SG81942A1 - Wafer carrier with minimal contact - Google Patents

Wafer carrier with minimal contact

Info

Publication number
SG81942A1
SG81942A1 SG9804226A SG1998004226A SG81942A1 SG 81942 A1 SG81942 A1 SG 81942A1 SG 9804226 A SG9804226 A SG 9804226A SG 1998004226 A SG1998004226 A SG 1998004226A SG 81942 A1 SG81942 A1 SG 81942A1
Authority
SG
Singapore
Prior art keywords
wafer carrier
minimal contact
minimal
contact
wafer
Prior art date
Application number
SG9804226A
Inventor
L Nyseth David
Eggum Shawn
S Adams Michael
M Bhatt Sanjiv
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Publication of SG81942A1 publication Critical patent/SG81942A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
SG9804226A 1997-10-20 1998-10-20 Wafer carrier with minimal contact SG81942A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US95464097A 1997-10-20 1997-10-20

Publications (1)

Publication Number Publication Date
SG81942A1 true SG81942A1 (en) 2001-07-24

Family

ID=25495730

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9804226A SG81942A1 (en) 1997-10-20 1998-10-20 Wafer carrier with minimal contact

Country Status (9)

Country Link
JP (1) JPH11204629A (en)
KR (1) KR100830654B1 (en)
CN (1) CN1165963C (en)
DE (1) DE19848147A1 (en)
FR (1) FR2770498B1 (en)
HK (1) HK1023228A1 (en)
IT (1) IT1303138B1 (en)
NL (1) NL1010321C2 (en)
SG (1) SG81942A1 (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10151320B4 (en) * 2001-10-17 2006-02-09 Infineon Technologies Ag disk support
EP1458634A1 (en) 2001-11-27 2004-09-22 Entegris, Inc. Front opening wafer carrier with path to ground effectuated by door
JP4146718B2 (en) 2002-12-27 2008-09-10 ミライアル株式会社 Thin plate support container
JP4681221B2 (en) * 2003-12-02 2011-05-11 ミライアル株式会社 Thin plate support container
JP4842879B2 (en) * 2007-04-16 2011-12-21 信越ポリマー株式会社 Substrate storage container and its handle
JP2009259951A (en) * 2008-04-15 2009-11-05 Shin Etsu Polymer Co Ltd Substrate storing container
JP5120668B2 (en) * 2009-06-08 2013-01-16 ゴールド工業株式会社 Precision substrate storage container and manufacturing method thereof
JP5078042B2 (en) * 2009-06-08 2012-11-21 ゴールド工業株式会社 Precision substrate storage container and manufacturing method thereof
JP5449974B2 (en) * 2009-10-16 2014-03-19 ゴールド工業株式会社 Precision substrate storage container
JP2011249372A (en) * 2010-05-24 2011-12-08 Shin Etsu Polymer Co Ltd Substrate storing container
JP5700434B2 (en) * 2011-05-18 2015-04-15 信越ポリマー株式会社 Wafer storage container
JP5921371B2 (en) * 2012-07-13 2016-05-24 信越ポリマー株式会社 Substrate storage container
KR102281583B1 (en) * 2014-01-21 2021-07-27 우범제 Apparatus for removing fume
KR102162366B1 (en) 2014-01-21 2020-10-06 우범제 Apparatus for removing fume
KR102223033B1 (en) * 2014-04-29 2021-03-04 삼성전자주식회사 wafer storage container
CN107706144A (en) * 2017-09-14 2018-02-16 德淮半导体有限公司 Wafer cleaning fixing device and cleaning equipment
KR102020294B1 (en) * 2017-09-15 2019-09-11 (주)상아프론테크 Slot structure and wafer container having the same
TWI689030B (en) * 2018-06-14 2020-03-21 家登精密工業股份有限公司 Substrate carrier
CN109003928B (en) * 2018-07-21 2021-03-09 江苏德尔科测控技术有限公司 Silicon wafer bearing device
KR200493303Y1 (en) * 2018-12-27 2021-03-10 위아코퍼레이션 주식회사 Slot bar for wafer carrier
TWI727713B (en) * 2020-03-23 2021-05-11 家登精密工業股份有限公司 Reticle pod and wear parts thereof
TWI751814B (en) * 2020-09-22 2022-01-01 家登精密工業股份有限公司 Central support device for supporting sheets and storage equipment for storing sheets
KR102349499B1 (en) * 2020-09-24 2022-01-07 우범제 Side storage

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2272964A (en) * 1992-11-27 1994-06-01 Toshiba Ceramics Co Vertical wafer boat
JPH0864669A (en) * 1994-08-25 1996-03-08 Hitachi Cable Ltd Wafer box
JPH09129567A (en) * 1995-10-30 1997-05-16 N T T Electron Technol Kk Wafer support structure of vertical wafer boat
JPH1098096A (en) * 1996-09-25 1998-04-14 Nippon Valqua Ind Ltd Semiconductor wafer cassette

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3145252B2 (en) * 1994-07-29 2001-03-12 淀川化成株式会社 Substrate supporting side plate and cassette using the same
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2272964A (en) * 1992-11-27 1994-06-01 Toshiba Ceramics Co Vertical wafer boat
JPH0864669A (en) * 1994-08-25 1996-03-08 Hitachi Cable Ltd Wafer box
JPH09129567A (en) * 1995-10-30 1997-05-16 N T T Electron Technol Kk Wafer support structure of vertical wafer boat
JPH1098096A (en) * 1996-09-25 1998-04-14 Nippon Valqua Ind Ltd Semiconductor wafer cassette

Also Published As

Publication number Publication date
NL1010321A1 (en) 1999-04-21
KR100830654B1 (en) 2008-11-11
CN1232289A (en) 1999-10-20
FR2770498B1 (en) 2000-06-16
NL1010321C2 (en) 1999-09-08
DE19848147A1 (en) 1999-04-22
CN1165963C (en) 2004-09-08
KR19990037214A (en) 1999-05-25
HK1023228A1 (en) 2000-09-01
ITTO980879A1 (en) 2000-04-16
FR2770498A1 (en) 1999-05-07
IT1303138B1 (en) 2000-10-30
JPH11204629A (en) 1999-07-30

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