MX9709688A - Eliminacion de material por medio de radiacion polarizada y aplicacion de radiacion en la parte posterior. - Google Patents
Eliminacion de material por medio de radiacion polarizada y aplicacion de radiacion en la parte posterior.Info
- Publication number
- MX9709688A MX9709688A MX9709688A MX9709688A MX9709688A MX 9709688 A MX9709688 A MX 9709688A MX 9709688 A MX9709688 A MX 9709688A MX 9709688 A MX9709688 A MX 9709688A MX 9709688 A MX9709688 A MX 9709688A
- Authority
- MX
- Mexico
- Prior art keywords
- removal
- radiation
- undesired material
- back side
- side application
- Prior art date
Links
- 239000000463 material Substances 0.000 title abstract 7
- 230000005855 radiation Effects 0.000 title 2
- 239000000758 substrate Substances 0.000 abstract 3
- 239000011261 inert gas Substances 0.000 abstract 1
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 230000000704 physical effect Effects 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70566—Polarisation control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/32051—Deposition of metallic or metal-silicide layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76819—Smoothing of the dielectric
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Environmental & Geological Engineering (AREA)
- Atmospheric Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- High Energy & Nuclear Physics (AREA)
- Electromagnetism (AREA)
- Drying Of Semiconductors (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Cleaning In General (AREA)
- Laser Beam Processing (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Polarising Elements (AREA)
- Materials For Medical Uses (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
Un aparato y método para eliminar, de manera selectiva, material no deseado de la superficie de un substrato, que suministra un flujo de gas inerte sobre la superficie del substrato de material no deseado, al mismo tiempo que irradia el material no deseado con fotones energéticos. El invento permite eliminar el material no deseado son alterar las propiedades físicas subyacentes al material no deseado eliminado o adyacentes la mismo. La efectividad de la eliminacion se puede mejorar utilizando fotnes nergéticos polarizados. El hecho de dirigir un haz lasérico al lado posterior de un substrato transparente, puede mejorar la efectividad de la eliminacion.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US47276295A | 1995-06-07 | 1995-06-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
MX9709688A true MX9709688A (es) | 1998-11-30 |
Family
ID=23876840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX9709688A MX9709688A (es) | 1995-06-07 | 1997-12-05 | Eliminacion de material por medio de radiacion polarizada y aplicacion de radiacion en la parte posterior. |
Country Status (19)
Country | Link |
---|---|
US (1) | US5958268A (es) |
EP (1) | EP0834191B1 (es) |
JP (1) | JP4089833B2 (es) |
KR (1) | KR19990022679A (es) |
CN (1) | CN100390938C (es) |
AT (1) | ATE211584T1 (es) |
AU (1) | AU5989296A (es) |
BR (1) | BR9609065A (es) |
CA (2) | CA2222502C (es) |
CZ (1) | CZ378297A3 (es) |
DE (1) | DE69618641T2 (es) |
EA (1) | EA199800002A1 (es) |
HU (1) | HUP9802661A2 (es) |
LV (1) | LV12080B (es) |
MX (1) | MX9709688A (es) |
MY (1) | MY121934A (es) |
NO (1) | NO975637L (es) |
TW (1) | TW284907B (es) |
WO (1) | WO1996041370A1 (es) |
Families Citing this family (94)
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-
1995
- 1995-06-24 TW TW084106499A patent/TW284907B/zh active
- 1995-09-27 MY MYPI95002884A patent/MY121934A/en unknown
-
1996
- 1996-03-01 US US08/609,449 patent/US5958268A/en not_active Expired - Fee Related
- 1996-06-05 JP JP50167497A patent/JP4089833B2/ja not_active Expired - Fee Related
- 1996-06-05 AU AU59892/96A patent/AU5989296A/en not_active Abandoned
- 1996-06-05 CA CA002222502A patent/CA2222502C/en not_active Expired - Fee Related
- 1996-06-05 EP EP96917247A patent/EP0834191B1/en not_active Expired - Lifetime
- 1996-06-05 CZ CZ973782A patent/CZ378297A3/cs unknown
- 1996-06-05 HU HU9802661A patent/HUP9802661A2/hu unknown
- 1996-06-05 EA EA199800002A patent/EA199800002A1/ru unknown
- 1996-06-05 DE DE69618641T patent/DE69618641T2/de not_active Expired - Fee Related
- 1996-06-05 BR BR9609065A patent/BR9609065A/pt not_active Application Discontinuation
- 1996-06-05 WO PCT/US1996/009331 patent/WO1996041370A1/en not_active Application Discontinuation
- 1996-06-05 CA CA002570713A patent/CA2570713A1/en not_active Abandoned
- 1996-06-05 CN CNB961960698A patent/CN100390938C/zh not_active Expired - Fee Related
- 1996-06-05 KR KR1019970709120A patent/KR19990022679A/ko not_active Application Discontinuation
- 1996-06-05 AT AT96917247T patent/ATE211584T1/de active
-
1997
- 1997-12-04 NO NO975637A patent/NO975637L/no unknown
- 1997-12-05 MX MX9709688A patent/MX9709688A/es not_active IP Right Cessation
-
1998
- 1998-01-05 LV LVP-98-01A patent/LV12080B/en unknown
Also Published As
Publication number | Publication date |
---|---|
DE69618641T2 (de) | 2002-08-14 |
CN100390938C (zh) | 2008-05-28 |
US5958268A (en) | 1999-09-28 |
CA2222502A1 (en) | 1996-12-19 |
DE69618641D1 (de) | 2002-02-28 |
KR19990022679A (ko) | 1999-03-25 |
TW284907B (en) | 1996-09-01 |
BR9609065A (pt) | 1999-01-26 |
AU5989296A (en) | 1996-12-30 |
NO975637D0 (no) | 1997-12-04 |
WO1996041370A1 (en) | 1996-12-19 |
JP4089833B2 (ja) | 2008-05-28 |
EA199800002A1 (ru) | 1998-08-27 |
LV12080A (lv) | 1998-06-20 |
CZ378297A3 (cs) | 1998-06-17 |
MY121934A (en) | 2006-03-31 |
HUP9802661A2 (hu) | 1999-03-29 |
CA2222502C (en) | 2007-05-08 |
EP0834191B1 (en) | 2002-01-02 |
ATE211584T1 (de) | 2002-01-15 |
EP0834191A1 (en) | 1998-04-08 |
NO975637L (no) | 1998-01-28 |
CN1194057A (zh) | 1998-09-23 |
JPH11507298A (ja) | 1999-06-29 |
CA2570713A1 (en) | 1996-12-19 |
LV12080B (en) | 1998-10-20 |
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