洞移植法在傾斜角 20-40° 處使用硼離子（15一30 KeV ;1E13一 1E14 cur2)，其 後為款煉步驟。圖4及5所示步驟可任選地反向，如此首先 實行一腔洞移植/韌煉後跟一源極/汲極移植/韌煉。
隨後’自晶圓（未圖示）可選擇性拆除硬面罩層1 〇，若需 要’與圖2至5所示之相同步驟係可對N -井區2實行，使用B 或BF2離子供源極/汲極移植與使用a s或p離子供腔洞移 植。 在上述步驟之後為本發明之一部分，選擇性移植結構係遭 受習用進一步處理以完成包括PMOS電晶體和NMOS電晶體之 半^體裝置。尤其是，在閘極如側上形成側壁隔板，一般 為氧化物或氮化物。隨後，一般用砷可選擇性摻雜劑在 N Μ 0 S面積上’同時使用習用隱蔽技術，且一般用硼可選擇 性地摻雜劑在PM〇s面積上。按任一次序可實行NMOS及PMOS 推雜劑步驟。後然後，可實行一韌煉步驟以致動摻雜劑 區。最後’可實行習用矽化和金屬化步驟，其最後可提供 所需之半導體裝置。 圖1 - 5係顯示使用依據本發明之方法製造一半導體裝置之 連續階段之示意剖面圖。
70739-920312.pt 第9頁 533482 _•案號 90109425 么月έ?日_修正 五、發明說明（6) 1
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70739-920312.ptc 第11頁

Claims (1)

  1. 533482 _案號 90109425 ^么年2月日_魅_ 六、申請專利範圍 / 1. 一種製造包括PMOS電晶體和NMOS電晶體之半導體裝置 之方法，包括以下步驟： (a) 提供一半導體基材具有係備有NMOS電晶體之Ρ-穴 區，與應備有PMOS電晶體之N-井區； (b) 在P -井區上和N -井區上形成閘極； · (c) 施加可涵蓋P -井區或者N -井區之一硬隱蔽罩； (d )移植一源極及汲極在未受硬隱蔽罩所涵蓋之該區 内，後跟熱作用； (e )移植腔洞移植物在未受硬隱蔽罩所涵蓋之該區内， 後跟熱作用； (ί )拆除隱蔽罩。 0 2 .如申請專利範圍第1項之方法，其中在加上硬隱蔽罩 之前，施加一介質層以涵蓋半導體基材與閘極。 3 .如申請專利範圍第1或2項之方法，其中步驟（c )係藉 施加一硬面罩層，用一抗層涵蓋該硬面罩層，使此抗層定 型，且使用定型之抗層為一使硬面罩層定型之隱蔽以形成 硬面罩層。 4 .如申請專利範圍第1或2項之方法，其中施加硬面罩 層，其厚度至少0.05微米。 5 .如申請專利範圍第4項之方法，其中施加硬面罩層， 其厚度在0.25微米以下。 6 .如申請專利範圍第1或2項之方法，其中施加之硬面罩 _ 層包括G e -掺雜劑石夕，S i - r i c h S i Ν或多結晶G e。
    70739-920312.ptc 第12頁
TW090109425A 2000-04-12 2001-04-19 Method of manufacturing a semiconductor device TW533482B (en)

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KR100796825B1 (ko) 2008-01-22
US20010031522A1 (en) 2001-10-18
WO2001080310A1 (en) 2001-10-25
KR20020025892A (ko) 2002-04-04
JP4846167B2 (ja) 2011-12-28
EP1275147A1 (en) 2003-01-15
JP2003531494A (ja) 2003-10-21
EP1275147B1 (en) 2009-06-24
US6461908B2 (en) 2002-10-08
ATE434831T1 (de) 2009-07-15

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