JP3754859B2 - 画像表示装置の製造法 - Google Patents

画像表示装置の製造法 Download PDF

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Publication number
JP3754859B2
JP3754859B2 JP2000038603A JP2000038603A JP3754859B2 JP 3754859 B2 JP3754859 B2 JP 3754859B2 JP 2000038603 A JP2000038603 A JP 2000038603A JP 2000038603 A JP2000038603 A JP 2000038603A JP 3754859 B2 JP3754859 B2 JP 3754859B2
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JP
Japan
Prior art keywords
substrate
processing chamber
chamber
getter
image display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000038603A
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English (en)
Japanese (ja)
Other versions
JP2001229828A5 (enExample
JP2001229828A (ja
Inventor
俊彦 宮崎
耕平 中田
哲也 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2000038603A priority Critical patent/JP3754859B2/ja
Priority to US09/781,305 priority patent/US6905384B2/en
Priority to TW090103292A priority patent/TW514960B/zh
Priority to AT01301315T priority patent/ATE438195T1/de
Priority to EP01301315A priority patent/EP1126496B1/en
Priority to DE60139358T priority patent/DE60139358D1/de
Priority to KR10-2001-0007695A priority patent/KR100442214B1/ko
Priority to CNB011168730A priority patent/CN100430981C/zh
Publication of JP2001229828A publication Critical patent/JP2001229828A/ja
Priority to KR10-2004-0019042A priority patent/KR100441388B1/ko
Publication of JP2001229828A5 publication Critical patent/JP2001229828A5/ja
Priority to US11/101,506 priority patent/US7226335B2/en
Application granted granted Critical
Publication of JP3754859B2 publication Critical patent/JP3754859B2/ja
Priority to US11/620,819 priority patent/US7628670B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07F—COIN-FREED OR LIKE APPARATUS
    • G07F11/00—Coin-freed apparatus for dispensing, or the like, discrete articles
    • G07F11/02—Coin-freed apparatus for dispensing, or the like, discrete articles from non-movable magazines
    • G07F11/04—Coin-freed apparatus for dispensing, or the like, discrete articles from non-movable magazines in which magazines the articles are stored one vertically above the other
    • G07F11/16—Delivery means
    • G07F11/24—Rotary or oscillatory members
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07F—COIN-FREED OR LIKE APPARATUS
    • G07F5/00—Coin-actuated mechanisms; Interlocks
    • G07F5/02—Coin-actuated mechanisms; Interlocks actuated mechanically by coins, e.g. by a single coin
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07F—COIN-FREED OR LIKE APPARATUS
    • G07F9/00—Details other than those peculiar to special kinds or types of apparatus
    • G07F9/10—Casings or parts thereof, e.g. with means for heating or cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/18—Assembling together the component parts of electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • H01J9/48—Machines having sequentially arranged operating stations with automatic transfer of workpieces between operating stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Spinning Or Twisting Of Yarns (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
JP2000038603A 2000-02-16 2000-02-16 画像表示装置の製造法 Expired - Fee Related JP3754859B2 (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP2000038603A JP3754859B2 (ja) 2000-02-16 2000-02-16 画像表示装置の製造法
US09/781,305 US6905384B2 (en) 2000-02-16 2001-02-13 Method and apparatus for manufacturing image displaying apparatus
TW090103292A TW514960B (en) 2000-02-16 2001-02-14 Method and apparatus for manufacturing image displaying apparatus
EP01301315A EP1126496B1 (en) 2000-02-16 2001-02-15 Method and apparatus for manufacturing image displaying apparatus
DE60139358T DE60139358D1 (de) 2000-02-16 2001-02-15 Verfahren und Vorrichtung zum Herstellen einer Bildanzeigevorrichtung
AT01301315T ATE438195T1 (de) 2000-02-16 2001-02-15 Verfahren und vorrichtung zum herstellen einer bildanzeigevorrichtung
KR10-2001-0007695A KR100442214B1 (ko) 2000-02-16 2001-02-16 화상표시장치의 제조법 및 제조장치
CNB011168730A CN100430981C (zh) 2000-02-16 2001-02-16 制作图象显示装置的方法和设备
KR10-2004-0019042A KR100441388B1 (ko) 2000-02-16 2004-03-19 화상표시장치의 제조법 및 제조장치
US11/101,506 US7226335B2 (en) 2000-02-16 2005-04-08 Method and apparatus for manufacturing image displaying apparatus
US11/620,819 US7628670B2 (en) 2000-02-16 2007-01-08 Method and apparatus for manufacturing image displaying apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000038603A JP3754859B2 (ja) 2000-02-16 2000-02-16 画像表示装置の製造法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005315794A Division JP4235640B2 (ja) 2005-10-31 2005-10-31 画像表示装置の製造装置

Publications (3)

Publication Number Publication Date
JP2001229828A JP2001229828A (ja) 2001-08-24
JP2001229828A5 JP2001229828A5 (enExample) 2005-03-17
JP3754859B2 true JP3754859B2 (ja) 2006-03-15

Family

ID=18562315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000038603A Expired - Fee Related JP3754859B2 (ja) 2000-02-16 2000-02-16 画像表示装置の製造法

Country Status (8)

Country Link
US (3) US6905384B2 (enExample)
EP (1) EP1126496B1 (enExample)
JP (1) JP3754859B2 (enExample)
KR (2) KR100442214B1 (enExample)
CN (1) CN100430981C (enExample)
AT (1) ATE438195T1 (enExample)
DE (1) DE60139358D1 (enExample)
TW (1) TW514960B (enExample)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3754859B2 (ja) * 2000-02-16 2006-03-15 キヤノン株式会社 画像表示装置の製造法
KR100448663B1 (ko) * 2000-03-16 2004-09-13 캐논 가부시끼가이샤 화상표시장치의 제조방법 및 제조장치
JP3754883B2 (ja) * 2000-03-23 2006-03-15 キヤノン株式会社 画像表示装置の製造法
US7052354B2 (en) * 2002-08-01 2006-05-30 Canon Kabushiki Kaisha Method for producing spacer and spacer
JP5068924B2 (ja) * 2004-02-20 2012-11-07 中外炉工業株式会社 ガラスパネル組立体の連続封着処理炉および封着処理方法
US7271529B2 (en) 2004-04-13 2007-09-18 Canon Kabushiki Kaisha Electron emitting devices having metal-based film formed over an electro-conductive film element
JP4393257B2 (ja) * 2004-04-15 2010-01-06 キヤノン株式会社 外囲器の製造方法および画像形成装置
JP2006085933A (ja) 2004-09-14 2006-03-30 Toshiba Matsushita Display Technology Co Ltd 表示装置の製造方法及び製造装置
US20060269656A1 (en) * 2005-05-26 2006-11-30 Eastman Kodak Company Reducing contamination in OLED processing systems
JP2007027018A (ja) * 2005-07-21 2007-02-01 Hitachi Ltd ディスプレイパネルの製造方法及びアノードパネル
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JP2010086947A (ja) 2008-09-02 2010-04-15 Canon Inc 真空気密容器の製造方法
JP2010135312A (ja) 2008-11-04 2010-06-17 Canon Inc 気密容器の製造方法
JP5620146B2 (ja) * 2009-05-22 2014-11-05 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置
JP5623786B2 (ja) * 2009-05-22 2014-11-12 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置
KR101074792B1 (ko) * 2009-06-12 2011-10-19 삼성모바일디스플레이주식회사 박막 증착 장치
KR101117719B1 (ko) 2009-06-24 2012-03-08 삼성모바일디스플레이주식회사 박막 증착 장치
JP5328726B2 (ja) * 2009-08-25 2013-10-30 三星ディスプレイ株式會社 薄膜蒸着装置及びこれを利用した有機発光ディスプレイ装置の製造方法
JP5611718B2 (ja) * 2009-08-27 2014-10-22 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法
JP5677785B2 (ja) * 2009-08-27 2015-02-25 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法
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CN102117893B (zh) * 2010-12-01 2012-07-04 东莞宏威数码机械有限公司 真空加热除气处理设备
KR20120065789A (ko) 2010-12-13 2012-06-21 삼성모바일디스플레이주식회사 유기층 증착 장치
JP2012133993A (ja) * 2010-12-21 2012-07-12 Kochi Fel Kk 電界放出型光源の製造方法及び電界放出型光源
KR101760897B1 (ko) 2011-01-12 2017-07-25 삼성디스플레이 주식회사 증착원 및 이를 구비하는 유기막 증착 장치
KR101852517B1 (ko) 2011-05-25 2018-04-27 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR101840654B1 (ko) 2011-05-25 2018-03-22 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR101857249B1 (ko) 2011-05-27 2018-05-14 삼성디스플레이 주식회사 패터닝 슬릿 시트 어셈블리, 유기막 증착 장치, 유기 발광 표시장치제조 방법 및 유기 발광 표시 장치
KR20130004830A (ko) 2011-07-04 2013-01-14 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법
KR101826068B1 (ko) 2011-07-04 2018-02-07 삼성디스플레이 주식회사 유기층 증착 장치
KR102015872B1 (ko) 2012-06-22 2019-10-22 삼성디스플레이 주식회사 유기층 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR102081284B1 (ko) 2013-04-18 2020-02-26 삼성디스플레이 주식회사 증착장치, 이를 이용한 유기발광 디스플레이 장치 제조 방법 및 유기발광 디스플레이 장치
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JP3733308B2 (ja) * 2000-09-29 2006-01-11 キヤノン株式会社 画像表示装置の製造方法
JP3754882B2 (ja) * 2000-09-29 2006-03-15 キヤノン株式会社 画像表示装置の製造法

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EP1126496A2 (en) 2001-08-22
US7226335B2 (en) 2007-06-05
US20010034175A1 (en) 2001-10-25
KR20010088336A (ko) 2001-09-26
CN100430981C (zh) 2008-11-05
ATE438195T1 (de) 2009-08-15
DE60139358D1 (de) 2009-09-10
US6905384B2 (en) 2005-06-14
TW514960B (en) 2002-12-21
JP2001229828A (ja) 2001-08-24
CN1312536A (zh) 2001-09-12
KR20040030768A (ko) 2004-04-09
EP1126496B1 (en) 2009-07-29
KR100441388B1 (ko) 2004-07-23
US20050181698A1 (en) 2005-08-18
US20070111629A1 (en) 2007-05-17
EP1126496A3 (en) 2004-03-17
KR100442214B1 (ko) 2004-07-30

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