TW514960B - Method and apparatus for manufacturing image displaying apparatus - Google Patents
Method and apparatus for manufacturing image displaying apparatus Download PDFInfo
- Publication number
- TW514960B TW514960B TW090103292A TW90103292A TW514960B TW 514960 B TW514960 B TW 514960B TW 090103292 A TW090103292 A TW 090103292A TW 90103292 A TW90103292 A TW 90103292A TW 514960 B TW514960 B TW 514960B
- Authority
- TW
- Taiwan
- Prior art keywords
- chamber
- substrate
- image display
- manufacturing
- patent application
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 302
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 165
- 239000000758 substrate Substances 0.000 claims abstract description 358
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 48
- 239000012298 atmosphere Substances 0.000 claims abstract description 38
- 230000008569 process Effects 0.000 claims description 228
- 239000002250 absorbent Substances 0.000 claims description 174
- 230000002745 absorbent Effects 0.000 claims description 174
- 230000007246 mechanism Effects 0.000 claims description 148
- 230000006837 decompression Effects 0.000 claims description 92
- 238000010894 electron beam technology Methods 0.000 claims description 44
- 238000007789 sealing Methods 0.000 claims description 32
- 238000010276 construction Methods 0.000 claims description 31
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 30
- 238000002844 melting Methods 0.000 claims description 29
- 230000008018 melting Effects 0.000 claims description 28
- 239000002243 precursor Substances 0.000 claims description 28
- 230000032258 transport Effects 0.000 claims description 28
- 230000005284 excitation Effects 0.000 claims description 27
- 230000004888 barrier function Effects 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 25
- 230000002079 cooperative effect Effects 0.000 claims description 24
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- 239000007789 gas Substances 0.000 claims description 15
- 239000003566 sealing material Substances 0.000 claims description 14
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- 238000010438 heat treatment Methods 0.000 claims description 12
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- 239000006096 absorbing agent Substances 0.000 claims description 9
- 229910052738 indium Inorganic materials 0.000 claims description 9
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 8
- 229910052788 barium Inorganic materials 0.000 claims description 6
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical group [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 238000010521 absorption reaction Methods 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 3
- 238000009411 base construction Methods 0.000 claims description 2
- 230000008029 eradication Effects 0.000 claims description 2
- 229910000846 In alloy Inorganic materials 0.000 claims 4
- PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 claims 3
- 241000931705 Cicada Species 0.000 claims 2
- 239000008186 active pharmaceutical agent Substances 0.000 claims 1
- 210000000078 claw Anatomy 0.000 claims 1
- 230000006835 compression Effects 0.000 claims 1
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- 210000002784 stomach Anatomy 0.000 claims 1
- 230000009467 reduction Effects 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 20
- 238000001816 cooling Methods 0.000 description 18
- 238000002347 injection Methods 0.000 description 14
- 239000007924 injection Substances 0.000 description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 239000011159 matrix material Substances 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 229910052754 neon Inorganic materials 0.000 description 5
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000002772 conduction electron Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- -1 groups Substances 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000865 membrane-inlet mass spectrometry Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/46—Machines having sequentially arranged operating stations
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07F—COIN-FREED OR LIKE APPARATUS
- G07F11/00—Coin-freed apparatus for dispensing, or the like, discrete articles
- G07F11/02—Coin-freed apparatus for dispensing, or the like, discrete articles from non-movable magazines
- G07F11/04—Coin-freed apparatus for dispensing, or the like, discrete articles from non-movable magazines in which magazines the articles are stored one vertically above the other
- G07F11/16—Delivery means
- G07F11/24—Rotary or oscillatory members
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07F—COIN-FREED OR LIKE APPARATUS
- G07F5/00—Coin-actuated mechanisms; Interlocks
- G07F5/02—Coin-actuated mechanisms; Interlocks actuated mechanically by coins, e.g. by a single coin
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07F—COIN-FREED OR LIKE APPARATUS
- G07F9/00—Details other than those peculiar to special kinds or types of apparatus
- G07F9/10—Casings or parts thereof, e.g. with means for heating or cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/18—Assembling together the component parts of electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/46—Machines having sequentially arranged operating stations
- H01J9/48—Machines having sequentially arranged operating stations with automatic transfer of workpieces between operating stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Spinning Or Twisting Of Yarns (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000038603A JP3754859B2 (ja) | 2000-02-16 | 2000-02-16 | 画像表示装置の製造法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW514960B true TW514960B (en) | 2002-12-21 |
Family
ID=18562315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW090103292A TW514960B (en) | 2000-02-16 | 2001-02-14 | Method and apparatus for manufacturing image displaying apparatus |
Country Status (8)
| Country | Link |
|---|---|
| US (3) | US6905384B2 (enExample) |
| EP (1) | EP1126496B1 (enExample) |
| JP (1) | JP3754859B2 (enExample) |
| KR (2) | KR100442214B1 (enExample) |
| CN (1) | CN100430981C (enExample) |
| AT (1) | ATE438195T1 (enExample) |
| DE (1) | DE60139358D1 (enExample) |
| TW (1) | TW514960B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7521268B2 (en) | 2004-09-14 | 2009-04-21 | Toshiba Matsushita Display Technology Co., Ltd. | Method and apparatus for manufacturing display |
Families Citing this family (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3754859B2 (ja) * | 2000-02-16 | 2006-03-15 | キヤノン株式会社 | 画像表示装置の製造法 |
| KR100448663B1 (ko) * | 2000-03-16 | 2004-09-13 | 캐논 가부시끼가이샤 | 화상표시장치의 제조방법 및 제조장치 |
| JP3754883B2 (ja) * | 2000-03-23 | 2006-03-15 | キヤノン株式会社 | 画像表示装置の製造法 |
| US7052354B2 (en) * | 2002-08-01 | 2006-05-30 | Canon Kabushiki Kaisha | Method for producing spacer and spacer |
| JP5068924B2 (ja) * | 2004-02-20 | 2012-11-07 | 中外炉工業株式会社 | ガラスパネル組立体の連続封着処理炉および封着処理方法 |
| US7271529B2 (en) | 2004-04-13 | 2007-09-18 | Canon Kabushiki Kaisha | Electron emitting devices having metal-based film formed over an electro-conductive film element |
| JP4393257B2 (ja) * | 2004-04-15 | 2010-01-06 | キヤノン株式会社 | 外囲器の製造方法および画像形成装置 |
| US20060269656A1 (en) * | 2005-05-26 | 2006-11-30 | Eastman Kodak Company | Reducing contamination in OLED processing systems |
| JP2007027018A (ja) * | 2005-07-21 | 2007-02-01 | Hitachi Ltd | ディスプレイパネルの製造方法及びアノードパネル |
| US7710035B2 (en) | 2006-08-10 | 2010-05-04 | Lg Electronics Inc. | Plasma display apparatus omitting an exhaust unit |
| JP2010086947A (ja) | 2008-09-02 | 2010-04-15 | Canon Inc | 真空気密容器の製造方法 |
| JP2010135312A (ja) | 2008-11-04 | 2010-06-17 | Canon Inc | 気密容器の製造方法 |
| JP5620146B2 (ja) * | 2009-05-22 | 2014-11-05 | 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． | 薄膜蒸着装置 |
| JP5623786B2 (ja) * | 2009-05-22 | 2014-11-12 | 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． | 薄膜蒸着装置 |
| KR101074792B1 (ko) * | 2009-06-12 | 2011-10-19 | 삼성모바일디스플레이주식회사 | 박막 증착 장치 |
| KR101117719B1 (ko) | 2009-06-24 | 2012-03-08 | 삼성모바일디스플레이주식회사 | 박막 증착 장치 |
| JP5328726B2 (ja) * | 2009-08-25 | 2013-10-30 | 三星ディスプレイ株式會社 | 薄膜蒸着装置及びこれを利用した有機発光ディスプレイ装置の製造方法 |
| JP5611718B2 (ja) * | 2009-08-27 | 2014-10-22 | 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． | 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法 |
| JP5677785B2 (ja) * | 2009-08-27 | 2015-02-25 | 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． | 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法 |
| US20110052795A1 (en) * | 2009-09-01 | 2011-03-03 | Samsung Mobile Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
| US8876975B2 (en) | 2009-10-19 | 2014-11-04 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
| KR101084184B1 (ko) * | 2010-01-11 | 2011-11-17 | 삼성모바일디스플레이주식회사 | 박막 증착 장치 |
| US20110262625A1 (en) * | 2010-01-11 | 2011-10-27 | Hyun-Sook Park | Thin film deposition apparatus |
| KR101174875B1 (ko) * | 2010-01-14 | 2012-08-17 | 삼성디스플레이 주식회사 | 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
| KR101193186B1 (ko) | 2010-02-01 | 2012-10-19 | 삼성디스플레이 주식회사 | 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
| KR101156441B1 (ko) | 2010-03-11 | 2012-06-18 | 삼성모바일디스플레이주식회사 | 박막 증착 장치 |
| KR101202348B1 (ko) | 2010-04-06 | 2012-11-16 | 삼성디스플레이 주식회사 | 박막 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법 |
| US8894458B2 (en) | 2010-04-28 | 2014-11-25 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
| KR101223723B1 (ko) | 2010-07-07 | 2013-01-18 | 삼성디스플레이 주식회사 | 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
| KR101723506B1 (ko) | 2010-10-22 | 2017-04-19 | 삼성디스플레이 주식회사 | 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 |
| KR101738531B1 (ko) | 2010-10-22 | 2017-05-23 | 삼성디스플레이 주식회사 | 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
| KR20120045865A (ko) | 2010-11-01 | 2012-05-09 | 삼성모바일디스플레이주식회사 | 유기층 증착 장치 |
| CN102117893B (zh) * | 2010-12-01 | 2012-07-04 | 东莞宏威数码机械有限公司 | 真空加热除气处理设备 |
| KR20120065789A (ko) | 2010-12-13 | 2012-06-21 | 삼성모바일디스플레이주식회사 | 유기층 증착 장치 |
| JP2012133993A (ja) * | 2010-12-21 | 2012-07-12 | Kochi Fel Kk | 電界放出型光源の製造方法及び電界放出型光源 |
| KR101760897B1 (ko) | 2011-01-12 | 2017-07-25 | 삼성디스플레이 주식회사 | 증착원 및 이를 구비하는 유기막 증착 장치 |
| KR101852517B1 (ko) | 2011-05-25 | 2018-04-27 | 삼성디스플레이 주식회사 | 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 |
| KR101840654B1 (ko) | 2011-05-25 | 2018-03-22 | 삼성디스플레이 주식회사 | 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 |
| KR101857249B1 (ko) | 2011-05-27 | 2018-05-14 | 삼성디스플레이 주식회사 | 패터닝 슬릿 시트 어셈블리, 유기막 증착 장치, 유기 발광 표시장치제조 방법 및 유기 발광 표시 장치 |
| KR20130004830A (ko) | 2011-07-04 | 2013-01-14 | 삼성디스플레이 주식회사 | 유기층 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법 |
| KR101826068B1 (ko) | 2011-07-04 | 2018-02-07 | 삼성디스플레이 주식회사 | 유기층 증착 장치 |
| KR102015872B1 (ko) | 2012-06-22 | 2019-10-22 | 삼성디스플레이 주식회사 | 유기층 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
| KR102081284B1 (ko) | 2013-04-18 | 2020-02-26 | 삼성디스플레이 주식회사 | 증착장치, 이를 이용한 유기발광 디스플레이 장치 제조 방법 및 유기발광 디스플레이 장치 |
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2000
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- 2001-02-13 US US09/781,305 patent/US6905384B2/en not_active Expired - Fee Related
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- 2001-02-15 DE DE60139358T patent/DE60139358D1/de not_active Expired - Lifetime
- 2001-02-15 EP EP01301315A patent/EP1126496B1/en not_active Expired - Lifetime
- 2001-02-15 AT AT01301315T patent/ATE438195T1/de not_active IP Right Cessation
- 2001-02-16 CN CNB011168730A patent/CN100430981C/zh not_active Expired - Fee Related
- 2001-02-16 KR KR10-2001-0007695A patent/KR100442214B1/ko not_active Expired - Fee Related
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7521268B2 (en) | 2004-09-14 | 2009-04-21 | Toshiba Matsushita Display Technology Co., Ltd. | Method and apparatus for manufacturing display |
Also Published As
| Publication number | Publication date |
|---|---|
| US7628670B2 (en) | 2009-12-08 |
| EP1126496A2 (en) | 2001-08-22 |
| US7226335B2 (en) | 2007-06-05 |
| US20010034175A1 (en) | 2001-10-25 |
| KR20010088336A (ko) | 2001-09-26 |
| CN100430981C (zh) | 2008-11-05 |
| ATE438195T1 (de) | 2009-08-15 |
| DE60139358D1 (de) | 2009-09-10 |
| US6905384B2 (en) | 2005-06-14 |
| JP2001229828A (ja) | 2001-08-24 |
| JP3754859B2 (ja) | 2006-03-15 |
| CN1312536A (zh) | 2001-09-12 |
| KR20040030768A (ko) | 2004-04-09 |
| EP1126496B1 (en) | 2009-07-29 |
| KR100441388B1 (ko) | 2004-07-23 |
| US20050181698A1 (en) | 2005-08-18 |
| US20070111629A1 (en) | 2007-05-17 |
| EP1126496A3 (en) | 2004-03-17 |
| KR100442214B1 (ko) | 2004-07-30 |
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