JP2003205991A - Container for conveying plate-like object - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To overcome a problem such that a plate-like object is adversely affected by bending of a central part of the plate-like object due to a self-weight when the plate-like object for being housed increases in size, because a conventional conveyance system for conveying the plate-like object such as a glass plate for a liquid crystal panel is constituted in such a manner as to support the vicinity of an edge of the plate-like object, though the conventional conveyance system makes the plate-like objects conveyed in a state of being housed in one cassette. <P>SOLUTION: A sealable conveyance tray 50 is equipped with a bottom plate 51, a top plate 52, a plurality of side plates 53 and 53 which are provided between the bottom plate 51 and the top plate 52, an opening 50a which is provided in at least one side plate 53 so as to allow the plate-like object 5 to be taken in/out, and a lid 54 for opening/closing the opening 50a. A supporting pin 59 for supporting the object 5 is arranged in a position in which the object 5 on a top surface of the bottom plate 51 is not bent. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal panel, a plasma display panel, or a glass plate or a resin plate used as an organic EL (electroluminescence) display panel, which is particularly large (850 mm ×).
More specifically, the present invention relates to a plate-shaped object transport container capable of accommodating a plate-shaped object having a size of 950 mm or more), and particularly to a configuration of a plate-shaped object transfer container capable of individually accommodating a single plate-shaped object in a hermetically sealed state.

[0002]

2. Description of the Related Art Conventionally, as a container used to convey a plate-like object such as a liquid crystal panel, it is possible to store a plurality of plate-like objects in a stacked state at regular intervals. Some had openings that could be taken in and out. For example, in FIG.
0, as shown in FIG. 21, a cassette 1 with one side open
01, a plurality of liquid crystal panel glass plates 102 are stored in a stacked state, and the cassette 101 in which the liquid crystal panel glass plates 102 are stored is automatically guided by an automated guided device (Automated Guided Veh
icle). A plurality of supporting portions 101a, 101a for supporting both ends of the liquid crystal panel glass plate 102 are projected in the cassette 101 to form a plurality of shelves.

[0003]

Since the plate-shaped container described above is configured to support the vicinity of the edge of the plate-shaped object, when the size of the plate-shaped object to be stored becomes large, the central portion of There is a problem that it bends due to its own weight and adversely affects the plate-like object. In addition, when the plate-shaped objects are stored in the vertically configured shelves due to the bending of the central portion of the plate-shaped objects, it is necessary to widen the space between the upper and lower shelves so that the upper and lower plate-shaped objects do not come into contact with each other. However, there was a problem that the storage efficiency deteriorates. Furthermore, since the above-mentioned container is not sealed,
If the plate-like object to be stored is a liquid crystal panel that dislikes foreign substances such as dust, and it is necessary to keep the entire transport path in a clean state, the cost of equipment for the clean room and its maintenance cost will be incurred. was there. Therefore, the present invention provides a container that can prevent the plate-shaped object to be stored from bending and can store the plate-shaped object in a sealed state.

[0004]

The present invention uses the following means in order to solve the above problems. That is, in the invention of claim 1, a bottom member, a ceiling member, a plurality of side wall members connecting the bottom member and the ceiling member,
A sealable plate-like object transport container including an opening for inserting and removing a plate-like object provided in at least one side wall member, and a support for supporting the plate-like object. The member was arranged on the upper surface of the bottom member at a position where the plate-like object did not bend.

Further, in the invention of claim 2, an opening is formed in the side wall member facing the side wall member in which the opening is provided, and a lid member for opening and closing the opening is provided.

Further, in the invention of claim 3, the lid member is a plate-shaped object transport container mounting table on which a plate-shaped object transport container is stored or taken out. A movable member to be engaged is disposed by a lid member opening / closing means attached to the.

Further, in the invention of claim 4, a grip for gripping is attached to a side surface of the container, and the grip is used when the plate-shaped object transfer container is transferred by a transfer means.
It serves as a guide guide that is guided by a guide member provided on the conveying means.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view showing a carrying tray which is an embodiment of the plate-like object carrying container according to the present invention, FIG. 2 is a front sectional view showing the carrying tray in a state of being stacked in a plurality of stages, FIG.
4 is a perspective view showing an opened / closed state of the lid of the transport tray, FIG. 4 is a perspective view showing a state in which a plate-like object stored in the transport tray is taken in and out, and FIG. 5 is an upper left / right engaging portion and a lower left / right engagement of the transport tray. 6 is a perspective view showing an upper front-rear engaging portion and a lower front-rear engaging portion of the transport tray, FIG. 7 is a side view of the same, and FIG. 8 is a view showing a transport state of the transport tray. Is. 9 is a plan view showing a second embodiment of the transport tray, FIG. 10 is a bottom view of the same, FIG. 11 is a front sectional view showing the transport trays similarly stacked in two stages, and FIG. FIG. 13 is a side cross-sectional view showing the vicinity of the lid portion, FIG. 13 is a perspective view showing the upper engaging portion and the lower engaging portion of the transport tray, and FIG. 14 is a side view showing the transport tray transfer system.
FIG. 15 is a side view showing a plate-like object transfer device of the transfer system,
FIG. 16 is a plan view showing the plate-like object transfer device, FIG. 17 is a side view showing a transfer tray whose lid is opened and closed by an opener of the plate-like object transfer device, and FIG. 18 is a transfer tray transferred by a roller conveyor. FIG. 19 is a front sectional view of the same, FIG. 19 is a perspective view of a cassette which is a conventional plate-shaped object transport container, and FIG.

The structure of a carrying tray which is an embodiment of the plate-like object carrying container of the present invention will be described. The carrier tray 1 shown in FIGS. 1 and 2 is a plate-like object such as a glass plate or a resin plate used as a liquid crystal panel, a plasma display panel, or an organic EL (electroluminescence) display panel, particularly a large size (850 mm × 950
It is formed into a thin rectangular parallelepiped shape capable of accommodating a single plate-shaped object 5 (mm or more). One side surface of the carrying tray 1 is opened to form an opening 1a, and the opening 1a is formed.
A lid 2 is provided to be openable and closable. That is, the transport tray 1 has a bottom member, a ceiling member, a plurality of side wall members provided between the bottom member and the ceiling member, and an opening for inserting and removing a plate-like object provided in at least one side wall member. 1A and a lid 2 for opening and closing the opening 1a is configured as a sealable plate-shaped object transport container.

The lid 2 is provided so as to be openable / closable by, for example, a hinge portion 8 provided at the upper end, and when the lid 2 is opened, the plate-like object 5 is taken in / out of the transport tray 1 through the opening 1a. When the lid 2 is closed, the transport tray 1 can be
It is possible to seal the inside. A handle portion 2a projects from the outer surface of the lid 2, and when the lid 2 is opened and closed, the handle portion 2a is gripped from the outside of the transport tray 1 by an arm or the like of a device that automatically opens and closes the lid 2. By doing so, it is possible to open and close the lid 2. The opening / closing mechanism of the lid 2 is not limited to the one described above.
As shown in, the lid 2 may be opened and closed with the upper end of the lid 2 as a fulcrum. In addition, as an opening / closing mechanism of the lid 2, a mechanism that slides up and down or a mechanism that the entire lid 2 is detached forward may be used. It is preferable that a known sealing means such as an O-ring is disposed between the lid 2 and the main body of the transport tray 1 in order to enhance the airtightness. Further, various locking mechanisms for locking the lid 2 and the main body of the transport tray 1 may be provided so that the lid 2 does not open during transportation. Further, when the plate-like material 5 is glass for liquid crystal, it is preferable that the opening and the lid are provided both in front of and behind the transport tray 1. This is because, for example, when the plate-like object 5 is washed, it is possible to wash the plate-like object 5 without pulling out the plate-like object 5 by forming an opening and a lid at the front and rear.

When the opening 1a is the front surface of the transport tray 1, the side surface support portions 3a project inward from the left and right side surfaces of the transport tray 1, and the bottom surface support portion 3b extends from the bottom surface of the transport tray 1. It projects upwards. In the case of this example, one bottom surface support portion 3b is provided, and is disposed in the substantially central portion on the left and right.

The side surface supporting portion 3a and the bottom surface supporting portion 3b are formed in a long shape which is long in the front-rear direction of the transport tray 1, and the upper surfaces of the side surface supporting portion 3a and the bottom surface supporting portion 3b are
A plurality of protrusions 4, 4, ... Are formed. Then, the plate-like object 5 to be housed in the transport tray 1 is placed on the projections 4, 4, ... Formed on the side surface supporting portion 3a and the bottom surface supporting portion 3b, and the side surface supporting portions arranged at both left and right end portions are supported. It is configured to be supported at three locations, that is, the portion 3a and the bottom surface support portion 3b arranged in the substantially left and right central portion.

As shown in FIG. 4, when the plate-like material 5 is taken in and out of the transport tray 1, the lower surface of the plate-like material 5 is supported by a fork 11 such as a single-wafer transfer device for transferring the plate-like material 5. ,
This is done by moving the fork 11. Therefore,
As shown in FIG. 2, the side surface supporting portion 3a and the bottom surface supporting portion 3b.
Between the supported plate-like object 5 and the bottom surface of the transport tray 1,
At least, the fork 11 is arranged at such a height that a space h is formed so that the fork 11 can be inserted.

Further, for example, when the plate-like material 5 is taken out from the carrying tray 1, the side surface supporting portion 3a and the bottom surface supporting portion 3 are provided.
A predetermined space is also provided between the plate-like object 5 and the upper surface of the transport tray 1 so that the plate-like object 5 placed on the b is temporarily lifted up by the fork 11 and taken out.
Further, between the side surface supporting portion 3a and the bottom surface supporting portion 3b,
An interval w is provided so that the fork 11 can be inserted.

Instead of the side surface supporting portions 3a, the bottom surface supporting portions 3b are arranged at the left and right end portions of the carrying tray 1, and the plate-like objects 5 are arranged at the right and left and substantially central portions of the carrying tray 1. It can also be configured to be supported by the bottom surface support portion 3b. Further, not only one but a plurality of bottom surface support portions 3b provided between the side surface support portions 3a and 3a (or the bottom surface support portions 3b and 3b) formed at the left and right ends of the transport tray 1,
The plate-like material 5 can be supported at four or more points. In this case, at least a space is provided between the side surface support portion 3a and the bottom surface support portion 3b or between the bottom surface support portion 3b and the bottom surface support portion 3b so that the fork 11 can be inserted. Furthermore, between the side surface support portion 3a and the bottom surface support portion 3b,
Alternatively, the space between the bottom surface support portion 3b and the bottom surface support portion 3b is set to a size such that the plate-shaped object 5 to be placed does not bend.

As shown in FIG. 2, the transport trays 1 can be stacked in a plurality of stages, and the upper left and right engaging portions 6 and the lower left and right engaging portions 7 are provided on the upper surface and the lower surface of the transport tray 1, respectively.
Are formed. The upper left and right engaging portions 6 project upward from the left and right ends of the upper surface of the transport tray 1, and the inner side surfaces of the left and right upper left and right engaging portions 6 have a spacing Ra. On the other hand, the lower left and right engaging portions 7 project downward from both left and right end portions of the lower surface of the transport tray 1, and the left and right lower left and right engaging portions 7
Has an interval Rb on its inner surface.

The spacing Ra between the upper left and right engaging portions 6, 6
And the lower left and right engaging portions 7.7 are formed to have substantially the same distance Rb, and when the transport trays 1 are stacked, the upper left and right engaging portions 6.6 and the lower left and right engaging portions 7.7 are engaged. Then, the vertically adjacent transport trays 1 are positioned in the left-right direction, so that the left-right position can be prevented from shifting. As a result, when the transport trays 1 are stacked and transported, it is possible to prevent the upper transport tray 1 from being displaced due to vibration or the like and further falling.

In this case, as shown in FIG. 5, the left and right outer side surfaces of the upper left and right engaging portions 6 are formed into inclined surfaces that incline outward as they go downward, and the left and right inner side surfaces of the lower left and right engaging portions 7 are formed. , An inclined surface that is inclined inward as it goes upward, and when the upper left and right engaging portions 6 and the lower left and right engaging portions 7 are engaged, the left and right outer inclined surfaces of the upper left and right engaging portions 6 And the inclined surfaces on the inside of the left and right of the lower left and right engaging portion 7 are in contact with each other. By contacting the upper and lower inclined surfaces in this way, the positional deviation of the upper and lower transport trays 1 is corrected, the left and right positions of the upper transport tray 1 and the lower transport tray 1 coincide, and accurate positioning is always performed. As a result, the backlash is suppressed, and it is possible to prevent the work tray 1 from being displaced due to the displacement of the position of the transport tray 1 when the transfer device transfers the transfer tray.

Further, as shown in FIGS. 1, 6 and 7, the hinge portion 8 is provided at the front and rear ends of the upper surface of the carrying tray 1.
The hinge portion 8 is formed with an upper front-rear engaging portion 8a, and the lower surface is formed with a lower front-rear engaging portion 9 at front and rear end portions. Inclined surfaces are formed on the front and rear inner side surfaces of the upper front-rear engaging portion 8a so as to incline in the front-rear direction as it goes downward, and the front-rear outer side surfaces of the lower front-rear engaging portion 9 incline as it goes downward. An inclined surface is formed. When the transport trays 1 are stacked, the upper left and right engaging portions 6
As in the case of the lower left and right engaging portions 7, the upper front and rear engaging portions 8a, 8a and the lower front and rear engaging portions 9, 9 are engaged with each other to position the adjacent upper and lower transport trays 1 in the front and rear direction. I'm trying to do it. As described above, by forming the upper front-rear engaging portion 8a in the hinge portion 8, it is not necessary to separately provide the upper front-rear engaging portion. The front and rear engaging portions 8a and 9 are formed on the lower surface of the hinge portion 8 and the carrying tray 1, but they may be formed at other locations. For example, by forming a notch in a part of the upper left and right engaging portions 6 in the longitudinal direction, and forming a protrusion that fits into the notch in the lower left and right engaging portions 7,
The upper front-rear engaging portion and the lower front-rear engaging portion may be formed.

Further, as shown in FIG. 1, the transport tray 1 has data I unique to the plate-like object 5 such as a manufacturing lot, a manufacturing number, a manufacturing history and the like of the plate-like object 5 to be stored.
The D tag 15 is attached. The data relating to the plate-like material 5 that the ID tag 15 has may be displayed as a bar code, a number, a symbol, or the like, or may be recorded on a recording member that is magnetically recorded. In this example, the ID tag 15 is attached to one side surface of the transport tray 1, but it may be attached to the upper surface, the lower surface, or the lid 2.

The carrying tray 1 having the above-mentioned structure is
A single plate-like object 5 is housed in the transfer tray 1 and is transferred with the lid 2 closed and the inside sealed. In this case, the transport trays 1 are transported in a state where they are stacked in a plurality of stages or only one stage.

For example, as shown in FIG. 8A, a plurality of transport trays 1A, 1B, 1C, and 1D are stacked, and the automatic transport device V is used to move from a certain process to a process shown in FIG. ) Is conveyed to the automatic warehouse S and temporarily stocked. The transport trays 1A, 1B, 1C, 1D stocked in the automatic warehouse S are sorted and merged by the transfer device provided in the automatic warehouse S before the delivery. For example, as shown in FIG. 8C, the transfer trays 1A, 1B, 1C, and 1D in a stacked state are divided into transfer trays 1A, 1B, 1D, and transfer tray 1C by a transfer device and temporarily placed. To be done. In this way, by accommodating the transport trays 1 in a stacked state, the storage efficiency of the automated warehouse S can be improved.

This sorting and merging is carried out by each carrying tray 1
Based on the ID tags 15 attached to A, 1B, 1C, and 1D, the process is performed so as to be in a state corresponding to the process in the next process. That is, in this example, transport trays 1A, 1B and 1D for accommodating the plate-like material 5 to be processed by the apparatus in the next step,
It is divided into a transport tray 1C for accommodating the plate-like material 5 to be processed by another device.

After that, the transport trays 1A, 1B and 1D are transported by the automatic transport device V to a device in the next process, and the transport tray 1C is transported by the automatic transport device V to another device in the next process and processed. It

In a conventional system in which a plurality of plate-like objects 5 are housed and conveyed in one cassette, data regarding the plurality of plate-like objects 5 are collectively attached to the cassette, and sorting and merging are performed. It was necessary to have information on which stage in the cassette the plate-like object 5 to be performed is stored. Therefore, when performing sorting and merging while transferring the plate-shaped material 5 stored in a certain cassette to another cassette, the data related to the plate-shaped material 5 transferred due to a transfer error or the like becomes confused. In some cases, the work in the process may not be performed accurately.

However, according to the present invention, the transport tray 1 is capable of accommodating a single plate-like object 5 and is provided with an ID tag 15 having unique data. And the data about the plate-like object 5 that the ID tag 15 has are in a one-to-one correspondence, and there is no need for information on which stage the plate-like object 5 is stored. Further, even when performing sorting and merging, the plate-shaped objects 5 are not taken out from the transfer tray 1, and the plate-shaped objects 5 are kept stored in the transfer tray 1.
Since the data is transferred, the data held by the ID tag 15 and the plate-like material 5 stored in the transport tray 1 do not conflict with each other due to a transfer error or the like. Therefore, the work in the subsequent process is surely performed accurately, and the data management is easy.

Further, since the transport tray 1 is transported in a closed state with the lid 2 closed, if the inside of the transport tray 1 is kept clean when the plate-like material 5 is stored in the transport tray 1. The cleanliness can be lowered because it is not necessary to keep the atmosphere of the transport path and the atmosphere of the place where sorting and merging of the transport tray 1 are so clean. Further, the transport tray 1 has an upper left-right engaging portion 6, a lower left-right engaging portion 7, an upper front-rear engaging portion 8a, and a lower front-rear engaging portion 9, and can be stacked while positioning them. , Without the need for cleanliness of the transportation route,
As in the case of the conventional cassette, a plurality of plate-like objects 5 can be collectively transported, and the transport efficiency and the storage efficiency can be improved.

Further, since the transport tray 1 is constructed so as to support the plate-like object 5 to be stored at at least three positions, that is, both ends and the intermediate part, as described above, the size of the plate-like object 5 is set. Even when the size is large, like when supporting only at both ends,
The center part does not bend. As a result, the storage space for the plate-like object 5 in the vertical direction can be reduced, and the transport tray 1
It is possible to reduce the height dimension of the sheet trays, reduce the storage pitch of the plate-like objects 5 when the transport trays 1 are stacked, and further improve the storage efficiency.

Further, in the present invention, since the plate-like objects 5 are housed one by one in the carrying tray 1, for example, when the plate-like objects 5 housed in a certain carrying tray 1 are accidentally damaged. However, it is possible to prevent the plate-like objects 5 stored in the other transport trays 1 from being affected, and it is possible to minimize damage. In addition, in the present embodiment, it is described that the transport and transfer of the transport tray 1 are performed by various transport facilities. However, in consideration of a case where the transport facility fails, it is possible for the worker to transport. Further, it is preferable to form the handle 16 (shown in FIGS. 1 and 2) on the side surface of the transport tray 1. The handles 16 are, for example, formed as recesses in the front and rear of the left and right side surfaces of the transport tray 1 below the lower surface of the plate-shaped object 5 placed thereon. More specifically, the handle 16 is formed below the side surface support portions 3a formed on both side surfaces. By forming the handle 16 at this height position, the fork 11 which is a dead space is formed.
It is possible to prevent the height of the transport tray 1 from increasing by the height of the handle 16 by effectively utilizing the interval h formed for inserting the tray.

Next, a second embodiment of the plate-like material carrying container of the present invention will be described. As shown in FIGS. 9 to 12, the transport tray 50 is formed into a thin rectangular parallelepiped shape capable of accommodating one plate-like object 5, and has a bottom plate 51 arranged on the bottom surface portion of the transport tray 50. A top plate 52 arranged on the ceiling surface part, a plurality of side plates 53 arranged on the side surface part and connecting the bottom plate 51 and the top plate 52, and openings 50a, 50a also formed on the side surface part, It is provided with lids 54 and 54 for opening and closing the openings 50a and 50a. Side plates 53
53 are arranged at positions facing each other, and the opening 50a
50a is arranged in a vertical position with respect to the side plates 53.

Below the bottom plate 51, there is arranged a base frame 61 which is formed by hanging a plurality of reinforcing frames 61a on a frame frame 61a having a cross beam shape, and by mounting the bottom plate 51 on the base frame 61. , Transport tray 50
To prevent deformation and distortion. From the surface of the base frame 61 on which the side plates 53 are arranged (left and right in FIGS. 9 and 10), the carrying handles 66, 66 respectively project outward, and the carrying handles 66, 66 are provided. It is possible to carry the transport tray 50 and the like by gripping.

As shown in FIGS. 9 and 12, the lid 5
The reference numeral 4 is rotatably attached to the top plate 52 by a plurality of hinges 58, for example, so that the opening 50a can be opened and closed. Then, when the lid 54 is opened, the plate-shaped material 5 can be transferred onto the transport tray 50 from the opening 50a, and when the lid 54 is completely closed, the transport tray 50 is opened.
The inside can be sealed. A magnet 54 is attached to the lid 54.
a is attached, and the attracted member 50c is fixed to the main body side of the transport tray 50, and when the lid 54 is closed, the magnet 54a and the attracted member 50c are attracted to each other to some extent. The lid 54 is configured so that it cannot be opened unless force is applied. As a result, it is possible to prevent the lid 54 from being opened unintentionally due to movement or vibration of the transport tray 50. Further, the lid 54 and the carrier tray 1
A lock mechanism for locking the main body is provided to cover the lid 2 during transportation.
Can be configured not to open.

It should be noted that the opening / closing mechanism of the lid 54 may be another mechanism such as a mechanism in which the lid 54 slides up and down, or a mechanism in which the entire lid 54 is removed in front, and between the lid 54 and the carrier tray 50 main body. It is preferable to arrange a known sealing means such as an O-ring to improve the airtightness. Also, the opening 50a
If the formation surface of the plate is the front and rear side surfaces (upper and lower surfaces in FIG. 9) of the transport tray 50, the transfer of the plate-like material 5 is performed in the front and rear direction.

In this way, the carrier tray 50 is attached to the bottom plate 51.
By configuring the top plate 52, the side plates 53, 53, and the lid 54 that opens and closes the opening 50a into a hermetically sealed container,
If the inside of the transfer tray 50 is kept in a clean state, it is not necessary to keep the external atmosphere such as the transfer path in a clean state, and the cleanliness can be lowered to reduce the equipment cost.

Further, as shown in FIG. 13, opening / closing handles 55 project from the left and right end surfaces of the lid 54, and when the lid 54 is opened / closed by an opener 80 which is lid opening / closing means described later, The opening / closing arm 81 of the opener 80 can be engaged with the opening / closing handle 55 to perform the opening / closing operation.

Further, as shown in FIGS. 9 and 11, when the plate-like material 5 is glass for liquid crystal, the opening 50a and the lid 54 are provided on both front and rear side surfaces of the carrying tray 50 as in this example. It is preferably provided in a portion. This is because, for example, when the plate-like object 5 stored in the transport tray 50 is washed, the cleaning liquid is introduced from one opening 50a and the other opening 5 is opened.
This is because it is possible to easily inject and discharge the cleaning liquid to and from the transport tray 50, such as discharging from the transport tray 0a, and it is possible to perform cleaning without removing the plate-like object 5 from the transport tray 50. Further, it is possible to transfer the plate-like material from both front and rear sides in the transport path of the transport tray 50.

Further, inside the transport tray 50, a plurality of support pins 59, 59, ... Project upward from the bottom plate 51. The plurality of support pins 59, 59 ... Supports the plate-like object 5 housed in the transport tray 50. Each of the support pins 59, 59 ...
59 ... Arranged at such a position that the plate-like object 5 placed on the top does not bend. For example, a plurality of support pins 59.5
9 ... are arranged side by side in a row with a predetermined space Sd provided in the transfer direction of the plate-like material 5. In this example, three support pin rows 59a, 59a ... Sw is provided and arranged on the left and right. And this front-to-back spacing S
The distance d and the distance Sw in the left-right direction are set to dimensions such that the placed plate-like object 5 does not bend. Furthermore, FIG. 9 and FIG.
As shown in FIG. 4, the arrangement interval Sw of the support pin rows 59a, 59a ... Is the loader / unloader 70, which will be described later, for loading or unloading the plate-like material 5 into or from the transport tray 50.
A pair of forks 62a of the single-wafer transfer device 62 included in
The distance 62a is set so as not to interfere. That is, in the case of this example, the support pin rows 59a, 59a, ...
Are arranged in three rows along the transfer direction at intervals that do not interfere with the pair of forks 62a, 62a of the single-wafer transfer device 62 that transfers the plate-like material 5 into the transport tray.

The plate-like object 5 is transferred onto the transport tray 50 while the lower surface of the plate-like object 5 is supported by the pair of forks 62a, 62a of the single-wafer transfer device 62 for transferring the plate-like object 5. , The forks 62a and 62a are moved. Therefore, the support pins 59, 59 ... Are provided between the supported plate-like object 5 and the bottom plate 51 of the carrying tray 50.
It is formed at a height such that at least an interval can be secured so that the pair of forks 62a can be inserted.

Further, for example, the plate-like material 5 is loaded onto the transport tray 50.
In order to take it out from the support pins 59, 59, ..., the plate-like object 5 placed on the supporting pins 59, 59 ... A predetermined space is also provided between the upper surface of 50. In the embodiment of the present embodiment, the support pin 59 transfers the plate-shaped material 5 into the transport tray 50 by using the single-wafer transfer device 62.
Pair of forks (plate-like object support portions) 62a of the transfer device
Although the support pins 59 are arranged in three rows along the transfer direction at intervals that do not interfere with 62a, the support pin rows 59a, 59a, ... It is also possible to provide four or more rows as long as the distance is such that the pair of forks 62a, 62a can be inserted and the plate-like object 5 is not bent.

By arranging the support pins 59, 59 ... In this way, a pair of forks 62a, 62a are usually provided.
It is possible to smoothly transfer the plate-like material 5 by the single-wafer transfer device 62 having the above. Also,
Arrangement interval Sd and interval Sw of the support pins 59, 59 ...
Is set to a size such that the plate-like object 5 does not bend, so that the plate-like object 5 such as a liquid crystal panel is prevented from being damaged by coming into contact with the transport tray 50 or the pair of forks 62a, 62a. In addition, the height dimension of the transport tray 50 can be suppressed, and the storage pitch of the plate-like objects 5 when the transport trays 50 are stacked can be reduced.
The storage efficiency can be improved.

As shown in FIGS. 11 and 13, the carrying trays 50 can be stacked in a plurality of stages in the vertical direction, and the carrying trays 50 are stacked at the corners of the upper surface and the lower surface of the carrying tray 50. Engagement portions that engage with each other at this time are formed. The upper engaging portion 56 is provided on the upper surface of the transport tray 50, and the lower engaging portion 57 is provided on the lower surface. The upper engaging portion 56 and the lower engaging portion 57 are provided at four corners, respectively. Has been. The upper engaging portion 56 has a protruding portion 56a protruding upward from the upper surface of the top plate 52, and the lower engaging portion 57 has its lower end position aligned with the lower surface of the base frame 61 and has the shape of the protruding portion 56a. Has a cutout portion 57a adapted to.

When the transport trays 50 are vertically stacked, the upper engaging portion 56 and the lower engaging portion 57 are formed at each corner.
Are engaged with each other, and the vertically adjacent transport trays 50 are positioned in the front-rear direction and the left-right direction, so that the positional deviation between the two can be prevented. As a result, the transport tray 5
It is possible to prevent the upper transport tray 50 from being displaced due to vibration or the like and further falling during the transport in the state where 0s are stacked, and to reliably stack the transport trays 50 in the vertical direction. You can And the transport tray 5
It is possible to prevent a work error from occurring due to a displacement of the position of the transport tray 50 when transferring 0 or the like. In addition,
As shown in FIG. 13, the opening / closing handle 55 provided on the lid 54 is provided with a roller 55 by a shaft 55a protruding outward in the left and right directions.
5b is rotatably supported. Roller 55
Reference numeral b denotes a portion with which an opening / closing arm 81 of the opener 80, which will be described later, abuts, and is provided for smooth opening / closing of the lid 54.

As shown in FIG. 14, the transfer tray 50 is transferred by the unmanned transfer vehicle V or the like and transferred to the loader / unloader 70. In the loader / unloader 70, a plurality of transfer trays 50 are stacked on a base table 71 that is configured to be vertically movable by a not-shown elevating means, and the plate-like objects 5 stored in each transfer tray 50 are transferred individually. It is transferred to the processing device M by the mounting device 62. Also, FIG.
5, as shown in FIG. 16, loader / unloader 70
A plurality of elastic members 72, 72 ...
Are arranged, and the transport trays 50, 50 ... Are supported by the base 71 via elastic members 72, 72. The transport trays 50, 50 ... Supported via the elastic members 72, 72, ... Can be moved in the horizontal direction with respect to the base 71, and are a pair arranged on the diagonal line of the base 71. The positioning member 73 is used for horizontal positioning.

Further, as shown in FIGS. 15 to 17, an opener 80 that can be moved up and down is arranged near the base 71 to open and close the lid 54 of the transport tray 50. The opener 80 is provided with an opening / closing arm 81 that can swing up and down. When the opening / closing arm 81 is rotated from the lower side to the upper side, the opening / closing arm 81 engages with the opening / closing handle 55 of the lid 54. , The opening / closing handle 55 is lifted upward. As a result, the lid 54 can be opened, and the plate-shaped material 5 can be transferred to the transport tray 50 or the plate-shaped material 5 can be taken out from the transport tray 50. That is, a rotation fulcrum is provided above the transport tray 50, and the lid 54 that rotates in the vertical direction is picked up by the opening / closing arm 81 that swings in the vertical direction so as to be in the direction opposite to the rotation direction of the lid 54. The lid 54 can be closed by opening the lid 54 and lowering the opening / closing arm 81 downward. Since the base table 71 is configured to be able to move up and down, the lid 54 of the transport tray 50 at an arbitrary stage can be opened and closed by appropriately moving the base table 71 up and down. Further, the height of the base 71 may be fixed so that the opener 80 can be moved up and down.

As described above, by providing the lid 54 with the opening / closing handle 55 for opening / closing the lid 54 by swinging the opener 80, the lid 54 can be automatically opened / closed, and the plate-like object is formed. It is possible to automate the storing and taking-out of the transport tray 50 of No. 5. Further, the opening / closing handle 55 is provided on the left and right side surfaces of the lid 54 so as not to interfere with the pair of forks 62a and 62a and the plate-like object 5 when the plate-like object 5 is stored and taken out by the single wafer transfer device 62. It is formed so as to project outward from. The opener 80 also moves from the movement path of the pair of forks 62a and 62a and the plate-like object 5 so as not to interfere with the pair of forks 62a and 62a and the plate-like object 5 when the plate-like object 5 is stored and taken out. It is located in an off position. Also, only one opener 80 is provided as the minimum configuration for opening and closing the lid 54, but in order to open the lid 54 smoothly, a pair of left and right openers 80 are provided and driven synchronously. Is also good.

As shown in FIGS. 18 and 19, the conveyor 83 for carrying the carrying tray 50 is a pair of roller conveyors 83a, 83a for supporting the left and right ends of the carrying tray 50.
The rollers of one roller conveyor 83a are drive wheels. Roller guides 83b and 83b are provided on both the left and right sides of the conveyor tray 50 on the conveyor 83. The roller guide 83b has a large number of horizontally rotating guide rollers 83c arranged in the longitudinal direction. When the transport tray 50 is transported, the roller guide 8
The guide rollers 83c, 83c, ... Of 3b, 83b are brought into contact with the carrying handles 66, 66 of the carrying tray 50,
It is configured to guide the transport tray 50.
That is, the carrying handles 66, 66 are used as guide guide members when carrying the carrying tray 50.

As described above, by using the carrying handles 66, 66 for gripping the carrying tray 50 when carrying the carrying tray 50, as a guide guide member for carrying the carrying tray 50, the carrying tray 50 is provided with a guide member. Since it is not necessary to provide it separately, it is possible to prevent the main body portion of the transport tray 50 from being scratched.

[0048]

Since the present invention is constructed as described above, it has the following effects. That is, as described in claim 1, a bottom member, a ceiling member, a plurality of side wall members connecting the bottom member and the ceiling member, and an opening for inserting and removing a plate-like object provided in at least one side wall member. A sealable plate-shaped object transporting container comprising: a lid member that opens and closes an opening; and a support member that supports the plate-shaped object at a position on the upper surface of the bottom member where the plate-shaped object does not bend. Since it was arranged, if the inside of the plate-like object transport container is kept in a clean state,
It is not necessary to keep the external atmosphere such as the transfer route in a very clean state, and the cleanliness can be lowered to reduce the equipment cost. By preventing the plate-like object from bending, it is possible to prevent the plate-like object such as a liquid crystal panel from being damaged by accidentally contacting the plate-like object transport container or the fork of the plate-like object transfer device. In addition, it is possible to suppress the height dimension of the plate-shaped object transport container and to reduce the plate-shaped object storage pitch, thereby further improving the storage efficiency. Furthermore, even if a plate-shaped object stored in one plate-shaped object transfer container is accidentally damaged, it is possible to prevent the plate-shaped object stored in another plate-shaped object transfer container from being affected and damage. Can be minimized.

Further, as described in claim 2, since the opening is formed in the side wall member facing the side wall member in which the opening is provided, and the lid member for opening and closing the opening is provided, for example, When cleaning the plate-shaped object stored in the plate-shaped object transport container, the cleaning liquid should be injected into and discharged from the plate-shaped object transfer container by injecting the cleaning liquid from one opening and discharging it from the other opening. It can be easily performed, and it becomes possible to wash the plate-shaped object without removing it from the transport tray. Further, the plate-shaped object can be transferred from both front and rear sides in the transfer path in the plate-shaped object transfer container.

Further, as described in claim 3, the lid member is provided with a plate-shaped object transport container mounting table on which the plate-shaped object transfer container is stored or taken out. Since the movable member to be engaged is disposed by the attached lid member opening / closing means, the lid can be automatically opened / closed, and the storage and removal of the plate-shaped object from the plate-shaped object transport container can be automated. Can be achieved. Further, by projecting the engaged member outward from the left and right side surfaces of the lid, there is no obstacle when the lid member opening / closing means opens / closes the lid.

Further, as described in claim 4, a handle for gripping is attached to a side surface of the container, and the handle is provided with a guide provided in the transport means when transporting the plate-shaped material transport container by the transport means. Since it serves as a guide guided by the member, it is not necessary to separately provide a guide member on the plate-shaped object transport container, and it is possible to prevent the main body of the plate-shaped object transfer container from being damaged.

[Brief description of drawings]

FIG. 1 is a perspective view showing a carrying tray which is an embodiment of a plate-like object carrying container according to the present invention.

FIG. 2 is a front sectional view showing the transport trays in a state of being stacked in a plurality of stages.

FIG. 3 is a perspective view showing an open / closed state of a lid of a carrying tray.

FIG. 4 is a perspective view showing a state in which a plate-like object stored in a transport tray is taken in and out.

FIG. 5 is a diagram showing an engagement state between an upper left and right engaging portion and a lower left and right engaging portion of the transport tray.

FIG. 6 is a perspective view showing an upper front-rear engaging portion and a lower front-rear engaging portion of the transport tray.

FIG. 7 is a side view of the same.

FIG. 8 is a diagram showing a carrying state of a carrying tray.

FIG. 11 is a plan view showing a second embodiment of the carrying tray.

FIG. 10 is a bottom view of the same.

FIG. 11 is a front cross-sectional view showing transport trays that are similarly stacked in two stages.

FIG. 12 is a side cross-sectional view showing the vicinity of the lid of the transport tray in the same manner.

FIG. 13 is a perspective view showing an upper engaging portion and a lower engaging portion of the transport tray in the same manner.

FIG. 14 is a side view showing a transfer tray transfer system.

FIG. 15 is a side view showing a plate-shaped object transfer device of the transfer system.

FIG. 16 is a plan view showing the plate-like object transfer device in the same manner.

FIG. 17 is a side view showing a transport tray whose lid is opened and closed by an opener of the plate-like material transfer device.

FIG. 18 is a plan view showing a carrying tray carried by a roller conveyor.

FIG. 19 is a front sectional view of the same.

FIG. 20 is a perspective view showing a cassette, which is a conventional plate-shaped object transport container.

FIG. 21 is a front view of the same.

[Explanation of symbols]

1.50 transport tray 2.54 lid 5 Plates 6.66 Upper left and right engaging parts 7.67 Lower left and right engaging parts 11.62 Single wafer transfer device 62a fork 59 Support pin 66 carrying handle

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kuniharu Saito             Yodogawa, 2-4-8 Esaka-cho, Suita City, Osaka Prefecture             Within Hutech Co., Ltd. (72) Inventor Ryusuke Tsubota             2-11-1, Tagawa, Yodogawa-ku, Osaka-shi, Osaka             Daihen Co., Ltd. (72) Inventor Kenji Hoshino             Murata, No. 2, Nakajima, Hashizume, Inuyama, Aichi Prefecture             Machinery Co., Ltd. Inuyama factory F-term (reference) 3E006 AA10 BA01 DA01 DB01                 3E062 AA03 AB10 AC01 HC06 HD30                 3E084 AA05 AA14 AB10 BA02 CA03                       FA06 FC20 GA06 GB06                 3E096 AA06 BA20 BB05 CA02 CA08                       CB03 DA02 DA08 DA17 DB04                       DB06 DC02 FA09 FA10 FA19                       FA20 FA30 FA31 FA40 GA03                       GA07 GA10

Claims (4)

[Claims] 1. A bottom member, a ceiling member, a plurality of side wall members provided between the bottom member and the ceiling member, and at least 1.
What is claimed is: 1. A sealable plate-like object transport container comprising an opening for taking in and out a plate-like object provided in one side wall member, and a lid member for opening and closing the opening, the support member supporting the plate-like object. The plate-shaped object transport container is arranged at a position on the upper surface of the bottom member where the plate-shaped object does not bend. 2. The side wall member facing the side wall member provided with the opening is provided with an opening and a lid member for opening and closing the opening is provided. Plate-shaped material transport container. 3. The lid member opening / closing means attached to the plate-shaped article transport container mounting table for storing the plate-like article in the plate-like article transport container or taking out the plate-like article from the plate-like article transport container. The plate-shaped article transport container according to claim 1 or 2, wherein an engaged member that can be engaged with is disposed. 4. A guide for gripping is attached to a side surface of the container, and the guide is guided by a guide member provided in the conveying means when the plate-shaped object conveying container is conveyed by the conveying means. The plate-like object transport container according to any one of claims 1 to 3, wherein: