JP5627509B2 - Substrate storage container - Google Patents

Description

  The present invention relates to a substrate storage container for storing, storing, transporting, and transporting a substrate made of a semiconductor wafer, a glass wafer, a mask glass, or the like, and more specifically, a seal is formed between a container body and a lid of the substrate storage container. It is related with the gasket to do.

  Although the substrate storage container in the related art is not shown in the figure, a container body of a front open box for aligning and storing a plurality of semiconductor wafers, a lid body detachably fitted to the opened front surface of the container body, A locking mechanism that locks the lid fitted on the front surface and an elastically deformable gasket that is interposed and sealed between the front surface of the container body and the lid body. It is transported between processes, or positioned and mounted on a lid opening / closing device attached to a semiconductor processing apparatus (see Patent Documents 1, 2, and 3).

  Each semiconductor wafer is a φ300 mm type silicon wafer having a thickness of, for example, 775 μm, and has a larger diameter than the φ200 mm type from the viewpoint of increasing the chip size and improving productivity. The container body, the lid, the locking mechanism, and the gasket are each configured in a large size or formed in a large size in accordance with the increase in the diameter of the semiconductor wafer.

  The lid is automatically press-fitted into the front of the container body opened by the lid opening / closing device, and is fitted or removed. The position of the pressing of the lid against the front surface of the container body is set by the lid body opening / closing device, so that the lid body is not excessively press-fitted into the opened front surface of the container body. Moreover, the upper limit is set from the viewpoint of the automation of a process for the pressing force when the lid body opening / closing device press-fits the lid body into the open front of the container body.

  The gasket is pressed against a frame interposed between the front inner periphery of the container body and the lid, and a seal forming surface that protrudes from the frame and is partitioned between the front inner periphery of the container body and the lid. It has a lip piece that deforms and seals, and functions so that contaminants do not enter the substrate storage container from the outside and cause contamination of the semiconductor wafer (see Patent Document 4). If this gasket is made of a material with little warping such as an O-ring, the reaction force increases when the lid is fitted and locked to the open front of the container body, which hinders automatic opening and closing of the lid. It is molded from a relatively flexible material. Further, the lip piece protrudes obliquely from the frame body, and the deformation is facilitated.

JP 2010-3948 A JP 2009-272371 A JP 2009-224464 A JP 2008-62979 A

  The conventional substrate storage container is configured as described above, and a flexible lip piece is simply protruded from the gasket frame, so that the lid body is pressed beyond the set value in the open front of the container body. When fitting with force, the lip pieces in the corner areas at the four corners of the frame warp due to the deformation of the lip pieces in a plurality of linear pieces oriented in the direction perpendicular to the other areas adjacent to the corner areas. Therefore, a part of the lip piece may be separated from the seal forming surface or the deformation may be insufficient. As a result, the sealing performance may deteriorate and the semiconductor wafer may be contaminated, or the container main body and the lid body may be in direct contact to cause dust generation.

  The present invention has been made in view of the above, and prevents the deterioration of the sealing performance in the corner area of the gasket, so that the substrate is less likely to be contaminated or to generate dust when the container body and the lid come into contact with each other. The purpose is to provide a container.

In the present invention, in order to solve the above-mentioned problems, a container body of a front open box that can store a substrate, a lid body that is detachably fitted to the opened front surface of the container body, and the container body and the lid body A sealing gasket interposed between them, a step portion is provided at least on the inner periphery of the front surface of the container body, a seal forming surface for the gasket is formed on the step portion, and the gasket is fitted on the back surface of the lid. A joint mounting groove is formed, and the gasket protrudes from the outer peripheral surface of the frame body toward the seal forming surface of the container body and is deformed to the seal forming surface of the container body. A lip piece that contacts and seals ,
The frame of the gasket includes a plurality of corner regions that form four corners, and a straight piece that connects the plurality of corner regions to form another region, and the corner region is bent in an L shape, and Formed from a plurality of straight portions that extend from both ends of the bent portion and are connected to straight pieces,
In the corner area of the gasket, a reinforcing piece is formed on the non-facing surface that does not face the seal forming surface of the lip piece so as to be thicker than the lip piece in the other area, and the deformation amount of the lip piece in the corner area is increased in the other area. By making it smaller than the deformation amount of the lip piece, the lip piece in the corner area of the gasket is restricted from being separated from the seal forming surface of the container body when the lid is fitted on the front surface of the container body. It is a feature.

In the present invention, in order to solve the above-mentioned problem, a container body of a front open box that can store a substrate, a lid body that is detachably fitted to the open front of the container body, and these container body and lid body And a sealing gasket interposed between the container body, a step portion is provided at least on the inner periphery of the front surface of the container body, a gasket seal forming surface is formed on the step portion, and a gasket is formed on the back surface of the lid. And a gasket that fits into the fitting mounting groove of the lid body, and projects from the outer peripheral surface of the frame body toward the seal forming surface of the container body, and the seal forming surface of the container body A substrate storage container formed from a lip piece that is deformed to contact and seal ,
Forming a seal-forming surface of the container body into a front frame shape, and forming a corner region of the seal-forming surface from a bent portion bent into an L-shape and a plurality of straight portions extending respectively from both ends of the bent portion; This corner area protrudes in the front direction of the container body from other areas,
The frame of the gasket includes a plurality of corner regions that form four corners, and a straight piece that connects the plurality of corner regions to form another region, and the corner region is bent in an L shape, and Formed from a plurality of straight portions that extend from both ends of the bent portion and are connected to straight pieces,
When the lid is fitted to the front of the container body by deforming the lip piece in the corner area of the gasket more strongly than the lip piece in the other area, and deforming it in the corner area of the seal forming surface of the container body The lip piece in the corner area of the gasket is restricted from the seal forming surface .

In addition, the position shift prevention part which contacts in the fitting attachment groove | channel of a cover body can be formed in the frame of a gasket .

Here, the substrate in the claims includes a necessary number of at least φ200, 300, 450 mm semiconductor wafer, glass wafer, mask glass, and the like. The container body is a front open box having a front opening, and may be transparent, opaque, or translucent. The lid body is composed of a lid body fitted into the opening of the container body, and a surface plate covering the open surface of the lid body, and the lid body between the lid body and the surface plate or on the lid body. A locking mechanism can be attached.

  The corner region in the gasket frame is not particularly limited to one or more. Therefore, the deformation amount of the lip piece in some corner regions can be made different from the deformation amount of the lip piece in other regions other than the corner region. It is also possible to make it different from the deformation amount of the lip piece.

  According to the present invention, when the lid body is opposed to the opening of the container main body that accommodates the substrate and the lid body is fitted, the lip piece of the gasket leaves a gap on the seal forming surface between the container main body and the lid body. In this case, the sealing property of the substrate storage container is secured by deforming and contacting the seal forming surface as the lid is fitted. At this time, the deformation amount of the lip piece in the corner region in the gasket frame is different from the deformation amount of the lip piece in the other region. Less likely to leave the formation surface easily.

According to the present invention, the lip piece in the corner region is less likely to deform than the lip piece in the other region due to the reinforcing action of the reinforcing piece. Even when fitted, the lip piece in the corner area is lifted due to the adverse effect of the lip piece in the other adjacent area, effectively preventing the lip piece from being deformed and floating or easily leaving the corner area on the seal forming surface. be able to. Therefore, it can be expected that the sealing performance is uniform over the entire circumference of the gasket, eliminating the possibility that the sealing performance will deteriorate and the substrate will be contaminated, or that the container body and the lid will be in direct contact and cause dust generation. There is an effect that can be. Further, since the seal forming surface is formed by the step portion in the container main body, the position of the lid body with respect to the container main body can be regulated by this seal forming surface, and excessive fitting can be regulated. Further, since there is no need to modify the front surface of the container body or the inner periphery thereof, the existing container body can be used as it is.

According to the second aspect of the present invention, the corner region of the seal forming surface of the container main body strongly presses and deforms the lip piece in the corner region of the gasket, so that the lip piece in the corner region of the gasket needs to be formed thick. There is no.

Furthermore, according to the third aspect of the present invention, it is possible to prevent displacement and dropping of the gasket fitted in the fitting mounting groove of the lid by the frame displacement prevention portion.

It is a whole perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the gasket in the embodiment of the substrate storage container concerning the present invention. It is a plane explanatory view showing typically the gasket in the embodiment of the substrate storage container concerning the present invention. FIG. 4 is a sectional view taken along line IV-IV in FIG. 3. It is a fragmentary sectional view showing typically the state just before fitting of a container main part and a lid in an embodiment of a substrate storage container concerning the present invention. It is a partial section explanatory view showing typically the fitting state of a container main part and a lid in an embodiment of a substrate storage container concerning the present invention. It is a fragmentary sectional view showing typically the state just before fitting of a container main part and a lid in a 2nd embodiment of a substrate storage container concerning the present invention. It is a fragmentary sectional view showing typically a fitting state of a container main part and a lid in a 2nd embodiment of a substrate storage container concerning the present invention.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 6, a substrate storage container in the present embodiment includes a container main body 1 capable of aligning and storing a plurality of semiconductor wafers W, and The lid body 20 that is detachably fitted to the open front surface 2 of the container main body 1, the locking mechanism 30 that locks the lid body 20 fitted to the front surface 2 of the container main body 1, the container main body 1 and the lid body And a gasket 40 for sealing interposed between the lip piece 47 and the lip piece 47 in the corner region 42 of the gasket 40 so as to be different from the deformation amount of the lip piece 47 in the other region.

  As shown in FIG. 1, each semiconductor wafer W is made of, for example, a φ300 mm silicon wafer having a thickness of 775 μm, and 25 wafers are horizontally inserted and stored in the container main body 1 on the front surface 2 of the container main body 1. After the fitted lid 20 is locked, it is packed and transported to a semiconductor manufacturing factory. Such a semiconductor wafer W is appropriately subjected to various types of processing and processing in a semiconductor component manufacturing process (up to 500 to 600 processes) to become a semiconductor component.

  The container body 1 and the lid body 20 are each formed by combining a plurality of parts by injection molding a plurality of parts from a molding material containing a predetermined resin. Examples of the predetermined resin of the molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyether ketone, polyether ether ketone, polybutylene terephthalate, polyacetal, and liquid crystal polymer, and alloys thereof. .

  These resins are added with various antistatic agents such as conductive materials made of carbon fibers, carbon powder, carbon nanotubes, conductive polymers, and the like, and anions, cations, and nonionics as required. Further, benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, hindered amine-based ultraviolet absorbers are added, and glass fibers, carbon fibers, and the like that improve rigidity are also selectively added.

  As shown in FIG. 1 and the like, the container body 1 is formed in a front open box type in which a front surface 2 is opened, and is held by a ceiling transport mechanism in a semiconductor manufacturing factory with the front surface 2 opened in a horizontal horizontal direction. It is transported between processes or positioned and mounted on a lid opening / closing device attached to the semiconductor processing apparatus. The container body 1 is provided with a pair of left and right support pieces 3 for supporting the semiconductor wafer W substantially horizontally on opposite inner sides, in other words, inner surfaces of both side walls, respectively. The position restricting portions that restrict excessive insertion of the semiconductor wafer W are integrally formed.

  The pair of support pieces 3 are arranged at a predetermined pitch in the vertical direction, and each support piece 3 is formed in an elongated plate shape that supports the peripheral edge of the side of the semiconductor wafer W. The regulation stepped part for regulating the jump-out of the semiconductor wafer W is integrally formed. In addition, mounting holes are drilled through both sides of the front and rear portions of the bottom plate of the container body 1, and a gas replacement filter valve 4 is fitted into each mounting hole. The plurality of filter valves 4 function to eliminate the pressure difference between the inside and outside of the substrate storage container by allowing gas such as air and purge gas to flow inside and outside.

  Positioning tools for positioning the container body 1 are disposed on both sides of the front part and the center of the rear part on the back of the bottom plate of the container body 1. Each positioning tool is basically formed in a substantially V-shaped cross section having a substantially elliptical shape in a plane, and a concave portion having a pair of inclined surfaces is directed downward, and the concave portion is fitted to the positioning pin of the lid opening / closing device from above. The container body 1 functions to position the container body 1 with high accuracy by the sliding contact.

  A separate bottom plate is screwed horizontally on the back surface of the bottom plate of the container body 1 via a screw tool, and the bottom plate exposes a plurality of positioning tools. In addition, a transfer top flange 5 that is gripped by a ceiling transfer mechanism of a semiconductor manufacturing factory is detachably attached to the central portion of the top plate of the container body 1.

  As shown in FIGS. 1, 5, and 6, the opened front surface 2 of the container body 1 is bent outward and bulges to form a step 6 at least on the inner peripheral surface. The step portion 6 forms the seal forming surface 7 for the gasket 40 flat. The seal forming surface 7 is formed in a substantially frame shape when viewed from the front, faces the peripheral edge of the back surface of the lid 20, exhibits a sealing function when the lid 20 is fitted and locked, and excessively press-fits the lid 20. It functions to regulate the mating.

The corner regions 8 at the four corners of the seal forming surface 7 are integrally formed from a bent portion 9 bent into a substantially L shape and straight portions 10 that extend from both ends of the bent portion 9 short (for example, about 10 mm). Further, locking holes 11 for the locking mechanism 30 are drilled on both the upper and lower sides of the front inner periphery of the container body 1.
A grip tool 12 that functions for gripping operation is detachably attached to the center of both side walls of the container body 1. In addition, side rails 13 for transportation are selectively and horizontally attached to the lower portions of both side walls of the container body 1.

  As shown in FIGS. 1, 5, and 6, the lid 20 covers a lid main body 21 that is press-fitted into the open front of the container main body 1 and the open front of the lid main body 21. A surface plate 27 is provided, and the peripheral wall of the lid body 21 is brought into contact with the front inner periphery of the container body 1 which is opened. The lid body 21 is basically formed in a substantially dish-shaped cross section with a shallow bottom, and a plurality of reinforcing and mounting ribs are disposed therein, and on the back surface, which is the facing surface facing the semiconductor wafer W, A front retainer 22 that elastically holds the semiconductor wafer W is mounted.

  The front retainer 22 includes a vertically long holding frame 23 that is attached to the center of the back surface of the lid main body 21, and a plurality of elastic pieces 24 extending inward are arranged on the left and right sides of the holding frame 23. It is formed. Each elastic piece 24 is provided with flexibility and elasticity, and a holding block for holding the front peripheral edge of the semiconductor wafer W with a V-groove or the like is integrally formed at the tip. In this holding block, it is also possible to form a U-shaped groove instead of the V-shaped groove.

  A substantially frame-shaped fitting mounting groove 25 is formed in the rear peripheral edge of the lid main body 21 in a front view, and a gasket 40 that presses against the seal forming surface 7 of the container main body 1 is formed inside the fitting mounting groove 25. (See FIGS. 5 and 6). Further, on both the upper and lower sides of the peripheral wall of the lid main body 21, the protruding / retracting holes 26 for the locking mechanism 30 facing the locking holes 11 of the container main body 1 are penetrated and drilled.

  The surface plate 27 is formed in a horizontally long front rectangle, and a plurality of reinforcing and mounting ribs, screw holes, and the like are provided. On both side portions of the surface plate 27, operation holes 28 for the locking mechanism 30 are respectively drilled.

  As shown in FIGS. 1, 5, and 6, the locking mechanism 30 includes a pair of left and right rotating plates 31 that are pivotally supported on the left and right sides of the lid body 21 of the lid body 20 and rotated from the outside. A plurality of advancing and retracting plates 32 that slide in the vertical direction of the lid body 20 as the rotating plate 31 rotates, and a locking hole of the container body 1 that appears and retracts from the retracting hole 26 of the lid body 21 as each of the advancing and retracting plates 32 slides 11 is provided between the lid body 21 and the surface plate 27.

  Each rotary plate 31 faces the operation hole 28 of the surface plate 27 of the lid 20 and is rotated by an operation key of the lid opening / closing device passing through the operation hole 28. Each locking claw 33 is basically bent and formed in a substantially L-shaped cross section, and has a rotatable roller at its tip, and is pivotally supported in the vicinity of the retracting hole 26 in the lid body 21. The forward / backward moving plate 32 is connected to the distal end portion via a pin, and the roller is brought into contact with and separated from the locking hole 11 of the container body 1.

  As shown in FIGS. 2 to 6, the gasket 40 includes a frame body 41 interposed between the front inner periphery of the container body 1 and the back surface of the lid body 20, and a seal for the container body 1 formed from the frame body 41. A flexible lip piece 47 that protrudes in the direction of the surface 7 and press-contacts is integrally provided, and the amount of deformation of the lip piece 47 in the corner area 42 at the four corners of the frame 41 is different from that in the corner area 42. It is adjusted to be smaller than the deformation amount. The gasket 40 is molded using, for example, a polyester, polystyrene, polyolefin, or silicone elastomer having excellent heat resistance and weather resistance as a molding material.

  As shown in FIGS. 2 and 3, the frame 41 includes a plurality of corner regions 42 that form four corners and face the corner regions 8 of the seal forming surface 7, and the plurality of corner regions 42 are the other regions. They are connected by a certain long straight piece 43 and are press-fitted into the fitting mounting groove 25 of the lid main body 21 so as to be tightly fitted.

  Each corner region 42 includes a bent portion 44 that is chamfered and bent into a substantially L shape so as to correspond to the corner region 8 of the seal forming surface 7, and the straight portions 45 are linearly short from both ends of the bent portion 44. (For example, about 10 mm) In addition to being formed to be elongated, each straight portion 45 is integrally connected to the end portion of the straight piece 43, and from the viewpoint of obtaining a good displacement, from the bent portion 44 toward each straight portion 45, It is gradually formed into a thin wall.

  As shown in FIGS. 4 to 6, a plurality of misalignment prevention ribs 46 that are deformed by being pressed into the fitting mounting groove 25 of the lid main body 21 are juxtaposed on the outer peripheral surface of the frame body 41. Each misalignment prevention rib 46 is formed, for example, in a tapered shape having a substantially angled cross section, and effectively prevents misalignment and dropout of the gasket 40. This misalignment prevention rib 46 can also be formed in a substantially semicircular or semi-elliptical cross section.

  The lip piece 47 is formed in a continuous front substantially frame shape, protrudes obliquely from the outer peripheral surface of the frame body 41, and presses and seals against the seal forming surface 7 of the container body 1 when the lid body 20 is fitted and locked. It works as follows. The lip piece 47 may protrude linearly or may protrude while bending.

  As shown in FIG. 4 and the like, the lip piece 47 in each corner region 42 is reinforced by laminating a reinforcement piece 48 on at least one of the front and back surfaces, thereby reinforcing the lip in other regions other than the corner region 42. It is formed thicker than the piece 47 and is pressed against the corner region 8 of the seal forming surface 7. The reinforcing piece 48 is preferably laminated on a non-opposing surface that does not oppose the seal forming surface 7 of the lip piece 47, and may be formed integrally with the lip piece 47 or may be formed later. Such a lip piece 47 in the corner region 42 is less likely to bend than the lip piece 47 in the straight piece 43 other than the corner region 42, and excessive deformation more than necessary is suppressed.

  In the above configuration, when the lid body 20 is fitted to the open front surface 2 of the container body 1 in which the semiconductor wafers W are aligned and stored, the lid body 20 is sucked and held by the lid body opening / closing device, and the container body 1 is opened. The lid body 20 is disposed opposite to the front surface 2 by the lid body opening / closing device, and then the lid body 20 is gradually press-fitted into the front surface 2 of the container main body 1 by the lid body opening / closing device, and is locked. 30 is locked.

  Then, the lip piece 47 of the gasket 40 faces the seal forming surface 7 of the container main body 1 with a gap (see FIG. 5), and press-contacts while being bent to the seal forming surface 7 of the container main body 1 as the lid 20 is press-fitted. By sealing (refer to FIG. 6), the sealing property of the substrate storage container is ensured, and the contaminants are effectively prevented from entering the inside from the outside.

  At this time, the lip pieces 47 of each corner region 42 are less likely to be deformed than the lip pieces 47 of the other regions by the reinforcing action of the reinforcing pieces 48, so that the lid 20 is set within the front surface 2 opened of the container body 1. Even when press-fitting is performed with a pressing force exceeding the value, the lip piece 47 in each corner region 42 is lifted due to the adverse effect of the adjacent linear piece 43 and lip piece 47 in the other region, and is lifted by deformation or seal formation. It is possible to effectively prevent easy separation from the corner area 8 of the surface 7.

  Therefore, the uniformity of the sealing performance over the entire circumference of the gasket 40 can be greatly expected, the sealing performance deteriorates and the semiconductor wafer W is contaminated, or the container body 1 and the lid 20 are in direct contact with each other to generate dust. Can be eliminated. Moreover, since it is not necessary to modify the front surface 2 of the container main body 1 or its inner periphery, the existing container main body 1 can be used as it is.

  Next, FIG. 7 and FIG. 8 show the second embodiment of the present invention. In this case, the corner regions 8 at the four corners of the seal forming surface 7 of the container body 1 are changed to regions other than the corner region 8. The lip piece 47 of each corner area 42 of the gasket 40 is formed by projecting each corner area 8 in the front two directions (downward in the figure) of the container body 1 from the other areas. The seal forming surface 7 is brought into contact with the seal forming surface 7 prior to other portions to strongly suppress this.

  Each corner region 8 of the seal forming surface 7 is integrally formed of a bent portion 9 that is chamfered and bent into an approximately L shape, and a straight portion 10 that is linearly short (for example, about 10 mm) from both ends of the bent portion 9. It is formed. Examples of the method of forming the corner region 8 on the thick surface include lamination adhesion of an elastomer layer and a base material, formation of flat protrusions 14 and the like. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  Also in this embodiment, the same effect as the above embodiment can be expected, and the corner region 8 of the seal forming surface 7 is formed thick and thick, so that the lip piece 47 of each corner region 42 of the gasket 40 is replaced with another. The lip piece 47 in the region can be pressed and deformed more strongly (see FIG. 8). Therefore, it is possible to prevent an adverse effect caused by the deformation of the corner region 42 of the gasket 40 when it floats, and it is absolutely necessary to form the reinforcing piece 48 on the lip piece 47 of each corner region 42 and reinforce it. Clearly, the configuration of the gasket 40 can be simplified.

  In the above-described embodiment, the plurality of elastic pieces 24 are arranged in the vertical direction on the left and right sides of the holding frame 23 of the front retainer 22, but the left and right elastic pieces 24 are connected via connecting pieces. A holding block may be formed. Alternatively, a connecting column may be installed vertically between the upper and lower portions of the holding frame 23, and a plurality of elastic pieces 24 may be arranged in the vertical direction on the left and right sides of the connecting column.

  Moreover, although the fitting attachment groove | channel 25 was dented and formed in the back surface peripheral part of the lid | cover main body 21, it is not limited to this at all. For example, the fitting attachment groove 25 can be formed in the peripheral wall of the lid 20, that is, the peripheral wall of the lid body 21. In addition, a single misalignment prevention rib 46 can be formed to protrude from the outer peripheral surface of the frame body of the gasket 40. Further, a plurality of lip pieces 47 may be formed intermittently in the circumferential direction of the frame body 41, the lip pieces 47 may be formed with a tapered cross section, and the tip of the lip piece 47 has a substantially circular cross section. It is also possible to expand and form.

  The substrate storage container according to the present invention can be used in the field of manufacturing semiconductors and liquid crystal displays.

1 Container body 2 Front (opening)
3 Supporting piece 6 Stepped portion 7 Seal forming surface 8 Corner region 9 Bent portion 10 Linear portion 14 Protrusion 20 Lid body 21 Lid body 25 Fitting mounting groove 27 Surface plate 30 Locking mechanism 40 Gasket 41 Frame body 42 Corner region 43 Linear piece ( Other areas)
44 Bent part 45 Straight line part 46 Misalignment prevention rib (positional deviation prevention part)
47 Lip piece 48 Reinforcement piece W Semiconductor wafer (substrate)

Claims (3)

A container body of a front open box that can store a substrate, a lid body that is detachably fitted to the open front of the container body, and a sealing gasket that is interposed between the container body and the lid body Provided with a stepped portion at least on the inner periphery of the front surface of the container body, a gasket-forming surface for the gasket is formed on the stepped portion, a fitting mounting groove for the gasket is formed on the back surface of the lid, and the gasket is covered with the lid. Formed from a frame fitted into the fitting mounting groove of the body, and a lip piece protruding from the outer peripheral surface of the frame toward the seal forming surface of the container body and deformingly contacting and sealing the seal forming surface of the container body A substrate storage container,
The frame of the gasket includes a plurality of corner regions that form four corners, and a straight piece that connects the plurality of corner regions to form another region, and the corner region is bent in an L shape, and Formed from a plurality of straight portions that extend from both ends of the bent portion and are connected to straight pieces,
In the corner area of the gasket, a reinforcing piece is formed on the non-facing surface that does not face the seal forming surface of the lip piece so that it is thicker than the lip piece in the other area, and the deformation amount of the lip piece in the corner area is By making it smaller than the deformation amount of the lip piece, the lip piece in the corner area of the gasket is restricted from being separated from the seal forming surface of the container body when the lid is fitted on the front surface of the container body. A substrate storage container. A container body of a front open box that can store a substrate, a lid body that is detachably fitted to the open front of the container body, and a sealing gasket that is interposed between the container body and the lid body Provided with a stepped portion at least on the inner periphery of the front surface of the container body, a gasket-forming surface for the gasket is formed on the stepped portion, a fitting mounting groove for the gasket is formed on the back surface of the lid, and the gasket is covered with the lid. Formed from a frame fitted into the fitting mounting groove of the body, and a lip piece protruding from the outer peripheral surface of the frame toward the seal forming surface of the container body and deformingly contacting and sealing the seal forming surface of the container body A substrate storage container,
Forming a seal-forming surface of the container body into a front frame shape, and forming a corner region of the seal-forming surface from a bent portion bent into an L-shape and a plurality of straight portions extending respectively from both ends of the bent portion; This corner area protrudes in the front direction of the container body from other areas,
The frame of the gasket includes a plurality of corner regions that form four corners, and a straight piece that connects the plurality of corner regions to form another region, and the corner region is bent in an L shape, and Formed from a plurality of straight portions that extend from both ends of the bent portion and are connected to straight pieces,
When the lid is fitted to the front of the container body by deforming the lip piece in the corner area of the gasket more strongly than the lip piece in the other area, and deforming it in the corner area of the seal forming surface of the container body A substrate storage container characterized by restricting the separation of the lip piece in the corner area of the gasket from the seal forming surface . The substrate storage container according to claim 1 or 2, wherein a misalignment prevention portion that contacts the fitting mounting groove of the lid is formed on the gasket frame .

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