JP6507912B2 - 半導体受光素子 - Google Patents
半導体受光素子 Download PDFInfo
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- JP6507912B2 JP6507912B2 JP2015150723A JP2015150723A JP6507912B2 JP 6507912 B2 JP6507912 B2 JP 6507912B2 JP 2015150723 A JP2015150723 A JP 2015150723A JP 2015150723 A JP2015150723 A JP 2015150723A JP 6507912 B2 JP6507912 B2 JP 6507912B2
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- 239000004065 semiconductor Substances 0.000 title claims description 22
- 230000005684 electric field Effects 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 20
- 230000031700 light absorption Effects 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 230000004888 barrier function Effects 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 239000002019 doping agent Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 140
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 29
- 230000007704 transition Effects 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 238000000927 vapour-phase epitaxy Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier working in avalanche mode, e.g. avalanche photodiode
- H01L31/1075—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier working in avalanche mode, e.g. avalanche photodiode in which the active layers, e.g. absorption or multiplication layers, form an heterostructure, e.g. SAM structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0304—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L31/03046—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035236—Superlattices; Multiple quantum well structures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
Description
Claims (4)
- 半絶縁性基板と、
前記半絶縁性基板上に順に積層されたバッファ層、p型コンタクト層、光吸収層、p型電界緩和層、電子増倍層、n型電界緩和層及びn型コンタクト層とを備え、
前記バッファ層は、InP層とAlxGayIn1−x−yAs層(0.16≦x≦0.48、0≦y≦0.31)を交互に積層した超格子を有し、電子に対するバリアを形成し、前記光吸収層で吸収される波長帯域の光を吸収しないことを特徴とする半導体受光素子。 - 前記光吸収層は、前記p型コンタクト層上に互いに分離して形成された第1及び第2の光吸収層を有し、
前記p型電界緩和層は、前記第1及び第2の光吸収層上にそれぞれ形成された第1及び第2のp型電界緩和層を有し、
前記電子増倍層は、前記第1及び第2のp型電界緩和層上にそれぞれ形成された第1及び第2の電子増倍層を有し、
前記n型電界緩和層は、前記第1及び第2の電子増倍層上にそれぞれ形成された第1及び第2のn型電界緩和層を有し、
前記n型コンタクト層は、前記第1及び第2のn型電界緩和層上にそれぞれ形成された第1及び第2のn型コンタクト層を有し、
前記第1の光吸収層、前記第1のp型電界緩和層、前記第1の電子増倍層、前記第1のn型電界緩和層及び前記第1のn型コンタクト層は第1のアバランシェフォトダイオードを構成し、
前記第2の光吸収層、前記第2のp型電界緩和層、前記第2の電子増倍層、前記第2のn型電界緩和層及び前記第2のn型コンタクト層は第2のアバランシェフォトダイオードを構成することを特徴とする請求項1に記載の半導体受光素子。 - 前記バッファ層は半絶縁性ドーパントがドーピングされていることを特徴とする請求項1又は2に記載の半導体受光素子。
- 前記バッファ層の前記AlxGayIn1−x−yAs層中の酸素濃度が1E+15cm−3以上、1E+20cm−3以下であることを特徴とする請求項1又は2に記載の半導体受光素子。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015150723A JP6507912B2 (ja) | 2015-07-30 | 2015-07-30 | 半導体受光素子 |
US15/054,841 US10079324B2 (en) | 2015-07-30 | 2016-02-26 | Semiconductor light-receiving device |
CN201610617954.6A CN106409966B (zh) | 2015-07-30 | 2016-07-29 | 半导体受光元件 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015150723A JP6507912B2 (ja) | 2015-07-30 | 2015-07-30 | 半導体受光素子 |
Publications (3)
Publication Number | Publication Date |
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JP2017034028A JP2017034028A (ja) | 2017-02-09 |
JP2017034028A5 JP2017034028A5 (ja) | 2018-03-29 |
JP6507912B2 true JP6507912B2 (ja) | 2019-05-08 |
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JP2015150723A Active JP6507912B2 (ja) | 2015-07-30 | 2015-07-30 | 半導体受光素子 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10079324B2 (ja) |
JP (1) | JP6507912B2 (ja) |
CN (1) | CN106409966B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210098725A (ko) * | 2020-02-03 | 2021-08-11 | 삼성전자주식회사 | 적외선 검출 소자 및 이를 포함하는 적외선 검출 시스템 |
EP4250377A1 (en) * | 2020-12-04 | 2023-09-27 | Hamamatsu Photonics K.K. | Semiconductor light reception element |
WO2022157888A1 (ja) * | 2021-01-21 | 2022-07-28 | 三菱電機株式会社 | アバランシェフォトダイオード |
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2015
- 2015-07-30 JP JP2015150723A patent/JP6507912B2/ja active Active
-
2016
- 2016-02-26 US US15/054,841 patent/US10079324B2/en active Active
- 2016-07-29 CN CN201610617954.6A patent/CN106409966B/zh active Active
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Publication number | Publication date |
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JP2017034028A (ja) | 2017-02-09 |
US20170033254A1 (en) | 2017-02-02 |
US10079324B2 (en) | 2018-09-18 |
CN106409966B (zh) | 2018-12-18 |
CN106409966A (zh) | 2017-02-15 |
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