JP5921371B2 - Substrate storage container - Google Patents

Description

  The present invention relates to a substrate storage container used for storing, storing, transporting, transporting, and the like of semiconductor wafers.

In a semiconductor production line, various substrates typified by semiconductor wafers are handled, and a substrate storage container (not shown) is used for transporting the substrate (see Patent Documents 1, 2, and 3).
This type of substrate storage container locks, for example, a container main body that can store a plurality of substrates arranged in the vertical direction, a lid that opens and closes the front of the container main body, and a lid that is fitted to the front of the container main body. A locking mechanism, and is used for transporting a substrate in a semiconductor manufacturing process (see Patent Document 1).

The container body is formed into a front open box having an opening only on the front surface, and a pair of left and right support pieces for horizontally supporting the semiconductor wafer is provided on both sides of the container body. Moreover, although the locking mechanism is mainly of a type built in the lid, there is also a type installed on the side wall of the container body (see Patent Document 2).
Such a substrate storage container is mounted and positioned on a lid opening / closing device provided in the semiconductor manufacturing apparatus, and the lid fitted to the front surface of the container body is removed by the lid opening / closing device. The substrate is loaded or unloaded from the front of the main body opened.

Japanese Patent No. 3593122 JP 2012-4530 A Japanese Patent No. 3545167

  By the way, if there are semiconductor manufacturing equipment that is sufficient if the substrate can be accessed from the front of the container body, the semiconductor can be accessed from the front and back of the container body in two directions, reducing work time and improving efficiency. There are also typical manufacturing equipment.

  However, in the conventional substrate storage container, since only the front surface of the container main body is opened, substrate loading and unloading are limited to one direction. Therefore, for example, when a substrate is to be supplied to another manufacturing apparatus, the lid body of the substrate storage container is fitted with a lid opening / closing device on the open front surface of the container main body and turned to another manufacturing apparatus. If the substrate is not loaded or unloaded after docking and removing the lid, there arises a problem that the work is delayed or complicated.

  In order to solve such a problem, a method has been proposed in which the substrate storage container can be accessed in two directions by rotating and changing the direction of the substrate storage container. However, when this method is adopted, a complicated rotation mechanism for rotating the substrate storage container is required, and there is a new problem that the direction of the substrate storage container must be detected and controlled. Become.

  The present invention has been made in view of the above, and it is possible to access the substrate from two opposite directions of the container body without incurring work delays and complications, and a mechanism for changing the orientation of the container body, An object of the present invention is to provide a substrate storage container in which control and the like can be omitted.

In order to solve the above-mentioned problems in the present invention, a container main body that can store a round substrate, a support that supports the substrate stored in the container main body, a lid that opens and closes an opening of the container main body, and a container main body And a locking mechanism for locking the lid that closes the opening of the container, the container body is formed in a substantially box shape, and both opposite end surfaces thereof are formed in the opening, respectively, and the lid has an inner periphery of the opening of the container body A seal gasket that forms a sealed state in contact with is attached, and a locking groove for a locking mechanism is formed on the side surface of the lid ,
A mounting body provided on the inner side of the container main body, a shelf piece provided on the mounting wall, a support protrusion provided on the surface of the shelf piece and supporting the peripheral edge of the back surface of the substrate substantially horizontally. The displacement prevention wall is provided on the surface of the shelf piece and can contact the peripheral side of the substrate supported by the support protrusion, and the surface of the displacement prevention wall is higher than the surface of the support protrusion. The contact surface that can be contacted with the peripheral side of the substrate of the displacement prevention wall is curved according to the peripheral side of the substrate ,
The locking mechanism is supported on the peripheral side of the opening of the container body, and can be operated between the locking position and the unlocking position, and the peripheral side of the opening of the container body and the operated member. A locking member interposed between the locking members that moves in the direction of at least both end faces of the container main body according to the movement of the operated member, and the lid member that penetrates the container main body to the facing portion of the locking member facing the container main body. Forming a locking claw that contacts the locking groove of the locking member, and forming a cam projection that slidably fits in the plurality of cam grooves of the operated member on the facing portion of the locking member facing the operated member,
When the operated member of the locking mechanism moves to the locking position, the locking claw moves the lid that has been opposed to the opening of the container body, and the opening of the container body and the lid are brought into contact with each other. When the operated member of the locking mechanism is moved to the unlocked position, the locking claw is moved away from the opening of the container body to seal the sealing gasket of the lid. The state is released, and the lid is removed in one direction from the opening of the container body .

In addition, a flange can be formed in the upper part of the periphery of the opening of the container body and on both sides of the periphery, and a lid can be fitted into the flange from below, and the cover can be opposed to the opening of the container body.
Further, the container main body is divided into two equal parts into a pair of half containers, and joint flanges facing each other are formed on the peripheral edges of the divided opposing portions opened by the pair of half containers, and the plurality of joint flanges are formed. It can be joined via a hermetic seal member.

Moreover, the attaching part for locking mechanisms can be provided in the flange of the peripheral side in the opening part of a container main body, and a locking mechanism can also be installed in this attaching part.
In addition, the position displacement prevention wall of the support is formed so as to become gradually thinner from the front and rear portions of the container body toward the substantially central portion in plan view, and both end portions of the position displacement prevention wall are thickened to form the peripheral edge side of the substrate. It is also possible to make contact with each part.

Furthermore, the through hole for the locking mechanism is provided in the flange on the peripheral side in the opening of the container body,
On the side of the lid, a locking groove for the locking mechanism that can be opposed to the through hole of the flange of the container body is formed, and the upper part of this locking groove is opened,
An operation member that can move the locking mechanism between a locking position and an unlocking position, a locking member that moves at least in the front-rear direction of the container body in accordance with the movement of the operation member, and a flange of the container body A cover member sandwiching the locking member and the operated member between them, a plurality of cam grooves are formed in the operated member, and a through hole of the flange of the container body is formed on the opposing surface of the locking member facing the container body. A locking claw that penetrates and contacts the locking groove of the lid is formed, and cam protrusions that are slidably fitted in the plurality of cam grooves of the operated member are respectively provided on the opposing surface of the locking member that faces the operated member. When the member to be operated is moved to the locking position, the lid can be brought into contact with the opening of the container body by moving the locking member from the front to the rear of the container body.

  Here, the round substrate in the claims includes at least various sizes of semiconductor wafers, glass plates, and the like. Even if the substrate is partially cut away, the substrate may be a substantially circular plate as a whole. Further, the container body and the lid may be transparent, opaque, or translucent. The container body may be molded by a molding method, or may be configured by combining a plurality of plate materials. Furthermore, the locking mechanism can be installed on the opening side of the container body, the lid, or the like.

  According to the present invention, the opposite end surfaces of the container body are opened, and the substrate can be taken in and out from each opening, so that the loading and unloading of the substrate is rarely restricted in one direction. Therefore, it is not necessary to change the direction of the substrate storage container in the manufacturing apparatus, dock the lid, and take in and out the substrate, thereby simplifying, speeding up, and facilitating the operation.

According to the present invention, there is an effect that it is possible to access the substrate from two opposite directions of the container main body without incurring work delays and complications. In addition, since the mechanism and control for changing the orientation of the container body can be omitted, the configuration and control can be simplified. Moreover, since the back surface peripheral part of a board | substrate is supported by several support protrusions, the possibility of contamination of a board | substrate can be excluded with the reduction | decrease of the contact area of a board | substrate and a support protrusion. Furthermore, since the locking mechanism is not a lid directly facing the substrate, but located on the peripheral side of the opening of the container body, the side wall of the container body can be interposed between the locking mechanism and the substrate. As a result, it is possible to prevent dust from the locking mechanism from flowing into the container body and contaminating the substrate.

  According to the second aspect of the invention, since the lid is guided to the flange, it is possible to prevent the lid from being displaced in the vertical direction or rattling in the horizontal direction. Therefore, the lid can be appropriately opposed to the opening of the container body.

  Further, according to the invention described in claim 3, since the pair of half containers can be respectively molded with a relatively small mold, and the pair of half containers can be connected to form the container body, an integrated container Compared to molding the main body, a reduction in manufacturing cost can be expected. In addition, since the container body can be configured symmetrically, an improvement in the balance of the center of gravity during transportation can be expected. In addition, the split facing portions of the pair of half containers are not directly joined, but are joined using a plurality of joining flanges facing each other with the sealing member interposed therebetween, so that the pair of half containers can be easily maintained while maintaining airtightness. It becomes possible to join.

According to the fourth aspect of the present invention, since the locking mechanism is installed not on the lid facing the substrate but on the side of the flange and located outside the container body, the dust of the locking mechanism is outside the container body. It is possible to prevent the substrate from flowing into the interior from being contaminated.
Furthermore, according to the fifth aspect of the present invention, since both thick end portions of the displacement prevention wall are brought into contact with the peripheral side portion of the substrate, the substrate is displaced in the longitudinal direction of the container body, or protrudes from any opening. There is nothing to do.

It is a whole perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is front explanatory drawing which shows typically embodiment of the substrate storage container which concerns on this invention. It is side explanatory drawing which shows typically embodiment of the substrate storage container which concerns on this invention. It is an exploded perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the support in the embodiment of the substrate storage container concerning the present invention. It is explanatory drawing which shows typically the relationship between the locking groove of the cover body in the embodiment of the substrate storage container which concerns on this invention, and the locking nail | claw which the locking mechanism lowered | hung. It is explanatory drawing which shows typically the relationship between the locking groove of the cover body in the embodiment of the substrate storage container which concerns on this invention, and the locking claw of a locking mechanism. It is a disassembled perspective view which shows typically the container main body, the cover body, and the locking mechanism in embodiment of the substrate storage container which concerns on this invention. It is a perspective explanatory view showing typically the operated plate of the locking mechanism in the embodiment of the substrate storage container according to the present invention. It is a perspective explanatory view showing typically the locking plate of the locking mechanism in the embodiment of the substrate storage container according to the present invention. It is a perspective explanatory view showing typically the cover board of the locking mechanism in the embodiment of the substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the lock state of the lock mechanism which removed the cover board in the embodiment of the substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the unlocking state of the locking mechanism which removed the cover board in the embodiment of the substrate storage container concerning the present invention. It is sectional explanatory drawing which shows typically the locking state of the locking mechanism in embodiment of the board | substrate storage container which concerns on this invention. It is sectional explanatory drawing which shows typically the unlocking state of the locking mechanism in embodiment of the board | substrate storage container which concerns on this invention. It is a whole perspective explanatory view showing typically a 2nd embodiment of a substrate storage container concerning the present invention.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. A substrate storage container in the present embodiment includes a large container main body 1 capable of storing a round substrate W, as shown in FIGS. A pair of supports 20 that support the substrate W accommodated in the container body 1, a detachable lid 30 that opens and closes the opening 3 of the container body 1, and a lid 30 that closes the opening 3 of the container body 1. The container body 1 is formed in a box, and the opposite front and rear end faces are formed in the opening 3 respectively.

  As shown in FIGS. 4 and 8, the substrate W is made of, for example, a semiconductor wafer having a diameter of 300 mm, specifically a thin silicon wafer, and is horizontally supported in the container body 1 and a plurality of (for example, 10) wafers. Are stored side by side at a predetermined interval in the vertical direction. Positional notches and orientation flats are selectively formed on the peripheral edge of the substrate W. Such a substrate W is sequentially subjected to predetermined processing and processing, whereby an electronic circuit is formed on the surface.

  The container main body 1, the support body 20, the lid body 30, and the locking mechanism 50 are each molded by a molding material containing a required resin, for example. Examples of the resin in the molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyether ketone, polyether ether ketone, polybutylene terephthalate, polyacetal, and liquid crystal polymer, and alloys thereof.

  As shown in FIGS. 1, 3, and 4, the container body 1 is equally divided into a pair of half containers 1 </ b> A at the intermediate portion from the viewpoint of reducing manufacturing costs by molding with a small mold. The half-container half-opening division facing portion 8, in other words, the opened back surfaces are abutted and connected to each other. The container body 1 is provided with a support 20 for the substrate W on both sides inside, specifically, the inner surfaces of both side walls, and the air in the container body 1 is nitrogenated at predetermined locations such as the four corners of the bottom plate. A plurality of supply / exhaust valves to be replaced with gas are detachably fitted.

  A flat bottom plate 2 having a flat rectangular shape is mounted on the bottom plate of the container body 1 from below, and the bottom plate 2 is provided with a positioning tool, a fixing hole, and a sensing member that are fitted to the positioning pins of the lid opening / closing device from above. And the like are arranged. Moreover, a flange for conveyance is attached to the ceiling of the container body 1 as necessary.

  As shown in FIGS. 1 to 4, one half container 1 </ b> A is configured to have an opening 3, that is, a rectangular tube shape that divides the front side into a horizontally long shape. A channel-shaped flange 4 is integrally formed, and the lid 30 is inserted into the flange 4 from the lower side and rises, and the lid 30 is opposed to the opening 3 with a slight gap. The opening 3 is closed by the lid 30 by being pressed.

  As shown in FIG. 14 and FIG. 15, the flange 4 is formed to be bent in a substantially Z-shaped cross section, and a required number of through holes 5 facing the side surfaces of the lid body 30 are notched in the longitudinal direction on both sides. As shown in FIGS. 4 and 8, a pair of mounting bosses 6 for the locking mechanism 50 are vertically arranged on the outer surface of both sides of the flange 4, and each mounting boss 6 is formed in a cylindrical shape. Further, the lowermost portions 7 on both side portions of the flange 4 are cut short to expose a part of the locking mechanism 50 so as to be operable (see FIG. 2). Such a flange 4 functions not only to smoothly guide the lid 30 in the vertical direction, but also to support the locking mechanism 50 on both sides.

  A frame-shaped joining flange 9 projecting outward is integrally formed at the peripheral edge of the divided facing portion 8 of the half container 1A. A plurality of joining bosses 10 are formed on the joining flange 9 so as to project asymmetrically with respect to the center line in the width direction, each joining boss 10 is formed in a cylindrical shape, and a fastener is screwed later. In addition, a plurality of joint holes 11 are perforated in the joint flange 9 in an asymmetrical manner along the center line in the width direction.

  The other half-container 1A is configured in the same manner as the one half-container 1A, and has a frame-shaped joint that is oppositely joined to the joint flange 9 of the one half-container 1A via the sealing seal member 12 at the periphery of the divided facing portion 8. The flange 9 is integrally formed. The joint flange 9 has a plurality of joint holes 11 that are fitted into the plurality of joint bosses 10 of one half container 1A and is perforated, and a joint that fits into the plurality of joint holes 11 of one half container 1A. The bosses 10 are arranged and protruded, and each joining boss 10 is formed in a cylindrical shape, and the fastener is screwed later.

  As shown in FIG. 4, the hermetic seal member 12 is formed in a frame shape so as to correspond to the joining flange 9 of the pair of half containers 1 </ b> A, and through holes penetrating the plurality of joining bosses 10 are perforated at intervals. The Such a hermetic seal member 12 effectively prevents nitrogen gas from leaking out of the container body 1 from between the pair of joining flanges 9 when the pair of half containers 1A are connected to each other.

  As shown in FIGS. 4 and 5, each support 20 has a mounting wall 21 mounted on the inner side surface of the pair of half containers 1 </ b> A via a fastener and a predetermined interval in the vertical direction of the inner surface of the mounting wall 21. The plurality of shelf pieces 22 arranged side by side, the plurality of support protrusions 23 that are partially arranged on the surface of each shelf piece 22 and horizontally support the rear peripheral edge of the substrate W, and the shelf pieces 22 A misalignment prevention wall 24 that is partially stacked on the surface and is capable of contacting the peripheral side of the substrate W supported by a plurality of support protrusions 23 is configured.

  Each shelf piece 22 is formed as an elongated plate extending in the front-rear direction of the pair of half containers 1A, and is horizontally positioned inward of each half container 1A. Further, the plurality of support protrusions 23 are arranged near the anti-mounting wall 21 on the surface of the shelf piece 22, and each support protrusion 23 is formed in a short strip having a rectangular cross section or a semicircular shape. Oriented in the direction.

  The misalignment prevention wall 24 is formed so as to be thin while gradually bending in the direction of the mounting wall 21 as it goes from the front and rear portions of the pair of half containers 1A toward the center portion in plan view, and both end portions 25 are formed to be relatively thick. Each end portion 25 is formed in a substantially fan shape in the plane and is close to the support protrusion 23. The misalignment prevention wall 24 is formed thick and has a surface 26 positioned higher than the surfaces of the plurality of support protrusions 23, and a contact surface 27 that can contact the peripheral side of the substrate W is formed on the substrate W. It is curved and formed in a substantially arc shape according to the peripheral side portion, and functions to prevent the substrate W from shifting in the front-rear direction or the left-right direction of the half container 1A.

  As shown in FIGS. 1, 2, 4, 14, and 15, the lid body 30 is formed in a rectangular plate with a front face and is formed in a horizontally long plate. After the opposing arrangement, the opening 3 of the half container 1A is detachably closed. The lid 30 is formed to be thinner than the depth (height) dimension in the front-rear direction of the flange 4 of the half container 1A from the viewpoint of ensuring a smooth operation of the locking mechanism 50. Positioning holes 31 for the opening / closing device are respectively drilled, and each positioning hole 31 is formed in a circular shape or a polygonal shape.

  On the back surface of the lid 30, elongated holding ribs that hold the front edge of each substrate W and restrict excessive displacement thereof are integrally formed, and a frame-shaped gasket groove 32 is cut on the peripheral edge of the back surface. A seal gasket 33 for the opening 3 is press-fitted and fitted into the gasket groove 32. As shown in FIGS. 14 and 15, the seal gasket 33 includes a frame-shaped frame portion 34 that is tightly fitted in the gasket groove 32, and an outer peripheral surface of the flange 4 that extends outward from the outer peripheral surface of the frame portion 34. And a deformable tapered tongue piece portion 35 that press-contacts and seals between the opening 3 of each half container 1A and the lid 30.

  As shown in FIG. 8, locking grooves 36 for the locking mechanism 50 facing the through holes 5 of the flanges 4 of the respective half containers 1 </ b> A are cut out vertically on both side surfaces of the lid body 30. The upper part opens. As shown in FIGS. 6 and 7, the locking groove 36 includes a wide upper groove 37 located at the upper side of the lid 30, a long central groove 38 connected to the lower portion of the upper groove 37, A lower groove 39 having a reduced width connected to the lower portion of the groove 38 is integrally formed.

  The upper groove 37 is formed wider than the central groove 38 and the lower groove 39 from the viewpoint of facilitating locking of the locking mechanism 50 and avoiding unnecessary interference of the locking mechanism 50, and is inclined between the central groove 38. 40 is integrally formed. The central groove 38 is formed wider than the lower groove 39, and the inclined surface 40 is integrally formed with the lower groove 39.

  As shown in FIGS. 1, 4, 8, and the like, each locking mechanism 50 is configured to operate an operated plate 51 that can move between a vertically locked position and an unlocked position, and to move the operated plate 51. Accordingly, the half plate 1A includes a locking plate 55 that moves at least in the front-rear direction, and a cover plate 59 that sandwiches the locking plate 55 and the operated plate 51 between the flange 4 of the half container 1A.

  As shown in FIGS. 4, 8, 9, etc., the operated plate 51 is formed, for example, as a polygonal vertically long plate, and is supported by the mounting boss 6 of the flange 4 of the half container 1 </ b> A and between the flange 4. The locking plate 55 is sandwiched between the two. In the vicinity of the intermediate portion of the operated plate 51, a vertically long hole 52 that is loosely fitted to one mounting boss 6 of the half container 1A so as to be movable up and down is formed. The cam grooves 53 for the locking plate 55 that extend while being curved are cut out.

  Each cam groove 53 is inclined in the front-rear width direction of the operated plate 51, in other words, in the front-rear direction of the half container 1A, and at least the lower end portion of the upper and lower end portions linearly extends downward. The cam groove 53 is formed such that the upper end is separated from the front of the flange 4 of the half container 1 </ b> A and the lower end is close to the front of the flange 4.

  An operation piece 54 having a substantially L-shaped cross section that is slidably contacted with the other mounting boss 6 of the half container 1A is integrally formed vertically below the operated plate 51. The operation piece 54 is integrally formed at the lowermost portion 7 on the flange 4 side portion. (See FIG. 2). The operated plate 51 moves up and down between an upward unlocking position and a downward locking position when the exposed operation piece 54 is automatically or manually operated from the outside.

  As shown in FIGS. 4, 8, 10, and the like, the locking plate 55 is formed in, for example, a polygonal vertically long plate, and a horizontally long hole 56 that opposes the vertically long hole 52 of the operated plate 51 is formed in the vicinity of the intermediate portion. The horizontally long hole 56 is slidably supported by one mounting boss 6 of the half container 1A. A pair of upper and lower locking claws 57 that loosely pass through the through holes 5 of the flange 4 are formed on the opposing surface of the locking plate 55 facing the flange 4 of the half container 1A. The lid 30 is supported by the locking mechanism 50 by being fitted and locked in the locking groove 36 of the lid 30.

  As shown in FIG. 6 and FIG. 7, the pair of locking claws 57 are arranged so that the upper locking claw 57 is tightly connected to the central groove 38 of the locking groove 36 from the viewpoint of preventing rattling between the locking grooves 36. The lower locking claw 57 is formed so as to be fitted, and the lower locking claw 57 is formed so as to be closely fitted in the lower groove 39 of the locking groove 36. Cam protrusions 58 that are slidably fitted into cam grooves 53 of the operated plate 51 are formed on the upper and lower portions of the opposing surface of the locking plate 55 facing the operated plate 51, respectively. It is formed in a substantially cylindrical shape. Such a locking plate 55 moves in a direction parallel to the side wall of the half container 1 </ b> A according to the vertical movement of the operated plate 51.

  The cover plate 59 is formed, for example, as a vertically long plate having a polygonal shape as shown in FIGS. The cover plate 59 is fixed by screwing screw holes 60 in the upper and lower portions thereof, and screw 61 passing through the screw holes 60 being screwed to the mounting boss 6 of the half container 1A.

  In the above configuration, the case where the opening 3 of each half container 1A is closed by the lid body 30 and locked by the locking mechanism 50 will be described. First, the lid body 30 is placed in the flange 4 of the half container 1A. While being engaged and supported by the positioning pins, or being engaged and supported by vacuum suction, it is inserted and raised from below, and the locking claw 57 of the locking mechanism 50 is inserted into the locking groove 36 of the lid 30 (see FIG. 15). The lid 30 faces the opening 3 of the half container 1A with a slight gap (see the same figure). At this time, the pair of locking claws 57 of the locking plate 55 are fitted and inserted from the upper groove 37 of the locking groove 36 as the lid body 30 is raised, and are lowered relative to the central groove 38 and the lower groove of the locking groove 36. And 39 (see FIG. 6).

  Next, when the operation piece 54 of the operated plate 51 of the locking mechanism 50 is pulled down to the lid opening / closing device (see FIG. 12), the operated plate 51 is lowered to the locked position and the upper end portion of the vertically long hole 52 is attached to the mounting boss. 6, the upper end portion of the cam groove 53 of the operated plate 51 and the cam projection 58 of the locking plate 55 engage with each other, and one side portion of the laterally long hole 56 of the locking plate 55 contacts the mounting boss 6. The locking plate 55 moves from the opening 3 of the half container 1A in the direction of the division facing portion 8, in other words, in the sealing direction (see the arrow in FIG. 14).

  When the locking plate 55 moves in the direction of the divided facing portion 8 of the half container 1A in this way, the locking claw 57 of the locking plate 55 moves in the direction of the divided facing portion 8 of the half container 1A, thereby covering the opening 3 of the half container 1A. While the body 30 is pressed, the tongue piece 35 of the seal gasket 33 is pressed into the opening 3 of the half container 1A, and the opening 3 is firmly closed by the lid 30 (see FIG. 14). At this time, since the holding ribs of the lid 30 are fitted and held in the front edge of the peripheral edge of the substrate W, rattling of the substrate W is effectively prevented.

  On the other hand, when the locking mechanism 50 is unlocked and the lid 30 can be removed from the opening 3 of each half container 1A, the lid 30 is engaged and supported by the positioning pin of the lid opening / closing device, or Engagement support and vacuum suction support are performed, and the operation piece 54 of the operated plate 51 of the locking mechanism 50 is pushed up by the lid opening / closing device (see FIG. 13). Then, the operated plate 51 rises to the unlocked position, the lower end portion of the vertically long hole 52 is brought into contact with the mounting boss 6, and the lower end portion of the cam groove 53 of the operated plate 51 and the cam protrusion 58 of the locking plate 55 are brought into contact with each other. While engaging, the other side part of the laterally long hole 56 of the locking plate 55 and the mounting boss 6 come into contact with each other, and the locking plate 55 moves from the sealing direction of the half container 1A to the anti-sealing direction (see the arrow in FIG. 15).

  When the locking plate 55 moves in the anti-seal direction of the half container 1A, the locking claw 57 of the locking plate 55 moves in the anti-seal direction of the half container 1A, so that the lid that has been in contact with the opening 3 of the half container 1A 30 is spaced apart and opposed, and the tongue piece 35 of the seal gasket 33 that is in pressure contact with the opening 3 of the half container 1A is also separated so that the lid 30 can be removed from the opening 3 of the half container 1A. (See FIG. 15).

  Thereafter, the lid 30 is lowered in a state where it is engaged or supported by the positioning pin of the lid opening / closing device, or is supported by vacuum suction and the interference of the locking claw 57 of the locking plate 55 with the locking groove 36 is released. The At this time, since the upper groove 37 of the locking groove 36 is widened so as to easily avoid unnecessary contact with the locking claw 57, the upper groove 37 and the locking claw 57 are prevented from slidingly contacting each other. Generation of the accompanying particles can be effectively prevented (see FIG. 7).

  According to the above configuration, both the front surface and the back surface of the container body 1 are opened, and the substrate W can be taken in and out from each opening 3 and the operability of the container body 1 is improved. Loading is not limited to one direction. Therefore, for example, when it is desired to supply the substrate W to another manufacturing apparatus, it is not necessary to dock or unload the substrate W by docking the lid 30 of the substrate storage container whose direction is changed to the other manufacturing apparatus, The work can be greatly simplified, speeded up, and facilitated. Further, a complicated rotating mechanism that rotates the substrate storage container and changes its direction can be omitted, and it is not necessary to detect and control the direction of the substrate storage container.

  In addition, since the back surface peripheral portion of the substrate W is not horizontally supported on the surface of the shelf piece 22 but only the plurality of support protrusions 23 support the back surface peripheral portion of the substrate W, the support area of the substrate W is reduced. Accordingly, the possibility of contamination of the substrate W can be effectively eliminated. In addition, since the curved thick end portions 25 of the misregistration prevention wall 24 are in contact with the peripheral side portions of the substrate W, it is possible to effectively prevent the substrate W from being displaced in the longitudinal direction of the pair of half containers 1A.

  Further, the locking mechanism 50 is installed on both sides of the flange 4 instead of the lid body 30 that directly faces the substrate W and is located outside the container body 1, and the container body 1 is placed between the locking mechanism 50 and the substrate W. Since the side wall is interposed, it is possible to prevent dust from the locking mechanism 50 from flowing into the container body 1 and contaminating the substrate W.

  Next, FIG. 16 shows a second embodiment of the present invention. In this case, the container main body 1 is not divided equally into a pair of half containers 1A, but is integrally formed from the beginning. ing. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In this embodiment, the same effect as the above embodiment can be expected, and the dimensional accuracy of the container body 1 can be remarkably improved, and the possibility that nitrogen gas leaks to the outside from between the pair of joining flanges 9 can be eliminated. Obviously you can. Moreover, since the joining flange 9, the joining boss 10, and the joining hole 11 can be omitted, the configuration can be simplified.

  In the above embodiment, the substrate W is a semiconductor wafer having a diameter of 300 mm. However, the present invention is not limited to this, and a semiconductor wafer having a diameter of 450 mm may be used. Moreover, although the container main body 1, the cover body 30, and the locking mechanism 50 were shape | molded with the shaping | molding material containing required resin, when you want to improve durability, the container main body 1, the cover body 30, and the locking mechanism 50 are various. You may form with the metal material of. Further, the support body 20 is screwed and fixed to the both sides inside the container body 1 with fasteners, but a recess is formed in one of the container body 1 and the support body 20, and a protrusion is formed in the other. The support 20 may be fixed by fitting the convex portion.

  Further, the sealing seal member 12 may be sandwiched between the pair of joining flanges 9, but an O-ring for sealing or the like may be sandwiched instead. Further, from the viewpoint of preventing the contamination of the substrate W, it is also possible to incorporate a hygroscopic material in the container body 1, or to form the lid 30 hollow so as to incorporate the hygroscopic material, or to fill the hygroscopic gas. Further, instead of integrally forming the holding rib on the back surface of the lid body 30, a separate holding member can be detachably mounted.

  Further, the locking mechanism 50 is supported on both inner sides of the lid 30 and is rotated from outside, and a plurality of forward and backward movements that slide in the vertical direction of the lid 30 as each rotary plate rotates. It is also possible to comprise a plate and a plurality of locking claws that appear and disappear from the peripheral wall of the lid body and slide toward and away from the inner periphery of the opening 3 of the container body 1 as each forward / backward moving plate slides.

  The substrate storage container according to the present invention can be used in the field of semiconductor manufacturing.

DESCRIPTION OF SYMBOLS 1 Container body 1A Half container 3 Opening part 4 Flange 5 Through-hole 6 Mounting boss (attachment part)
8 Split facing portion 9 Joint flange 12 Sealing seal member 20 Support body 21 Mounting wall 22 Shelf piece 23 Support protrusion 24 Position shift prevention wall 25 End portion 26 Surface 27 Contact surface 30 Cover body 36 Locking groove 37 Upper groove 38 Central groove 39 Lower groove 50 Locking mechanism 51 Operated plate 55 Locking plate 59 Cover plate W Substrate

Claims (5)

A container body that can store a round substrate, a support that supports the substrate stored in the container body, a lid that opens and closes the opening of the container body, and a lock that locks the lid that closes the opening of the container body A sealing gasket that forms a sealed state in contact with the inner periphery of the opening of the container body. And a side wall of the lid, a substrate storage container having a locking groove for a locking mechanism ,
A mounting body provided on the inner side of the container main body, a shelf piece provided on the mounting wall, a support protrusion provided on the surface of the shelf piece and supporting the peripheral edge of the back surface of the substrate substantially horizontally. The displacement prevention wall is provided on the surface of the shelf piece and can contact the peripheral side of the substrate supported by the support protrusion, and the surface of the displacement prevention wall is higher than the surface of the support protrusion. The contact surface that can be contacted with the peripheral side of the substrate of the displacement prevention wall is curved according to the peripheral side of the substrate ,
The locking mechanism is supported on the peripheral side of the opening of the container body, and can be operated between the locking position and the unlocking position, and the peripheral side of the opening of the container body and the operated member. A locking member interposed between the locking members that moves in the direction of at least both end faces of the container main body according to the movement of the operated member, and the lid member that penetrates the container main body to the facing portion of the locking member facing the container main body. Forming a locking claw that contacts the locking groove of the locking member, and forming a cam projection that slidably fits in the plurality of cam grooves of the operated member on the facing portion of the locking member facing the operated member,
When the operated member of the locking mechanism moves to the locking position, the locking claw moves the lid that has been opposed to the opening of the container body, and the opening of the container body and the lid are brought into contact with each other. When the operated member of the locking mechanism is moved to the unlocked position, the locking claw is moved away from the opening of the container body to seal the sealing gasket of the lid. A substrate storage container , wherein the state is released and the lid body is removed from the opening of the container body in one direction .   The flange according to claim 1, wherein a flange is formed on the upper edge of the opening of the container body and on both sides of the edge, and a lid is fitted into the flange from below so that the cover faces the opening of the container body. Substrate storage container.   The container main body is divided into a pair of half containers approximately equally, and a joint flange facing each other is formed on the periphery of the split facing portion of the pair of half containers, and the plurality of joint flanges are hermetically sealed. The substrate storage container according to claim 1, wherein the substrate storage container is joined via a member.   The substrate storage container according to claim 2 or 3, wherein an attachment portion for a locking mechanism is provided on a peripheral side flange of the opening of the container body, and the locking mechanism is provided on the attachment portion.   The support position displacement prevention wall is formed so as to become gradually thinner from the front and rear parts of the container body toward the substantially central part in a plan view, and both end parts of the position deviation prevention wall are thickened on the peripheral side of the substrate. The substrate storage container according to any one of claims 1 to 4, wherein each can be contacted.

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