TW201107757A - Contact-type integrated circuit probe unit for inspecting monitor and manufacture method thereof - Google Patents
Contact-type integrated circuit probe unit for inspecting monitor and manufacture method thereof Download PDFInfo
- Publication number
- TW201107757A TW201107757A TW98134555A TW98134555A TW201107757A TW 201107757 A TW201107757 A TW 201107757A TW 98134555 A TW98134555 A TW 98134555A TW 98134555 A TW98134555 A TW 98134555A TW 201107757 A TW201107757 A TW 201107757A
- Authority
- TW
- Taiwan
- Prior art keywords
- integrated circuit
- electrode
- contact
- electrode portion
- probe unit
- Prior art date
Links
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Measuring Leads Or Probes (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Liquid Crystal (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20090079351 | 2009-08-26 | ||
KR20090089077 | 2009-09-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW201107757A true TW201107757A (en) | 2011-03-01 |
Family
ID=43786887
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW98134555A TW201107757A (en) | 2009-08-26 | 2009-10-13 | Contact-type integrated circuit probe unit for inspecting monitor and manufacture method thereof |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5119282B2 (ja) |
KR (1) | KR101265722B1 (ja) |
CN (1) | CN101996977A (ja) |
TW (1) | TW201107757A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5597564B2 (ja) * | 2011-02-04 | 2014-10-01 | 株式会社日本マイクロニクス | プローブ装置及びその製造方法 |
CN102879618A (zh) * | 2012-09-29 | 2013-01-16 | 郑礼朋 | 测试机构及其制作方法 |
KR101272493B1 (ko) | 2012-11-08 | 2013-06-10 | 주식회사 프로이천 | 필름타입 프로브카드 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02264868A (ja) * | 1989-04-04 | 1990-10-29 | Tokyo Electron Ltd | プローブ装置 |
JPH09281140A (ja) * | 1996-04-15 | 1997-10-31 | Casio Comput Co Ltd | プローブ装置 |
ES2242451T3 (es) * | 1998-10-10 | 2005-11-01 | Un-Young Chung | Conector de prueba. |
JP2000332077A (ja) * | 1999-05-17 | 2000-11-30 | Sony Corp | 半導体集積回路の配線欠陥検査方法および構造 |
JP2002350461A (ja) * | 2001-05-29 | 2002-12-04 | Hioki Ee Corp | プローブ装置および回路基板検査装置 |
JP2003098189A (ja) * | 2001-09-26 | 2003-04-03 | Micronics Japan Co Ltd | プローブシート及びプローブ装置 |
JP2003109705A (ja) * | 2001-09-28 | 2003-04-11 | Canon Inc | 接触子の位置決め機構及び位置決め方法 |
JP2006284221A (ja) * | 2005-03-31 | 2006-10-19 | Yamaha Corp | プローブユニット、その製造方法及び電子デバイスの検査方法 |
JP2009079911A (ja) * | 2007-09-25 | 2009-04-16 | Seiko Epson Corp | 検査用治具とその製造方法 |
-
2009
- 2009-10-13 TW TW98134555A patent/TW201107757A/zh unknown
- 2009-11-24 CN CN2009102235551A patent/CN101996977A/zh active Pending
- 2009-12-22 KR KR1020090128872A patent/KR101265722B1/ko not_active IP Right Cessation
-
2010
- 2010-02-26 JP JP2010042421A patent/JP5119282B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2011047919A (ja) | 2011-03-10 |
CN101996977A (zh) | 2011-03-30 |
KR20110021614A (ko) | 2011-03-04 |
KR101265722B1 (ko) | 2013-05-21 |
JP5119282B2 (ja) | 2013-01-16 |
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