JP7073599B2 - Board storage container - Google Patents

Description

The present disclosure relates to a substrate storage container.

The board storage container is provided with a container body for storing the board, a lid for closing the opening of the container body, and an annular packing provided between the container body and the lid, and the board is airtight. It is stored in a state.

This type of packing includes those in which the extension piece is formed so as to form an approximately acute angle between the extension line and the sealing surface, those in which the extension piece is curved to the outside of the substrate storage container in contact with the sealing surface, and the front surface of the opening. Those that are bent outward are known (see, for example, Patent Document 1 and Patent Document 2).

These packings are deformed in the direction in which the extension piece is pressed against the sealing surface when the inside of the substrate storage container is negative pressure, in other words, when the outside pressure is high, so that the packing has good sealing performance. It has become.

Japanese Unexamined Patent Publication No. 2002-06664 Japanese Unexamined Patent Publication No. 2008-02979

However, with the above-mentioned conventional technique, it is difficult to reduce the generation of particles due to friction caused by opening and closing the lid while ensuring the sealing property against the internal positive pressure. The packing is made of an elastomer or the like, and particles are relatively likely to be generated by friction. Further, when the purge gas such as the inert gas is supplied to the inside of the substrate storage container, that is, when the inside of the substrate storage container becomes positive pressure, the extension piece is deformed in the direction of being peeled off from the sealing surface, so that the seal is sealed. The sex may be reduced.

Therefore, on one aspect, it is an object of the present invention to reduce the generation of particles due to friction caused by opening and closing the lid while ensuring the sealing property against the internal positive pressure.

On one side, the container body that houses the board and
A lid that closes the opening of the container body is provided.
One part of the container body around the opening and one part of the lid body facing the first part are formed of a material different from the other part, and the other part. Provided is a substrate storage container having a protrusion that projects toward the surface and has a protrusion whose end face abuts on the other portion.

On one side, according to the present invention, it is possible to reduce the generation of particles due to friction caused by opening and closing the lid while ensuring the sealing property against the internal positive pressure.

It is an exploded schematic perspective view which shows a part of the substrate storage container of one Example. It is a schematic sectional drawing which shows the substrate storage container by an example. It is explanatory drawing of the seal effect by a labyrinth seal structure. It is a schematic sectional drawing which shows a part of the substrate storage container by another example. It is a schematic sectional drawing which shows a part of the substrate storage container by another example.

Hereinafter, each embodiment will be described in detail with reference to the accompanying drawings.

FIG. 1 is an exploded schematic perspective view showing a substrate storage container 1 of an embodiment.

As shown in FIG. 1, the substrate storage container 1 includes a container body 10 for storing the substrate W and a lid 20 for closing the opening 11 of the container body 10.

The container body 10 is a box-shaped body, and is a front open type having an opening 11 formed in the front surface. The opening 11 is bent and formed with a step so as to spread outward, and the surface of the step portion is formed as a sealing surface 12 on the inner peripheral edge of the front surface of the opening 11. The container body 10 is preferably a front open type because it is easy to insert a substrate W having a diameter of 300 mm or 450 mm, but it may be a bottom open type in which the opening 11 is formed on the lower surface.

Supports 13 are arranged on the left and right sides of the inside of the container body 10. The support 13 has a function of placing and positioning the substrate W. A plurality of grooves are formed in the support 13 in the height direction to form a so-called groove teeth. The substrate W is placed on two groove teeth on the left and right at the same height. The material of the support 13 may be the same as that of the container body 10, but different materials may be used in order to improve heat resistance, cleanability, and slidability.

Further, a rear retainer (not shown) is arranged behind (inside) the inside of the container body 10. When the lid 20 is closed, the rear retainer is paired with the front retainer 30 described later to hold the substrate W. However, in the modified example, the support 13 does not have a rear retainer, and the support 13 has a substrate holding portion having a “dogleg” shape or a linear shape on the back side of the groove teeth, so that the front retainer 30 and the substrate are held. It may be such that the substrate W is held by the portion. These supports 13 and rear retainers are provided on the container body 10 by insert molding, fitting, or the like.

The substrate W is supported by the support 13 and stored in the container body 10. An example of the substrate W is a silicon wafer, but is not particularly limited, and may be, for example, a quartz wafer, a gallium arsenide wafer, a glass wafer, a resin wafer, or the like.

A robotic flange 14 is detachably provided at the center of the ceiling of the container body 10. The substrate storage container 1 accommodating the substrate W in a clean state is grasped by the transfer robot in the factory with the robotic flange 14 and conveyed to the processing apparatus for each process of processing the substrate W.

Further, manual handles 15 held by the operator are detachably attached to the central portions of the outer surfaces of both side portions of the container body 10.

For example, an air supply valve 18 having a check valve function and an exhaust valve 19 are provided on the bottom surface of the container body 10. These are supplied by supplying an inert gas such as nitrogen gas or dry air from the air supply valve 18 to the inside of the substrate storage container 1 closed by the lid 20, and discharging the dry air from the exhaust valve 19 to discharge the substrate storage container 1. It replaces the gas inside the container and maintains the airtight state. The air supply valve 18 and the exhaust valve 19 are preferably located outside the position where the substrate W is projected onto the bottom surface, but the quantity and position of the air supply valve 18 and the exhaust valve 19 are limited to those shown in the drawings. do not have. Further, the air supply valve 18 and the exhaust valve 19 have a filter for filtering gas.

The replacement of the gas inside is performed for the purpose of blowing off impurities on the stored substrate W and lowering the humidity inside, and keeps the inside of the substrate storage container 1 being transported clean. By detecting the gas on the exhaust valve 19 side, it is possible to confirm whether the gas replacement is surely performed. Then, when replacing the gas inside or when the lid 20 is attached to the container body 10 and closed, the inside of the substrate storage container 1 becomes positive pressure, and conversely, the lid 20 is removed from the container body 10. Occasionally, the inside of the substrate storage container 1 becomes negative pressure.

The lid 20 has a substantially rectangular shape and is attached to the front of the opening 11 of the container body 10. As shown in FIG. 1, the lid 20 has a lid main body 21 (an example of the main body of the lid), a pair of locking mechanisms 26 installed on the lid main body 21 for locking, and each locking mechanism 26 attached and detached. It is provided with a pair of plates 27 that can be freely covered, and is detachably fitted to the front portion of the opening of the container body 10. The lid 20 is locked by the locking mechanism 26 by inserting a locking claw into a locking hole (not shown) formed in the container body 10. The lid body 21, the pair of locking mechanisms 26, and the pair of plates 27 of the lid 20 are molded using the same molding material as the container body 10.

Further, the lid 20 is detachably attached or integrally formed with an elastic front retainer 30 that horizontally holds the front peripheral edge of the substrate W in the central portion.

Since the front retainer 30 is a portion where the wafer comes into direct contact with the groove teeth of the support 13 and the substrate holding portion, a material having good detergency and slidability is used. The front retainer 30 can also be provided on the lid 20 by insert molding, fitting, or the like.

Examples of the material of the container body 10 and the lid 20 (lid body 21) include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyethersulphon, polyetheretherketone, and liquid crystal polymer. Be done. The thermoplastic resin may be further appropriately added with a conductive agent made of conductive carbon, conductive fiber, metal fiber, conductive polymer and the like, various antistatic agents, an ultraviolet absorber and the like.

FIG. 2 is a schematic cross-sectional view showing a seal structure according to an example. FIG. 2 (the same applies to FIGS. 3 and later described later) is a cross-sectional view of a portion of the container body 10 of FIG. 1 along the lines AA (cross-sectional view of the container body 10 with the lid 20 closed). Is. In FIG. 2, the X and Y directions are defined as two orthogonal directions. In the X direction, the X1 side corresponds to the inside and the X2 side corresponds to the outside. The X direction corresponds to the radial direction around the opening 11. Further, in the Y direction, the Y1 side corresponds to the inside and the Y2 side corresponds to the outside. The Y direction (an example of the first direction) is a direction substantially parallel to the surface of the substrate W (see FIG. 1) when it is housed in the container body 10.

As shown in FIG. 2, the container body 10 has a first portion 110 around the opening 11, and the lid 20 has a second portion 210 facing the first portion 110. The first portion 110 has a surface 101 (an example of the first surface) facing the second portion 210 in the Y direction, and a surface 102 facing the second portion 210 in the X direction. The surface 101 forms a sealing surface 12 (see FIG. 1). Similarly, the second portion 210 has a surface 211 (an example of the first surface) facing the first portion 110 in the Y direction and a surface 212 facing the first portion 110 in the X direction. In this way, the first portion 110 and the second portion 210 face each other in the Y direction and face each other in the X direction.

In FIG. 2, the minimum gap between the surface 101 and the surface 211 is 0 (design value), and the gap δ1 (minimum gap) between the surface 102 and the surface 212 is larger than 0. .. The gap δ1 is set so that contact between the surface 102 and the surface 212 does not occur due to a tolerance or the like. The gap δ1 is larger than 0 mm, preferably 1.0 mm or less, and more preferably 0.5 mm or less. This is because if it is larger than 1.0 mm, the sealing property cannot be effectively obtained.

The second portion 210 is a separate body from the lid portion main body 21. That is, the lid body 20 includes the lid portion main body 21 and the second portion 210. The second portion 210 is attached to the lid portion main body 21.

The second portion 210 is integrated with, for example, the lid portion main body 21 by fitting. Alternatively, the second portion 210 may be integrated with the lid portion main body 21 by adhesion. Alternatively, the second portion 210 may be integrally molded (for example, two-color molding) with the lid portion main body 21, depending on the material.

Since the second portion 210 is separate from the lid main body 21, it can be molded separately from the lid main body 21. Therefore, the second portion 210 can be designed without considering the formability of the lid portion main body 21. For example, the second portion 210 may partially include a shape that becomes an undercut, and may be fitted to the lid portion main body 21 by utilizing such a shape.

As the material of the second portion 210, a thermoplastic elastomer composed of a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, a urethane-based elastomer, etc., and elasticity of fluorine rubber, ethylene propylene rubber, silicone-based rubber, etc. You can use the body. From the viewpoint of improving adhesion, these materials include fillers made of carbon, glass fiber, mica, talc, silica, calcium carbonate, etc., and resins such as polyethylene, polyamide, polyacetal, fluororesin, and silicone resin. A predetermined amount may be selectively added. Further, from the viewpoint of imparting conductivity and antistatic properties, carbon fibers, metal fibers, metal oxides, various antistatic agents and the like may be appropriately added. The hardness of the second portion 210 is preferably 40 to 90 degrees, more preferably 60 to 90 degrees in terms of shore A hardness. Hereinafter, such a suitable material for the second portion 210 is simply referred to as an “elastic material”.

The second site 210 has a rib group 710 protruding toward the first site 110. In FIG. 2, the rib group 710 has three ribs 710-1, 710-2, and 710-3 (an example of protrusions) in the form of ridges, but the number of ribs is arbitrary. For example, any one or two of the three ribs 710-1, 710-2, 710-3 may be omitted, or additional ribs may be set.

The ribs 710-1, 710-2, and 710-3 are formed over the entire circumference around the opening 11. For example, the ribs 710-1, 710-2, and 710-3 may be formed with an equal cross section over the entire circumference around the opening. In the modified example, the ribs 710-1, 710-2, and 710-3 may have their cross sections changed in a part of the circumferential direction around the opening 11, or may not change in a part of the circumferential direction around the opening 11. It may be continuous.

As shown in FIG. 2, the ribs 710-1, 710-2, and 710-3 have end faces in the Y direction (end faces on the Y1 side) abutting on the first portion 110. At this time, the end faces of the ribs 710-1, 710-2, and 710-3 in the Y direction come into surface contact with the surface 101 of the first portion 110. The end faces of the ribs 710-1, 710-2, and 710-3 in the Y direction may be, for example, planar. The ribs 710-1, 710-2, and 710-3 have elasticity and may be pressed against the first portion 110.

The ribs 710-2 and 710-3 may be formed in any form. For example, in the example shown in FIG. 2, the ribs 710-2 and 710-3 have their outer peripheral surfaces inclined inward toward the Y1 side. In this case, the sealing property against the internal positive pressure can be enhanced in a non-contact state due to a tolerance or the like, which will be described later, as compared with the case where the inner peripheral surface is inclined toward the outside toward the Y1 side. The principle will be described later). However, in the modified example, the ribs 710-2 and 710-3 may or may not be inclined so that the inner peripheral surface is inclined toward the outside toward the Y1 side. Alternatively, the ribs 710-2 and 710-3 may be formed in a non-tilting manner.

The ribs 710-1, 710-2, and 710-3 preferably have a height difference (see height H in FIG. 2) of 10 mm or less, and may be, for example, in the range of 1 mm to 10 mm. If the height difference (see height H in FIG. 2) is 5 times or more, preferably 10 times or more the gap δ1, a large sealing effect can be expected.

Here, the substrate storage container 1 is used many times, and the lid 20 is opened and closed many times. In this respect, in the case of the comparative example in which the sealing property is ensured by using the packing formed of the elastomer or the like, particles are likely to be generated by friction. That is, particles are likely to be generated due to the sliding of the packing with respect to the sealing surface due to the opening and closing of the lid. If the inside of the container body is negative pressure when the lid is opened in the state where such particles are generated, the particles may enter the inside of the container body and contaminate the substrate.

Further, in the case of a comparative example (not shown) in which a packing formed of an elastomer or the like is used to ensure sealing performance, the packing sticks to the sealing surface of the container body, and the opening / closing torque of the lid becomes excessive, resulting in an excessive opening / closing torque in the manufacturing process. It causes an error or the like.

In this regard, according to the example shown in FIG. 2, since the second portion 210 has the rib group 710, the contact area between the first portion 110 and the second portion 210 is relatively small, and the first portion due to friction is generated. The possibility of generating particles from the 110 and the second portion 210 is low. Further, since the contact area between the first portion 110 and the second portion 210 is relatively small, the possibility that the second portion 210 sticks to the sealing surface 12 of the container body 10 is reduced. Therefore, according to the example shown in FIG. 2, the above-mentioned inconvenience (that is, the problem due to the comparative example) caused by using the conventional packing can be avoided.

In the example shown in FIG. 2, in the state where the lid 20 is completely closed to the substrate storage container 1 (the state in which the locking mechanism 26 is operated), the second portion 210 may be in an elastically deformed state. .. In this case, when the lid 20 is completely closed to the substrate storage container 1, the position of the lid main body 21 in the Y direction with respect to the sealing surface 12 of the substrate storage container 1 is designed due to various tolerances and the like. There is a high possibility that the end surface (end surface on the Y1 side) of the rib group 710 of the second portion 210 can be maintained in contact with the first portion 110 even if the gap in the Y direction is deviated from the position of. Become.

Further, in this embodiment, in a state where the lid 20 is completely closed to the substrate storage container 1, due to various tolerances and the like, the sealing surface 12 (surface 101) of the substrate storage container 1 and the lid main body 21 Even if the gap between the second portion 210 and the second portion 210 becomes larger than the design value of 0 (that is, no gap), high sealing performance can be maintained due to the labyrinth seal structure (described later with reference to FIG. 3). ..

Here, with reference to FIG. 3, the sealing effect of the labyrinth sealing structure will be described. Hereinafter, a state in which the gap between the sealing surface 12 (surface 101) of the substrate storage container 1 and the second portion 210 of the lid main body 21 is larger than the design value of 0 is referred to as a “non-contact state due to tolerance or the like”. Refer to.

FIG. 3 is an explanatory diagram of the sealing effect of the labyrinth sealing structure 70A formed in a non-contact state due to tolerance or the like. In FIG. 3, for the sake of explanation, the minimum gap in the Y direction between the surface 101 and the surface 211 is shown to be relatively large.

FIG. 3 shows a non-contact state due to tolerances and the like. In a non-contact state due to tolerance or the like, a labyrinth seal structure 70A is formed between the container body 10 and the lid body 20.

As shown in FIG. 3, the labyrinth seal structure 70A repeats the narrow portion 701 and the enlarged portion 702 along the X direction. Therefore, for example, when the inside of the container body 10 is positive pressure, in the flow from the inside P0 to the outside P1 of the container body 10, as schematically shown by an arrow in FIG. 3, the narrow portion 701 to the enlarged portion 702 A pressure loss is generated by repeating the rapid expansion of the flow path area at the time of transition to the expansion portion 702 and the rapid reduction of the flow path area at the time of transition from the expansion portion 702 to the narrow portion 701. Further, when the container body 10 is transferred from the internal P0 to the first narrow portion 701, the flow path area is rapidly reduced, so that a pressure loss occurs. Further, when the container body 10 is transferred to the external P1, the flow path area is rapidly expanded, so that a pressure loss occurs. In this way, in the labyrinth seal structure 70A, the pressure gradually changes between the internal P0 and the external P1. As a result, the flow of gas between the internal P0 and the external P1 via the labyrinth seal structure 70A is reduced or eliminated, and the sealing function is exhibited. That is, the sealing property against the positive pressure inside is ensured.

Further, even when the inside of the container body 10 has a negative pressure, the sealing function is similarly exhibited. This is because even in the flow from the outer P1 to the inner P0 of the container body 10, the flow path area is rapidly expanded at the time of transition from the narrow portion 701 to the enlarged portion 702, and the transition from the enlarged portion 702 to the narrow portion 701 is performed. This is because pressure loss occurs due to repeated rapid reduction of the flow path area.

The number of repetitions of the rapid expansion and contraction may be at least twice, including the rapid contraction of the container body 10 from the internal P0 and the rapid expansion of the container body 10 to the external P1. That is, as described above, the number of ribs may be one or more. However, in order to improve the sealing property, it is desirable that the number of ribs is two or more.

In this way, according to the present embodiment, even in a non-contact state due to tolerance or the like, the labyrinth seal structure 70A has a higher seal even though the first portion 110 and the second portion 210 are not in contact with each other. You can secure sex. Therefore, according to the example shown in FIG. 2, it is possible to reduce the generation of particles due to friction due to the opening and closing of the lid 20 while ensuring the sealing property against the positive pressure and the negative pressure inside the container body 10.

In the example shown in FIG. 2, the ribs 710-1, 710-2, and 710-3 are formed between the surface 101 of the first site 110 and the surface 211 of the second site 210, but instead. In addition, similar ribs 710-1, 710-2, 710-3 may be formed between the surface 102 of the first site 110 and the surface 212 of the second site 210.

Further, in the example shown in FIG. 2, the second part 210 is a separate body from the lid main body 21, and the rib group 710 is formed in the second part 210. Instead, the first part 110 is a container. It may be a separate body from the main body of the main body 10. In this case, a similar rib group 710 is formed at the first site 110. In this case, the first portion 110 is formed of an elastic material.

Further, in the example shown in FIG. 2, the entire second portion 210 is formed of the elastic material, but only the rib group 710 may be formed of the elastic material, or only the end portion of the rib group 710 on the Y1 side. It may be formed of an elastic material.

FIG. 4 is a schematic cross-sectional view showing a seal structure according to another example. In the example shown in FIG. 4, the same components as those in the above-mentioned example shown in FIG. 2 may be designated by the same reference numerals and the description thereof may be omitted.

The example shown in FIG. 4 differs from the example shown in FIG. 2 in that the lid body 20 is replaced with the lid body 20B. The lid body 20B is different from the lid body 20 in that the second portion 210B is attached to the lid portion main body 21B via the elastic body 60. That is, in the lid body 20 shown in FIG. 2, the second portion 210 is directly attached to the lid portion main body 21, whereas in the lid body 20B shown in FIG. 4, the second portion 210B is elastic to the lid portion main body 21B. It is integrated by being attached via the body 60.

The lid body 21B is formed of a resin material such as polycarbonate, a cycloolefin polymer, a liquid crystal polymer, a polyether ether ketone, polypropylene, or the like. On the other hand, the second moiety 210B is preferably formed of a highly slidable resin material such as polyetherketone, polybutylene terephthalate, polyacetal, etc., in addition to polypropylene. Even when the lid 20B is required to have low hygroscopicity, the second portion 210B may be formed of a material that does not have low hygroscopicity because it is a relatively small portion of the lid 20B.

As the elastic body 60, for example, a thermoplastic elastomer composed of a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, a urethane-based elastomer, etc., a fluororubber, an ethylene propylene rubber, a silicone-based rubber, or the like may be used. can.

The second portion 210B is integrated with the lid main body 21B by fitting, for example, in a state of being integrated with the elastic body 60. Alternatively, the second portion 210B may be integrated with the lid main body 21B by adhesion in a state of being integrated with the elastic body 60. Alternatively, the second portion 210B may be integrated with the elastic body 60 integrally molded with the lid portion main body 21B by adhesion.

In FIG. 4, the container body 10 has a first portion 110 around the opening 11, and the lid 20B has a second portion 210B facing the first portion 110. The second site 210B has a rib group 710 protruding toward the first site 110.

The example shown in FIG. 4 also has the same effect as the example shown in FIG. That is, even in the example shown in FIG. 4, since the labyrinth seal structure (not shown) is formed in a non-contact state due to a tolerance or the like, the sealing property against positive pressure and negative pressure inside the container body 10 is ensured. It is possible to reduce the generation of particles due to friction caused by opening and closing the lid 20.

Further, according to the example shown in FIG. 4, since the second portion 210B is a separate body from the lid portion main body 21B, it can be formed of a material different from that of the lid portion main body 21B. Therefore, the second portion 210B can be formed of a resin material having high slidability. In this case, the possibility of particle generation can be reduced as compared with the case where the second portion 210B is formed of the rubber material.

Further, according to the example shown in FIG. 4, since the second portion 210B is attached to the lid main body 21B via the elastic body 60, the tolerance can be absorbed by the elastic deformation of the elastic body 60. That is, in a state where the lid 20B is completely closed with respect to the container body 10, the position of the lid body 21B in the Y direction with respect to the sealing surface 12 of the container body 10 is designed due to various tolerances and the like. Even if the gap in the Y direction is deviated from the position in the narrowing direction, the elastic body 60 is elastically deformed, so that the end face (end face on the Y1 side) of the rib group 710 of the second part 210B is relatively high in the first part 110. The possibility of contact by pressure can be reduced. As a result, the possibility of generating particles from the contact range between the first portion 110 and the second portion 210B can be reduced.

In the example shown in FIG. 4, the side surface of the second portion 210B is separated from the lid body 21B on the X1 side, but the side surface on the X1 side is in contact with the lid body 21B. It may be attached to.

FIG. 5 is a schematic cross-sectional view showing a seal structure according to another example. In the example shown in FIG. 5, the same components as those in the above-mentioned example shown in FIG. 2 may be designated by the same reference numerals and the description thereof may be omitted.

The example shown in FIG. 5 is different from the example shown in FIG. 2 in that the container body 10 is replaced with the container body 10C and the lid body 20 is replaced with the lid body 20C.

The container body 10C is different from the container body 10 shown in FIG. 2 in that the first portion 110 is replaced with the first portion 110C. The lid body 20C is different from the lid body 20 shown in FIG. 2 in that the lid portion main body 21 is replaced with the lid portion main body 21C and the second portion 210 is replaced with the second portion 210C.

As shown in FIG. 5, the container body 10C has a first portion 110C around the opening 11 and the lid 20C has a second portion 210C facing the first portion 110C.

The first portion 110C has a surface 101C (an example of the first surface) facing the second portion 210C in the Y direction, and a surface 102C facing the second portion 210C in the X direction. The surface 101C forms a sealing surface 12 (see FIG. 1). Similarly, the second portion 210C has a surface 211C (an example of the first surface) facing the first portion 110C in the Y direction and a surface 212C facing the first portion 110C in the X direction. In this way, the first portion 110C and the second portion 210C face each other in the Y direction and face each other in the X direction.

In FIG. 5, the minimum gap between the surface 101C and the surface 211C is 0 (design value), and the gap δ1 (minimum gap) between the surface 102C and the surface 212C is larger than 0. .. The gap δ1 is set so that contact between the surface 102C and the surface 212C does not occur due to a tolerance or the like. The gap δ1 is larger than 0 mm, preferably 1.0 mm or less, and more preferably 0.5 mm or less. This is because if it is larger than 1.0 mm, the sealing property cannot be effectively obtained.

The first site 110C has a rib group 120C protruding toward the second site 210C. In FIG. 5, the rib group 120C has two ribs 120C-1 and 120C-2 (an example of a protrusion), but the number of ribs is arbitrary. For example, any one of the two ribs 120C-1 and 120C-2 may be omitted, or additional ribs may be set.

The second portion 210C is a separate body from the lid portion main body 21C. The second portion 210C is attached to the lid main body 21C.

The second portion 210C is integrated with the lid main body 21C by fitting, for example. Alternatively, the second portion 210C may be integrated with the lid portion main body 21C by adhesion. Alternatively, the second portion 210C may be integrally molded (for example, two-color molding) with the lid main body 21C, depending on the material.

Since the second portion 210C is separate from the lid main body 21C, it can be molded separately from the lid main body 21C. Therefore, the second portion 210C can be designed without considering the formability of the lid portion main body 21. For example, the second portion 210C may partially include a shape that becomes an undercut, and may be fitted to the lid portion main body 21C by utilizing such a shape.

The second portion 210C is formed of the elastic material described above. The second site 210C has a rib group 710C projecting toward the first site 110C. In FIG. 5, the rib group 710C has two ribs 710C-1 and 710C-2, but the number of ribs is arbitrary. For example, any one of the two ribs 710C-1 and 710C-2 may be omitted, or additional ribs may be set.

The ribs 120C-1 and 120C-2 and the ribs 710C-1 and 710C-2 are formed over the entire circumference around the opening 11. For example, the ribs 120C-1 and 120C-2 and the ribs 710C-1 and 710C-2 may be formed with an equal cross section over the entire circumference around the opening. In the modified example, at least one of the ribs 120C-1 and 120C-2 and the ribs 710C-1 and 710C-2 may have a cross section changed in a part of the circumferential direction around the opening 11, or the opening 11 may be changed. It may be discontinuous in a part of the surrounding circumferential direction.

The ribs 120C-1 and 120C-2 preferably have a form in which the moldability of the container body 10C is taken into consideration, that is, a form in which the ribs 120C-1 and 120C-2 are removed from the mold. As shown in FIG. 5, the ribs 120C-1 and 120C-2 have their outer peripheral surfaces inclined inward toward the Y2 side. However, in the modified example, the ribs 120C-1 and 120C-2 may be inclined toward the outside so that the inner peripheral surface thereof is toward the Y2 side.

The ribs 710C-1 and 710C-2 may be formed in any form. For example, as shown in FIG. 5, the rib 710C-2 has an outer peripheral surface inclined inward toward the Y1 side. However, in the modified example, the rib 710C-2 may be inclined toward the outside so that the inner peripheral surface thereof is toward the Y1 side. Alternatively, the ribs 710C-1 and 710C-2 may be formed in a non-tilting manner.

The ribs 120C-1 and 120C-2 and the ribs 710C-1 and 710C-2 preferably have a height difference of 10 mm or less, and may be, for example, in the range of 1 mm to 10 mm. If the height difference is 5 times or more, preferably 10 times or more the gap δ1, a large sealing effect can be expected.

The example shown in FIG. 5 also has the same effect as the example shown in FIG. That is, even in the example shown in FIG. 5, the labyrinth seal structure (not shown) is formed in a non-contact state due to a tolerance or the like, so that the sealing property against positive pressure and negative pressure inside the container body 10 is ensured. It is possible to reduce the generation of particles due to friction caused by opening and closing the lid 20. Further, in the example shown in FIG. 5, since the gas flow path in the labyrinth seal structure is in the shape of a key, a higher sealing effect can be expected.

In the example shown in FIG. 5, the rib group 710C is formed between the surface 101C of the first portion 110C and the surface 211C of the second portion 210C, but instead of or in addition to this, the first portion 110C is formed. A similar rib group 710C may be formed between the surface 102C of the surface 102C and the surface 212C of the second portion 210C.

Further, in the example shown in FIG. 5, the second part 210C is separate from the lid main body 21C, and the rib group 710C is formed in the second part 210C. Instead, the first part 110C is a container. It may be a separate body from the main body of the main body 10C. In this case, the first portion 110C is formed of an elastic material.

Further, in the example shown in FIG. 5, the entire second portion 210C is formed of the elastic material, but only the rib group 710C may be formed of the elastic material, and only the end portion of the rib group 710C on the Y1 side may be formed. It may be formed of an elastic material.

In addition, also in the example shown in FIG. 5, it is possible to modify the example shown in FIG. 2 as in the example shown in FIG. That is, the second portion 210C may be formed of a highly slidable resin material such as polyetherketone, polybutylene terephthalate, polyacetal, or the like, in addition to polypropylene. In this case, the second portion 210C may be attached to the lid main body 21C via an elastic body such as an elastic body 60 (see FIG. 4).

Although each embodiment has been described in detail above, the present invention is not limited to a specific embodiment, and various modifications and changes can be made within the scope of the claims. It is also possible to combine all or a plurality of the components of the above-described embodiment.

1 Board storage container 10 Container body 10C Container body 11 Opening 12 Sealing surface 13 Support 14 Robotic flange 15 Manual handle 18 Air supply valve 19 Exhaust valve 20 Lid 20B Lid 20C Lid 21 Lid body 21B Lid body 21C Closure body 26 Locking mechanism 27 Plate 30 Front retainer 60 Elastic body 70A Labyrinth seal structure 101 Surface 101C Surface 102 Surface 102C Surface 110 First part 110C First part 120C Rib group 120C-1 Rib 120C-2 Rib 210 Second part 210B 2nd part 210C 2nd part 211 Surface 211C Surface 212 Surface 212C Surface 701 Narrow part 702 Enlarged part 710 Rib group 710-1 Rib 710-2 Rib 710-3 Rib 710C Rib group 710C-1 Rib 710C-2 Rib P0 Internal P1 External W board δ1 gap

Claims (6)

The container body that stores the board and
A lid that closes the opening of the container body is provided.
One part of the container body around the opening and one part of the lid body facing the first part are formed of a material different from the other part, and the other part. Has a protrusion that protrudes toward
The protrusion is in the form of two or more ridges formed over the entire circumference of the opening.
When the end face of the protrusion does not abut on the other portion, leaving a small gap.
A labyrinth structure that repeats rapid expansion and contraction of the space that causes pressure loss at least twice is formed between the end face of the protrusion and the other portion to ensure sealing performance and to ensure sealing.
When the end face of the protrusion abuts on the other portion,
A substrate storage container that forms a closed space between the protrusion and the other portion to ensure sealing performance . The first portion and the second portion have first surfaces facing each other in a first direction substantially parallel to the surface of the substrate when stored in the container body.
The substrate storage container according to claim 1 , wherein the protrusion is formed by the first surface of the first portion and the first surface of the second portion. The substrate storage container according to claim 1 or 2 , wherein the protrusion has a height difference of 10 mm or less. The substrate storage container according to any one of claims 1 to 3 , wherein the one portion is formed of an elastic body. The substrate storage container according to any one of claims 1 to 4 , wherein the one portion is the second portion. The one part is the second part, and the part is the second part.
The second portion is separate from the main body of the lid, and is attached to the main body of the lid via an elastic body.
The substrate storage container according to any one of claims 1 to 3 , wherein the elastic body is a separate body from the second portion and the main body of the lid body .

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