SG11201401309PA - Composition for polishing purposes, polishing method using same, and method for producing substrate - Google Patents
Composition for polishing purposes, polishing method using same, and method for producing substrateInfo
- Publication number
- SG11201401309PA SG11201401309PA SG11201401309PA SG11201401309PA SG11201401309PA SG 11201401309P A SG11201401309P A SG 11201401309PA SG 11201401309P A SG11201401309P A SG 11201401309PA SG 11201401309P A SG11201401309P A SG 11201401309PA SG 11201401309P A SG11201401309P A SG 11201401309PA
- Authority
- SG
- Singapore
- Prior art keywords
- polishing
- composition
- same
- purposes
- producing substrate
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011233208 | 2011-10-24 | ||
| PCT/JP2012/076125 WO2013061771A1 (ja) | 2011-10-24 | 2012-10-09 | 研磨用組成物、それを用いた研磨方法及び基板の製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201401309PA true SG11201401309PA (en) | 2014-06-27 |
Family
ID=48167605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201401309PA SG11201401309PA (en) | 2011-10-24 | 2012-10-09 | Composition for polishing purposes, polishing method using same, and method for producing substrate |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9579769B2 (ko) |
| JP (1) | JP5860057B2 (ko) |
| KR (1) | KR101983868B1 (ko) |
| CN (1) | CN103890114B (ko) |
| DE (1) | DE112012004431T5 (ko) |
| MY (1) | MY171840A (ko) |
| SG (1) | SG11201401309PA (ko) |
| TW (1) | TWI547531B (ko) |
| WO (1) | WO2013061771A1 (ko) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102237745B1 (ko) * | 2013-03-15 | 2021-04-09 | 캐보트 마이크로일렉트로닉스 코포레이션 | 구리 화학 기계적 평탄화 후 수성 세정 조성물 |
| JP6360311B2 (ja) * | 2014-01-21 | 2018-07-18 | 株式会社フジミインコーポレーテッド | 研磨用組成物およびその製造方法 |
| JP6389629B2 (ja) * | 2014-03-31 | 2018-09-12 | ニッタ・ハース株式会社 | 研磨用組成物 |
| JP6389630B2 (ja) * | 2014-03-31 | 2018-09-12 | ニッタ・ハース株式会社 | 研磨用組成物 |
| JP6185432B2 (ja) * | 2014-06-24 | 2017-08-23 | 株式会社フジミインコーポレーテッド | シリコンウェーハ研磨用組成物 |
| JP6435689B2 (ja) * | 2014-07-25 | 2018-12-12 | Ａｇｃ株式会社 | 研磨剤と研磨方法、および研磨用添加液 |
| CN104130717B (zh) * | 2014-08-07 | 2016-06-08 | 佳明新材料科技有限公司 | 一种太阳能硅片研磨液配方 |
| WO2016132676A1 (ja) * | 2015-02-19 | 2016-08-25 | 株式会社フジミインコーポレーテッド | シリコンウェーハ研磨用組成物および研磨方法 |
| US20190010357A1 (en) * | 2015-06-26 | 2019-01-10 | Fujimi Incorporated | Polishing composition |
| EP3366746B1 (en) * | 2015-10-23 | 2023-02-22 | NITTA DuPont Incorporated | Polishing composition |
| SG11201803362VA (en) * | 2015-10-23 | 2018-05-30 | Nitta Haas Inc | Polishing composition |
| JP6348927B2 (ja) * | 2016-04-27 | 2018-06-27 | 株式会社フジミインコーポレーテッド | シリコンウェーハ研磨用組成物 |
| JP6678076B2 (ja) * | 2016-06-30 | 2020-04-08 | 花王株式会社 | シリコンウェーハ用研磨液組成物 |
| KR102515815B1 (ko) * | 2016-11-09 | 2023-03-30 | 가부시키가이샤 후지미인코퍼레이티드 | 연마용 조성물 및 실리콘 웨이퍼의 연마 방법 |
| WO2018150945A1 (ja) * | 2017-02-20 | 2018-08-23 | 株式会社フジミインコーポレーテッド | シリコン基板中間研磨用組成物およびシリコン基板研磨用組成物セット |
| KR102544607B1 (ko) * | 2017-11-30 | 2023-06-19 | 솔브레인 주식회사 | 화학적 기계적 연마 슬러리 조성물 및 이를 이용한 반도체 소자의 제조방법 |
| US10961487B2 (en) * | 2017-11-30 | 2021-03-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device cleaning solution, method of use, and method of manufacture |
| JP7138432B2 (ja) * | 2017-12-26 | 2022-09-16 | 花王株式会社 | シリコンウェーハ製造方法 |
| JP7141837B2 (ja) * | 2018-03-23 | 2022-09-26 | 株式会社フジミインコーポレーテッド | 研磨用組成物、研磨用組成物の製造方法、研磨方法、および半導体基板の製造方法 |
| EP3894495A1 (en) * | 2018-12-12 | 2021-10-20 | Basf Se | Chemical mechanical polishing of substrates containing copper and ruthenium |
| CN110054995A (zh) * | 2019-06-05 | 2019-07-26 | 连云港众成磨料有限公司 | 一种处理半导体元件电子芯片表面去除量的研磨材料 |
| JP7477964B2 (ja) * | 2019-12-13 | 2024-05-02 | インテグリス・インコーポレーテッド | 化学機械研磨組成物及びそれを用いた化学機械研磨方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001015461A (ja) | 1999-06-29 | 2001-01-19 | Toshiba Corp | 研磨液および研磨方法 |
| US6685757B2 (en) | 2002-02-21 | 2004-02-03 | Rodel Holdings, Inc. | Polishing composition |
| JP2004128069A (ja) | 2002-09-30 | 2004-04-22 | Fujimi Inc | 研磨用組成物及びそれを用いた研磨方法 |
| JP4593064B2 (ja) | 2002-09-30 | 2010-12-08 | 株式会社フジミインコーポレーテッド | 研磨用組成物及びそれを用いた研磨方法 |
| JP4212861B2 (ja) | 2002-09-30 | 2009-01-21 | 株式会社フジミインコーポレーテッド | 研磨用組成物及びそれを用いたシリコンウエハの研磨方法、並びにリンス用組成物及びそれを用いたシリコンウエハのリンス方法 |
| JP2005158867A (ja) | 2003-11-21 | 2005-06-16 | Jsr Corp | 化学機械研磨用水系分散体を調製するためのセット |
| CN101311205A (zh) * | 2004-07-23 | 2008-11-26 | 日立化成工业株式会社 | Cmp研磨剂以及衬底的研磨方法 |
| JP4808394B2 (ja) * | 2004-10-29 | 2011-11-02 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
| JP2007103515A (ja) * | 2005-09-30 | 2007-04-19 | Fujimi Inc | 研磨方法 |
| JP4983603B2 (ja) * | 2005-10-19 | 2012-07-25 | 日立化成工業株式会社 | 酸化セリウムスラリー、酸化セリウム研磨液及びこれらを用いた基板の研磨方法 |
| JP5204960B2 (ja) | 2006-08-24 | 2013-06-05 | 株式会社フジミインコーポレーテッド | 研磨用組成物及び研磨方法 |
| KR100725803B1 (ko) * | 2006-12-05 | 2007-06-08 | 제일모직주식회사 | 실리콘 웨이퍼 최종 연마용 슬러리 조성물 및 이를 이용한실리콘 웨이퍼 최종 연마 방법 |
| US20100112728A1 (en) * | 2007-03-31 | 2010-05-06 | Advanced Technology Materials, Inc. | Methods for stripping material for wafer reclamation |
| CN102084465A (zh) | 2008-02-01 | 2011-06-01 | 福吉米株式会社 | 研磨用组合物以及使用其的研磨方法 |
| JP5297695B2 (ja) * | 2008-05-30 | 2013-09-25 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | スラリー供給装置及び同装置を用いる半導体ウェーハの研磨方法 |
| CN102105267B (zh) | 2008-06-18 | 2016-08-03 | 福吉米株式会社 | 抛光组合物及利用该抛光组合物的抛光方法 |
| JP5255343B2 (ja) | 2008-06-27 | 2013-08-07 | 株式会社フジミインコーポレーテッド | 研磨用組成物及びそれを用いた研磨方法 |
| JP5474400B2 (ja) * | 2008-07-03 | 2014-04-16 | 株式会社フジミインコーポレーテッド | 半導体用濡れ剤、それを用いた研磨用組成物および研磨方法 |
| JP5362319B2 (ja) | 2008-10-21 | 2013-12-11 | 花王株式会社 | 研磨液組成物 |
| JP5413456B2 (ja) * | 2009-04-20 | 2014-02-12 | 日立化成株式会社 | 半導体基板用研磨液及び半導体基板の研磨方法 |
-
2012
- 2012-10-09 CN CN201280051935.1A patent/CN103890114B/zh active Active
- 2012-10-09 JP JP2013540715A patent/JP5860057B2/ja active Active
- 2012-10-09 KR KR1020147013217A patent/KR101983868B1/ko active IP Right Grant
- 2012-10-09 WO PCT/JP2012/076125 patent/WO2013061771A1/ja active Application Filing
- 2012-10-09 DE DE112012004431.2T patent/DE112012004431T5/de active Pending
- 2012-10-09 US US14/352,393 patent/US9579769B2/en active Active
- 2012-10-09 MY MYPI2014000981A patent/MY171840A/en unknown
- 2012-10-09 SG SG11201401309PA patent/SG11201401309PA/en unknown
- 2012-10-19 TW TW101138653A patent/TWI547531B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| JP5860057B2 (ja) | 2016-02-16 |
| CN103890114B (zh) | 2015-08-26 |
| US20140302752A1 (en) | 2014-10-09 |
| KR101983868B1 (ko) | 2019-05-29 |
| CN103890114A (zh) | 2014-06-25 |
| US9579769B2 (en) | 2017-02-28 |
| TW201333131A (zh) | 2013-08-16 |
| KR20140080543A (ko) | 2014-06-30 |
| MY171840A (en) | 2019-11-04 |
| JPWO2013061771A1 (ja) | 2015-04-02 |
| TWI547531B (zh) | 2016-09-01 |
| DE112012004431T5 (de) | 2014-07-10 |
| WO2013061771A1 (ja) | 2013-05-02 |
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