KR101265722B1 - 집적회로 접촉 프로브 유닛 및 그의 제조방법 - Google Patents

집적회로 접촉 프로브 유닛 및 그의 제조방법 Download PDF

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Publication number
KR101265722B1
KR101265722B1 KR1020090128872A KR20090128872A KR101265722B1 KR 101265722 B1 KR101265722 B1 KR 101265722B1 KR 1020090128872 A KR1020090128872 A KR 1020090128872A KR 20090128872 A KR20090128872 A KR 20090128872A KR 101265722 B1 KR101265722 B1 KR 101265722B1
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KR
South Korea
Prior art keywords
electrode
integrated circuit
pitch
pad
unit
Prior art date
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KR1020090128872A
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English (en)
Korean (ko)
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KR20110021614A (ko
Inventor
김헌민
Original Assignee
주식회사 코디에스
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Application filed by 주식회사 코디에스 filed Critical 주식회사 코디에스
Publication of KR20110021614A publication Critical patent/KR20110021614A/ko
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Publication of KR101265722B1 publication Critical patent/KR101265722B1/ko

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Liquid Crystal (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020090128872A 2009-08-26 2009-12-22 집적회로 접촉 프로브 유닛 및 그의 제조방법 KR101265722B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20090079351 2009-08-26
KR1020090079351 2009-08-26
KR1020090089077 2009-09-21
KR20090089077 2009-09-21

Publications (2)

Publication Number Publication Date
KR20110021614A KR20110021614A (ko) 2011-03-04
KR101265722B1 true KR101265722B1 (ko) 2013-05-21

Family

ID=43786887

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090128872A KR101265722B1 (ko) 2009-08-26 2009-12-22 집적회로 접촉 프로브 유닛 및 그의 제조방법

Country Status (4)

Country Link
JP (1) JP5119282B2 (ja)
KR (1) KR101265722B1 (ja)
CN (1) CN101996977A (ja)
TW (1) TW201107757A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5597564B2 (ja) * 2011-02-04 2014-10-01 株式会社日本マイクロニクス プローブ装置及びその製造方法
CN102879618A (zh) * 2012-09-29 2013-01-16 郑礼朋 测试机构及其制作方法
KR101272493B1 (ko) 2012-11-08 2013-06-10 주식회사 프로이천 필름타입 프로브카드

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02264868A (ja) * 1989-04-04 1990-10-29 Tokyo Electron Ltd プローブ装置
JPH09281140A (ja) * 1996-04-15 1997-10-31 Casio Comput Co Ltd プローブ装置
ES2242451T3 (es) * 1998-10-10 2005-11-01 Un-Young Chung Conector de prueba.
JP2000332077A (ja) * 1999-05-17 2000-11-30 Sony Corp 半導体集積回路の配線欠陥検査方法および構造
JP2002350461A (ja) * 2001-05-29 2002-12-04 Hioki Ee Corp プローブ装置および回路基板検査装置
JP2003098189A (ja) * 2001-09-26 2003-04-03 Micronics Japan Co Ltd プローブシート及びプローブ装置
JP2003109705A (ja) * 2001-09-28 2003-04-11 Canon Inc 接触子の位置決め機構及び位置決め方法
JP2006284221A (ja) * 2005-03-31 2006-10-19 Yamaha Corp プローブユニット、その製造方法及び電子デバイスの検査方法
JP2009079911A (ja) * 2007-09-25 2009-04-16 Seiko Epson Corp 検査用治具とその製造方法

Also Published As

Publication number Publication date
JP5119282B2 (ja) 2013-01-16
JP2011047919A (ja) 2011-03-10
TW201107757A (en) 2011-03-01
KR20110021614A (ko) 2011-03-04
CN101996977A (zh) 2011-03-30

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