RU2016111693A - Органическая-неорганическая гибридная тонкая пленка и способ ее изготовления - Google Patents

Органическая-неорганическая гибридная тонкая пленка и способ ее изготовления Download PDF

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RU2016111693A
RU2016111693A RU2016111693A RU2016111693A RU2016111693A RU 2016111693 A RU2016111693 A RU 2016111693A RU 2016111693 A RU2016111693 A RU 2016111693A RU 2016111693 A RU2016111693 A RU 2016111693A RU 2016111693 A RU2016111693 A RU 2016111693A
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thin films
group
hybrid organic
inorganic thin
stage
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RU2670303C2 (ru
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Мён Мо СУН
Кё Сок ХАН
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Июкф-Хю (Идастри-Юниверсити-Кооперейшн Фаундейшн Ханян Юниверсити)
БАСФ Коатингс ГмбХ
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Claims (45)

1. Гибридные органические/неорганические тонкие пленки, представленные следующей формулой 1:
[формула 1]
-[M-X-R1-Y]m-,
где m является 1 или более,
R1 представляет собой замещенный или незамещенный С1-20 алкил, С5-20 циклоалкил, или арил или гетероарил с атомным числом, составляющим 5-60,
М выбирают из группы, состоящей из Zn, Sn, In, Cd, Ga, Al, Ti, Si, V, Mn, Fe, Co, Cu, Zr, Ru, Mo, Nb, и W,
X и Y каждый выбирают из группы, состоящей из О, S, N, NH, и СО, и один из X или Y представляет собой S.
2. Гибридные органические/неорганические тонкие пленки по п. 1, отличающиеся тем, что толщина гибридных органических/неорганических тонких пленок составляет от 1
Figure 00000001
до 500
Figure 00000001
.
3. Гибридные органические/неорганические тонкие пленки по п. 1, где следующее соотношение выполняется, когда начальная толщина гибридных органических/неорганических тонких пленок принимается за d0, и толщина гибридных органических/неорганических тонких пленок после выдерживания в условиях стандартной температуры и давления на протяжении n часов принимается за dn:
0≤(dn/d0)≤0,1(0≤n≤240).
4. Функциональные тонкие пленки, которые включают гибридные органические/неорганические тонкие пленки, при этом функциональные тонкие пленки содержат гибридные органические/неорганические тонкие пленки по п. 1 и слой оксида металла, выбранного из группы, состоящей из Zn, Sn, In, Cd, Ga, Al, Ti, Si, V, Mn, Fe, Co, Cu, Zr, Ru, Mo, Nb, и W.
5. Функциональные тонкие пленки по п. 3, отличающиеся тем, что толщина слоя оксида металла в функциональных тонких пленках, которые включают гибридные органические/неорганические тонкие пленки, составляет от 100
Figure 00000001
до 2000
Figure 00000002
.
6. Функциональные тонкие пленки, которые включают гибридные органические/неорганические тонкие пленки по п. 3, где следующее соотношение выполняется, когда начальная толщина функциональных тонких пленок, которые включают гибридные органические/неорганические тонкие пленки принимается за D0, и толщина функциональных тонких пленок, которые включают гибридные органические/неорганические тонкие пленки после выдерживания в условиях стандартной температуры и давления на протяжении n часов, принимается за Dn:
0≤(Dn/D0)≤0,1(0≤n≤240).
7. Функциональные тонкие пленки, которые включают гибридные органические/неорганические тонкие пленки по п. 3, отличающиеся тем, что функциональные тонкие пленки применяют для покрытия в качестве оболочки.
8. Способ изготовления гибридных органических/неорганических тонких пленок по п. 1, при этом способ включает:
(1) образование неорганического молекулярного слоя на поверхности подложки, применяя первое соединение прекурсора, представленное следующей формулой 2:
[формула 2]
M(R21)(R22)…(R2n),
где М выбирают из группы, состоящей из Zn, Sn, Cd, Ti, Si, V, Mn, Fe, Co, Cu, Zr, Ru, Mo, Nb, W, In, Ga, Al, Tl,
n определяется в соответствии со степенью окисления металла М, и
R21-R2n каждая независимо представляют собой С1-20 алкил, С1-20 алкоксид, хлоридную группу, гидроксильную группу, оксигидроксидную группу, нитратную группу, карбонатную группу, ацетатную группу, или оксалатную группу; и
(2) образование на неорганическом молекулярном слое органического молекулярного слоя с помощью реакции второго соединения прекурсора, представленного следующей формулой 3, с неорганическим молекулярным слоем:
[формула 3]
R3-S-R4-R5,
где R3 представляет собой водород, COR6, С1-20 алкил, С5-20 циклоалкил, или арил или гетероарил с атомным числом, составляющим 5-60,
R4 представляет собой С1-20 алкил, С5-20 циклоалкил, или арил или гетероарил с атомным числом, составляющим 5-60,
R5 представляет собой по меньшей мере группу, выбранную из группы, состоящей из гидроксильной группы, С1-20 алкоксигруппы, простой эфирной группы, карбоксильной группы, COR6, тиольной группы, и аминогруппы, и
R6 представляет собой по меньшей мере группу, выбранную из группы, состоящей из водорода, алкоксигруппы, простой эфирной группы, карбоксильной группы, тиольной группы, и аминогруппы.
9. Способ изготовления гибридных органических/неорганических тонких пленок по п. 8, отличающийся тем, что второе соединение прекурсора представлено следующей формулой 4:
[формула 4]
Figure 00000003
где Z представляет собой тиольную группу, Q представляет собой группу, выбранную из тиольной группы или гидроксильной группы, и Z и Q находятся в орто-, мета-, или пара-положении.
10. Способ изготовления гибридных органических/неорганических тонких пленок по п. 8, отличающийся тем, что второе соединение прекурсора представлено следующей формулой 5:
[формула 5]
Figure 00000004
11. Способ изготовления гибридных органических/неорганических тонких пленок по п. 8, отличающийся тем, что второе соединение прекурсора представлено следующей формулой 6:
[формула 6]
Figure 00000005
12. Способ изготовления гибридных органических/неорганических тонких пленок по п. 8, отличающийся тем, что он дополнительно включает стадию несколько раз проводимой стадии (1) и стадии (2).
13. Способ изготовления гибридных органических/неорганических тонких пленок по п. 8, отличающийся тем, что подложку выбирают из группы, состоящей из стекла, кремния, и пластика.
14. Способ изготовления гибридных органических/неорганических тонких пленок по п. 8, отличающийся тем, что до проведения стадии (1) он дополнительно включает стадию образования слоя оксида на поверхности подложки.
15. Способ изготовления функциональных тонких пленок, которые включают гибридные органические/неорганические тонкие пленки по п. 3, включающий стадию (1) и стадию (2) по п. 8 и дополнительно включающий (3) образование слоя оксида металла, выбранного из группы, состоящей из Zn, Sn, In, Cd, Ga, Al, Ti, Si, V, Mn, Fe, Co, Cu, Zr, Ru, Mo, Nb, и W.
16. Способ изготовления функциональных тонких пленок по п. 15, отличающийся тем, что стадию (1) и стадию (2) проводят повторно n1 раза (где n1 является 1 или больше), и затем повторно n2 раза (где n2 является 1 или больше) проводят стадию (3).
17. Способ изготовления многослойных функциональных тонких пленок по п. 15, отличающийся тем, что стадию (1) - стадию (3) проводят несколько раз.
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