TW226403B - - Google Patents

Info

Publication number
TW226403B
TW226403B TW082100126A TW82100126A TW226403B TW 226403 B TW226403 B TW 226403B TW 082100126 A TW082100126 A TW 082100126A TW 82100126 A TW82100126 A TW 82100126A TW 226403 B TW226403 B TW 226403B
Authority
TW
Taiwan
Prior art keywords
percent
methods
composition
planarize
planarizing
Prior art date
Application number
TW082100126A
Other languages
English (en)
Chinese (zh)
Original Assignee
Rodel Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25364263&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TW226403(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Rodel Inc filed Critical Rodel Inc
Application granted granted Critical
Publication of TW226403B publication Critical patent/TW226403B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/346—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties utilised during polishing, or grinding operation
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
TW082100126A 1992-04-27 1993-01-11 TW226403B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/874,654 US5264010A (en) 1992-04-27 1992-04-27 Compositions and methods for polishing and planarizing surfaces

Publications (1)

Publication Number Publication Date
TW226403B true TW226403B (de) 1994-07-11

Family

ID=25364263

Family Applications (1)

Application Number Title Priority Date Filing Date
TW082100126A TW226403B (de) 1992-04-27 1993-01-11

Country Status (12)

Country Link
US (1) US5264010A (de)
EP (1) EP0690772B1 (de)
JP (1) JP2592401B2 (de)
KR (1) KR950701264A (de)
CN (2) CN1052502C (de)
AT (1) ATE166018T1 (de)
AU (1) AU3432693A (de)
DE (1) DE69318577T2 (de)
MY (1) MY108954A (de)
SG (1) SG43334A1 (de)
TW (1) TW226403B (de)
WO (1) WO1993022103A1 (de)

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FR2604443A1 (fr) * 1986-09-26 1988-04-01 Rhone Poulenc Chimie Composition de polissage a base de cerium destinee au polissage des verres organiques
JPS63114866A (ja) * 1986-10-31 1988-05-19 Hoya Corp ガラスの加工方法
FR2624519A1 (fr) * 1987-12-09 1989-06-16 Rhone Poulenc Chimie Composition de polissage perfectionnee a base de cerium et son procede de preparation
US4954142A (en) * 1989-03-07 1990-09-04 International Business Machines Corporation Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor
US4959113C1 (en) * 1989-07-31 2001-03-13 Rodel Inc Method and composition for polishing metal surfaces

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US5264010A (en) 1993-11-23
WO1993022103A1 (en) 1993-11-11
CN1077974A (zh) 1993-11-03
ATE166018T1 (de) 1998-05-15
EP0690772A4 (de) 1995-06-01
SG43334A1 (en) 1997-10-17
CN1052502C (zh) 2000-05-17
KR950701264A (ko) 1995-03-23
DE69318577D1 (de) 1998-06-18
AU3432693A (en) 1993-11-29
DE69318577T2 (de) 1998-11-12
CN1243857A (zh) 2000-02-09
JPH07502778A (ja) 1995-03-23
EP0690772A1 (de) 1996-01-10
JP2592401B2 (ja) 1997-03-19
EP0690772B1 (de) 1998-05-13
MY108954A (en) 1996-11-30

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