HK1023228A1 - Wafer carrier with minimum contact. - Google Patents

Wafer carrier with minimum contact.

Info

Publication number
HK1023228A1
HK1023228A1 HK00102409A HK00102409A HK1023228A1 HK 1023228 A1 HK1023228 A1 HK 1023228A1 HK 00102409 A HK00102409 A HK 00102409A HK 00102409 A HK00102409 A HK 00102409A HK 1023228 A1 HK1023228 A1 HK 1023228A1
Authority
HK
Hong Kong
Prior art keywords
wafer carrier
minimum contact
minimum
contact
wafer
Prior art date
Application number
HK00102409A
Other languages
English (en)
Inventor
David L Nyseth
Shawn Eggum
Michael S Adams
Sanjiv M Bhatt
Brian S Wiseman
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Publication of HK1023228A1 publication Critical patent/HK1023228A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electrostatic Charge, Transfer And Separation In Electrography (AREA)
  • Cable Accessories (AREA)
HK00102409A 1997-10-20 2000-04-20 Wafer carrier with minimum contact. HK1023228A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US95464097A 1997-10-20 1997-10-20

Publications (1)

Publication Number Publication Date
HK1023228A1 true HK1023228A1 (en) 2000-09-01

Family

ID=25495730

Family Applications (1)

Application Number Title Priority Date Filing Date
HK00102409A HK1023228A1 (en) 1997-10-20 2000-04-20 Wafer carrier with minimum contact.

Country Status (9)

Country Link
JP (1) JPH11204629A (xx)
KR (1) KR100830654B1 (xx)
CN (1) CN1165963C (xx)
DE (1) DE19848147A1 (xx)
FR (1) FR2770498B1 (xx)
HK (1) HK1023228A1 (xx)
IT (1) IT1303138B1 (xx)
NL (1) NL1010321C2 (xx)
SG (1) SG81942A1 (xx)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10151320B4 (de) * 2001-10-17 2006-02-09 Infineon Technologies Ag Scheibenträger
EP1458634A1 (en) * 2001-11-27 2004-09-22 Entegris, Inc. Front opening wafer carrier with path to ground effectuated by door
JP4146718B2 (ja) 2002-12-27 2008-09-10 ミライアル株式会社 薄板支持容器
JP4681221B2 (ja) * 2003-12-02 2011-05-11 ミライアル株式会社 薄板支持容器
JP4842879B2 (ja) * 2007-04-16 2011-12-21 信越ポリマー株式会社 基板収納容器及びそのハンドル
JP2009259951A (ja) * 2008-04-15 2009-11-05 Shin Etsu Polymer Co Ltd 基板収納容器
JP5078042B2 (ja) * 2009-06-08 2012-11-21 ゴールド工業株式会社 精密基板収納容器およびその製造方法
JP5120668B2 (ja) * 2009-06-08 2013-01-16 ゴールド工業株式会社 精密基板収納容器およびその製造方法
JP5449974B2 (ja) * 2009-10-16 2014-03-19 ゴールド工業株式会社 精密基板収納容器
JP2011249372A (ja) * 2010-05-24 2011-12-08 Shin Etsu Polymer Co Ltd 基板収納容器
JP5700434B2 (ja) * 2011-05-18 2015-04-15 信越ポリマー株式会社 ウェーハ収納容器
JP5921371B2 (ja) * 2012-07-13 2016-05-24 信越ポリマー株式会社 基板収納容器
KR102162366B1 (ko) 2014-01-21 2020-10-06 우범제 퓸 제거 장치
KR102281583B1 (ko) * 2014-01-21 2021-07-27 우범제 퓸 제거 장치
KR102223033B1 (ko) * 2014-04-29 2021-03-04 삼성전자주식회사 웨이퍼 수납장치
US9881820B2 (en) * 2015-10-22 2018-01-30 Lam Research Corporation Front opening ring pod
CN107706144A (zh) * 2017-09-14 2018-02-16 德淮半导体有限公司 晶圆清洗固定装置及清洗设备
KR102020294B1 (ko) * 2017-09-15 2019-09-11 (주)상아프론테크 슬롯 구조체 및 이를 포함하는 웨이퍼 보관 용기
TWI689030B (zh) * 2018-06-14 2020-03-21 家登精密工業股份有限公司 基板載具
CN109003928B (zh) * 2018-07-21 2021-03-09 江苏德尔科测控技术有限公司 一种硅片承载装置
KR200493303Y1 (ko) * 2018-12-27 2021-03-10 위아코퍼레이션 주식회사 웨이퍼 캐리어의 슬롯바
TWI727713B (zh) * 2020-03-23 2021-05-11 家登精密工業股份有限公司 光罩盒及其耐磨件
TWI751814B (zh) * 2020-09-22 2022-01-01 家登精密工業股份有限公司 支撐片狀物的中央支撐裝置及存放片狀物的儲存設備
KR102349499B1 (ko) * 2020-09-24 2022-01-07 우범제 사이드 스토리지

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5492229A (en) * 1992-11-27 1996-02-20 Toshiba Ceramics Co., Ltd. Vertical boat and a method for making the same
JP3145252B2 (ja) * 1994-07-29 2001-03-12 淀川化成株式会社 基板支承用側板およびそれを用いたカセット
JPH0864669A (ja) * 1994-08-25 1996-03-08 Hitachi Cable Ltd ウエハボックス
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers
JP3328763B2 (ja) * 1995-10-30 2002-09-30 エヌティティエレクトロニクス株式会社 縦型ウエハボートのウエハ支持構造
JPH1098096A (ja) * 1996-09-25 1998-04-14 Nippon Valqua Ind Ltd 半導体ウェハ用カセット

Also Published As

Publication number Publication date
NL1010321A1 (nl) 1999-04-21
KR19990037214A (ko) 1999-05-25
KR100830654B1 (ko) 2008-11-11
FR2770498B1 (fr) 2000-06-16
CN1165963C (zh) 2004-09-08
FR2770498A1 (fr) 1999-05-07
IT1303138B1 (it) 2000-10-30
JPH11204629A (ja) 1999-07-30
DE19848147A1 (de) 1999-04-22
SG81942A1 (en) 2001-07-24
NL1010321C2 (nl) 1999-09-08
ITTO980879A1 (it) 2000-04-16
CN1232289A (zh) 1999-10-20

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20081020