TW375841B - Field effect type transistors - Google Patents

Field effect type transistors

Info

Publication number
TW375841B
TW375841B TW087100752A TW87100752A TW375841B TW 375841 B TW375841 B TW 375841B TW 087100752 A TW087100752 A TW 087100752A TW 87100752 A TW87100752 A TW 87100752A TW 375841 B TW375841 B TW 375841B
Authority
TW
Taiwan
Prior art keywords
doped
layer
field effect
effect type
type transistors
Prior art date
Application number
TW087100752A
Other languages
English (en)
Inventor
Mitsuru Tanabe
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Application granted granted Critical
Publication of TW375841B publication Critical patent/TW375841B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
    • H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
    • H01L29/812—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
    • H01L21/28587—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds characterised by the sectional shape, e.g. T, inverted T
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/15—Structures with periodic or quasi periodic potential variation, e.g. multiple quantum wells, superlattices
    • H01L29/151—Compositional structures
    • H01L29/152—Compositional structures with quantum effects only in vertical direction, i.e. layered structures with quantum effects solely resulting from vertical potential variation
    • H01L29/155—Comprising only semiconductor materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/201—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
    • H01L29/205—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys in different semiconductor regions, e.g. heterojunctions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
    • H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET
    • H01L29/7783—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material
    • H01L29/7784—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material with delta or planar doped donor layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Junction Field-Effect Transistors (AREA)
TW087100752A 1997-03-05 1998-01-21 Field effect type transistors TW375841B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9050618A JPH10247727A (ja) 1997-03-05 1997-03-05 電界効果型トランジスタ

Publications (1)

Publication Number Publication Date
TW375841B true TW375841B (en) 1999-12-01

Family

ID=12863974

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087100752A TW375841B (en) 1997-03-05 1998-01-21 Field effect type transistors

Country Status (8)

Country Link
EP (1) EP0863554B1 (zh)
JP (1) JPH10247727A (zh)
KR (1) KR19980079943A (zh)
CN (1) CN1155099C (zh)
CA (1) CA2231206A1 (zh)
DE (1) DE69808161T2 (zh)
ES (1) ES2184155T3 (zh)
TW (1) TW375841B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6462361B1 (en) 1995-12-27 2002-10-08 Showa Denko K.K. GaInP epitaxial stacking structure and fabrication method thereof, and a FET transistor using this structure
TW522574B (en) * 1999-09-28 2003-03-01 Showa Denko Kk GaInP epitaxial stacking structure, a GaInP epitaxial stacking structure for FETs and a fabrication method thereof
US7297977B2 (en) * 2004-03-12 2007-11-20 Hewlett-Packard Development Company, L.P. Semiconductor device
US7465972B2 (en) * 2005-01-21 2008-12-16 Taiwan Semiconductor Manufacturing Company, Ltd. High performance CMOS device design
JP5495069B2 (ja) * 2011-05-17 2014-05-21 古河電気工業株式会社 半導体素子及びその製造方法
WO2013001676A1 (ja) * 2011-06-30 2013-01-03 パナソニック株式会社 薄膜トランジスタ装置及び薄膜トランジスタ装置の製造方法
US8941123B2 (en) * 2013-05-30 2015-01-27 International Business Machines Corporation Local interconnects by metal-III-V alloy wiring in semi-insulating III-V substrates
JP6507912B2 (ja) 2015-07-30 2019-05-08 三菱電機株式会社 半導体受光素子

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666334B2 (ja) * 1987-02-10 1994-08-24 日本電気株式会社 電界効果トランジスタ
JPS63278277A (ja) * 1987-05-09 1988-11-15 Fujitsu Ltd 化合物半導体装置
JPH01233776A (ja) * 1988-03-14 1989-09-19 Nec Corp ヘテロ接合電界効果トランジスタ
JPH01256176A (ja) * 1988-04-05 1989-10-12 Fujitsu Ltd 化合物半導体装置
JPH02150038A (ja) * 1988-11-30 1990-06-08 Sharp Corp 変調ドープ電界効果トランジスタ
JPH04369842A (ja) * 1991-06-19 1992-12-22 Matsushita Electric Ind Co Ltd ヘテロ接合電界効果トランジスタ
JP2611735B2 (ja) * 1993-12-22 1997-05-21 日本電気株式会社 ヘテロ接合ｆｅｔ
US5856685A (en) * 1995-02-22 1999-01-05 Nec Corporation Heterojunction field effect transistor

Also Published As

Publication number Publication date
JPH10247727A (ja) 1998-09-14
EP0863554A3 (en) 1998-12-30
EP0863554B1 (en) 2002-09-25
DE69808161T2 (de) 2003-01-30
CN1155099C (zh) 2004-06-23
EP0863554A2 (en) 1998-09-09
ES2184155T3 (es) 2003-04-01
CA2231206A1 (en) 1998-09-05
DE69808161D1 (de) 2002-10-31
KR19980079943A (ko) 1998-11-25
CN1192587A (zh) 1998-09-09

Similar Documents

Publication Publication Date Title
KR920022537A (ko) 감소된 기생 캐패시턴스를 갖는 보호형 프로그램가능 트랜지스터 및 그의 제조방법
WO2001086727A3 (en) Silicon carbide metal-semiconductor field effect transistors and methods of fabricating silicon carbide metal-semiconductor field effect transistors
TW200512930A (en) Low leakage heterojunction vertical transistors and high performance devices thereof
CA2227011A1 (en) Short channel fermi-threshold field effect transistors
TW375841B (en) Field effect type transistors
TW340965B (en) Process to separate the doping of polygate and source drain regions in dual gate field effect transistors
KR870006679A (ko) 전기효과 트랜지스터
EP0364818A3 (en) Method for making a polysilicon transistor
EP1049101A3 (en) Semiconductor memory cell
KR940004852A (ko) 모스트랜지스터 구조 및 제조방법
US20030107094A1 (en) Transistor structures having access gates with narrowed central portions
GB2012480A (en) Heterostructure field effect transistors
JP3253098B2 (ja) 低抵抗ゲートのためのｓｏｉ設計
KR100249194B1 (ko) 자기 정렬형 메스에프이티 제조방법
JPH04370977A (ja) 量子化電界効果トランジスタ
JP3121621B2 (ja) 半導体装置
KR920015641A (ko) 전계효과 트랜지스터가 구비된 반도체 디바이스 제조방법
JPH04116984A (ja) Ｎチャネルｍｏｓ型薄膜半導体装置
KR970024260A (ko) 채널 영역 아래에 산화막을 가지는 트랜지스터
JPH0445544A (ja) 電界効果トランジスタおよびその製造方法
JPS645074A (en) Field effect transistor
KR960012516A (ko) 스태틱 랜덤 억세스 메모리 소자 및 그 제조방법
JPH04207040A (ja) 半導体装置
JPH0338843A (ja) 電界効果トランジスタ
JPS6412579A (en) Schottky junction field-effect transistor

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees