GB2348634B - Wafer carrier - Google Patents

Wafer carrier

Info

Publication number
GB2348634B
GB2348634B GB0016655A GB0016655A GB2348634B GB 2348634 B GB2348634 B GB 2348634B GB 0016655 A GB0016655 A GB 0016655A GB 0016655 A GB0016655 A GB 0016655A GB 2348634 B GB2348634 B GB 2348634B
Authority
GB
United Kingdom
Prior art keywords
wafer carrier
wafer
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0016655A
Other versions
GB2348634A (en
GB0016655D0 (en
Inventor
David L Nyseth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fluoroware Inc
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/678,886 external-priority patent/US5788082A/en
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Publication of GB0016655D0 publication Critical patent/GB0016655D0/en
Publication of GB2348634A publication Critical patent/GB2348634A/en
Application granted granted Critical
Publication of GB2348634B publication Critical patent/GB2348634B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
GB0016655A 1996-07-12 1997-07-11 Wafer carrier Expired - Fee Related GB2348634B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/678,886 US5788082A (en) 1996-07-12 1996-07-12 Wafer carrier
GB9714701A GB2315260B (en) 1996-07-12 1997-07-11 Wafer carrier

Publications (3)

Publication Number Publication Date
GB0016655D0 GB0016655D0 (en) 2000-08-23
GB2348634A GB2348634A (en) 2000-10-11
GB2348634B true GB2348634B (en) 2000-12-06

Family

ID=26311875

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0016655A Expired - Fee Related GB2348634B (en) 1996-07-12 1997-07-11 Wafer carrier

Country Status (1)

Country Link
GB (1) GB2348634B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7316325B2 (en) * 2003-11-07 2008-01-08 Entegris, Inc. Substrate container
US7230702B2 (en) 2003-11-13 2007-06-12 Applied Materials, Inc. Monitoring of smart pin transition timing
KR20070048649A (en) * 2004-09-04 2007-05-09 어플라이드 머티어리얼스, 인코포레이티드 Substrate carrier having reduced height

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2272964A (en) * 1992-11-27 1994-06-01 Toshiba Ceramics Co Vertical wafer boat
WO1996009787A1 (en) * 1994-09-26 1996-04-04 Asyst Technologies, Inc. Semiconductor wafer cassette
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2272964A (en) * 1992-11-27 1994-06-01 Toshiba Ceramics Co Vertical wafer boat
WO1996009787A1 (en) * 1994-09-26 1996-04-04 Asyst Technologies, Inc. Semiconductor wafer cassette
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers

Also Published As

Publication number Publication date
GB2348634A (en) 2000-10-11
GB0016655D0 (en) 2000-08-23

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20150711