TW293173B - - Google Patents

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Publication number
TW293173B
TW293173B TW084112511A TW84112511A TW293173B TW 293173 B TW293173 B TW 293173B TW 084112511 A TW084112511 A TW 084112511A TW 84112511 A TW84112511 A TW 84112511A TW 293173 B TW293173 B TW 293173B
Authority
TW
Taiwan
Prior art keywords
conductor layer
wiring pattern
patent application
item
electrode
Prior art date
Application number
TW084112511A
Other languages
English (en)
Chinese (zh)
Original Assignee
Toshiba Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Co Ltd filed Critical Toshiba Co Ltd
Application granted granted Critical
Publication of TW293173B publication Critical patent/TW293173B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/13625—Patterning using multi-mask exposure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G02F1/13629—Multilayer wirings

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
TW084112511A 1994-11-24 1995-11-23 TW293173B (enExample)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP28932494 1994-11-24
JP25027595A JPH08201853A (ja) 1994-11-24 1995-09-28 電極基板および平面表示装置

Publications (1)

Publication Number Publication Date
TW293173B true TW293173B (enExample) 1996-12-11

Family

ID=26539712

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084112511A TW293173B (enExample) 1994-11-24 1995-11-23

Country Status (4)

Country Link
US (2) US6208390B1 (enExample)
JP (1) JPH08201853A (enExample)
KR (1) KR100207136B1 (enExample)
TW (1) TW293173B (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08201853A (ja) * 1994-11-24 1996-08-09 Toshiba Electron Eng Corp 電極基板および平面表示装置
JP3762002B2 (ja) * 1996-11-29 2006-03-29 株式会社東芝 薄膜トランジスタ、及び液晶表示装置
KR100472174B1 (ko) * 1997-06-18 2005-06-07 삼성전자주식회사 중첩 노광을 이용한 액정 표시 장치의 제조방법
JP4070896B2 (ja) * 1998-10-07 2008-04-02 三菱電機株式会社 電気光学素子および該電気光学素子の製造方法
KR100333979B1 (ko) * 1999-04-26 2002-04-24 윤종용 액정 표시 장치용 박막 트랜지스터 기판 및 그의 제조 방법
US6759281B1 (en) 1999-04-26 2004-07-06 Samsung Electronics Co., Ltd. Method of making a display switch having a contact hole through a passivation layer and a color filter
JP4118484B2 (ja) 2000-03-06 2008-07-16 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP2001257350A (ja) 2000-03-08 2001-09-21 Semiconductor Energy Lab Co Ltd 半導体装置およびその作製方法
JP4700160B2 (ja) 2000-03-13 2011-06-15 株式会社半導体エネルギー研究所 半導体装置
JP4118485B2 (ja) * 2000-03-13 2008-07-16 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4683688B2 (ja) 2000-03-16 2011-05-18 株式会社半導体エネルギー研究所 液晶表示装置の作製方法
JP4393662B2 (ja) 2000-03-17 2010-01-06 株式会社半導体エネルギー研究所 液晶表示装置の作製方法
JP4785229B2 (ja) 2000-05-09 2011-10-05 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP3880356B2 (ja) * 2000-12-05 2007-02-14 キヤノン株式会社 表示装置
US7071037B2 (en) * 2001-03-06 2006-07-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP2004219991A (ja) * 2002-12-27 2004-08-05 Sharp Corp 表示装置用基板およびこれを有する液晶表示装置
JP4877866B2 (ja) * 2003-10-28 2012-02-15 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4784382B2 (ja) * 2005-09-26 2011-10-05 ソニー株式会社 液晶表示装置
JP5136745B2 (ja) * 2006-12-13 2013-02-06 大日本印刷株式会社 多重露光技術におけるマスク製造誤差検証方法
US8330887B2 (en) * 2007-07-27 2012-12-11 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and electronic device
JP2010066486A (ja) * 2008-09-10 2010-03-25 Citizen Finetech Miyota Co Ltd 大型ｌｃｏｓ表示素子及びその製造方法
JP4935963B2 (ja) 2009-09-28 2012-05-23 凸版印刷株式会社 アクティブマトリクス基板及びその製造方法並びに画像表示装置
KR101928983B1 (ko) * 2011-07-20 2018-12-14 삼성디스플레이 주식회사 표시 기판 제조 방법
CN104662646B (zh) * 2012-09-21 2018-01-09 凸版印刷株式会社 薄膜晶体管及其制造方法、图像显示装置
TWI545381B (zh) * 2014-05-21 2016-08-11 群創光電股份有限公司 顯示裝置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5042918A (en) * 1988-11-15 1991-08-27 Kabushiki Kaisha Toshiba Liquid crystal display device
US5162933A (en) * 1990-05-16 1992-11-10 Nippon Telegraph And Telephone Corporation Active matrix structure for liquid crystal display elements wherein each of the gate/data lines includes at least a molybdenum-base alloy layer containing 0.5 to 10 wt. % of chromium
EP0545327A1 (en) * 1991-12-02 1993-06-09 Matsushita Electric Industrial Co., Ltd. Thin-film transistor array for use in a liquid crystal display
FR2702286B1 (fr) * 1993-03-04 1998-01-30 Samsung Electronics Co Ltd Affichage à cristaux liquides et procédé pour le fabriquer.
US5502583A (en) * 1993-05-15 1996-03-26 Nec Corporation Liquid crystal display device capable of compensating for a positioning error between a drain line and a display electrode
US5777703A (en) * 1994-09-30 1998-07-07 Sanyo Electric Co., Ltd. Active matrix type liquid crystal display apparatus with a projection part in the drain line
JPH08201853A (ja) * 1994-11-24 1996-08-09 Toshiba Electron Eng Corp 電極基板および平面表示装置
JPH0980476A (ja) * 1995-09-12 1997-03-28 Nec Corp アクティブマトリックス基板とその製造方法
JP3222762B2 (ja) * 1996-04-26 2001-10-29 シャープ株式会社 アクティブマトリクス基板およびその製造方法

Also Published As

Publication number Publication date
JPH08201853A (ja) 1996-08-09
KR960018698A (ko) 1996-06-17
US6208390B1 (en) 2001-03-27
US6411350B2 (en) 2002-06-25
KR100207136B1 (ko) 1999-07-15
US20010026342A1 (en) 2001-10-04

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