SG11202002853TA - Substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device - Google Patents
Substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor deviceInfo
- Publication number
- SG11202002853TA SG11202002853TA SG11202002853TA SG11202002853TA SG11202002853TA SG 11202002853T A SG11202002853T A SG 11202002853TA SG 11202002853T A SG11202002853T A SG 11202002853TA SG 11202002853T A SG11202002853T A SG 11202002853TA SG 11202002853T A SG11202002853T A SG 11202002853TA
- Authority
- SG
- Singapore
- Prior art keywords
- reflective mask
- reflective
- substrate
- semiconductor device
- manufacturing semiconductor
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/42—Alignment or registration features, e.g. alignment marks on the mask substrates
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/52—Reflectors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
- G03F1/84—Inspecting
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7073—Alignment marks and their environment
- G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017201189 | 2017-10-17 | ||
PCT/JP2018/038501 WO2019078206A1 (ja) | 2017-10-17 | 2018-10-16 | 多層反射膜付き基板、反射型マスクブランク、反射型マスク、及び半導体装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202002853TA true SG11202002853TA (en) | 2020-05-28 |
Family
ID=66174168
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202002853TA SG11202002853TA (en) | 2017-10-17 | 2018-10-16 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device |
Country Status (6)
Country | Link |
---|---|
US (2) | US11262647B2 (ko) |
JP (2) | JP7286544B2 (ko) |
KR (1) | KR20200064065A (ko) |
SG (1) | SG11202002853TA (ko) |
TW (1) | TW201928503A (ko) |
WO (1) | WO2019078206A1 (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2019225737A1 (ja) | 2018-05-25 | 2021-06-10 | Hoya株式会社 | 反射型マスクブランク、反射型マスク、並びに反射型マスク及び半導体装置の製造方法 |
WO2020235612A1 (ja) * | 2019-05-21 | 2020-11-26 | Agc株式会社 | Euvリソグラフィ用反射型マスクブランク |
CN111290224B (zh) * | 2020-02-20 | 2023-04-07 | 上海华力微电子有限公司 | 一种单元标记及其设计方法 |
JP7318607B2 (ja) * | 2020-07-28 | 2023-08-01 | Agc株式会社 | Euvリソグラフィ用反射型マスクブランク、euvリソグラフィ用反射型マスク、およびそれらの製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005317617A (ja) * | 2004-04-27 | 2005-11-10 | Nikon Corp | 位置検出用マーク及びそれを備えたレチクル又は感光性基板、位置検出方法、マーク評価方法、及びマーク検出方法とマーク検出装置、並びに露光方法と露光装置 |
JP2010219445A (ja) | 2009-03-18 | 2010-09-30 | Nuflare Technology Inc | 荷電粒子ビーム描画方法、荷電粒子ビーム描画用の基準マークの位置検出方法及び荷電粒子ビーム描画装置 |
JP5385248B2 (ja) | 2010-12-06 | 2014-01-08 | 株式会社三和スクリーン銘板 | 導光型装飾樹脂成型品およびその製造方法 |
JP5935804B2 (ja) | 2011-09-01 | 2016-06-15 | 旭硝子株式会社 | 反射型マスクブランク及び反射型マスクブランクの製造方法 |
JP6460619B2 (ja) | 2012-03-12 | 2019-01-30 | Hoya株式会社 | 反射型マスクブランク及び反射型マスクの製造方法 |
JP2013222811A (ja) | 2012-04-16 | 2013-10-28 | Lasertec Corp | Euvマスクブランクス、マスクの製造方法、及びアライメント方法 |
WO2014050891A1 (ja) | 2012-09-28 | 2014-04-03 | 旭硝子株式会社 | Euvリソグラフィ用反射型マスクブランクおよびその製造方法、ならびにeuvリソグラフィ用反射型マスクおよびその製造方法 |
WO2015146140A1 (ja) | 2014-03-24 | 2015-10-01 | 凸版印刷株式会社 | Euvマスクの位相欠陥評価方法、euvマスクの製造方法、euvマスクブランク及びeuvマスク |
JP6713251B2 (ja) * | 2015-03-30 | 2020-06-24 | Hoya株式会社 | 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びにそれらの製造方法 |
JP6586934B2 (ja) | 2015-09-17 | 2019-10-09 | Agc株式会社 | 反射型マスクブランク、及び反射型マスクブランクの製造方法 |
JP2017075997A (ja) * | 2015-10-13 | 2017-04-20 | 旭硝子株式会社 | 反射型マスクブランク、及び反射型マスクブランクの製造方法 |
-
2018
- 2018-10-16 JP JP2019549295A patent/JP7286544B2/ja active Active
- 2018-10-16 KR KR1020207007408A patent/KR20200064065A/ko not_active Application Discontinuation
- 2018-10-16 US US16/756,727 patent/US11262647B2/en active Active
- 2018-10-16 SG SG11202002853TA patent/SG11202002853TA/en unknown
- 2018-10-16 WO PCT/JP2018/038501 patent/WO2019078206A1/ja active Application Filing
- 2018-10-17 TW TW107136501A patent/TW201928503A/zh unknown
-
2022
- 2022-01-21 US US17/581,590 patent/US11681214B2/en active Active
-
2023
- 2023-05-24 JP JP2023085233A patent/JP7500828B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
WO2019078206A1 (ja) | 2019-04-25 |
US11262647B2 (en) | 2022-03-01 |
TW201928503A (zh) | 2019-07-16 |
KR20200064065A (ko) | 2020-06-05 |
WO2019078206A8 (ja) | 2020-02-20 |
US20200249558A1 (en) | 2020-08-06 |
JP7286544B2 (ja) | 2023-06-05 |
US11681214B2 (en) | 2023-06-20 |
JPWO2019078206A1 (ja) | 2020-11-05 |
US20220146925A1 (en) | 2022-05-12 |
JP2023104997A (ja) | 2023-07-28 |
US20230266658A1 (en) | 2023-08-24 |
JP7500828B2 (ja) | 2024-06-17 |
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