GB2293816B - Wafer carrier with cushioning means - Google Patents

Wafer carrier with cushioning means

Info

Publication number
GB2293816B
GB2293816B GB9519637A GB9519637A GB2293816B GB 2293816 B GB2293816 B GB 2293816B GB 9519637 A GB9519637 A GB 9519637A GB 9519637 A GB9519637 A GB 9519637A GB 2293816 B GB2293816 B GB 2293816B
Authority
GB
United Kingdom
Prior art keywords
wafer carrier
cushioning means
cushioning
wafer
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9519637A
Other versions
GB2293816A (en
GB9519637D0 (en
Inventor
Shinichi Ohori
Tatsuaki Hirohata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd, Shin Etsu Chemical Co Ltd, Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Polymer Co Ltd
Publication of GB9519637D0 publication Critical patent/GB9519637D0/en
Publication of GB2293816A publication Critical patent/GB2293816A/en
Application granted granted Critical
Publication of GB2293816B publication Critical patent/GB2293816B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67369Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02Internal fittings
    • B65D25/10Devices to locate articles in containers
GB9519637A 1994-10-06 1995-09-26 Wafer carrier with cushioning means Expired - Fee Related GB2293816B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24258194A JP2796502B2 (en) 1994-10-06 1994-10-06 Wafer holding in wafer storage container

Publications (3)

Publication Number Publication Date
GB9519637D0 GB9519637D0 (en) 1995-11-29
GB2293816A GB2293816A (en) 1996-04-10
GB2293816B true GB2293816B (en) 1998-06-10

Family

ID=17091198

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9519637A Expired - Fee Related GB2293816B (en) 1994-10-06 1995-09-26 Wafer carrier with cushioning means

Country Status (5)

Country Link
JP (1) JP2796502B2 (en)
KR (1) KR960015841A (en)
DE (1) DE19537193A1 (en)
FR (1) FR2725960B1 (en)
GB (1) GB2293816B (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5788082A (en) * 1996-07-12 1998-08-04 Fluoroware, Inc. Wafer carrier
US5711427A (en) * 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door
US6193090B1 (en) 1999-04-06 2001-02-27 3M Innovative Properties Company Reusable container
KR20010053787A (en) * 1999-12-01 2001-07-02 마이클 디. 오브라이언 handling device for wafer
DE10151320B4 (en) * 2001-10-17 2006-02-09 Infineon Technologies Ag disk support
JP4903893B2 (en) * 2003-12-02 2012-03-28 ミライアル株式会社 Thin plate support container lid
KR100832702B1 (en) * 2003-12-24 2008-05-28 동부일렉트로닉스 주식회사 Semiconductor wafer cleaning apparatus
US20060042998A1 (en) * 2004-08-24 2006-03-02 Haggard Clifton C Cushion for packing disks such as semiconductor wafers
JP4606294B2 (en) * 2005-09-27 2011-01-05 Okiセミコンダクタ株式会社 Wafer carrier and method of manufacturing semiconductor device using the same
EP2081223A4 (en) * 2006-11-07 2011-09-07 Shinetsu Polymer Co Substrate container
SG151129A1 (en) * 2007-09-26 2009-04-30 E Sun Prec Ind Co Ltd Container for reticle
DE102010005202B4 (en) * 2010-01-21 2020-04-09 Q-Cells Se Magazine for a photovoltaic wafer and / or cell stack with a magazine insert for receiving the same
CN102582670A (en) * 2011-10-17 2012-07-18 上海华力微电子有限公司 Safety masking plate carrying cart
JP2016149492A (en) * 2015-02-13 2016-08-18 ミライアル株式会社 Substrate housing container

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4557382A (en) * 1983-08-17 1985-12-10 Empak Inc. Disk package
US4718549A (en) * 1985-03-08 1988-01-12 Dynamit Nobel Silicon S.P.A. Container for the storage and shipment of silicon disks or wafers

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4043451A (en) * 1976-03-18 1977-08-23 Fluoroware, Inc. Shipping container for silicone semiconductor wafers
US5207324A (en) * 1991-03-08 1993-05-04 Fluoroware, Inc. Wafer cushion for shippers
JP2586364Y2 (en) * 1992-12-28 1998-12-02 住友シチックス株式会社 Transport wafer case
JPH0679152U (en) * 1993-04-22 1994-11-04 株式会社大八化成 Structure of semiconductor wafer transport container
JP2908985B2 (en) * 1994-07-19 1999-06-23 信越ポリマー株式会社 Wafer holding in wafer storage container

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4557382A (en) * 1983-08-17 1985-12-10 Empak Inc. Disk package
US4718549A (en) * 1985-03-08 1988-01-12 Dynamit Nobel Silicon S.P.A. Container for the storage and shipment of silicon disks or wafers

Also Published As

Publication number Publication date
JP2796502B2 (en) 1998-09-10
FR2725960B1 (en) 1998-04-03
GB2293816A (en) 1996-04-10
DE19537193A1 (en) 1996-04-11
KR960015841A (en) 1996-05-22
GB9519637D0 (en) 1995-11-29
JPH08107141A (en) 1996-04-23
FR2725960A1 (en) 1996-04-26

Similar Documents

Publication Publication Date Title
GB2315260B (en) Wafer carrier
IL120027A0 (en) Carrier
IL114105A0 (en) Bottle carrier
TW346103U (en) Article carrier with four-sides
AP9701032A0 (en) Article carrier
GB2293816B (en) Wafer carrier with cushioning means
EP0704183A3 (en) Baby carrier
IL120786A (en) Module carrier
GB9414204D0 (en) Luggage carrier
GB2314026B (en) Infant carrier
EP0741091A4 (en) Carrier device
GB9623571D0 (en) Article carrier
GB2348634B (en) Wafer carrier
GB9404626D0 (en) Carriers
AU124813S (en) Carrier
AU133050S (en) Carrier
GB2324520B (en) Carrier
GB9404359D0 (en) The bag carrier for the carrier bag
GB9600366D0 (en) Article carrier
CA74090S (en) Bottle carrier
CA74441S (en) Infant carrier
GB9400213D0 (en) Carrier
AU123686S (en) Carrier
CA79530S (en) Carrier
AU124262S (en) Bottle carrier

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20070926