JP4853204B2 - Plate-like material conveying method and plate-like material conveying device - Google Patents

Description

The present invention relates to a method and an apparatus for receiving, delivering, and transporting a plate-like object having a rectangular shape, rigidity, and a plane direction that is bent by its own weight as a horizontal direction. Use a tray for transportation or storage that holds the plate-like object in a bent state with the surface direction set to the horizontal direction, and is used for transportation or storage with a plurality of the plate-like objects placed on top of each other. The present invention relates to a method and an apparatus for receiving and delivering a plate-like object.
Various plate-like materials or members for flat display panels that bend due to their own weight, or plate-like materials such as metals, rare metals, silicon, etc., and plate-like treatment members that have been processed on them, as plate-like materials This is particularly effective when mounted on a tray.

It is important to transport and store a plate-like object having a functional layer on its surface such as a flat panel such as a plasma display panel or a liquid crystal display panel without damaging or contaminating the functional layer on the surface.
Conventionally, when storing and transporting such plate-shaped objects, box-shaped storage containers that can be stored in parallel at predetermined intervals so that the surfaces do not contact each other are used to protect the surface of the plate-shaped objects from scratches and damage. It was. For example, Japanese Unexamined Patent Application Publication No. 2004-59116 (Patent Document 1) discloses a display that efficiently transports and stores a large number of display substrates in a limited space without the display substrates contacting each other. A substrate storage tray is described.
JP 2004-59116 A

Under these circumstances, in particular, for flat panels for liquid crystal displays, it has been required to produce larger-sized color filter-formed substrates, and transportation costs due to further improved transportation efficiency for transportation and storage. There is a need for saving and space saving.
However, in the transport using the storage container as described above, it is very difficult to reduce the thickness because the plate-like object is likely to jump due to vibration during transportation and cracks and scratches are likely to occur.
In addition, if the peripheral part of the plate-like object is pressed from the top in order to eliminate the splash of the plate-like object, dust adhesion and scratches occur near the end face of the plate-like object, and the plate having a functional layer on the surface In the case of a shape, there is a problem that the quality is deteriorated.

For this reason, the applicant of the present application uses a tray that holds the plate-like object placed on the upper side of the rectangular and rigid plate-like object in the horizontal direction, and the plate-like object is placed thereon. Japanese Patent Application No. 2006-207592 (Patent Document 2) proposes a tray for transportation or storage that is used for transportation or storage in a state where a plurality of sheets are stacked.
Japanese Patent Application No. 2006-207592 When such a tray is used to receive and transfer a plate-like material by pin support, conventionally, the plate-like material unpacking operation from the transport tray is once supported horizontally. It was placed on the pin and transported to other devices by a robot. However, when the plate-shaped object is delivered between the tray and the support pin, the back surface of the plate-shaped object is damaged or soiled, resulting in a problem of quality deterioration.

As described above, recently, a color filter forming substrate for a display panel is required to be manufactured in a larger size, and a color filter forming substrate for a display panel or a color filter forming substrate for producing the color filter forming substrate is required. For transportation and storage of intermediate process substrates, further reduction in transportation cost by improving transportation efficiency and space saving of storage space are required, and the plane direction of a rectangular and rigid plate-like object is horizontal. As a tray for holding and holding the plate-like object on the upper side, and a tray for carrying or storing that is used for carrying or storing a plurality of the plate-like objects in a stacked state is used. However, when such a tray is used to receive and deliver a plate-like material by pin support, the plate-like material is delivered at the time of delivery of the plate-like material between the tray and the support pin. There is the back of damage or contamination of the occurrence, which has become a worse cause of quality, this correspondence has been demanded.
The present invention corresponds to this, and is a tray that holds the plate-like object placed on the upper side thereof with the surface direction of the rectangular and rigid plate-like substance as the horizontal direction, and the plate-like object is When receiving and delivering a plate-shaped object by pin support using a tray for conveyance or storage, which is used for conveyance or storage in a stacked state in a mounted state, a plate-shaped object between the tray and the support pin It is an object of the present invention to provide a plate-like material transport method and a plate-like material transport device that does not cause damage or contamination of the back surface of the plate-like material.

The method for transporting a plate-like object of the present invention is a method of receiving, delivering, and conveying the plate-like object in a rectangular shape, having rigidity and having the surface direction of the plate-like object bent by its own weight as the horizontal direction. From the upper side or the lower side of the first stacking portion in which a plurality of the trays on which the plate-like objects are stacked are stacked in order, the tray holding the plate-like objects on the upper side in a bent state is used. The trays on which the pins are placed are taken out one by one, and the position of each pin is controlled to a height corresponding to the bent state of the plate-like object in a state where the plate-like object is bent together with the tray in the opening area of the tray. In the first pin holding section that holds the plurality of pins, the plurality of pins and the tray are relatively received by moving at least one of them in the vertical direction, and the plate-like object is bent. While maintaining the state, remove the tray from the plate, The first plate-shaped object receiving step for receiving only the object in a bent state and the plate-shaped object mounted on the first pin holding unit are horizontally mounted on a transport unit such as a robot arm or a conveyor. Each plate receives a plate mounted horizontally on a transfer unit such as a robot arm, a conveyor, etc. A second pin holding part that holds a plurality of pins whose position can be controlled to a height corresponding to the horizontal state or the bent state of the object, and receives it in a horizontal state or in a bent state. The plate-shaped object receiving step and, if necessary, the position of each pin of the second pin holding part is controlled to a height in a desired bent state, and the plate-like object is obtained by the second pin holding part. A step of holding a plate-like object, While holding the plate-like object in the bent state with the second pin holding part, the plate-like object is mounted on the tray. A tray stacking step is performed in which a plurality of trays on which a product is stacked are stacked on the upper side or the lower side of the second stacking unit, and one or both of a series of transfer processes are performed. It is characterized by this.
And it is a conveyance method of said plate-shaped object, Comprising: It mounts in a 1st pin holding | maintenance part or a 2nd pin holding | maintenance part, and a plate-like object is in the state bent, or horizontal In this state, the plate-like object is moved.
Further, in any one of the above plate-like object conveying methods, in the series of plate-like object receiving and conveying processes, after the first plate-like object receiving step, each pin of the first pin holding portion is set in a predetermined manner. The position of the height corresponding to the bent state is controlled from the height corresponding to the horizontal state, and the plate-like object carrying step is performed while the plate-like object is held horizontally.
Further, in any one of the above plate-like object conveying methods, at least a part of the tip of the first holding part or the second holding part is in contact with the plate-like object. It is characterized by having a movable part that moves in the surface direction of the plate-like object when it comes into contact, and the movable part is a rotating ball that is supported by a ball bearing and rotates. It is characterized by.
Moreover, it is a conveyance method of the plate-shaped object of any one of the above-mentioned, Comprising: The material of the surface part of the said movable part is a thermoplastic resin, It is characterized by the above-mentioned.
Alternatively, the plate-like object conveying apparatus according to any one of claims 1 to 3, wherein at least a part of the pins of the first pin holding part or the second holding part. The tip portion of the plate supports the plate-like object in a non-contact manner, and the tip portion of the at least part of the pin pushes up the plate-like object by the gas pressure, and in a state close to the plate-like object by the non-contact, It is what is supported.
Further, in any of the above plate-like material transport methods, the plate-like material is a color filter forming substrate for a display panel or an intermediate process substrate for producing the color filter forming substrate. It is a feature.

The plate-like material conveying device of the present invention is a device that is rectangular, rigid, receives the plate-like material, delivers and conveys the plate-like material with the surface direction of the plate-like material deflected by its own weight as the horizontal direction. From the upper side or the lower side of the first stacking portion in which a plurality of the trays on which the plate-like objects are stacked are stacked in order, the tray holding the plate-like objects on the upper side in a bent state is used. The trays on which the plates are placed are taken out one by one, and the plate is bent together with the tray, and in the opening area of the tray, the position of each pin is controlled to a height corresponding to the bent state of the plate. In the first pin holding section that holds the plurality of pins, the plurality of pins and the tray are relatively received by moving at least one of them in the vertical direction, and the plate-like object is bent. While maintaining the state, remove the tray from the plate, The first plate-shaped object receiving step for receiving only the object in a bent state and the plate-shaped object mounted on the first pin holding unit are horizontally mounted on a transport unit such as a robot arm or a conveyor. A plate-like object carrying step is performed as a series of plate-like material receiving processes, and a plate-like object horizontally mounted on a conveying part such as a robot arm or a conveyor in order. Each pin is horizontal or bent by a second pin holding portion that is held by a plurality of pins that can be position-controlled at a height corresponding to the horizontal state or bending state of the plate-like object. Receiving the second plate-shaped object receiving step, and if necessary, position-controlling each pin of the second pin holding part to a height in a desired bending state, and at the second pin holding part Hold the plate-like object in a bent state. A bending holding step, a tray mounting step in which the plate-like object is mounted on the tray while the plate-like object is held by the second pin holding portion in a bent state, and the plate-like object and the tray. As a unit, the tray stacking step of stacking a plurality of trays loaded with plate-like objects on the upper side or the lower side of the second stack unit is performed as a series of transfer processes. Or both processing units.
And it is said plate-shaped object conveyance apparatus, Comprising: As for the 1st pin holding | maintenance part and the 2nd pin holding | maintenance part, each pin respond | corresponded to the horizontal state of the plate-shaped object, or the bending state. It is characterized by having a plurality of pins whose position can be controlled at a height.
Further, in any one of the above plate-like object conveying devices, at least a part of the tip of the first holding part or the second holding part is in contact with the plate-like object. It is characterized by having a movable part that moves in the surface direction of the plate-like object when it comes into contact, and the movable part is a rotating ball that is supported by a ball bearing and rotates. It is characterized by.
And it is a conveyance apparatus of the plate-shaped object of any one of Claim 11 thru | or 12, Comprising: The material of the surface part of the said movable part is a thermoplastic resin, It is characterized by the above-mentioned.
Alternatively, the plate-like object transport device according to any one of claims 9 to 10, wherein at least a part of the pins of the first pin holding part or the second holding part. The tip portion of the plate supports the plate-like object in a non-contact manner, and the tip portion of the at least part of the pin pushes up the plate-like object by the gas pressure, and in a state close to the plate-like object by the non-contact, It is what is supported.
Also, any one of the above plate-like material conveying apparatuses, wherein the plate-like material is a color filter forming substrate for a display panel or an intermediate process substrate for producing the color filter forming substrate. It is a feature.

Further, in any one of the above plate-like object conveying devices, the tray holds the plate-like object placed on the upper side thereof with the surface direction of the rectangular and rigid plate-like object being set as the horizontal direction. It is a tray for transportation or storage that is used for transportation or storage by stacking a plurality of the plate-shaped objects in a state where the plate-shaped objects are placed on the tray. The tray is a base material that supports the whole, and a frame inner region is supported by the frame portion larger than the plate-like material, and the plate-like material is vertically moved in the frame inner region of the frame portion. And a plate-like object holding part that is held from the lower side in a state of being bent downward in the direction, and the plate-like object holding part extends along two opposing sides of the four sides of the frame part. The two ends of the plate-like material are supported on the vertical direction in the direction along the other two opposite sides of the four sides of the frame portion. The frame portion is an overlapping portion when a plurality of trays are stacked, and is formed so that the front and back surfaces come into surface contact with each other when a plurality of trays are stacked. It is characterized by that.
Alternatively, in the plate-like material transport apparatus, the tray is a base material that supports the whole, and a frame inner region is supported by a frame portion larger than the plate-like material, and four sides of the frame portion, In the frame inner region of the frame portion, the plate-like object is provided with a plate-like object holding part that is held from the lower side in a state where the plate-like object is bent downward in the vertical direction. The upper surface along each side of the four sides of the frame part is curved downward, and its end along the four sides of the plate-like object so as to be along the four sides of the frame part. And is bent in the vertical direction in the direction along each of the four sides of the frame to support the plate-like object in a bent state. The frame includes a plurality of trays. It is an overlapping portion when overlapping, and is characterized in that when a plurality of trays are stacked, the front and back surfaces are in surface contact with each other.

(Function)
The plate-like material transport method of the present invention has such a configuration, and the surface direction of the rectangular and rigid plate-like material is set as the horizontal direction, and the plate-like material is placed on the upper side and held. When receiving and delivering plate-like objects by pin support using a tray for transportation or storage, which is used for conveyance or storage in a state where a plurality of the plate-like objects are placed on a tray Further, it is possible to provide a method for transporting a plate-shaped object in which the back surface of the plate-shaped object is not damaged or soiled when the plate-shaped object is delivered between the tray and the support pin.
Specifically, in order, using a tray that holds and holds the plate-like object on the upper side in a bent state, from the upper side or the lower side of the first stacking unit in which a plurality of the trays on which the plate-like object is stacked are stacked, The trays on which the objects are placed are taken out one by one, and each pin has a height corresponding to the bending state of the plate-like object in a state where the plate-like object is bent together with the tray in the opening area of the tray. The first pin holding portion that holds the plurality of position-controlled pins receives the plurality of pins and the tray relatively by moving at least one of them in the vertical direction, and deflects the plate-like object. The tray is removed from the plate-like object while holding the state, and only the plate-like object is received in a bent state and is mounted on the first pin holding unit. Placing a plate-like object on a transfer part such as a robot arm or conveyor A plate-shaped object carrying step, which is mounted and received flatly, is performed, a series of plate-shaped object receiving processes, and in order, a plate-shaped object horizontally mounted on a conveying unit such as a robot arm or a conveyor. The second pin holding part that holds each pin with a plurality of pins whose position can be controlled to a height corresponding to the horizontal state or the bent state of the plate-like object is made horizontal or bent. And receiving the second plate-shaped object receiving step and, if necessary, controlling the position of each pin of the second pin holding portion to a height in a desired bent state, to the second pin holding portion. And holding the plate-like object in a bent state, and holding the plate-like object in the second pin holding portion while bending the plate-like object, while the plate-like object is held in the tray. The tray mounting step to be in the mounted state, and the plate and the tray are integrated. The tray stacking step is performed by stacking a plurality of trays each having a plate-like object on the upper side or the lower side of the second stack, and either one of a series of transfer processes, or both This is achieved by processing.
Here, it is mounted on the first pin holding part or the second pin holding part, and as necessary, for example, as a conveyance or as an auxiliary movement, in a state where the plate-like object is bent, or The form of invention of Claim 2 which performs a movement of a plate-shaped object in a horizontal state is mentioned.
Further, in the series of plate-shaped object receiving and conveying processes, after the first plate-shaped object receiving step, each pin of the first pin holding portion is changed from a height corresponding to a predetermined bending state to a height corresponding to a horizontal state. Then, the plate-shaped object is transported in a state in which the plate-shaped object is held horizontally, and the plate-shaped object is formed by a conveying unit such as a robot arm or a conveyor. Can be carried out more smoothly.
In addition, at least a part of the tip of the first holding part or the second holding part is in contact with the plate-like object, and when contacting, in the surface direction of the plate-like object According to an embodiment of the invention of claim 4, which has a movable part that can move, or the tip of at least a part of the pin of the first pin holding part or of the second holding part The part supports the plate-like object in a non-contact manner, and the tip of the at least some of the pins pushes up the plate-like object by gas pressure and supports it in a state close to the plate-like object by non-contact. By adopting the form of the invention of claim 7, it is possible to reliably prevent breakage of the back surface of the plate-like object and occurrence of dirt.
In the form of the invention of claim 4, the movable part includes a rotating ball supported by a ball bearing and rotating.
And as a material of the surface part of the said movable part, a thermoplastic resin is preferable from the surface of intensity | strength and the damage prevention of the back surface of a plate-shaped object.
Examples of the plate-like material include a color filter forming substrate for a display panel or an intermediate process substrate for producing the color filter forming substrate.

By adopting such a configuration, the plate-like object conveying device of the present invention holds the plate-like object placed on the upper side, with the plane direction of the rectangular and rigid plate-like substance being set as the horizontal direction. A tray and a tray for transport or storage that is used for transportation or storage in a state where the plate-shaped object is placed on a tray, and using a tray for transportation or storage, pin receiving and / or delivery of the plate-shaped object is supported. In the case of performing the above, it is possible to provide a plate-like material transport device that does not cause damage or contamination of the back surface of the plate-like material when receiving and delivering the plate-like material between the tray and the support pin. .
Here, A and / or B means that only A, B only, and both A and B are included.

As the first pin holding part and the second pin holding part, each pin has a plurality of pins whose position can be controlled to a height corresponding to the horizontal state or the bent state of the plate-like object. The thing of a form is mentioned.
Thereby, the position of the height of each pin can be controlled in correspondence with the horizontal state or the predetermined bending state of the plate-like object during reception, delivery, and conveyance.
As a driving method for position control of each pin, pneumatic driving can be mentioned, but other driving methods may be used.
In particular, at least a part of the tip of the first holding part or the second holding part is in contact with the plate-like object, and when contacting, in the surface direction of the plate-like object By having a movable part that can move, the back surface of the plate-like object can be prevented from being damaged due to the contact between the plate-like object and the tip of the pin.
Examples of the movable part include a rotating ball that is supported by a ball bearing and rotates. Examples of the material of the surface part of the movable part include a thermoplastic resin.
In addition, the tip of at least a part of the pin of the first pin holding part or the second holding part supports a plate-like object in a non-contact manner, and the at least part of the pin The tip portion pushes up the plate-like object by gas pressure and supports it in a state of being close to the plate-like object by non-contact, thereby preventing the rear surface of the plate-like object from being damaged.
This is effective when the plate-like material is a color filter forming substrate for a display panel or an intermediate process substrate for producing the color filter forming substrate.

The tray is a tray that holds and holds the plate-like object on the upper side, with the surface direction of the rectangular and rigid plate-like object being in the horizontal direction, and a plurality of trays with the plate-like object placed thereon. Examples thereof include a tray for transportation or storage that is used for transportation or storage.
Specifically, the tray is a base material that supports the whole, the frame inner region is larger than the plate-like material, and is supported by the frame portion, and in the frame inner region of the frame portion, the plate And a plate-like object holding portion that holds the shape-like object from the lower side in a state where it is bent downward in the vertical direction. The plate-like object holding portion is one of the two opposite sides of the four sides of the frame portion. Supports both ends of the plate-like object along the side and bends vertically downward in the direction along the other two opposite sides of the four sides of the frame to support the plate-like object Thus, the frame portion is an overlapping portion when a plurality of trays are stacked, and when the plurality of trays are stacked, the front and back surfaces thereof are in surface contact with each other, or a base material that supports the whole, and a frame inner region. Is supported by the frame part larger than the plate-like object and four sides of the frame part, and the plate-like object is vertically arranged in the frame inner region of the frame part. A plate-like object holding portion that is held from the lower side while being bent downward, the plate-like object holding portion has its upper surface along each side of the four sides of the frame portion, Both are curved downward, support the edges along the four sides of the plate-like object along the four sides of the frame, and on each of the four sides of the frame. The plate is bent in the vertical direction and supported in a state where the plate-like object is bent, and the frame portion is an overlapping portion when stacking a plurality of trays. The form currently formed so that the front and back may mutually surface-contact is mentioned.

As will be further described, when the plate-like object of the unit is held by the tray, the plate-like object and the plate-like object holding part are in a predetermined positional relationship with the plate-like object being bent with respect to the frame part. Therefore, even if the tray holding the plate-like object of such a unit is overlapped in surface contact with the frame part, the plate-like objects can maintain the distance by the thickness of the frame. It becomes.
And the plate-shaped object of each tray bends similarly, and the pitch space | interval maintains the thickness of a frame part.

The present invention, as described above, is a tray that holds a plate-like object placed on the upper side thereof with the plane direction of the rectangular and rigid plate-like object as a horizontal direction, and the plate-like object is placed thereon. In the case of using a transport or storage tray that is used for transport or storage in a stacked state, and receiving and delivering a plate-like material by pin support, the plate-like material between the tray and the support pin It is possible to provide a plate-shaped material transport method and a plate-shaped material transport device that does not cause damage or contamination of the back surface of the plate-shaped material during delivery.
In particular, a color filter forming substrate for a display panel having a functional part on one side thereof, or an intermediate process substrate for producing the color filter forming substrate is used as a plate, and the plate is held in a bent state. Using a tray, one surface of a plate-like object, for example, a surface provided with a functional part is stacked, transported and stored in a state where the plate-like objects are kept at a predetermined interval without contacting each other. Can be easily and efficiently performed, and can more reliably cope with quality.

Embodiments of the present invention will be described with reference to the drawings.
FIG. 1A to FIG. 1F are schematic views showing the flow of plate-shaped material receiving and conveying processing in an embodiment of the plate-shaped material conveying method of the present invention. 2 (e) is a schematic diagram showing the flow of the plate-like material transfer conveyance process in the embodiment of the plate-like material conveyance method of the present invention, and FIGS. 3 (a) to 3 (c) are bent. FIG. 3D is a diagram illustrating an example of the tip of the pin when the plate-like object held in the tray is held horizontally by a plurality of pins, and FIG. 4 (a) to 4 (c) are diagrams for explaining holding and bending states by a plurality of pins, respectively, and FIGS. 5 (a) to 5 (d) are conventional plate-like object receiving and conveying processes. 5 (a1) to FIG. 5 (d1) are schematic diagrams illustrating the flow of a conventional plate-like material transfer and conveyance process, and FIG. 6 (a1) to FIG. 4) is a diagram for explaining the movement of a pin when a conventional plate-like object bent and held on a tray is horizontally held by a plurality of pins, and FIGS. 6 (b1) to 6 (b4) are diagrams. FIG. 7A is a diagram for explaining the movement of a pin when a plate-like object horizontally held by a plurality of conventional pins is bent and held on a tray. FIG. 7A shows a state in which the plate-like object is bent. FIG. 7A to FIG. 7F are diagrams for explaining the stacking of the trays that hold the plate-like object in a bent state, and FIG. FIG. 8A is a schematic configuration diagram of still another example of a tray that holds a plate-like object in a bent state, and FIGS. 8A to 8D hold the plate-like object in a bent state. FIGS. 9A to 9E are diagrams for explaining stacking of trays for horizontally holding a conventional plate-like object. 0 (a) ~ FIG 10 (d) are sectional views for explaining a switch to support the horizontal state from the support in a state flexed by the pin.
In FIGS. 1 to 3, 5, and 6, a thick arrow indicates the progress direction of the process.
FIGS. 3A to 3C are views corresponding to one cross section in the processing shown in FIGS. 1B to 1C.
In FIG. 6, the dotted line indicates the horizontal direction.
7 (e), 7 (f), 9 (d), and 9 (e) are shown in a state in which the frame portion of each tray is separated for easy understanding. The frame portions are in surface contact with each other.
1 to 9, 1, 1A is a stacking portion (also referred to as a first stacking portion), 2, 2A is a stacking portion (also referred to as a second stacking portion), 10, 10A is a tray, and 20 is a plate-like object. , 30 is a pin holding portion (also referred to as a first pin holding portion), 30a is a pin holding portion (also referred to as a second pin holding portion), 30A is a pin holding portion, 31, 31a to 31f are pins, and 32 is movable. Part (also called a ball), 33 is a fixing part, 34 is a tip fixing part, 35 is a shaft, 36 is a shaft slide fixing part, 40 is a robot, 41 is a robot arm, 110 is a tray, 120 is a frame part, 130 is a plate 130a to 130d are support parts (also referred to as holding parts), 140 is a plate, 210 is a tray, 220 is a frame part, 230 is a plate object holding part, and 230a to 230d are support parts (holding parts). Also, 240 is a plate, 310 is Lee, 320 frame portion, 330 the bottom (supporting portion), 340 is a plate-like material.

First, an example of an embodiment of the plate-like material transport method of the present invention will be described with reference to FIG.
In this example, the plate-like object is transported by a method of receiving, delivering, and conveying the plate-like object with a rectangular shape, rigidity, and the plane direction of the plate-like object bent by its own weight as the horizontal direction. As shown in FIG. 1, a first stacking unit 1 in which a plurality of trays 10 on which plate-like objects 20 are placed is stacked in order using a tray 10 that holds and holds the plate-like objects 20 on the upper side in a bent state. The trays 10 on which the plate-like objects 20 are placed are taken out one by one from the upper side of the sheet, and each pin 31 is in a state where the plate-like objects 20 are bent together with the tray 10 in the opening area of the tray. The first pin holding unit 30 that holds the plurality of pins 31 that are position-controlled at a height corresponding to the bending state of 20 receives the plurality of pins and the tray by relatively moving in the vertical direction, While holding the bent state of the plate-like object 10, the tray 10 is A first plate receiving step for removing the plate 20 and receiving only the plate 20 in a bent state, and the plate 20 mounted on the first pin holding unit 30 on the robot arm 41. It includes a series of plate-shaped object receiving processes for performing a robot arm transfer step that is horizontally mounted and received and transferred.
When taking out the tray 10 that holds the plate-like object 20 on the upper side in a bent state from the first stack 1, a method such as lifting the whole or lifting a tray other than the lowermost stage is used. By taking the above, the trays on which the plate-like objects are placed may be taken out one by one from the lower side.
Further, in this example, after the reception of the plate-like object 20 by the pin 31 is completed, the transfer of the plate-like object 20 downstream is performed by the robot 40. For example, a conveyor (see FIG. (Not shown) may be arranged, and after receiving the plate-like object 20 by the pin 31, it may be transferred downstream by a conveyor.
In addition, as shown in FIG. 2, the plate-like object 20 mounted horizontally on the robot arm 41 is sequentially positioned so that each pin 31 is at a height corresponding to the horizontal state or the bent state of the plate-like object. A second plate receiving step for receiving in a horizontal state or a bent state at the second pin holding portion 30a held by a plurality of controllable pins, and, if necessary, the second plate receiving step A plate-like object in which each pin of the second pin holding part 30a is position-controlled to a height in a desired bending state and the plate-like object 20 is held in a bent state by the second pin holding part 30a. A tray holding step, and a plate-like object in which the plate-like object 20 is mounted on the tray 10 while being held by the second pin holding part 30a in a state where the plate-like object 20 is bent. 20 and the tray 10 are integrated, and a plate-like object 20 is placed thereon. Stacking tray 10 to the second upper stacking unit 2 stacked plurality, and the tray stacking step is performed, in which a series of transfer processes.
When stacking a plurality of trays 10 on which plate-like objects 20 are stacked, the stacks are stacked under the second stacked portion 2 or stacked under the entire lifted tray or under the entire lifted tray. By taking a method such as stacking on a pedestal, trays on which plate-like objects are placed may be delivered one by one from the lower side.
In this example, the plate-like object 20 mounted horizontally on the robot arm 41 is transferred to the pin 31. For example, the pin 31 is placed under the conveyor on which the plate-like object 20 mounted horizontally is placed. And the 2nd pin holding | maintenance part 30a may be arrange | positioned and the plate-shaped object 20 may be delivered by the pin 31. FIG.
Examples of the plate-like material 20 include, but are not limited to, a color filter forming substrate for a display panel or an intermediate process substrate for producing the color filter forming substrate.

The plate-like object receiving process in this example will be further described with reference to FIG.
First, the tray 110 shown in FIG. 7A and the tray 210 shown in FIG. 8A are used as the tray 10, and a plurality of trays 10 on which the plate-like object 20 is bent are stacked. Part 1 is prepared. (Fig. 1 (a))
Next, from the upper side of the first stack 1, the trays 10 placed in a state where the plate-like object 20 is bent are held one by one with a predetermined holder and taken out, in the opening region of the tray In the state where the plate-like object 20 is bent together with the tray 10, each pin 31 is held by a plurality of pins 31 whose positions are controlled to the height corresponding to the bent state of the plate-like object 20. At 30 (FIG. 1 (b)), the tray 10 is removed from the plate 20 while the bent state of the plate 10 is held, and only the plate 20 is received in a bent state. (Fig. 1 (c))
The take-out of the tray on which the plate-like object is placed from the first stacking unit 1 in FIG. 1A is not particularly limited. For example, a tray having an adsorbing unit along the side of the frame unit, There is a form in which a robot arm is used.
In the case of a form using a robot arm, for example, as a tray, a conveyance support part (not shown) protruding outside the frame part is provided along two opposing side parts of the tray. Use a robot arm to support the transfer support with the robot arm and lift the tray.
In addition, as described above, the plurality of pins 31 are all in contact with each other to support and receive the plate-like object 20, but are not limited thereto.
For example, at least a part of the plurality of pins 31 receives and supports the plate-like object 20 in a non-contact manner, and the tip part of the at least some pins pushes up the plate-like object 20 by gas pressure, The form which supports in the state which adjoined the plate-shaped object by non-contact is also mentioned.
Next, the plate-like object 20 mounted on the first pin holding unit 30 is left in a bent state (FIG. 1D) or in a horizontal state (FIG. 1E), and the robot It is mounted horizontally on the arm 41 (FIG. 1 (f)) and conveyed.
Here, the reason why the plate-like object bent and held on the tray is held horizontally by the plurality of pins is because it is easy to receive the robot arm 41. The pin is moved in the direction of the dotted arrow shown in FIG. 3 (c). At this time, the contact portion between the upper top of the pin and the back surface of the plate-like object may be scratched to prevent this. For example, as shown in FIG. 3D, a rotatable ball 32 supported by a small ball bearing (not shown) is provided as a movable portion at the top of the pin, and the surface material thereof is a thermoplastic resin. It is said.
Further, among thermoplastic resins, ultra high molecular weight polyethylene (UHMW-PE), polyamide resins such as nylon 66 and nylon 610, polyether ether ketone (PEEK) and polyimide are particularly desirable.
In order to make the pins horizontal from the height of each pin along the deflection of FIG. 3A, the pins 31a and 31c are relatively lowered as shown in FIG. As shown in 3 (c), the pin 32b is relatively lifted upward.
In addition to the method described above, the plate-like object bent and held on the tray is held horizontally by moving the pin not only in the vertical direction but also in the horizontal direction or the rotation direction. Also good.
For example, as shown in FIG. 10 (a), pins 31d to 31f are inclined and arranged in a direction substantially perpendicular to the contacting surface on a plate-like object 20 that is bent in a predetermined bending state and supported by the tray 10. By moving the pins in the vertical direction or in the vertical direction and the horizontal direction, the pins are brought into contact with each other while maintaining the predetermined bending state close to the tray 10 (FIG. 10B), and the tray 10 side is further moved. The plate-like object 220 is supported while being relatively lowered from the pins 31d to 31f side and maintaining the predetermined bending state only on the pins 31d to 31f side (FIG. 10 (c)). While controlling the inclination, the pins are rotated, moved vertically, and moved horizontally so that all the pins supporting the plate-like object 20 are aligned vertically and the tip positions of the pins are aligned horizontally. (Fig. 10 (d))
In this manner, in the support of the plate-like object 20 by the pins 10, the support in the state where the plate-like object 220 is bent can be switched to the support in the horizontal state.
In this way, a receiving process for receiving the plate-like object 20 from the first stacking unit 1 is performed.

The plate-like material delivery process in this example will be further described with reference to FIG.
First, a plurality of plate-like objects 20 (FIG. 2A) mounted horizontally on the robot arm 41 can be position-controlled so that each pin 41 has a height corresponding to the horizontal state or the bent state of the plate-like object. In the second pin holding portion 30a held by this pin, it is leveled (FIG. 2 (b)) or bent (FIG. 2 (c)) and received.
When receiving horizontally, each pin 41 is position-controlled to a height corresponding to the horizontal state of the plate-like object, and when receiving in a bent state, each pin 41 is received by the plate-like object. The position is controlled to a height corresponding to the desired bent state.
When the plate-like object 20 is in a horizontal state, the position of each pin 31 of the second pin holding portion 30a is controlled to a height in a desired bending state, and the second pin holding portion 30a The shape 20 is held in a bent state.
Next, the plate-like object 20 is mounted on the tray 10 while being held by the second pin holding portion 30a in a state where the plate-like object 20 is bent. (Fig. 2 (d))
Here, the tray 10 is transported by a predetermined holder, and the plate-like object 20 is mounted on the tray 10 along the plate-like object 20 from the lower side.
Next, the plate-like object 20 and the tray 10 are integrated, and the trays 10 on which the plate-like objects 20 are placed are stacked on the upper side of the second stacking unit 2. (Fig. 2 (e))
The stacking of the trays on which the plate-like objects are placed on the second stacking portion 1 in FIG. 2 (e) is not particularly limited. For example, the tray having the suction portion along the side portion of the frame portion, There is a form in which a robot arm is used.
In the case where the robot arm is used, as described above, the tray has a conveyance support portion (not shown) protruding outward along the frame portion, and two opposite side portions of the tray. The tray is lifted by supporting the transfer support by the robot arm.
In this way, a delivery process for delivering the plate-like object 20 to the second stacked unit 2 is performed.
The second pin holding portion 30a is basically the same as the first pin holding portion 30. The upper tip of the pin is provided with a ball 32 that can be rotated by a ball bearing support as a movable portion, and its surface material is the same. It is a thermoplastic resin.

Here, the stacking of the tray 10 and the tray on which the plate-like object is placed will be described.
As the tray 10, for example, a plate-like tray (hereinafter also referred to as a plate-like tray) 110 of the first example as shown in FIG. 7A is used.
The plate-like object tray 110 of the first example is a tray 110 that holds the plate-like object 140 placed on the upper side thereof, with the surface direction of the rectangular and rigid plate-like object 140 being the horizontal direction, and This is a transport or storage tray that is used for transport or storage in a state where a plurality of plate-like objects 140 are placed thereon, and is a base material that supports the whole. And a plate-like object holding part 130 that is supported by the frame part 120 and holds the plate-like object 140 from the lower side in a state of being bent downward in the vertical direction in the frame inner region of the frame part 120. It is a thing.
The plate-like object holding unit 130 includes support parts 130a, 130b, 130c, and 130d that are in contact with and supported by the plate-like object 140, and two opposite sides of the four sides of the frame part 120 by the support parts 130b and 130d. So that both ends of the plate-like object 140 are supported along the four sides of the frame portion and bent downward in the vertical direction in the direction along the other two opposite sides of the four sides of the frame portion by the support portions 130a and 130c. The shape 140 is supported.
The plate-like object holding portion 130 is curved so as to follow the bending of the plate-like object 140 to be held. In this example, the curved shape is close to the bending shape in the bending direction due to the weight of the plate-like object. Each support portion 130 a, 130 b, 130 c, 130 d is formed along the plate-like object 140.
The frame portion 120 is an overlapping portion when a plurality of trays 110 are stacked, and is formed such that the front and back of the tray 110 come into surface contact with each other when stacking a plurality of trays 110. In each side, the front and back surfaces are flat, and the front and back surfaces of each side are located on one plane.
Further, in the first example, the plate-like object holding unit 130 is disposed only on the peripheral portion of the plate-like object 140 to be held, supports the peripheral portion of the plate-like object 140, and is held. An area corresponding to the internal area of the plate-like object 40 is an opening.
The tray 110 of the first example can be in a state where the plate-like object 140 is bent by such a configuration, and one surface of the plate-like object, for example, a surface provided with a functional part is brought into contact with the other. In addition, the plate-like objects can be stacked, transported and stored easily while maintaining a predetermined interval.
Although the plate-like object holding part 130 is not shown here, the shape of the plate-like object holding part 130 is a shape along the plate-like object 140, and the thickness of the plate-like object holding part 130 is required to be thinner than the thickness of the frame part 120, and some bending is caused. It is preferable that the thickness of the frame portion 120 is sufficiently thinner in consideration of the variation and vibration of the frame portion 120.
Note that the frame portion 120 is preferably made of a material having a high strength and a light weight, such as aluminum.
Each of the support parts 130a to 130d of the plate-like object holding part 130 is also preferably a material having a high strength and a light weight. For example, a cushioning material is used for a portion that contacts the plate-like object 140 using aluminum as a base material. The form to provide is preferable.

When the plate-like object 140 is held by such a tray 110, the plate-like object 120 and the plate-like object holding unit 130 are in a predetermined positional relationship with respect to the frame part 120 in a state where the plate-like object 120 is bent. Therefore, even if the tray 110 holding the plate-like object 140 of such a unit is overlapped in surface contact with the frame portion 120, the plate-like objects are spaced apart by the thickness of the frame. It can be maintained.
Thus, what laminated | stacked the plate-shaped object is equivalent to the 1st stacking part 1 shown to Fig.1 (a), and the 2nd stacking part 2 shown to FIG.2 (e).
When the trays are stacked in this manner, that is, when the first stacking portion 1 and the second stacking portion 2 are formed, although not shown here, for example, the frame portion 120 A dedicated pedestal having a shape corresponding to the shape of the tray and having a shape corresponding to the frame portion 120 of the tray is used as the pedestal.

Furthermore, when the plate-like object tray 110 according to the first example is used, the stacking of the plate-like object 140 and the stack of the trays 110 on which the plate-like object 140 is mounted are shown in FIGS. A brief description will be given based on this.
First, the plate-like object tray 110 of the first example is prepared (FIG. 7A), and the plate-like object 140 is formed in a plate-like shape so that the peripheral portion thereof is placed on each of the support portions 130a to 130d. When placed on the object holding part 130, the plate-like object 140 is supported at both ends by the support parts 130b and 130d so as to be along two opposite sides of the four sides of the frame part 120. The support portions 130a and 130c are supported by being bent downward in the vertical direction in the direction along the other two opposite sides of the four sides of the frame portion in a state along the support portions 130a and 130c. (FIG. 7 (b) to FIG. 7 (c))
In this way, the plate-like object 140 is mounted on the tray 110 in a bent state.
Next, in this way, two trays on which the plate-like object 140 shown in FIG. 7C is mounted are overlapped (FIG. 7E), and the plate-like object 140 shown in FIG. The mounted trays are stacked (FIG. 7f), and the three are in a stacked state.
The frames are stacked in surface contact.
In this way, the layers are sequentially stacked.
Alternatively, the same tray on which the plate-like object 140 is not mounted is placed on the upper side of the tray on which the plate-like object 140 shown in FIG. 7 (c) is mounted. It is placed on the plate-like object holding part 130 so that the peripheral part is placed on each of the support parts 130a to 130d, and two trays on which the plate-like objects 140 are mounted are stacked. (Fig. 7 (e))
Furthermore, on this, the same tray on which the plate-like object 140 is not mounted is placed, and further, the plate-like object 140 is similarly placed thereon so that the peripheral portion thereof is placed on each of the support portions 130a to 130d. It is placed on the plate-like object holding part 130 to obtain a stack of three trays on which the plate-like objects 140 are mounted. (Fig. 7 (f))
In this way, the layers are sequentially stacked.

As the tray 10, for example, a plate-like tray (hereinafter also referred to as a plate-like tray) 210 of the second example as shown in FIG. 8A is used.
Similarly to the plate-like object tray 110 of the first example, the second plate-like object tray 210 also has the plate-like object 240 as its horizontal direction with the surface direction of the rectangular and rigid plate-like object 240 as the horizontal direction. A tray 210 for holding on the upper side, and a tray for transportation or storage that is used for transportation or storage in a state where a plurality of plate-like objects 240 are placed thereon. A state in which the inner region is supported by the rectangular frame portion 220 larger than the plate-like object and four sides of the frame portion 220 and the plate-like object 240 is bent downward in the vertical direction in the frame inner region of the frame portion 220. And a plate-like object holding part 230 that is held from the lower side.
In the second plate-like object tray 210, the plate-like object holding portion 230 includes four support portions 230 a, 230 b, 230 c, and 230 d along the four sides of the frame portion 220, and each of the four sides of the frame portion 220. The upper surfaces along the sides are all curved downward, and support the end portions along the four sides of the plate-like object 240 so as to follow the four sides of the frame portion 220, and In the direction along each of the four sides of the frame portion 220, the plate-like object 240 is supported in a bent state by bending downward in the vertical direction.
Although the plate-like object holding unit 230 is curved so as to follow the bending of the plate-like object 240 to be held, for example, although not shown, the curved shape is arranged on the diagonal of the plate-like object 240. When only two corner portions are supported, the shape is close to the bent shape due to the weight of the plate-like object, and is curved along the plate-like object 240. Each of the support portions 230a, 230b, 230c, and 230d is the plate-like object 240. The plate-like object 240 is supported along the line.
The frame portion 220 is an overlapping portion when a plurality of trays 210 are stacked, and is formed such that the front and back of the trays 210 are in surface contact with each other when stacking a plurality of trays 210. Each of the four sides has a shape along a curve along each side of the plate-like object holding unit 30.
In addition, the plate-like object holding unit 230 is disposed only in the peripheral portion of the plate-like object 240 to be held, supports the peripheral portion of the plate-like object 240, and is an internal region of the plate-like object 240 to be held. The area corresponding to is an opening.
About the material of each part, the thing similar to the tray 110 for plate-like objects of a 1st example is used.

Furthermore, when the plate-like object tray 210 of the second example is used, the mounting of the plate-like object 240 and the stacking of the tray 210 on which the plate-like object 240 is mounted are shown in FIGS. 8 (a) to 8 (d). A brief explanation based on the above.
A plate-like object tray 210 of the second example is prepared (FIG. 8A), and the plate-like object 240 is placed on the respective support parts 230a to 230d so that the peripheral part of the plate-like object 240 is placed on the respective support parts 230a to 230d. The plate-like object 240 is supported by the four support portions 230a, 230b, 230c, and 230d at the ends of the sides along the four sides of the frame portion 220, and The frame portion 220 is supported while being bent downward in the vertical direction in the direction along each of the four sides of the frame portion 220. (FIGS. 8B to 8C)
In this way, the plate-like object 240 is mounted on the tray 210 in a bent state.
Next, in this way, the trays on which the plate-like objects 240 shown in FIG. 8C are mounted are sequentially stacked with their frame portions 220 in surface contact with each other. (Fig. 8 (d))
In this way, stacking of trays on which plate-like objects are placed with the frame portions in surface contact is performed.
Also in this case, actually, it is superposed on a pedestal (not shown) and transported or the like.

Here, mounting and stacking of plate-like objects according to an example of a conventional tray will be briefly described with reference to FIG.
As shown in FIG. 9A, the frame portion 320 is an overlapping portion and a bottom portion (support portion) 330 on which a plate-like object is mounted. The bottom portion (support portion) 330 is fixed to the frame portion. 320 is a strong plate-like material that covers the entire region inside the frame, and even if a plate-like object is mounted horizontally on it, it does not bend due to its own weight.
In the case of this conventional tray, for example, a plate in which a plate-like object is mounted on the bottom 330 in a horizontal state is sequentially stacked on the frame (FIGS. 9A to 9C), Two trays on which the objects are mounted are overlapped (FIG. 9 (d)) and tripled (FIG. 9 (e)).
In this way, the desired number of stacks is obtained, but in this conventional tray, the plate-like object is just mounted on the bottom, and is displaced by vibrations such as transportation, so that the functional surface comes into contact. In some cases, the ends may be damaged due to scraping or dust may be generated, resulting in quality problems.
In contrast, the plate-like object tray 110 of the first example and the plate-like object tray 210 of the second example are both mounted in a state of being bent downward in the vertical direction. It is possible to reduce the floating of the plate-like object due to vibrations at the time, and to eliminate such quality problems.

When the conventional tray 310 that is held horizontally as shown in FIG. 9 (a) is used, the trays 10A on which the plate-like objects 20 are placed are stacked horizontally, but FIGS. 5 (a) to 5 (d). As shown in FIG. 5A, basically, as in the case of this example, the plate-like object is received and processed in a horizontal state, and as shown in FIGS. 5 (a1) to 5 (d1). In the same manner as in this example, the plate-like object is transferred in a horizontal state.
Although the tray shown in FIG. 9A is not explicitly shown, pin operation is possible.

In the case of the tray shown in FIG. 7 (a) or FIG. 8 (a), conventionally, the tray 10 (110 in FIG. 7, 110 in FIG. 8) is used as shown in a cross section in FIG. 6 (a1) to FIG. 6 (a4). The plate-like object 20 is received from the pin holding portion to the pin 31 of the pin holding portion in a horizontal state, and one section is shown in FIGS. 6 (b1) to 6 (b4). The transfer from the pin 31 of the pin holding portion to the tray 10 (corresponding to 130 in FIG. 7 and 230 in FIG. 8) was performed in a horizontal state. For this reason, during receipt and delivery, the plate-like object 20 and the plate-like object holding portion of the tray 10 (corresponding to 130 in FIG. 7 and 230 in FIG. 8) are rubbed, causing the occurrence of quality defects such as dirt or scratches. It was.
In the series of receiving processes of this example shown in FIG. 1, such a rubbing between the plate-like object 20 and the plate-like object holding portion of the tray 10 does not occur.

In addition, although it may be mounted in a pin holding part by the bending condition of a plate-shaped object as shown to FIG. 4 (a), FIG.4 (b), although not illustrated about these bending conditions, the above-mentioned In the first plate-like object tray 110, for example, the downward bending of the support portions 130a and 130c (see FIG. 7) is matched, and further, the belt-like support portions having such a curved shape are combined with the support portions 130b and 130d. It can respond with the modification (not shown) of the 1st tray for plate-like objects arranged so that it may straddle.
Further, the plate-like object may be placed on the pin holding portion as shown in FIG. 4C, but this bending condition can be handled by the second plate-like object tray 210. .

As an example of the plate-shaped article conveyance device of the present invention, any one of a reception processing unit that performs a series of reception processing shown in FIG. 1 and a delivery processing unit that performs a series of delivery processing shown in FIG. , One or both are provided.
As the tray, the stacking portion of the tray on which the plate-like object is placed, and the pin holding portion, those described above can be applied, and description of these respective portions is omitted.
The first stacking unit (corresponding to 1 in FIG. 1 (a)) takes out to the tray on which the plate-like object is placed, or is taken out from the tray on which the plate-like object is placed, or is received by the second stacking unit 2 The delivery / delivery unit is not particularly limited. For example, there is a configuration in which a suction unit is provided along the side of the frame, or a configuration in which a robot arm is used.
In the case of using a robot arm, the tray has a transport support portion (not shown) protruding outward along the frame portion along two opposite sides of the tray. Use the robot arm to support and lift the transfer support.

Fig.1 (a)-FIG.1 (f) are the schematic which showed the flow of the receiving conveyance process of the plate-shaped object in the embodiment of the conveyance method of the plate-shaped object of this invention. FIG. 2A to FIG. 2E are schematic views showing the flow of the plate-like material transfer and conveyance process in the embodiment of the plate-like material conveyance method of the present invention. FIGS. 3A to 3C are diagrams for explaining the movement of the pins when the plate-like object bent and held on the tray is held horizontally by a plurality of pins, and FIG. FIG. 4 is a view showing an example of a tip portion of a pin. FIG. 4A to FIG. 4C are diagrams for explaining holding and bending states by a plurality of pins, respectively. 5 (a) to 5 (d) are schematic views showing the flow of the conventional plate-like object receiving and conveying process, and FIGS. 5 (a1) to 5 (d1) are conventional plate-like object delivering and conveying processes. It is the schematic which showed the flow of the process. 6 (a1) to 6 (a4) are diagrams for explaining the movement of a pin when a conventional plate-like object bent and held on a tray is horizontally held by a plurality of pins. b1) to FIG. 6 (b4) are diagrams for explaining the movement of the pins when the plate-like object horizontally held by a plurality of conventional pins is bent and held on the tray. FIG. 7A is a schematic configuration diagram of an example of a tray that holds a plate-like object in a bent state, and FIGS. 7A to 7F hold the plate-like object in a bent state. It is a figure for demonstrating stacking of this tray. FIG. 8A is a schematic configuration diagram of still another example of a tray that holds a plate-like object in a bent state, and FIGS. 8A to 8D are states in which the plate-like object is bent. It is a figure for demonstrating stacking | stacking of this tray hold | maintained. FIG. 9A to FIG. 9E are views for explaining stacking of conventional trays for horizontally holding a plate-like object. FIG. 10A to FIG. 10D are cross-sectional views for explaining switching from support in a bent state to support in a horizontal state by a pin.

Explanation of symbols

1, 1A stacking part (also called first stacking part)
2, 2A stacking section (also called second stacking section)
10, 10A Tray 20 Plate-like object 30 Pin holding part (also referred to as first pin holding part)
30a Pin holding part (also called second pin holding part)
30A pin holding part 31, 31a-31f pin 332 movable part (also called a ball)
33 fixing portion 34 tip fixing portion 35 shaft 36 axis slide fixing portion 40 robot 41 robot arm 110 tray 120 frame portion 130 plate-like object holding portions 130a to 130d supporting portions (also referred to as holding portions)
140 plate-like object 210 tray 220 frame part 230 plate-like object holding part 230a to 230d support part (also referred to as holding part)
240 Plate 310 310 Tray 320 Frame 330 Bottom (Support)
340 Plate

Claims (18)

  A method of receiving, delivering, and transporting a plate-like object having a rectangular shape, rigidity, and the plane direction of the plate-like object deflected by its own weight as a horizontal direction, in which the plate-like object is bent in order. From the upper side or the lower side of the first stacking portion in which a plurality of trays on which plate-like objects are stacked are used, the trays on which the plate-like objects are placed one by one, In the opening area of the tray, in the state where the plate-like object is bent together with the tray, each pin is held by a plurality of pins whose positions are controlled to the height corresponding to the bent state of the plate-like object. In the pin holding portion, the plurality of pins and the tray are relatively received by moving at least one of them in the vertical direction, and the tray is formed in a plate shape while holding the bent state of the plate-like object. Remove from the object and receive only the plate-like object in a bent state The first plate receiving step, and the plate mounted on the first pin holding unit is horizontally mounted on a transfer unit such as a robot arm or conveyor, and is received and transferred. A series of plate-shaped object receiving processes, in order, a plate-like object horizontally mounted on a transfer unit such as a robot arm or a conveyor, and each pin is in a horizontal state or a bent state of the plate-like object And receiving a second plate-like object that is received in a horizontal state or in a bent state at a second pin holding portion that is held by a plurality of pins whose position can be controlled to a height corresponding to Accordingly, each pin of the second pin holding portion is position-controlled to a height in a desired bending state, and the plate-like object is held in a bent state by the second pin holding portion. The plate-like object bending holding step and the second state in which the plate-like object is bent A tray mounting step in which the plate-like object is mounted on the tray while being held by the pin holding unit, and a second stack of the plate-like object and the tray on which the plate-like object and the tray are integrated. A method for transporting a plate-like object, comprising performing a tray stacking step of stacking on an upper side or a lower side of the stacking unit, performing a series of delivery processes, or both processes.   It is the conveyance method of the plate-shaped object of Claim 1, Comprising: It mounts in a 1st pin holding | maintenance part or a 2nd pin holding | maintenance part, and a plate-shaped object is bent as needed, or A method for conveying a plate-like object, wherein the plate-like object is moved in a horizontal state.   3. The plate-like object transport method according to claim 1, wherein, in the series of plate-like object receiving and conveying processes, after the first plate-like object receiving step, a first pin holding is performed. The position of each pin of the section is controlled from the height corresponding to the predetermined bending state to the height corresponding to the horizontal state, and the plate-like object carrying step is performed while the plate-like object is held horizontally. To transport plate-like objects.   It is a conveyance method of the plate-shaped object of any one of Claim 1 thru | or 3, Comprising: The front-end | tip part of at least one part pin of the said 1st holding | maintenance part or the said 2nd holding | maintenance part is A method for conveying a plate-like object, characterized by having a movable part that comes into contact with the plate-like object and is movable in the surface direction of the plate-like object when contacting.   5. The plate-like material carrying method according to claim 4, wherein the movable part is a rotating ball that is supported by a ball bearing and rotates.   6. The method for transporting a plate-like object according to claim 4, wherein a material of a surface portion of the movable part is a thermoplastic resin.   4. The plate-like material transfer device according to claim 1, wherein the tip of at least a part of the first pin holding part or the second holding part is provided. Is to support the plate-like object in a non-contact manner, and the tip of at least some of the pins pushes up the plate-like object by gas pressure and supports it in a state close to the plate-like object by non-contact. A method for transporting a plate-like object.   The method for transporting a plate-like object according to any one of claims 1 to 7, wherein the plate-like object is for producing a color filter forming substrate for a display panel or the color filter forming substrate. A method for conveying a plate-like object, which is an intermediate process substrate.   A device that receives, delivers, and transports a plate-like object in a rectangular shape, is rigid, and has a horizontal direction as a surface direction of the plate-like object that is bent by its own weight. From the upper side or the lower side of the first stacking portion in which a plurality of trays on which plate-like objects are stacked are used, the trays on which the plate-like objects are placed one by one, In the state where the plate-like object is taken out and bent together with the tray, each pin is held by a plurality of pins whose positions are controlled to the height corresponding to the bent state of the plate-like object in the opening region of the tray. In the pin holding portion, the plurality of pins and the tray are relatively received by moving at least one of them in the vertical direction, and the tray is formed in a plate shape while holding the bent state of the plate-like object. Remove from the object and receive only the plate-like object in a bent state The first plate receiving step, and the plate mounted on the first pin holding unit is horizontally mounted on a transfer unit such as a robot arm or conveyor, and is received and transferred. Steps are performed as a series of plate-like material receiving processes. The receiving processing unit, in order, a plate-like material mounted horizontally on a transfer unit such as a robot arm or a conveyor, each pin is in a horizontal state of the plate-like material. Or receiving a second plate-like object that is received horizontally or in a bent state by a second pin holding portion that is held by a plurality of pins whose position can be controlled to a height corresponding to the bent state. Step, and if necessary, the position of each pin of the second pin holding portion is controlled to the height in a desired bending state, and the plate-like object is bent at the second pin holding portion. A plate-shaped object bending holding step, and a plate-shaped object While holding the second pin holding portion in a bent state, the plate-like object is mounted on the tray. The tray mounting step, the plate-like object and the tray are integrated, and the plate-like object is loaded. One of the processing units, or both of the processing units, which performs the tray stacking step as a series of transfer processing, stacking the trays on the upper side or the lower side of the second stacking unit in which a plurality of trays are stacked. A plate-like material conveying device comprising:   It is a conveyance apparatus of the plate-shaped object of Claim 9, Comprising: As for the 1st pin holding | maintenance part and the 2nd pin holding | maintenance both, each pin is in the horizontal state of a plate-shaped object, or a bending state. A plate-like object conveying device comprising a plurality of pins whose position can be controlled to a corresponding height.   11. The plate-like material transport device according to claim 9, wherein at least a tip portion of a pin of the first holding part or the second holding part is provided. An apparatus for transporting a plate-like object, characterized by having a movable part that comes into contact with the plate-like object and is movable in the surface direction of the plate-like object when contacting.   12. The plate-like material conveying apparatus according to claim 11, wherein the movable part is a rotating ball that is supported by a ball bearing and rotates.   The plate-like material conveying apparatus according to any one of claims 11 to 12, wherein a material of a surface portion of the movable part is a thermoplastic resin.   11. The plate-like material transfer device according to claim 9, wherein the tip of at least a part of the first pin holding part or the second holding part is provided. Is to support the plate-like object in a non-contact manner, and the tip of at least some of the pins pushes up the plate-like object by gas pressure and supports it in a state close to the plate-like object by non-contact. A plate-like object conveying apparatus characterized by the above.   15. The plate-like material transport apparatus according to claim 9, wherein the plate-like material is used for producing a color filter forming substrate for a display panel or the color filter forming substrate. A plate-like material transfer apparatus, which is an intermediate process substrate.   The plate-like object conveying device according to any one of claims 9 to 15, wherein the tray is a rectangular and rigid plate-like object in a horizontal direction, and the plate-like object is Conveying a plate-like object characterized in that it is a tray that is placed on the upper side of the tray and is used for conveyance or storage in a state where a plurality of the plate-like objects are placed on top of each other. apparatus.   The plate-like material conveying apparatus according to claim 16, wherein the tray is a base material that supports the whole, a frame inner region is supported by the frame portion larger than the plate-like material, the frame portion, In the frame inner region of the frame portion, the plate-like object is provided with a plate-like object holding portion that holds the plate-like object from the lower side in a state of being bent downward in the vertical direction. The two ends of the plate-like object are supported along one of the two opposite sides, and bent downward in the vertical direction in the direction along the other two opposite sides of the four sides of the frame portion. The frame part is an overlapping part when stacking a plurality of trays, and is formed such that the front and back of the tray are in surface contact with each other when stacking a plurality of trays. A plate-like material transport device.   17. The plate-like object conveying apparatus according to claim 16, wherein the tray is a base material that supports the whole, and a frame inner region is supported by a frame part larger than the plate-like object and four sides of the frame part. And a plate-like object holding part that holds the plate-like object from the lower side in a state where the plate-like object is bent downward in the vertical direction in the frame inner region of the frame part. The upper surface along each side of the four sides of the frame is curved downward, and along the four sides of the plate-like object, along the four sides of the frame. The end portion is supported and bent in the vertical direction in the direction along each of the four sides of the frame portion to support the plate-like object in a bent state. An apparatus for transporting a plate-like object, wherein the plurality of trays are overlapped portions, and are formed so that the front and back of the trays are in surface contact with each other when a plurality of trays are stacked.