KR940006232A - 프로우브 장치 - Google Patents
프로우브 장치 Download PDFInfo
- Publication number
- KR940006232A KR940006232A KR1019930009674A KR930009674A KR940006232A KR 940006232 A KR940006232 A KR 940006232A KR 1019930009674 A KR1019930009674 A KR 1019930009674A KR 930009674 A KR930009674 A KR 930009674A KR 940006232 A KR940006232 A KR 940006232A
- Authority
- KR
- South Korea
- Prior art keywords
- probe
- test head
- probe card
- inclination
- mounting plate
- Prior art date
Links
- 239000000523 sample Substances 0.000 title claims abstract description 18
- 238000001514 detection method Methods 0.000 abstract 2
- 238000005259 measurement Methods 0.000 abstract 2
- 230000000694 effects Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
(목적)측정시에 테스트 헤드에 대한 피처리체의 위치맞춤이 가능하고, 고정밀도로 고주파 측정이 가능한 프로우브장치를 제공함.
(구성)테스트 헤드(1)에 직접 프로우브 침을 갖춘 프로우브 카드(9)를 부착함과 함께, 피검사체를 지지하는 얹어놓는판(41)에, 이 얹어놓는판에 대한 프로우브 카드(9)의 기울기를 검출하는 검출수단(14)을 착설함과 함께, 이 검출수단(14)으로부터의 정보에 기초한 얹어놓는판(41)의 기울기를 보정하는 보정수단을 형성한다. 보정수단은 얹어놓는 판(41)을 지지하는 길이가 변화가능한 3개의 지지부로 이루어지며, 각 지지부의 길이를 바꿈으로써 얹어놓는판(41)의 기울기를 보정한다.
(효과)테스트 헤드에 직접 프로우브 카드를 착설하는 것이 가능하므로, 테스트 헤드와 프로우브 카드의 사이의 측정케이블등 접속부를 없이 할 수 있으며, 임피던스의 증가를 없게하고, 정확한 고주파측정이 가능하다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 프로우브 장치의 일실시예를 나타내는 전체 구성도,
제2도는 본 발명에 관한 프로우브 카드의 일실시예를 나타내는 도면,
제3도는 제1도의 프로우브 장치의 요부를 나타내는 사시도,
제4도는 제1도의 프로우브 장치의 다른 요부를 나타내는 도면.
Claims (2)
- 테스트 헤드(1)와, 피검사체를 검사하기 위한 프로우드 침(9a)을 구비하고, 상기 테스트 헤드(1)에 전기적으로 접속되는 프로우브 카드(9)와, 상기 피검사체를 지지하는 지지수단(4)과, 상기 지지수단(4)을 상기 피검사체와 상기 프로우브 침(9a)이 접촉하도록 이동하기 위한 스테이지(5)를 구비한 프로우브장치에 있어서, 상기 지지수단(4)은 상기 피검사체의 상기 테스트 헤드(1)에 대한 기울기를 보정하는 보정수단(14),(43)을 갖춘 것을 특징으로 하는 프로우브 장치.
- 제1항에 있어서, 상기 프로우브 카드(9)는 상기 테스트 헤드(1)에 고정적으로 연결되어 있는 것을 특징으로 하는 프로우브 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP92-140563 | 1992-06-01 | ||
JP14056392A JP3219844B2 (ja) | 1992-06-01 | 1992-06-01 | プローブ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940006232A true KR940006232A (ko) | 1994-03-23 |
KR100260116B1 KR100260116B1 (ko) | 2000-07-01 |
Family
ID=15271596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930009674A KR100260116B1 (ko) | 1992-06-01 | 1993-05-31 | 프로우브 장치 |
Country Status (3)
Country | Link |
---|---|
US (1) | US5410259A (ko) |
JP (1) | JP3219844B2 (ko) |
KR (1) | KR100260116B1 (ko) |
Families Citing this family (115)
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CN105929202A (zh) * | 2016-04-25 | 2016-09-07 | 昆山瑞鸿诚自动化设备科技有限公司 | 一种home键与前屏幕二合一测试治具 |
CN106814222B (zh) * | 2016-06-28 | 2019-05-07 | 昆山欧博精密机械电子有限公司 | 电路板植针治具底座 |
JP6783185B2 (ja) * | 2017-05-15 | 2020-11-11 | 東京エレクトロン株式会社 | 検査装置 |
TWI641836B (zh) * | 2017-08-21 | 2018-11-21 | 漢民科技股份有限公司 | 平面校正裝置及包含其之半導體測試設備 |
CN110238547B (zh) * | 2019-05-09 | 2020-12-18 | 西安理工大学 | 一种用于测量大功率激光焦点位置的系统及测量方法 |
CN110187259A (zh) * | 2019-06-10 | 2019-08-30 | 德淮半导体有限公司 | 一种防止晶圆测试中针痕偏移的调整系统以及调整方法 |
US11940482B2 (en) * | 2019-12-20 | 2024-03-26 | Nidec Read Corporation | Inspection device |
CN113019994A (zh) * | 2019-12-24 | 2021-06-25 | 苏州瀚川智能科技股份有限公司 | 一种电池测试机构 |
CN112763193B (zh) * | 2021-01-07 | 2023-05-30 | 上海浩创亘永科技有限公司 | Ccd模组检测装置及ccd模组检测方法 |
US20240125817A1 (en) * | 2022-10-17 | 2024-04-18 | The Boeing Company | Tilt calibration for probe systems |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5830128A (ja) * | 1981-08-17 | 1983-02-22 | Hitachi Ltd | ウエハのチヤツク装置 |
JPS6362245A (ja) * | 1986-09-02 | 1988-03-18 | Canon Inc | ウエハプロ−バ |
US4864227A (en) * | 1987-02-27 | 1989-09-05 | Canon Kabushiki Kaisha | Wafer prober |
JP2802825B2 (ja) * | 1990-09-22 | 1998-09-24 | 大日本スクリーン製造 株式会社 | 半導体ウエハの電気測定装置 |
-
1992
- 1992-06-01 JP JP14056392A patent/JP3219844B2/ja not_active Expired - Fee Related
-
1993
- 1993-05-31 KR KR1019930009674A patent/KR100260116B1/ko not_active IP Right Cessation
- 1993-06-01 US US08/069,839 patent/US5410259A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
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JPH05335385A (ja) | 1993-12-17 |
JP3219844B2 (ja) | 2001-10-15 |
US5410259A (en) | 1995-04-25 |
KR100260116B1 (ko) | 2000-07-01 |
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