JP5888492B2 - Substrate storage container - Google Patents

Description

  The present invention relates to a substrate storage container for storing a semiconductor wafer and the like, and more particularly to a sealing structure thereof.

  Although the conventional substrate storage container is not shown, a container main body that stores a plurality of precision substrates made of semiconductor wafers, a lid that is detachably fitted to an opening front portion of the container main body, and the container main body, A deformable elastic seal gasket that is interposed between and sealed with the lid body is provided. Such a substrate storage container may store and temporarily store a substrate in the process of forming an electronic circuit on its surface. At this time, in order to prevent deterioration of the substrate surface such as oxidation and corrosion, the substrate storage container is used for gas permeation. In order to replace the internal gas with an inert gas such as nitrogen gas or dry air, the open / close valve is provided (see, for example, Patent Document 1).

  Such a substrate storage container is provided with an elastically deformable seal member interposed between the container main body and a lid body that opens and closes the opening surface thereof, and the seal gasket is formed on the periphery of the lid body. A base to be fitted into the mating holding groove, a fitting protrusion formed on the base and pressed against the inner surface of the fitting holding groove, and formed on the base to protrude from the fitting holding groove and contact the seal forming surface of the container body When the internal pressure of the container main body is higher than the external pressure, the internal leakage of the container main body is allowed to leak from the inside of the container main body, and the internal pressure of the container main body closed by the lid is higher than the external pressure. In the case of lowering, a substrate storage container has been proposed in which the invasion of gas from the outside to the inside of the container body is regulated (see, for example, Patent Document 2).

  In addition, a greater compressive force is applied to the seal member that is placed in a portion that is susceptible to deformation at the joint between the upper lid and the outer box body, and good sealing performance is maintained even during deformation. And the plate-shaped member storage container which improved the sealing performance as a whole was also known (for example, refer patent document 3).

JP 2004-179449 A Japanese Patent No. 3556185 JP-A-11-195698

  In the above-described conventional substrate storage container, the seal lip of the seal gasket is curved outward, which is excellent in preventing gas from entering from the outside of the substrate storage container. However, when the internal pressure of the substrate storage container increases, the gas easily leaks from the tip of the seal lip to the outside. Therefore, when the gas inside the substrate storage container is replaced by supplying an inert gas or the like, the internal pressure is reduced. Along with the increase, the gas supplied at an angle has leaked out of the opening as it is in a short time, and there has been a problem that the replacement of the gas takes time and is not efficient.

  Specifically, there is a problem that it takes a long time for the oxygen concentration inside the substrate storage container and the amount of water to decrease to a certain value or less, resulting in poor work efficiency. Further, if the gas is operated without being completely replaced, there is a possibility that the yield of the product is lowered due to the above-described substrate deterioration.

  The present invention has been made in view of the above, and when replacing the gas inside the substrate storage container, the substrate storage container capable of efficiently replacing the gas so that the gas leaks from a specific location from the inside of the substrate storage container. The purpose is to provide.

In order to solve the above problems, the substrate storage container of the present invention is:
A container body that houses a precision substrate and has a gas purging on-off valve on the bottom surface, and has a base at one end of the bottom surface provided on the front surface of the container body for taking the precision substrate into and out of the container body. A rectangular opening, a lid that opens and closes the opening, and an elastically deformable rectangular seal gasket that is interposed between the opening and the lid,
The seal gasket includes a base portion that is fitted to a fitting holding portion that is formed over the entire outer periphery of the lid body, and a bent portion that extends obliquely outward from the base portion toward the outer periphery and is pressed against the seal forming surface of the container body. And a fitting rib that is formed to protrude from one surface of the base portion and is brought into contact with the inner surface of the fitting holding portion in a press- contact holding state, and the protruding piece on a lateral side of the seal gasket. When the deflection amount h2 of 1 is set to 1 , the deflection ratio of the deflection amount h1 of the protruding piece on the side of the seal gasket is set to 1.3 or more, and the conditional expression h1 ≧ 1.3 × h2 is satisfied .
An inert gas, which is a purge gas, is supplied to the container body, and the height h1 of the projecting piece on the side of the seal gasket with respect to the height h2 of the projecting piece on the lateral side of the rectangular seal gasket. By changing the ratio, the side-side bent seal piece of the seal gasket that forms the deflection amount ratio is more strongly pressed against the seal forming surface, and while the purge gas is being supplied to the container body, the container Leakage of the gas from the side and lateral sides of the main body is prevented, and when the gas pressure in the container main body is higher than the external pressure, the container main body only from the lateral side as a gas leakage position the internal residual gas in the inner to leak to the outside, the residual gas in the container body, the purge gas efficiency and good substituted, in the conditional expression, varying deflection ratio of h1 for h2 Te, changing the time to be replaced in the purge gas, it is summarized in that.

  By forming the crushing amount ratio of the projecting piece on the side of the seal member to be 1.3 or more, the opening of the container body is closed by the lid, the projecting piece is bent, and the bent portion and the contact surface of the container body The purge gas is supplied from one of the on-off valves to the substrate storage container closed by the lid, and the gas from the periphery of the opening of the substrate storage container to the outside is increased with the internal pressure of the substrate storage container higher than the external pressure. This leakage can occur only from the lateral side of the rectangular opening.

The gist of the substrate storage container is that a protrusion is formed on the side seal forming surface on the side of the container main body, and the ratio of the deflection amount is formed by the formation of the protrusion.

  In addition, the ratio of the height from the lid on the side of the seal member to the container main body toward the height from the lid on the lateral side of the rectangular seal member to the container main body or the thickness of the protruding piece Is formed thicker at the side of the sealing member than at the side of the rectangular sealing member, the crushing amount ratio can be formed.

  The seal member is preferably formed with high hardness on the lateral side and low hardness on the side.

  Further, it is preferable that the surface roughness of the projecting piece of the seal member is formed more smoothly on the side of the seal member than on the side of the seal member in the lateral direction.

  The precision substrate may be any of a 200 mm, 300 mm, and 450 mm type semiconductor wafer, quartz glass, a liquid crystal cell, and the like. The container body and the lid may be transparent, opaque, or translucent. The peripheral edge of the lid includes both the peripheral wall of the lid and the peripheral edge of the back surface of the lid.

  The seal gasket may be an endless frame shape, but may be a single or a plurality of filaments having flexibility. Furthermore, the substrate storage container may be any of a front open box type, a top open box type, and a bottom open box type.

  According to the present invention, the gas inside the substrate storage container can be efficiently replaced by making the gas leak from the inside when the internal pressure of the substrate storage container rises to a specific location.

It is a perspective view which shows the substrate storage container which concerns on embodiment of this invention. It is a front view which shows the seal gasket which concerns on embodiment of this invention. (A) It is an expanded sectional view of a1 and a2 part of the side of the seal gasket of FIG. (B) It is an expanded sectional view of b1 part of the top side b2 of a seal gasket of FIG. (A) It is a fragmentary sectional view which shows arrangement | positioning in the side part of the seal gasket hold | maintained at the container main body and the cover body based on 1st Embodiment of this invention. (B) It is a fragmentary sectional view which shows the seal formation state of the seal gasket of Fig.4 (a) based on 1st Embodiment of this invention. (A) It is a fragmentary sectional view which shows arrangement | positioning in the horizontal direction side part containing the base part and top part of the seal gasket hold | maintained at the container main body and the cover body based on 1st Embodiment of this invention. (B) It is a fragmentary sectional view which shows the seal formation state of the seal gasket of Fig.5 (a) based on 1st Embodiment of this invention. (A) It is a modification of 1st Embodiment of this invention, and a seal gasket is a fragmentary sectional view of the state which formed the seal | sticker between the container main bodies in a side part. (B) It is a modification of 1st Embodiment of this invention, and a seal gasket is a fragmentary sectional view of the state which formed the seal | sticker between the container main bodies in the horizontal direction side part. (A) It is a fragmentary sectional view in the state where a seal gasket concerning a 2nd embodiment of the present invention formed a seal between a container main part in a side part. (B) It is a fragmentary sectional view showing the state where the seal gasket concerning the 2nd embodiment of the present invention formed the seal between the container main part in the horizontal direction side part. It is a partial front view which shows the horizontal direction side part of the seal gasket based on 3rd Embodiment of this invention. (A) It is sectional drawing which shows the seal gasket of FIG. 8 which concerns on 3rd Embodiment of this invention. (B) It is sectional drawing which shows one modification of the seal gasket of FIG. 8 which concerns on 3rd Embodiment of this invention. It is a fragmentary sectional view in the state where a groove for leak was formed in a transverse direction side seal formation surface of a seal gasket concerning a 3rd embodiment of the present invention. It is a flowchart which shows the gas substitution test method using the board | substrate storage container of this invention.

  Hereinafter, preferred embodiments of the present invention (hereinafter referred to as “embodiments”) will be described with reference to the drawings. As shown in FIG. 1, the substrate storage container in the present embodiment includes a container body 1 that stores a plurality of precision substrates, a lid body 2 that is fitted into a rectangular opening 40 of the container body 1, and A rectangular seal gasket 3 made of a deformable elastic body that is interposed between and sealed between the container body 1 and the lid body 2, and the seal gasket 3 is provided on the inner periphery of the opening 40 of the container body 1. A seal forming surface 4 (side side seal forming surface 4a, lateral side seal forming surface 4b) that contacts and deforms is formed, and a fitting groove for the seal gasket 3 is formed in the peripheral portion of the lid body 2. Is formed.

  In the present embodiment, the seal gasket 3 has a rectangular shape as shown in FIG. 2, and includes a lateral side including a top side and a bottom side in the figure, and side sides on both sides.

  The substrate is made of, for example, a 300 mm diameter thin round semiconductor wafer (Si wafer or reclaimed wafer) or the like, and a notch for positioning is selectively cut out at the peripheral edge, Alternatively, the sheets are stored in an order of 1 to 26 sheets.

  As shown in FIG. 1, the container body 1 is formed into a front open box type having a front opening using a predetermined molding material, and a pair of left and right sides horizontally supporting the peripheral edge of the substrate is provided on both sides of the container body 1. The teeth 5 are formed so as to protrude, and the pair of teeth 5 facing each other are arranged in parallel in the vertical direction at a predetermined interval. Examples of the molding material for the container body 1 include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyethersulfone, and polyetheretherketone. The thermoplastic resin includes conductive carbon and conductive carbon. Conductive agents composed of fibers, metal fibers, conductive polymers and the like, various antistatic agents, ultraviolet absorbers, and the like are appropriately added.

  A bottom plate 6 having a substantially Y-shape, polygonal shape, or triangle shape is detachably attached to the bottom surface of the container body 1. A positioning tool having a substantially V-shaped cross section with respect to a processing apparatus (not shown) is attached to the bottom plate 6. As shown in FIG. 1, a robotic flange 7 held by a transfer robot is detachably attached to the center of the ceiling of the container body 1.

  As shown in FIG. 1, the opening 40 of the container body 1 is bent and formed with a step so as to project outward, and the step surface of the step is flat with the seal forming surface 4 (side side seal forming surface). 4a, which functions as a lateral side seal forming surface 4b). A pair of left and right locking holes 8 are formed in a recessed manner at a predetermined interval above and below the inner peripheral edge of the rectangular opening 40 of the container body 1. Further, a through hole 9 is provided at the bottom of the container body, and one or more open / close valves 10 (supply side open / close valve 10a, exhaust side open / close valve 10b) for replacing the gas inside are provided therein. ing.

  As shown in FIG. 1, the lid body 2 is provided with a pair of locking mechanisms 11 that are fitted into the opening 40 of the container body 1 and installed inside the container body 1 to lock the lid body 2 to the container body 1. The lid 2 and the pair of locking mechanisms 11 are molded using the same molding material as that of the container body 1. An elastic front retainer 12 that holds the front peripheral edge of the precision substrate horizontally is detachably attached to the recessed central portion of the back surface of the lid body 2.

  Each locking mechanism 11 is supported by a lid 2 that is pivotally supported by the lid 2 and is rotated by an external operation of the processing apparatus, and is connected to the peripheral portion of the rotary plate 13 and interlocks with the rotation to thereby move the inside and outside of the lid 2. A pair of power transmission plates 14 that slide in a direction (vertical direction in FIG. 1), and pivotally supported at the tip of each power transmission plate 14, and when the lid body 2 is locked, the lid body 2 is slid by sliding the power transmission plate 14. It protrudes from the through-hole of the peripheral wall and is locked in the locking hole 8 on the inner peripheral edge of the opening 40 of the container body 1. When the lid body 2 is unlocked, the container body 1 is locked by returning the slidable power transmission plate 14. A pair of retractable locking claws 15 that retracts from the hole 8 into the through-hole of the lid body 2 are provided.

  As shown in FIGS. 1 to 5, the seal gasket 3 is formed in a rectangular shape to be fitted into the fitting holding groove 5 of the lid body 2, and is formed side by side on the base 16. A bendable fitting protrusion 17 pressed against the inner surface (inner surface on the container body 1 side), an intermediate portion 18 projecting horizontally from the base 16, and a seal forming surface 4 (side) of the container body 1 provided on the intermediate portion 18 A bent seal piece 19 (side-side bent seal piece 19a, lateral-side bent seal piece 19b) that is pressed against the side-side seal forming surface 4a and the lateral side-side seal forming surface 4b) is integrally formed. .

  The seal gasket 3 is molded using a molding material such as a thermoplastic elastomer made of, for example, a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, a urethane-based elastomer, a fluororubber, EPDM, or a silicone-based rubber. Is done. Carbon fibers, metal fibers, metal oxides, various antistatic agents, and the like are appropriately added to the molding material from the viewpoint of imparting conductivity and antistatic properties. In addition, from the viewpoint of improving the adhesion of the surface, a predetermined amount of filler such as carbon, glass fiber, mica, talc, silica, calcium carbonate, etc., polyethylene, polyamide, polyacetal, fluorine resin, silicone resin, etc. Selectively added.

  The seal gasket 3 can be manufactured using the above-described materials, for example, using a known technique such as injection molding.

  The base 16 is formed in an endless frame shape as shown in FIG. 2, and the cross section thereof is a cross-sectional shape of a fitting groove 22 of the lid 2 described later as shown in FIGS. 3 (a) and 3 (b). Is substantially rectangular so that the substantially linear inner surface is in close contact with the substantially linear innermost surface of the fitting groove 22 in parallel as the contact surface, and the outer surface is the opening of the fitting groove 22. Located on the part 40 side. The fitting projections 17 can be provided as two rows of chevron ribs that project from one surface of the base 16.

  The bending seal piece 19 (side side side bending seal piece 19a, lateral side side bending seal piece 19b) is formed on the outer surface of the base 16 as shown in FIGS. 3 (a) and 3 (b). An intermediate portion 18 projecting linearly so as to be substantially parallel, and a seal forming surface 4 (side side seal forming surface 4a, lateral side seal forming surface) of the container body 1 provided at the tip of the intermediate portion 18 4b) a curved portion 20 having a substantially arc-shaped cross section that extends while bending in the direction, and a seal forming surface 4 (side side seal forming surface 4a, lateral side seal forming surface 4b) that is inflated and formed at the tip of the curved portion 20. ) And spherical protrusions 21 in pressure contact with each other. Here, the height h1 from the lower surface of the intermediate piece of the side-side bent seal piece 19a to the apex of the curved portion of the base 16 is from the lower surface of the intermediate piece of the lateral side bent seal piece 19b to the apex of the bent portion. It is formed to be higher than the height h2. Preferably, by satisfying h1 ≧ 1.3 × h2, the supplied inert gas can be efficiently replaced.

(First embodiment)
4 (a) and 4 (b) show a cross section of a seal forming portion by the seal gasket 3 provided with the above-described side-side bent seal piece 19a. FIG. 4A shows a state in which the lid 2 is inserted into the opening 40 of the container body 1 and the side seal forming surface 4a and the side bent seal piece 19a approach each other, and FIG. The lid 2 is locked to the container body 1, and the side bent seal piece 19a is in contact with the side seal forming surface 4a to form a seal.

  On the other hand, FIGS. 5A and 5B show a cross section of a seal forming portion by the seal gasket 3 provided with the lateral side bent seal piece 19b. FIG. 5A shows a state in which the lid body 2 is inserted into the opening 40 of the container body 1, and the lateral side seal forming surface 4b and the lateral side bent seal piece 19b approach each other. b) represents a state in which the lid 2 is locked to the container body 1 and the lateral side bent seal piece 19b is in contact with the lateral side seal forming surface 4b to form a seal.

  Since the side-side bent seal piece 19a and the lateral side-side bent seal piece 19b are set so that the height on the side is increased, the side-side bent seal piece 19a is located on the side of the opening 40. By being strongly pressed by the seal forming surface 4a, it is possible to prevent the gas from leaking out.

  Next, replacement of the gas in the substrate storage container provided with such a seal gasket 3 will be described. When an inert gas such as nitrogen is supplied from one supply opening / closing valve 10a of the opening / closing valve 10 provided in the container body 1 and exhausted from the other exhaust opening / closing valve 10b, the inside of the substrate storage container is positively charged. In this way, gas replacement is performed. At this time, since the inside of the container main body 1 has a positive pressure, the bent seal pieces 19 (the side-side bent seal pieces 19a and the lateral side-side bent seal pieces 19b) of the seal gasket 3 are pressed by the pressure and the seal pieces. When the gas leaks from the opening 40 around the gas supply opening / closing valve 10a, the tip 20 of the gas is easily separated from the seal forming surface 4 (side side seal forming surface 4a, lateral side seal forming surface 4b). Since the supplied inert gas leaks before the inside of the substrate storage container is filled, it takes time to replace the air inside the substrate storage container with the inert gas.

  In the embodiment of the present invention, after the gas such as the inert gas supplied from an arbitrary place of the opening 40 does not leak immediately, the container body 1 is filled to some extent with the gas. By making it leak, the air which existed in the board | substrate storage container can be leaked from here. As a result, the replacement efficiency can be improved. Moreover, such a leaking part can be made to become the upper part or the lower part of the opening part 40 filled with the inert gas supplied, for example from the bottom face.

  Here, the bending amount of the bent seal piece 19 (side-side bent seal piece 19a, lateral side-side bent seal piece 19b) of the seal gasket is defined as b1 on the lateral side of the rectangular frame shown in FIG. When b1 is set to 1, the air leakage position can be controlled by setting the side a1 and a2 to be 1.3 times or more. If it is less than 1.3, it is not sufficient to prevent leakage from the side and the replacement time of the inert gas cannot be shortened.

  Specifically, the heights h1 and h2 from the lower surface of the intermediate piece of the bent seal piece 19 (the side-side bent seal piece 19a, the lateral side-side bent seal piece 19b) of the seal gasket 3 are set to the horizontal sides of the frame body. When the side h1 is 1, the side h2 is 1.3 times higher so that the left and right side seal forming surfaces 4a of the opening 40 are strongly pressed and pressed. By preventing the leakage of gas until the supplied inert gas is filled to some extent, and after being filled to some extent, it is possible to leak from the top side or the bottom side which are b1 and b2 in the lateral direction, Gas replacement time can be shortened.

  6A and 6B are modifications of the first embodiment, and among the bent seal pieces 23 (side side bent seal pieces 23a, lateral side bent seal pieces 23b) of the seal gasket 3, The thickness t1 of the side-side bent seal piece 23a is made thicker than the wall thickness t2 of the lateral side-side bent seal piece 23b, and the difference in the crushing strength of the seal gasket 3 when the lid 2 is attached to the opening 40 is different. It is attached. Also in this case, since the gas immediately after supply can be prevented from leaking from the left and right sides of the opening 40, the same effect as in the first embodiment can be obtained.

(Second Embodiment)
FIGS. 7A and 7B show the second embodiment. 7 (a) and 7 (b), the dimensions of the bent seal piece 24 (side side seal forming surface 24a, lateral side seal forming surface 24b) of the seal gasket 3 are not changed. On the side side, as shown in FIG. 7A, a protrusion 25 is provided on the side side seal forming surface 24a to press the side side bent seal piece 19a more strongly. On the lateral side, as shown in FIG. 7B, no projection is provided on the lateral side seal forming surface 24b. In this case, the same effect as that of the first embodiment can be obtained.

(Third embodiment)
FIGS. 8, 9A, and 9B show the third embodiment, and the lateral side bent seal piece 27b of the seal gasket 26 or the lateral side seal forming surface 28b of the opening 40 is shown. In addition, when the internal pressure of the substrate storage device is increased, minute irregularities 29 (protrusions 29a and 29b) that impair the sealing performance are formed to facilitate gas leakage from here.

FIG. 10 shows an example in which a leaking groove 30 is formed on the lateral side seal forming surface 28b.
In these cases, the same effects as those of the first and second embodiments are obtained.

  In the first to third embodiments, the seal gasket is premised on having a certain property regardless of the portion of the rectangular frame. For example, the side of the frame has a lower hardness than the lateral side. By forming, a sealing effect becomes high. The adjustment of the hardness by such a part is, for example, changing the blending amount of the elastomer plasticizer used for the seal gasket depending on the part, providing a difference between a pair of opposite sides of the rubber material, or having different properties. This is achieved by molding the material in two colors.

  Using a substrate storage container as shown in FIG. 1 and a seal gasket, supply nitrogen gas into the substrate storage container, and prepare a plurality of bent seal pieces or openings with different dimensions of the seal gasket. As shown in FIG. 11, measurement is performed by inserting a sensor for measuring oxygen concentration, humidity, pressure, etc. into the substrate storage container, and each of the replacement times when the oxygen concentration becomes a predetermined value of 11 ppm or less is measured. did.

Example 1
Using a seal gasket with the height of the bent seal piece on the lateral side of the seal gasket set to 1 and the height of the bent seal piece on the side set to 1.3, 40 L of nitrogen is supplied from one side of the opening / closing valve of the container body. / Min was supplied and the other side was exhausted, and the time when the value was 11 ppm or less was measured. This value was taken as the replacement time.

(Example 2)
Supply nitrogen at 40 L / min from one of the open / close valves on the container body using a seal gasket with a side bent seal piece height of 1 and a side bent seal piece height of 1.5. Then, the gas was exhausted from the other side, and the time when the value was 11 ppm or less was measured. This value was taken as the replacement time.

(Example 3)
A seal gasket in which the height of the bent seal piece on the lateral side is set to 1, and the height of the bent seal piece on the side side is set to 1, and the side opening on the side is 1 than the horizontal side opening on the container body. Using a container body formed with a side formed so as to be three times higher, nitrogen is supplied from one of the opening and closing valves of the container body at 40 L / min, and exhausted from the other, whereby the oxygen concentration inside the substrate storage container Was measured, and the time when the value was 11 ppm or less was measured. This value was taken as the replacement time.

Example 4
The height of the bent seal piece on the side in the lateral direction is 1, the height of the bent seal piece on the side is set to 1, and the thickness of the bent seal piece on the side is thicker than that on the side in the lateral direction. Using a seal gasket formed to increase 1.3 times, supply 40 L / min of nitrogen from one of the opening and closing valves of the container body and exhaust from the other to measure the oxygen concentration inside the substrate storage container. The time when the value was 11 ppm or less was measured. This value was taken as the replacement time.

(Comparative Example 1)
Supply nitrogen at 40 L / min from one of the opening and closing valves of the container body using a seal gasket with the height of the bent seal piece on the lateral side set to 1 and the height of the bent seal piece on the side set to 1; It exhausted from the other, the oxygen concentration inside a substrate storage container was measured, and the time when the value was 11 ppm or less was measured. This value was taken as the replacement time.

(Comparative Example 2)
Using a seal gasket in which the height of the bent seal piece on the lateral side is 1, and the height of the bent seal piece on the side is 1.2 times, nitrogen is supplied from one side of the open / close valve of the container body to 40 L / min. Then, the oxygen was exhausted from the other side, and the oxygen concentration inside the substrate storage container was measured, and the time when the value was 11 ppm or less was measured. This value was taken as the replacement time.

  Table 1 shows the nitrogen gas replacement time in the substrate storage container with respect to the seal gasket height and the container body seal formation surface height of each of Examples 1 to 4 and Comparative Examples 1 and 2. By changing the seal gasket height and the container body seal formation surface height to form a crushing amount ratio of the projecting piece on the side of the seal member to 1.3 or more, the nitrogen gas replacement time is reduced to 86% or less. It has been shown.

DESCRIPTION OF SYMBOLS 1 Container body 2 Cover body 3 Seal gasket 4 Seal formation surface 4a Side edge seal formation surface 4b Lateral side edge seal formation surface 5 Teeth 6 Bottom plate 7 Robotic flange 8 Locking hole 9 Through hole 10 Opening / closing valve 10a Supply side Open / close valve 10b Exhaust side open / close valve 11 Locking mechanism 12 Front retainer 13 Rotating plate
14 Power transmission plate 15 Locking claw 16 Base
17 Mating protrusion 18 Middle part
19 Bent seal piece 19a Side side bent seal piece 19b Lateral side side bent seal piece 20 Curved portion 21 Spherical protrusion 22 Fitting groove 23 Bent seal piece 23a Side side bent seal piece 23b Lateral side side bent seal piece 24 Seal Forming surface 24a Side side seal forming surface 24b Lateral side side seal forming surface 25 Protruding portion 26 Seal gasket 27b Lateral side side bent seal piece 28b Lateral side side seal forming surface 29 Concavity and convexity 29a Convex 29b Concave 30 Leak groove 40 Opening Part

Claims (6)

A container body that houses a precision substrate, and has a gas purge opening / closing valve on the bottom surface;
A rectangular opening provided on the front surface of the container body and having a bottom side at one end of the bottom surface for taking the precision substrate into and out of the container body;
A lid for opening and closing the opening;
An elastically deformable rectangular seal gasket interposed between the opening and the lid;
With
The seal gasket includes a base portion that is fitted to a fitting holding portion that is formed over the entire outer periphery of the lid body, and a bent portion that extends obliquely outward from the base portion toward the outer periphery and is pressed against the seal forming surface of the container body. A projecting piece, and a fitting rib that protrudes from one surface of the base portion and is brought into contact with the inner surface of the fitting holding portion in a press- contact holding state,
Wherein when the bending amount h2 of the projecting piece in the lateral-edge of the seal gasket was 1, the bending ratio of the amount of deflection of said protrusion in the side-edge of the sealing gasket h1 formed in 1.3 above, h1 ≧ 1 .3 × h2 is satisfied ,
An inert gas that is a purge gas is supplied to the container body ,
The ratio of the amount of deflection is formed by changing the ratio of the height h1 of the projecting piece on the side of the seal gasket to the height h2 of the projecting piece on the lateral side of the rectangular seal gasket. The side-side bent seal piece of the seal gasket is more strongly pressed against the seal-forming surface,
While supplying the purge gas to the container body, leakage of the gas from the side and side sides of the container body is prevented,
When the gas pressure in the container body is higher than the external pressure, the internal stagnant gas in the container body is leaked to the outside only from the lateral side as the gas leakage position,
The residence gas in the container body is efficiently replaced with the purge gas,
In the conditional expression, the time for replacement with the purge gas is changed by changing the deflection ratio of h1 to h2.
A substrate storage container. A protrusion is formed on the side seal forming surface on the side of the container body, and the ratio of the deflection amount is formed by forming the protrusion .
The substrate storage container according to claim 1, wherein: The ratio of the height of the sealing gasket from the lid body to the container body direction on the side edge of the seal gasket is changed with respect to the height of the rectangular sealing gasket from the lid body to the container body direction at the lateral side. Thus, the ratio of the deflection amount is formed .
The substrate storage container according to claim 1, wherein: The thickness of the projecting piece is than in the transverse-edge of the rectangular of the sealing gasket is formed thicker in the side edge of the sealing gasket,
The substrate storage container according to claim 1, wherein: The seal gasket is formed with high hardness on the lateral side and formed with low hardness on the side .
The board | substrate storage container of any one of Claims 1-4 characterized by the above-mentioned. The surface roughness of the sealing gasket projecting piece is than in the transverse-edge of the rectangular of the sealing gasket is smoothly formed in the side edge of the sealing gasket,
The substrate storage container according to any one of claims 1 to 5, wherein

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