TW200943539A - Non-volatile semiconductor storage device and method of manufacturing the same - Google Patents
Non-volatile semiconductor storage device and method of manufacturing the sameInfo
- Publication number
- TW200943539A TW200943539A TW097141653A TW97141653A TW200943539A TW 200943539 A TW200943539 A TW 200943539A TW 097141653 A TW097141653 A TW 097141653A TW 97141653 A TW97141653 A TW 97141653A TW 200943539 A TW200943539 A TW 200943539A
- Authority
- TW
- Taiwan
- Prior art keywords
- storage device
- semiconductor storage
- volatile semiconductor
- manufacturing
- same
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000009825 accumulation Methods 0.000 abstract 2
- 238000009413 insulation Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B41/23—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B41/27—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007280091A JP5148242B2 (ja) | 2007-10-29 | 2007-10-29 | 不揮発性半導体記憶装置、及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200943539A true TW200943539A (en) | 2009-10-16 |
TWI389305B TWI389305B (zh) | 2013-03-11 |
Family
ID=40581716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097141653A TWI389305B (zh) | 2007-10-29 | 2008-10-29 | 非揮發性半導體儲存元件及其製造方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US8148789B2 (zh) |
JP (1) | JP5148242B2 (zh) |
KR (1) | KR101012247B1 (zh) |
TW (1) | TWI389305B (zh) |
Families Citing this family (58)
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JP2008192857A (ja) * | 2007-02-05 | 2008-08-21 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
JP2009302116A (ja) * | 2008-06-10 | 2009-12-24 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2010080561A (ja) * | 2008-09-25 | 2010-04-08 | Toshiba Corp | 不揮発性半導体記憶装置 |
JP5395460B2 (ja) * | 2009-02-25 | 2014-01-22 | 株式会社東芝 | 不揮発性半導体記憶装置、及びその製造方法 |
JP2010278233A (ja) * | 2009-05-28 | 2010-12-09 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
US8258034B2 (en) * | 2009-08-26 | 2012-09-04 | Micron Technology, Inc. | Charge-trap based memory |
JP2011060991A (ja) * | 2009-09-10 | 2011-03-24 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
US8569829B2 (en) | 2009-12-28 | 2013-10-29 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device |
US9536970B2 (en) | 2010-03-26 | 2017-01-03 | Samsung Electronics Co., Ltd. | Three-dimensional semiconductor memory devices and methods of fabricating the same |
US8455940B2 (en) * | 2010-05-24 | 2013-06-04 | Samsung Electronics Co., Ltd. | Nonvolatile memory device, method of manufacturing the nonvolatile memory device, and memory module and system including the nonvolatile memory device |
KR20110132865A (ko) * | 2010-06-03 | 2011-12-09 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 및 그 제조 방법 |
KR101713228B1 (ko) | 2010-06-24 | 2017-03-07 | 삼성전자주식회사 | 비대칭 워드라인 패드를 갖는 반도체 메모리 소자 |
KR20120007838A (ko) | 2010-07-15 | 2012-01-25 | 삼성전자주식회사 | 수직형 비휘발성 메모리 소자 및 그 제조방법 |
KR101559345B1 (ko) * | 2010-08-26 | 2015-10-15 | 삼성전자주식회사 | 비휘발성 메모리 소자 및 그 제조 방법 |
US20130341701A1 (en) * | 2010-10-18 | 2013-12-26 | Imec | Vertical Semiconductor Memory Device and Manufacturing Method Thereof |
US8766227B1 (en) | 2010-11-10 | 2014-07-01 | Contour Semiconductor, Inc. | Pinched center resistive change memory cell |
JP2012160567A (ja) | 2011-01-31 | 2012-08-23 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
KR101206508B1 (ko) * | 2011-03-07 | 2012-11-29 | 에스케이하이닉스 주식회사 | 3차원 구조를 갖는 비휘발성 메모리 장치 제조방법 |
KR20130015428A (ko) * | 2011-08-03 | 2013-02-14 | 삼성전자주식회사 | 반도체 소자 |
JP5593283B2 (ja) * | 2011-08-04 | 2014-09-17 | 株式会社東芝 | 半導体記憶装置及びその製造方法 |
JP5611903B2 (ja) * | 2011-08-09 | 2014-10-22 | 株式会社東芝 | 抵抗変化メモリ |
US9136128B2 (en) | 2011-08-31 | 2015-09-15 | Micron Technology, Inc. | Methods and apparatuses including memory cells with air gaps and other low dielectric constant materials |
KR20130025207A (ko) * | 2011-09-01 | 2013-03-11 | 삼성전자주식회사 | 반도체 장치 및 그의 형성방법 |
US8901635B2 (en) | 2011-09-12 | 2014-12-02 | Kabushiki Kaisha Toshiba | Semiconductor memory device and method for manufacturing the same |
KR20130072911A (ko) * | 2011-12-22 | 2013-07-02 | 에스케이하이닉스 주식회사 | 비휘발성 메모리 장치 및 그 제조 방법 |
JP2013187294A (ja) | 2012-03-07 | 2013-09-19 | Toshiba Corp | 半導体記憶装置 |
US10504596B2 (en) * | 2012-04-18 | 2019-12-10 | Micron Technology, Inc. | Apparatuses and methods of forming apparatuses using a partial deck-by-deck process flow |
KR102059196B1 (ko) | 2013-01-11 | 2019-12-24 | 에프아이오 세미컨덕터 테크놀로지스, 엘엘씨 | 3차원 반도체 장치 및 그 제조 방법 |
KR20140117212A (ko) | 2013-03-26 | 2014-10-07 | 에스케이하이닉스 주식회사 | 반도체 장치 |
US9012973B2 (en) * | 2013-08-14 | 2015-04-21 | Kabushiki Kaisha Toshiba | Semiconductor memory device and method for manufacturing the same |
BR112016003590B1 (pt) | 2013-08-19 | 2022-01-18 | 3M Innovative Properties Company | Artigo retrorrefletivo |
JP2015149381A (ja) * | 2014-02-06 | 2015-08-20 | 株式会社東芝 | 半導体記憶装置 |
KR102170770B1 (ko) | 2014-03-03 | 2020-10-28 | 삼성전자주식회사 | 반도체 장치 |
US10651189B2 (en) | 2014-03-04 | 2020-05-12 | Unisantis Electronics Singapore Pte. Ltd. | Method for producing pillar-shaped semiconductor memory device |
JP5779301B1 (ja) * | 2014-03-04 | 2015-09-16 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッドUnisantis Electronics Singapore Pte Ltd. | 柱状半導体メモリ装置及びその製造方法 |
US9508739B2 (en) * | 2014-09-11 | 2016-11-29 | Kabushiki Kaisha Toshiba | Semiconductor memory device and method for manufacturing the same |
US9515085B2 (en) | 2014-09-26 | 2016-12-06 | Sandisk Technologies Llc | Vertical memory device with bit line air gap |
US9230984B1 (en) * | 2014-09-30 | 2016-01-05 | Sandisk Technologies Inc | Three dimensional memory device having comb-shaped source electrode and methods of making thereof |
US9406690B2 (en) * | 2014-12-16 | 2016-08-02 | Sandisk Technologies Llc | Contact for vertical memory with dopant diffusion stopper and associated fabrication method |
US9324731B1 (en) * | 2015-01-30 | 2016-04-26 | Macronix International Co., Ltd. | Method for fabricating memory device |
JP2017011123A (ja) * | 2015-06-23 | 2017-01-12 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置の駆動方法 |
US9735171B2 (en) | 2015-07-14 | 2017-08-15 | Kabushiki Kaisha Toshiba | Semiconductor memory device and method of manufacturing the same |
US9899399B2 (en) | 2015-10-30 | 2018-02-20 | Sandisk Technologies Llc | 3D NAND device with five-folded memory stack structure configuration |
US9768192B1 (en) | 2016-03-16 | 2017-09-19 | Sandisk Technologies Llc | Three-dimensional memory device containing annular etch-stop spacer and method of making thereof |
US9780034B1 (en) * | 2016-03-16 | 2017-10-03 | Sandisk Technologies Llc | Three-dimensional memory device containing annular etch-stop spacer and method of making thereof |
US9929174B1 (en) | 2016-10-28 | 2018-03-27 | Sandisk Technologies Llc | Three-dimensional memory device having non-uniform spacing among memory stack structures and method of making thereof |
US10056399B2 (en) | 2016-12-22 | 2018-08-21 | Sandisk Technologies Llc | Three-dimensional memory devices containing inter-tier dummy memory cells and methods of making the same |
US20180331117A1 (en) | 2017-05-12 | 2018-11-15 | Sandisk Technologies Llc | Multilevel memory stack structure with tapered inter-tier joint region and methods of making thereof |
US10453855B2 (en) | 2017-08-11 | 2019-10-22 | Micron Technology, Inc. | Void formation in charge trap structures |
US10680006B2 (en) | 2017-08-11 | 2020-06-09 | Micron Technology, Inc. | Charge trap structure with barrier to blocking region |
US10164009B1 (en) | 2017-08-11 | 2018-12-25 | Micron Technology, Inc. | Memory device including voids between control gates |
US10446572B2 (en) | 2017-08-11 | 2019-10-15 | Micron Technology, Inc. | Void formation for charge trap structures |
US10115459B1 (en) | 2017-09-29 | 2018-10-30 | Sandisk Technologies Llc | Multiple liner interconnects for three dimensional memory devices and method of making thereof |
US10332835B2 (en) * | 2017-11-08 | 2019-06-25 | Macronix International Co., Ltd. | Memory device and method for fabricating the same |
TWI716818B (zh) * | 2018-02-28 | 2021-01-21 | 美商應用材料股份有限公司 | 形成氣隙的系統及方法 |
JP7304413B2 (ja) | 2018-10-18 | 2023-07-06 | 長江存儲科技有限責任公司 | ジグザグスリット構造を有する三次元メモリデバイスおよびそれを形成するための方法 |
KR102635442B1 (ko) * | 2018-10-25 | 2024-02-13 | 에스케이하이닉스 주식회사 | 반도체 장치 및 그 제조방법 |
CN115966463B (zh) * | 2023-02-28 | 2023-06-16 | 杭州芯迈半导体技术有限公司 | 一种沟槽型mosfet的气隙隔离结构及其制造方法 |
Family Cites Families (14)
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US5467305A (en) * | 1992-03-12 | 1995-11-14 | International Business Machines Corporation | Three-dimensional direct-write EEPROM arrays and fabrication methods |
JP3229012B2 (ja) | 1992-05-21 | 2001-11-12 | 株式会社東芝 | 半導体装置の製造方法 |
KR0165398B1 (ko) | 1995-05-26 | 1998-12-15 | 윤종용 | 버티칼 트랜지스터의 제조방법 |
JPH10125815A (ja) * | 1996-04-08 | 1998-05-15 | Sony Corp | 電界効果トランジスタ |
US5864160A (en) * | 1996-05-24 | 1999-01-26 | Advanced Micro Devices, Inc. | Transistor device with reduced hot carrier injection effects |
JPH1093083A (ja) * | 1996-09-18 | 1998-04-10 | Toshiba Corp | 半導体装置の製造方法 |
US5990532A (en) * | 1997-12-18 | 1999-11-23 | Advanced Micro Devices | Semiconductor arrangement with lightly doped regions under a gate structure |
KR100483035B1 (ko) * | 2001-03-30 | 2005-04-15 | 샤프 가부시키가이샤 | 반도체 기억장치 및 그 제조방법 |
JP3566944B2 (ja) | 2001-06-23 | 2004-09-15 | 富士雄 舛岡 | 半導体記憶装置及びその製造方法 |
US6933556B2 (en) | 2001-06-22 | 2005-08-23 | Fujio Masuoka | Semiconductor memory with gate at least partially located in recess defined in vertically oriented semiconductor layer |
JP4537680B2 (ja) * | 2003-08-04 | 2010-09-01 | 株式会社東芝 | 不揮発性半導体記憶装置及びその動作方法、製造方法、半導体集積回路及びシステム |
US8022489B2 (en) * | 2005-05-20 | 2011-09-20 | Macronix International Co., Ltd. | Air tunnel floating gate memory cell |
JP5016832B2 (ja) * | 2006-03-27 | 2012-09-05 | 株式会社東芝 | 不揮発性半導体記憶装置及びその製造方法 |
JP2008192708A (ja) * | 2007-02-01 | 2008-08-21 | Toshiba Corp | 不揮発性半導体記憶装置 |
-
2007
- 2007-10-29 JP JP2007280091A patent/JP5148242B2/ja not_active Expired - Fee Related
-
2008
- 2008-10-28 KR KR1020080106103A patent/KR101012247B1/ko not_active IP Right Cessation
- 2008-10-29 US US12/260,589 patent/US8148789B2/en active Active
- 2008-10-29 TW TW097141653A patent/TWI389305B/zh active
-
2012
- 2012-02-03 US US13/365,600 patent/US8426276B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20090108333A1 (en) | 2009-04-30 |
KR101012247B1 (ko) | 2011-02-08 |
JP2009111049A (ja) | 2009-05-21 |
US20120135595A1 (en) | 2012-05-31 |
KR20090043463A (ko) | 2009-05-06 |
US8426276B2 (en) | 2013-04-23 |
US8148789B2 (en) | 2012-04-03 |
JP5148242B2 (ja) | 2013-02-20 |
TWI389305B (zh) | 2013-03-11 |
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