NL1010321C2 - Wafeldrager. - Google Patents

Wafeldrager. Download PDF

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Publication number
NL1010321C2
NL1010321C2 NL1010321A NL1010321A NL1010321C2 NL 1010321 C2 NL1010321 C2 NL 1010321C2 NL 1010321 A NL1010321 A NL 1010321A NL 1010321 A NL1010321 A NL 1010321A NL 1010321 C2 NL1010321 C2 NL 1010321C2
Authority
NL
Netherlands
Prior art keywords
wafer
carrier
wafers
guide
guides
Prior art date
Application number
NL1010321A
Other languages
English (en)
Dutch (nl)
Other versions
NL1010321A1 (nl
Inventor
David Lee Nyseth
Shawn Daniel Eggum
Michael Shawn Adams
Sanjiv Mahipat Bhatt
Brian Scott Wiseman
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Publication of NL1010321A1 publication Critical patent/NL1010321A1/xx
Application granted granted Critical
Publication of NL1010321C2 publication Critical patent/NL1010321C2/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Cable Accessories (AREA)
  • Electrostatic Charge, Transfer And Separation In Electrography (AREA)
NL1010321A 1997-10-20 1998-10-15 Wafeldrager. NL1010321C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US95464097A 1997-10-20 1997-10-20
US95464097 1997-10-20

Publications (2)

Publication Number Publication Date
NL1010321A1 NL1010321A1 (nl) 1999-04-21
NL1010321C2 true NL1010321C2 (nl) 1999-09-08

Family

ID=25495730

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1010321A NL1010321C2 (nl) 1997-10-20 1998-10-15 Wafeldrager.

Country Status (9)

Country Link
JP (1) JPH11204629A (ko)
KR (1) KR100830654B1 (ko)
CN (1) CN1165963C (ko)
DE (1) DE19848147A1 (ko)
FR (1) FR2770498B1 (ko)
HK (1) HK1023228A1 (ko)
IT (1) IT1303138B1 (ko)
NL (1) NL1010321C2 (ko)
SG (1) SG81942A1 (ko)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10151320B4 (de) * 2001-10-17 2006-02-09 Infineon Technologies Ag Scheibenträger
CN100374358C (zh) 2001-11-27 2008-03-12 诚实公司 通过门形成接地线路的前开口式晶片容器
JP4146718B2 (ja) 2002-12-27 2008-09-10 ミライアル株式会社 薄板支持容器
JP4681221B2 (ja) * 2003-12-02 2011-05-11 ミライアル株式会社 薄板支持容器
JP4842879B2 (ja) * 2007-04-16 2011-12-21 信越ポリマー株式会社 基板収納容器及びそのハンドル
JP2009259951A (ja) * 2008-04-15 2009-11-05 Shin Etsu Polymer Co Ltd 基板収納容器
JP5078042B2 (ja) * 2009-06-08 2012-11-21 ゴールド工業株式会社 精密基板収納容器およびその製造方法
JP5120668B2 (ja) * 2009-06-08 2013-01-16 ゴールド工業株式会社 精密基板収納容器およびその製造方法
JP5449974B2 (ja) * 2009-10-16 2014-03-19 ゴールド工業株式会社 精密基板収納容器
JP2011249372A (ja) * 2010-05-24 2011-12-08 Shin Etsu Polymer Co Ltd 基板収納容器
JP5700434B2 (ja) * 2011-05-18 2015-04-15 信越ポリマー株式会社 ウェーハ収納容器
JP5921371B2 (ja) * 2012-07-13 2016-05-24 信越ポリマー株式会社 基板収納容器
KR102162366B1 (ko) * 2014-01-21 2020-10-06 우범제 퓸 제거 장치
KR102281583B1 (ko) * 2014-01-21 2021-07-27 우범제 퓸 제거 장치
KR102223033B1 (ko) * 2014-04-29 2021-03-04 삼성전자주식회사 웨이퍼 수납장치
US9881820B2 (en) * 2015-10-22 2018-01-30 Lam Research Corporation Front opening ring pod
CN107706144A (zh) * 2017-09-14 2018-02-16 德淮半导体有限公司 晶圆清洗固定装置及清洗设备
KR102020294B1 (ko) * 2017-09-15 2019-09-11 (주)상아프론테크 슬롯 구조체 및 이를 포함하는 웨이퍼 보관 용기
TWI689030B (zh) * 2018-06-14 2020-03-21 家登精密工業股份有限公司 基板載具
CN109003928B (zh) * 2018-07-21 2021-03-09 江苏德尔科测控技术有限公司 一种硅片承载装置
KR200493303Y1 (ko) * 2018-12-27 2021-03-10 위아코퍼레이션 주식회사 웨이퍼 캐리어의 슬롯바
TWI727713B (zh) * 2020-03-23 2021-05-11 家登精密工業股份有限公司 光罩盒及其耐磨件
TWI751814B (zh) * 2020-09-22 2022-01-01 家登精密工業股份有限公司 支撐片狀物的中央支撐裝置及存放片狀物的儲存設備
KR102349499B1 (ko) * 2020-09-24 2022-01-07 우범제 사이드 스토리지

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers
US5584401A (en) * 1994-07-29 1996-12-17 Yodogawa Kasei Kabushiki Kaisha Substrate-supporting side boards and a cassette utilizing the boards

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5492229A (en) * 1992-11-27 1996-02-20 Toshiba Ceramics Co., Ltd. Vertical boat and a method for making the same
JPH0864669A (ja) * 1994-08-25 1996-03-08 Hitachi Cable Ltd ウエハボックス
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
JP3328763B2 (ja) * 1995-10-30 2002-09-30 エヌティティエレクトロニクス株式会社 縦型ウエハボートのウエハ支持構造
JPH1098096A (ja) * 1996-09-25 1998-04-14 Nippon Valqua Ind Ltd 半導体ウェハ用カセット

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5584401A (en) * 1994-07-29 1996-12-17 Yodogawa Kasei Kabushiki Kaisha Substrate-supporting side boards and a cassette utilizing the boards
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers

Also Published As

Publication number Publication date
DE19848147A1 (de) 1999-04-22
SG81942A1 (en) 2001-07-24
CN1165963C (zh) 2004-09-08
KR100830654B1 (ko) 2008-11-11
KR19990037214A (ko) 1999-05-25
FR2770498B1 (fr) 2000-06-16
HK1023228A1 (en) 2000-09-01
ITTO980879A1 (it) 2000-04-16
FR2770498A1 (fr) 1999-05-07
NL1010321A1 (nl) 1999-04-21
JPH11204629A (ja) 1999-07-30
CN1232289A (zh) 1999-10-20
IT1303138B1 (it) 2000-10-30

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Legal Events

Date Code Title Description
AD1A A request for search or an international type search has been filed
RD2N Patents in respect of which a decision has been taken or a report has been made (novelty report)

Effective date: 19990708

SD Assignments of patents

Owner name: ENTEGRIS, INC.

Effective date: 20050708

MM Lapsed because of non-payment of the annual fee

Effective date: 20161101