ATE438195T1 - Verfahren und vorrichtung zum herstellen einer bildanzeigevorrichtung - Google Patents

Verfahren und vorrichtung zum herstellen einer bildanzeigevorrichtung

Info

Publication number
ATE438195T1
ATE438195T1 AT01301315T AT01301315T ATE438195T1 AT E438195 T1 ATE438195 T1 AT E438195T1 AT 01301315 T AT01301315 T AT 01301315T AT 01301315 T AT01301315 T AT 01301315T AT E438195 T1 ATE438195 T1 AT E438195T1
Authority
AT
Austria
Prior art keywords
substrates
display panel
manufacturing
processing chamber
processing
Prior art date
Application number
AT01301315T
Other languages
English (en)
Inventor
Toshihiko Miyazaki
Kohei Nakata
Tetsuya Kaneko
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE438195T1 publication Critical patent/ATE438195T1/de

Links

Classifications

    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07F—COIN-FREED OR LIKE APPARATUS
    • G07F11/00—Coin-freed apparatus for dispensing, or the like, discrete articles
    • G07F11/02—Coin-freed apparatus for dispensing, or the like, discrete articles from non-movable magazines
    • G07F11/04—Coin-freed apparatus for dispensing, or the like, discrete articles from non-movable magazines in which magazines the articles are stored one vertically above the other
    • G07F11/16—Delivery means
    • G07F11/24—Rotary or oscillatory members
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07F—COIN-FREED OR LIKE APPARATUS
    • G07F5/00—Coin-actuated mechanisms; Interlocks
    • G07F5/02—Coin-actuated mechanisms; Interlocks actuated mechanically by coins, e.g. by a single coin
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07F—COIN-FREED OR LIKE APPARATUS
    • G07F9/00—Details other than those peculiar to special kinds or types of apparatus
    • G07F9/10—Casings or parts thereof, e.g. with means for heating or cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/18—Assembling together the component parts of electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • H01J9/48—Machines having sequentially arranged operating stations with automatic transfer of workpieces between operating stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Spinning Or Twisting Of Yarns (AREA)
AT01301315T 2000-02-16 2001-02-15 Verfahren und vorrichtung zum herstellen einer bildanzeigevorrichtung ATE438195T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000038603A JP3754859B2 (ja) 2000-02-16 2000-02-16 画像表示装置の製造法

Publications (1)

Publication Number Publication Date
ATE438195T1 true ATE438195T1 (de) 2009-08-15

Family

ID=18562315

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01301315T ATE438195T1 (de) 2000-02-16 2001-02-15 Verfahren und vorrichtung zum herstellen einer bildanzeigevorrichtung

Country Status (8)

Country Link
US (3) US6905384B2 (de)
EP (1) EP1126496B1 (de)
JP (1) JP3754859B2 (de)
KR (2) KR100442214B1 (de)
CN (1) CN100430981C (de)
AT (1) ATE438195T1 (de)
DE (1) DE60139358D1 (de)
TW (1) TW514960B (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3754859B2 (ja) * 2000-02-16 2006-03-15 キヤノン株式会社 画像表示装置の製造法
US6848961B2 (en) * 2000-03-16 2005-02-01 Canon Kabushiki Kaisha Method and apparatus for manufacturing image displaying apparatus
JP3754883B2 (ja) * 2000-03-23 2006-03-15 キヤノン株式会社 画像表示装置の製造法
US7052354B2 (en) * 2002-08-01 2006-05-30 Canon Kabushiki Kaisha Method for producing spacer and spacer
JP5068924B2 (ja) * 2004-02-20 2012-11-07 中外炉工業株式会社 ガラスパネル組立体の連続封着処理炉および封着処理方法
US7271529B2 (en) 2004-04-13 2007-09-18 Canon Kabushiki Kaisha Electron emitting devices having metal-based film formed over an electro-conductive film element
JP4393257B2 (ja) * 2004-04-15 2010-01-06 キヤノン株式会社 外囲器の製造方法および画像形成装置
JP2006085933A (ja) 2004-09-14 2006-03-30 Toshiba Matsushita Display Technology Co Ltd 表示装置の製造方法及び製造装置
US20060269656A1 (en) * 2005-05-26 2006-11-30 Eastman Kodak Company Reducing contamination in OLED processing systems
JP2007027018A (ja) * 2005-07-21 2007-02-01 Hitachi Ltd ディスプレイパネルの製造方法及びアノードパネル
US7710035B2 (en) 2006-08-10 2010-05-04 Lg Electronics Inc. Plasma display apparatus omitting an exhaust unit
JP2010086947A (ja) 2008-09-02 2010-04-15 Canon Inc 真空気密容器の製造方法
JP2010135312A (ja) 2008-11-04 2010-06-17 Canon Inc 気密容器の製造方法
JP5623786B2 (ja) * 2009-05-22 2014-11-12 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置
JP5620146B2 (ja) * 2009-05-22 2014-11-05 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置
KR101074792B1 (ko) * 2009-06-12 2011-10-19 삼성모바일디스플레이주식회사 박막 증착 장치
KR101117719B1 (ko) 2009-06-24 2012-03-08 삼성모바일디스플레이주식회사 박막 증착 장치
JP5328726B2 (ja) * 2009-08-25 2013-10-30 三星ディスプレイ株式會社 薄膜蒸着装置及びこれを利用した有機発光ディスプレイ装置の製造方法
JP5677785B2 (ja) * 2009-08-27 2015-02-25 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法
JP5611718B2 (ja) * 2009-08-27 2014-10-22 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法
US20110052795A1 (en) * 2009-09-01 2011-03-03 Samsung Mobile Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US8876975B2 (en) 2009-10-19 2014-11-04 Samsung Display Co., Ltd. Thin film deposition apparatus
KR101084184B1 (ko) 2010-01-11 2011-11-17 삼성모바일디스플레이주식회사 박막 증착 장치
US20110262625A1 (en) * 2010-01-11 2011-10-27 Hyun-Sook Park Thin film deposition apparatus
KR101174875B1 (ko) * 2010-01-14 2012-08-17 삼성디스플레이 주식회사 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR101193186B1 (ko) 2010-02-01 2012-10-19 삼성디스플레이 주식회사 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR101156441B1 (ko) 2010-03-11 2012-06-18 삼성모바일디스플레이주식회사 박막 증착 장치
KR101202348B1 (ko) 2010-04-06 2012-11-16 삼성디스플레이 주식회사 박막 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법
US8894458B2 (en) 2010-04-28 2014-11-25 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
KR101223723B1 (ko) 2010-07-07 2013-01-18 삼성디스플레이 주식회사 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR101723506B1 (ko) 2010-10-22 2017-04-19 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR101738531B1 (ko) 2010-10-22 2017-05-23 삼성디스플레이 주식회사 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR20120045865A (ko) 2010-11-01 2012-05-09 삼성모바일디스플레이주식회사 유기층 증착 장치
CN102117893B (zh) * 2010-12-01 2012-07-04 东莞宏威数码机械有限公司 真空加热除气处理设备
KR20120065789A (ko) 2010-12-13 2012-06-21 삼성모바일디스플레이주식회사 유기층 증착 장치
JP2012133993A (ja) * 2010-12-21 2012-07-12 Kochi Fel Kk 電界放出型光源の製造方法及び電界放出型光源
KR101760897B1 (ko) 2011-01-12 2017-07-25 삼성디스플레이 주식회사 증착원 및 이를 구비하는 유기막 증착 장치
KR101852517B1 (ko) 2011-05-25 2018-04-27 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR101840654B1 (ko) 2011-05-25 2018-03-22 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR101857249B1 (ko) 2011-05-27 2018-05-14 삼성디스플레이 주식회사 패터닝 슬릿 시트 어셈블리, 유기막 증착 장치, 유기 발광 표시장치제조 방법 및 유기 발광 표시 장치
KR20130004830A (ko) 2011-07-04 2013-01-14 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법
KR101826068B1 (ko) 2011-07-04 2018-02-07 삼성디스플레이 주식회사 유기층 증착 장치
KR102015872B1 (ko) 2012-06-22 2019-10-22 삼성디스플레이 주식회사 유기층 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR102081284B1 (ko) 2013-04-18 2020-02-26 삼성디스플레이 주식회사 증착장치, 이를 이용한 유기발광 디스플레이 장치 제조 방법 및 유기발광 디스플레이 장치
EP3542687A1 (de) * 2018-03-22 2019-09-25 Koninklijke Philips N.V. Nahrungsverarbeitungsvorrichtung
CN116105466A (zh) * 2023-02-24 2023-05-12 湖北亿纬动力有限公司 锂离子电池的干燥方法

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2876260A (en) * 1956-08-27 1959-03-03 Dow Chemical Co Preparation of symmetrical disubstituted ureas
US4018490A (en) * 1975-07-07 1977-04-19 International Business Machines Corporation Gas discharge display panel fabrication
US4607593A (en) * 1983-12-23 1986-08-26 U.S. Philips Corporation Apparatus for processing articles in a controlled environment
JPS6171533A (ja) 1984-09-12 1986-04-12 Futaba Corp 表示管の製造方法
EP0299461B1 (de) 1987-07-15 1995-05-10 Canon Kabushiki Kaisha Elektronenemittierende Vorrichtung
US5872541A (en) 1987-07-15 1999-02-16 Canon Kabushiki Kaisha Method for displaying images with electron emitting device
US5415024A (en) * 1992-12-16 1995-05-16 Marathon Oil Company Composition analyzer for determining composition of multiphase multicomponent fluid mixture
FR2705163B1 (fr) 1993-05-12 1995-07-28 Pixel Int Sa Procede de mise en vide et de scellement d'ecrans plats de visualisation.
US5433639A (en) * 1993-08-18 1995-07-18 Santa Barbara Research Center Processing of vacuum-sealed dewar assembly
CA2137721C (en) 1993-12-14 2000-10-17 Hidetoshi Suzuki Electron source and production thereof, and image-forming apparatus and production thereof
JP2903998B2 (ja) 1994-03-25 1999-06-14 双葉電子工業株式会社 表示管の製造装置
JP2832510B2 (ja) * 1994-05-10 1998-12-09 双葉電子工業株式会社 表示装置の製造方法
JP3241935B2 (ja) 1994-07-07 2001-12-25 富士通株式会社 フラット形表示装置
EP0738420B1 (de) * 1994-11-09 1997-12-17 Pixel International S.A. Zusammenbauverfahren und einrichtung einer flachen bildwiedergaberöhre
KR960019424A (ko) * 1994-11-28 1996-06-17 윌리엄 이. 힐러 전계 방출 디바이스 어셈블리의 복사 냉각 장치 및 방법
JP3423511B2 (ja) * 1994-12-14 2003-07-07 キヤノン株式会社 画像形成装置及びゲッタ材の活性化方法
US5618216C1 (en) 1995-06-02 2001-06-26 Advanced Vision Tech Inc Fabrication process for lateral-emitter field-emission device with simplified anode
US5653836A (en) * 1995-07-28 1997-08-05 Rohr, Inc. Method of repairing sound attenuation structure used for aircraft applications
US5653838A (en) * 1995-08-24 1997-08-05 Texas Instruments Incorporated Glass heating and sealing system
JPH0992184A (ja) 1995-09-28 1997-04-04 Ise Electronics Corp 蛍光表示管およびその製造方法
US5697825A (en) * 1995-09-29 1997-12-16 Micron Display Technology, Inc. Method for evacuating and sealing field emission displays
US5813893A (en) * 1995-12-29 1998-09-29 Sgs-Thomson Microelectronics, Inc. Field emission display fabrication method
EP0782169A1 (de) 1995-12-29 1997-07-02 STMicroelectronics, Inc. Feldemissionsanzeigevorrichtung
US5827102A (en) * 1996-05-13 1998-10-27 Micron Technology, Inc. Low temperature method for evacuating and sealing field emission displays
JPH10254374A (ja) 1997-03-14 1998-09-25 Canon Inc 画像形成装置とその製造方法
JPH1154038A (ja) 1997-08-05 1999-02-26 Canon Inc 電子放出素子、電子源及び画像形成装置の製造方法
JPH11135018A (ja) 1997-08-29 1999-05-21 Canon Inc 画像形成装置の製造方法、製造装置および画像形成装置
GB2346008B (en) 1997-10-01 2002-04-10 Complete Multilayer Solutions Visual display
KR19990053755A (ko) 1997-12-24 1999-07-15 김영환 플라즈마 디스플레이 패널의 제조장치 및 이를 이용한 플라즈마 디스플레이 패널의 제조 방법
WO2000054307A1 (fr) 1999-03-05 2000-09-14 Canon Kabushiki Kaisha Dispositif de formation d'images
EP1168410A4 (de) 1999-03-31 2006-08-02 Toshiba Kk Herstellungsverfahren einer flachen bildanzeige und flachbildanzeigevorrichtung
US6049168A (en) * 1999-06-04 2000-04-11 Litton Systems, Inc. Method and system for manufacturing microchannel plates
JP3754859B2 (ja) * 2000-02-16 2006-03-15 キヤノン株式会社 画像表示装置の製造法
US6848961B2 (en) 2000-03-16 2005-02-01 Canon Kabushiki Kaisha Method and apparatus for manufacturing image displaying apparatus
JP3754883B2 (ja) 2000-03-23 2006-03-15 キヤノン株式会社 画像表示装置の製造法
US6479944B2 (en) * 2000-07-25 2002-11-12 Lg Electronics Inc. Plasma display panel, fabrication apparatus for the same, and fabrication process thereof
JP3733308B2 (ja) * 2000-09-29 2006-01-11 キヤノン株式会社 画像表示装置の製造方法
JP3754882B2 (ja) * 2000-09-29 2006-03-15 キヤノン株式会社 画像表示装置の製造法

Also Published As

Publication number Publication date
EP1126496B1 (de) 2009-07-29
EP1126496A2 (de) 2001-08-22
KR20010088336A (ko) 2001-09-26
CN1312536A (zh) 2001-09-12
KR100441388B1 (ko) 2004-07-23
JP3754859B2 (ja) 2006-03-15
US6905384B2 (en) 2005-06-14
US7628670B2 (en) 2009-12-08
US20070111629A1 (en) 2007-05-17
CN100430981C (zh) 2008-11-05
KR100442214B1 (ko) 2004-07-30
JP2001229828A (ja) 2001-08-24
US20010034175A1 (en) 2001-10-25
DE60139358D1 (de) 2009-09-10
TW514960B (en) 2002-12-21
US20050181698A1 (en) 2005-08-18
US7226335B2 (en) 2007-06-05
KR20040030768A (ko) 2004-04-09
EP1126496A3 (de) 2004-03-17

Similar Documents

Publication Publication Date Title
ATE438195T1 (de) Verfahren und vorrichtung zum herstellen einer bildanzeigevorrichtung
KR100713987B1 (ko) 기판 밀착장치 및 이를 이용한 유기전계발광 표시장치의밀봉방법
JP2001229828A5 (de)
EP0996141A3 (de) Bilderzeugungsgerät und Herstellungsverfahren dafür
EP1291890A3 (de) Verfahren zur Herstellung von Fasern und Verfahren zur Herstellung einer Elektronenemittierenden Vorrichtung, einer Elektronenquelle und eines Bilderzeugungsgerätes unter Verwendung von diesen Fasern
DE60237886D1 (de) Maskenkorrektur durch elektronenstrahlinduzierte chemische ätzung
WO2002044687A3 (en) Method and device utilizing plasma source for real-time gas sampling
EP1223599A3 (de) Verfahren und Apparat zum Herstellen einer Plasma-Anzeigevorrichtung
JP2002137939A (ja) 表示パネルの製造方法およびその製造装置
EP1531502A3 (de) Sehr dünne OLED Vorrichtung und Verfahren zu deren Herstellung
EP1441380A3 (de) Feldemissinsanzeigevorrichtung und Verfahren zur Herstellung
WO1999067803A3 (en) Plasma display panel manufacturing method for achieving luminescence characteristics
EP1548794A3 (de) Anzeigetafel und Anzeigevorrichtung
WO2002054436A1 (en) A method for sealing a flat panel display in a vacuum
JP2002175756A5 (de)
EP1420081A3 (de) Vorrichtung und Verfahren zur Herstellung von dünnen Schichten
CN103502391B (zh) 紫外光产生用靶、电子射线激励紫外光源、以及紫外光产生用靶的制造方法
ATE159838T1 (de) Verfahren zur herstellung eines bilderzeugerungsgeräts
AU4243596A (en) Field emission device with internal structure for aligning phosphor pixels with corresponding field emitters
EP0865067A3 (de) Verfahren zur Herstellung eines Phosphormusters, damit hergestelltes Phosphormuster und Rückplatte für eine Plasma-Anzeigetafel
ATE319184T1 (de) Verfahren und gerät zur plasmadotierung durch pulsieren der anode
TW200619689A (en) Apparatus and methods for curing ink on a substrate using an electron beam
ATE353163T1 (de) Elektronenemissionsvorrichtung und verfahren zu deren herstellung
TWI264460B (en) Red-emitting phosphors excited by vacuum ultraviolet radiation and manufacturing method thereof
DE602005008320D1 (de) Quantum-Teilungs Fluoridphosphore, Verfahren zu ihrer Herstellung und Vorrichtung mit diesen Phosphoren

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties