TW296489B - - Google Patents
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- Publication number
- TW296489B TW296489B TW085105204A TW85105204A TW296489B TW 296489 B TW296489 B TW 296489B TW 085105204 A TW085105204 A TW 085105204A TW 85105204 A TW85105204 A TW 85105204A TW 296489 B TW296489 B TW 296489B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- bonding layer
- bonding
- mixed crystal
- crystal ratio
- Prior art date
Links
- 239000010410 layer Substances 0.000 claims description 359
- 239000013078 crystal Substances 0.000 claims description 65
- 239000004065 semiconductor Substances 0.000 claims description 45
- 229910052782 aluminium Inorganic materials 0.000 claims description 31
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 26
- 230000000694 effects Effects 0.000 claims description 13
- 239000002356 single layer Substances 0.000 claims description 13
- 239000011229 interlayer Substances 0.000 claims description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 53
- 238000000034 method Methods 0.000 description 22
- 239000000463 material Substances 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 11
- 238000009792 diffusion process Methods 0.000 description 10
- 239000011241 protective layer Substances 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 229910002704 AlGaN Inorganic materials 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
- AXAZMDOAUQTMOW-UHFFFAOYSA-N dimethylzinc Chemical compound C[Zn]C AXAZMDOAUQTMOW-UHFFFAOYSA-N 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 4
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 229910017401 Au—Ge Inorganic materials 0.000 description 1
- 241001342895 Chorus Species 0.000 description 1
- JREMBWMRHVSFKX-UHFFFAOYSA-N Cl.Cl.Cl.[P] Chemical compound Cl.Cl.Cl.[P] JREMBWMRHVSFKX-UHFFFAOYSA-N 0.000 description 1
- FSCNUJMKSQHQSY-UHFFFAOYSA-N Gein Chemical compound COC1=CC(CC=C)=CC=C1OC1C(O)C(O)C(O)C(COC2C(C(O)C(O)CO2)O)O1 FSCNUJMKSQHQSY-UHFFFAOYSA-N 0.000 description 1
- 101100518501 Mus musculus Spp1 gene Proteins 0.000 description 1
- 241000233805 Phoenix Species 0.000 description 1
- JZRWCGZRTZMZEH-UHFFFAOYSA-N Thiamine Natural products CC1=C(CCO)SC=[N+]1CC1=CN=C(C)N=C1N JZRWCGZRTZMZEH-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- HAORKNGNJCEJBX-UHFFFAOYSA-N cyprodinil Chemical compound N=1C(C)=CC(C2CC2)=NC=1NC1=CC=CC=C1 HAORKNGNJCEJBX-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 235000011389 fruit/vegetable juice Nutrition 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- JOTBHEPHROWQDJ-UHFFFAOYSA-N methylgallium Chemical compound [Ga]C JOTBHEPHROWQDJ-UHFFFAOYSA-N 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- KYMBYSLLVAOCFI-UHFFFAOYSA-N thiamine Chemical compound CC1=C(CCO)SCN1CC1=CN=C(C)N=C1N KYMBYSLLVAOCFI-UHFFFAOYSA-N 0.000 description 1
- 229960003495 thiamine Drugs 0.000 description 1
- 235000019157 thiamine Nutrition 0.000 description 1
- 239000011721 thiamine Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
- H01L33/145—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure with a current-blocking structure
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8951095A JPH08288544A (ja) | 1995-04-14 | 1995-04-14 | 半導体発光素子 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW296489B true TW296489B (ja) | 1997-01-21 |
Family
ID=13972789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085105204A TW296489B (ja) | 1995-04-14 | 1996-05-01 |
Country Status (3)
Country | Link |
---|---|
US (2) | US5732098A (ja) |
JP (1) | JPH08288544A (ja) |
TW (1) | TW296489B (ja) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6996150B1 (en) * | 1994-09-14 | 2006-02-07 | Rohm Co., Ltd. | Semiconductor light emitting device and manufacturing method therefor |
JPH08288544A (ja) * | 1995-04-14 | 1996-11-01 | Toshiba Corp | 半導体発光素子 |
JP3713100B2 (ja) | 1996-05-23 | 2005-11-02 | ローム株式会社 | 半導体発光素子の製法 |
JPH104240A (ja) * | 1996-06-17 | 1998-01-06 | Furukawa Electric Co Ltd:The | 半導体光素子、ウエハ及びその製造方法 |
JP3097570B2 (ja) * | 1996-09-26 | 2000-10-10 | 日本電気株式会社 | Ii−vi族化合物半導体およびその製造方法 |
US6258619B1 (en) | 1996-12-06 | 2001-07-10 | Rohm Ltd | Fabrication of semiconductor light emitting device |
US6194742B1 (en) * | 1998-06-05 | 2001-02-27 | Lumileds Lighting, U.S., Llc | Strain engineered and impurity controlled III-V nitride semiconductor films and optoelectronic devices |
US20010020703A1 (en) * | 1998-07-24 | 2001-09-13 | Nathan F. Gardner | Algainp light emitting devices with thin active layers |
TW399344B (en) * | 1998-09-09 | 2000-07-21 | Jan Shr Shiung | High intensity light emitting diode (LED) and the manufacturing method thereof |
JP3698402B2 (ja) | 1998-11-30 | 2005-09-21 | シャープ株式会社 | 発光ダイオード |
US6430202B1 (en) * | 1999-04-09 | 2002-08-06 | Xerox Corporation | Structure and method for asymmetric waveguide nitride laser diode |
JP4024463B2 (ja) * | 1999-09-27 | 2007-12-19 | シャープ株式会社 | 半導体発光素子の製造方法 |
JP2001274456A (ja) | 2000-01-18 | 2001-10-05 | Sharp Corp | 発光ダイオード |
JP3882539B2 (ja) * | 2000-07-18 | 2007-02-21 | ソニー株式会社 | 半導体発光素子およびその製造方法、並びに画像表示装置 |
JP2002111052A (ja) * | 2000-09-28 | 2002-04-12 | Toshiba Corp | 半導体発光素子及びその製造方法 |
JP2002111134A (ja) | 2000-09-29 | 2002-04-12 | Toshiba Corp | 半導体レーザ装置 |
JP5283293B2 (ja) * | 2001-02-21 | 2013-09-04 | ソニー株式会社 | 半導体発光素子 |
US6775314B1 (en) * | 2001-11-29 | 2004-08-10 | Sandia Corporation | Distributed bragg reflector using AIGaN/GaN |
JP2003289176A (ja) * | 2002-01-24 | 2003-10-10 | Sony Corp | 半導体発光素子およびその製造方法 |
JP2004288799A (ja) * | 2003-03-20 | 2004-10-14 | Sony Corp | 半導体発光素子およびその製造方法、集積型半導体発光装置およびその製造方法、画像表示装置およびその製造方法ならびに照明装置およびその製造方法 |
KR101034055B1 (ko) * | 2003-07-18 | 2011-05-12 | 엘지이노텍 주식회사 | 발광 다이오드 및 그 제조방법 |
US6967346B2 (en) * | 2003-08-02 | 2005-11-22 | Formosa Epitaxy Incorporation | Light emitting diode structure and manufacture method thereof |
EP1697983B1 (en) * | 2003-12-09 | 2012-06-13 | The Regents of The University of California | Highly efficient gallium nitride based light emitting diodes having surface roughening |
US7196835B2 (en) * | 2004-06-01 | 2007-03-27 | The Trustees Of Princeton University | Aperiodic dielectric multilayer stack |
KR100616596B1 (ko) * | 2004-07-09 | 2006-08-28 | 삼성전기주식회사 | 질화물 반도체 소자 및 제조방법 |
US7307516B2 (en) * | 2004-08-22 | 2007-12-11 | Wiegner Thomas F | Instrument viewing display system for motorcycles |
JP2006120668A (ja) * | 2004-10-19 | 2006-05-11 | Mitsubishi Electric Corp | 半導体レーザ |
JP2007096267A (ja) * | 2005-08-30 | 2007-04-12 | Hitachi Cable Ltd | 半導体発光素子用エピタキシャルウェハ及びその製造方法並びに半導体発光素子 |
TWI452716B (zh) * | 2007-06-08 | 2014-09-11 | Formosa Epitaxy Inc | Gallium nitride based light emitting diode and manufacturing method thereof |
TWI341600B (en) * | 2007-08-31 | 2011-05-01 | Huga Optotech Inc | Light optoelectronic device and forming method thereof |
US8403885B2 (en) | 2007-12-17 | 2013-03-26 | Abbott Cardiovascular Systems Inc. | Catheter having transitioning shaft segments |
TWI473292B (zh) * | 2008-12-15 | 2015-02-11 | Lextar Electronics Corp | 發光二極體晶片 |
JP2011054862A (ja) * | 2009-09-04 | 2011-03-17 | Hitachi Cable Ltd | エピタキシャルウエハ、発光素子、エピタキシャルウエハの製造方法、及び発光素子の製造方法 |
KR20130137295A (ko) * | 2012-06-07 | 2013-12-17 | 엘지이노텍 주식회사 | 발광 소자 및 발광 소자 패키지 |
JP6325948B2 (ja) * | 2014-09-02 | 2018-05-16 | 株式会社東芝 | 半導体発光素子および光結合装置 |
CN105742433B (zh) * | 2016-04-29 | 2018-03-02 | 厦门市三安光电科技有限公司 | 一种AlGaInP发光二极管 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4792958A (en) * | 1986-02-28 | 1988-12-20 | Kabushiki Kaisha Toshiba | Semiconductor laser with mesa stripe waveguide structure |
JPH0212885A (ja) * | 1988-06-29 | 1990-01-17 | Nec Corp | 半導体レーザ及びその出射ビームの垂直放射角の制御方法 |
US5153889A (en) * | 1989-05-31 | 1992-10-06 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device |
JPH039515A (ja) * | 1989-06-07 | 1991-01-17 | Sharp Corp | 半導体装置 |
JPH04247676A (ja) * | 1991-02-01 | 1992-09-03 | Nippon Telegr & Teleph Corp <Ntt> | 面発光半導体モードロックレーザ |
JP3242967B2 (ja) * | 1992-01-31 | 2001-12-25 | 株式会社東芝 | 半導体発光素子 |
JPH05235312A (ja) * | 1992-02-19 | 1993-09-10 | Fujitsu Ltd | 半導体基板及びその製造方法 |
JP3373561B2 (ja) * | 1992-09-30 | 2003-02-04 | 株式会社東芝 | 発光ダイオード |
EP1450415A3 (en) * | 1993-04-28 | 2005-05-04 | Nichia Corporation | Gallium nitride-based III-V group compound semiconductor device |
BE1007251A3 (nl) * | 1993-06-28 | 1995-05-02 | Philips Electronics Nv | Straling-emitterende halfgeleiderdiode en werkwijze ter vervaardiging daarvan. |
US5537433A (en) * | 1993-07-22 | 1996-07-16 | Sharp Kabushiki Kaisha | Semiconductor light emitter |
JPH0766455A (ja) * | 1993-08-24 | 1995-03-10 | Shin Etsu Handotai Co Ltd | 半導体発光装置 |
JPH07162089A (ja) * | 1993-12-13 | 1995-06-23 | Mitsubishi Electric Corp | 可視光レーザダイオード及びその製造方法 |
JPH07235733A (ja) * | 1993-12-27 | 1995-09-05 | Sanyo Electric Co Ltd | 半導体レーザ素子 |
JPH07231142A (ja) * | 1994-02-18 | 1995-08-29 | Mitsubishi Electric Corp | 半導体発光素子 |
JP3293996B2 (ja) * | 1994-03-15 | 2002-06-17 | 株式会社東芝 | 半導体装置 |
DE69517614T2 (de) * | 1994-03-22 | 2001-02-15 | Uniphase Opto Holdings Inc | Halbleiterdiodenlaser und dessen Herstellungsverfahren |
JPH07281619A (ja) * | 1994-04-04 | 1995-10-27 | Rohm Co Ltd | Ledランプ、およびその基板への取付け構造 |
US5592501A (en) * | 1994-09-20 | 1997-01-07 | Cree Research, Inc. | Low-strain laser structures with group III nitride active layers |
US5568499A (en) * | 1995-04-07 | 1996-10-22 | Sandia Corporation | Optical device with low electrical and thermal resistance bragg reflectors |
JPH08288544A (ja) * | 1995-04-14 | 1996-11-01 | Toshiba Corp | 半導体発光素子 |
-
1995
- 1995-04-14 JP JP8951095A patent/JPH08288544A/ja active Pending
-
1996
- 1996-04-11 US US08/611,460 patent/US5732098A/en not_active Expired - Lifetime
- 1996-05-01 TW TW085105204A patent/TW296489B/zh not_active IP Right Cessation
-
1997
- 1997-12-18 US US08/993,574 patent/US6229834B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH08288544A (ja) | 1996-11-01 |
US5732098A (en) | 1998-03-24 |
US6229834B1 (en) | 2001-05-08 |
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Legal Events
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MK4A | Expiration of patent term of an invention patent |