SG11201504647VA - Photosensitive resin composition, method for producing heat-resistant resin film and display device - Google Patents

Photosensitive resin composition, method for producing heat-resistant resin film and display device

Info

Publication number
SG11201504647VA
SG11201504647VA SG11201504647VA SG11201504647VA SG11201504647VA SG 11201504647V A SG11201504647V A SG 11201504647VA SG 11201504647V A SG11201504647V A SG 11201504647VA SG 11201504647V A SG11201504647V A SG 11201504647VA SG 11201504647V A SG11201504647V A SG 11201504647VA
Authority
SG
Singapore
Prior art keywords
display device
producing heat
resin composition
resin film
photosensitive resin
Prior art date
Application number
SG11201504647VA
Other languages
English (en)
Inventor
Yusuke Komori
Mika Koshino
Kazuto Miyoshi
Original Assignee
Toray Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries filed Critical Toray Industries
Publication of SG11201504647VA publication Critical patent/SG11201504647VA/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387—Polyamides or polyimides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/037—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1039—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors comprising halogen-containing substituents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D179/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
    • C09D179/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C09D179/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/87—Arrangements for heating or cooling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/124—Insulating layers formed between TFT elements and OLED elements

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Wood Science & Technology (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials For Photolithography (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
SG11201504647VA 2012-12-20 2013-12-13 Photosensitive resin composition, method for producing heat-resistant resin film and display device SG11201504647VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012277743 2012-12-20
PCT/JP2013/083491 WO2014097992A1 (ja) 2012-12-20 2013-12-13 感光性樹脂組成物、耐熱性樹脂膜の製造方法および表示装置

Publications (1)

Publication Number Publication Date
SG11201504647VA true SG11201504647VA (en) 2015-07-30

Family

ID=50978324

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201504647VA SG11201504647VA (en) 2012-12-20 2013-12-13 Photosensitive resin composition, method for producing heat-resistant resin film and display device

Country Status (8)

Country Link
US (1) US9897915B2 (ja)
EP (1) EP2937732B1 (ja)
JP (2) JP6332022B2 (ja)
KR (2) KR101942150B1 (ja)
CN (2) CN110147031A (ja)
SG (1) SG11201504647VA (ja)
TW (1) TWI568797B (ja)
WO (1) WO2014097992A1 (ja)

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JP2016133741A (ja) * 2015-01-21 2016-07-25 住友ベークライト株式会社 感光性樹脂組成物、および電子装置
CN107430334B (zh) * 2015-01-23 2021-07-30 艾曲迪微系统股份有限公司 正型感光性树脂组合物、图案固化膜的制造方法、图案固化膜和电子部件
EP3270664A4 (en) * 2015-03-11 2018-10-31 Toray Industries, Inc. Organic el display device and method for manufacturing same
KR102281541B1 (ko) * 2015-03-24 2021-07-26 도레이 카부시키가이샤 감광성 수지 조성물
CN107428935B (zh) * 2015-03-27 2019-04-02 东丽株式会社 二胺化合物、使用其的耐热性树脂或耐热性树脂前体
KR102445235B1 (ko) * 2015-03-27 2022-09-20 도레이 카부시키가이샤 감광성 수지 조성물, 감광성 시트, 반도체 장치 및 반도체 장치의 제조 방법
JP6658514B2 (ja) * 2015-03-27 2020-03-04 東レ株式会社 薄膜トランジスタ用感光性樹脂組成物、硬化膜の製造方法、薄膜トランジスタの製造方法および液晶表示装置または有機電界発光表示装置の製造方法
TWI704418B (zh) * 2015-06-30 2020-09-11 日商富士軟片股份有限公司 負型感光性樹脂組成物、硬化膜、硬化膜的製造方法及半導體元件
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JP6760073B2 (ja) * 2015-09-03 2020-09-23 東レ株式会社 ポジ型感光性樹脂組成物、その樹脂組成物により形成された未硬化の樹脂パターン、硬化樹脂パターン、およびそれを用いた半導体装置とその製造方法
US9740101B2 (en) * 2015-11-13 2017-08-22 Globalfoundries Inc. Additions of organic species to facilitate crosslinker removal during PSPI cure
TWI634135B (zh) 2015-12-25 2018-09-01 日商富士軟片股份有限公司 樹脂、組成物、硬化膜、硬化膜的製造方法及半導體元件
JP6958351B2 (ja) * 2016-03-18 2021-11-02 東レ株式会社 硬化膜およびポジ型感光性樹脂組成物
KR102373030B1 (ko) * 2016-03-28 2022-03-11 도레이 카부시키가이샤 감광성 수지 조성물
KR102654926B1 (ko) * 2016-08-10 2024-04-05 삼성디스플레이 주식회사 포토레지스트 조성물 및 이를 이용한 금속 패턴의 형성 방법
JP7013872B2 (ja) * 2016-10-05 2022-02-15 東レ株式会社 樹脂組成物、硬化膜、半導体装置およびそれらの製造方法
SG11201903455QA (en) * 2016-11-10 2019-05-30 Toray Industries Di-Amine Compound, And Heat Resistant Resin And Resin Composition Using The Same
KR102299419B1 (ko) * 2018-02-28 2021-09-06 주식회사 엘지화학 감광성 수지 조성물 및 경화막
WO2020059485A1 (ja) * 2018-09-18 2020-03-26 東レ株式会社 感光性樹脂組成物、樹脂シート、硬化膜、有機ｅｌ表示装置、半導体電子部品、半導体装置、および有機ｅｌ表示装置の製造方法
CN110776586B (zh) * 2019-10-24 2022-05-20 安庆飞凯新材料有限公司 一种烷氧基苯绕蒽酮光引发剂的制备方法及其应用
KR20220112366A (ko) * 2021-02-04 2022-08-11 주식회사 엘지화학 폴리이미드 수지 및 이를 포함하는 포지티브형 감광성 수지 조성물
KR102473464B1 (ko) * 2021-12-13 2022-12-05 신진유지건설 주식회사 하수관거의 파손부위 및 균열부위 보수공법
KR20240009689A (ko) * 2022-07-14 2024-01-23 주식회사 동진쎄미켐 감광성 수지 조성물, 경화막 및 이를 포함하는 표시장치
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Also Published As

Publication number Publication date
KR101942150B1 (ko) 2019-01-24
KR20190009002A (ko) 2019-01-25
WO2014097992A1 (ja) 2014-06-26
KR20150097578A (ko) 2015-08-26
CN104854508A (zh) 2015-08-19
US9897915B2 (en) 2018-02-20
TWI568797B (zh) 2017-02-01
TW201434972A (zh) 2014-09-16
CN110147031A (zh) 2019-08-20
US20150301453A1 (en) 2015-10-22
EP2937732B1 (en) 2020-08-19
CN104854508B (zh) 2019-05-07
EP2937732A4 (en) 2017-03-08
JP6332022B2 (ja) 2018-05-30
JP2018146969A (ja) 2018-09-20
JPWO2014097992A1 (ja) 2017-01-12
EP2937732A1 (en) 2015-10-28

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