DE60037884D1 - Mehrfachsonden-Messgerät und zugehöriges Anwendungsverfahren - Google Patents

Mehrfachsonden-Messgerät und zugehöriges Anwendungsverfahren

Info

Publication number
DE60037884D1
DE60037884D1 DE60037884T DE60037884T DE60037884D1 DE 60037884 D1 DE60037884 D1 DE 60037884D1 DE 60037884 T DE60037884 T DE 60037884T DE 60037884 T DE60037884 T DE 60037884T DE 60037884 D1 DE60037884 D1 DE 60037884D1
Authority
DE
Germany
Prior art keywords
local
probes
measurements
measuring device
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60037884T
Other languages
English (en)
Other versions
DE60037884T2 (de
Inventor
Stephan Maximilian Altmann
Johann Karl Heinrich Hoerber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Europaisches Laboratorium fuer Molekularbiologie EMBL
Original Assignee
Europaisches Laboratorium fuer Molekularbiologie EMBL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Europaisches Laboratorium fuer Molekularbiologie EMBL filed Critical Europaisches Laboratorium fuer Molekularbiologie EMBL
Application granted granted Critical
Publication of DE60037884D1 publication Critical patent/DE60037884D1/de
Publication of DE60037884T2 publication Critical patent/DE60037884T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/874—Probe tip array

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Measuring And Recording Apparatus For Diagnosis (AREA)
DE60037884T 2000-09-13 2000-12-18 Mehrfachsonden-Messgerät und zugehöriges Anwendungsverfahren Expired - Lifetime DE60037884T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US660885 2000-09-13
US09/660,885 US6583411B1 (en) 2000-09-13 2000-09-13 Multiple local probe measuring device and method

Publications (2)

Publication Number Publication Date
DE60037884D1 true DE60037884D1 (de) 2008-03-13
DE60037884T2 DE60037884T2 (de) 2009-01-15

Family

ID=24651352

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60037884T Expired - Lifetime DE60037884T2 (de) 2000-09-13 2000-12-18 Mehrfachsonden-Messgerät und zugehöriges Anwendungsverfahren

Country Status (4)

Country Link
US (1) US6583411B1 (de)
EP (1) EP1189240B1 (de)
AT (1) ATE385032T1 (de)
DE (1) DE60037884T2 (de)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY112320A (en) * 1995-06-19 2001-05-31 Qualcomm Inc Method and appatratus for managing load conditions in a local wireless loop system
US6545492B1 (en) * 1999-09-20 2003-04-08 Europaisches Laboratorium Fur Molekularbiologie (Embl) Multiple local probe measuring device and method
JP2003202284A (ja) * 2002-01-09 2003-07-18 Hitachi Ltd 走査プローブ顕微鏡およびこれを用いた試料観察方法およびデバイス製造方法
WO2003067248A1 (en) * 2002-02-08 2003-08-14 Cantion A/S Scion.Dtu A sensor comprising mechanical amplification of surface stress sensitive cantilever
US6850050B2 (en) * 2002-05-24 2005-02-01 Intel Corporation Reticle inspection
CN100477067C (zh) * 2002-07-08 2009-04-08 马尔蒂普罗布公司 多个扫描探针的软件同步
US6835589B2 (en) * 2002-11-14 2004-12-28 International Business Machines Corporation Three-dimensional integrated CMOS-MEMS device and process for making the same
US7260980B2 (en) * 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
US7460462B2 (en) * 2003-12-17 2008-12-02 Hewlett-Packard Development Company, L.P. Contact probe storage fet sensor and write heater arrangements
JP2005266650A (ja) * 2004-03-22 2005-09-29 Sii Nanotechnology Inc スクラッチ修正加工方法及びそれに用いるｓｐｍ
EP1617293A1 (de) * 2004-07-14 2006-01-18 Universität Kassel Verfahren und Vorrichtung zum Ausrichten von einem ersten Gegenstand zu einem zweiten Gegenstand
JP2006039260A (ja) * 2004-07-28 2006-02-09 Sii Nanotechnology Inc 原子間力顕微鏡を用いたフォトマスクのパーティクル除去方法
WO2006039506A2 (en) 2004-10-01 2006-04-13 Board Of Regents Of The Nevada System Of Higher Education, On Behalf Of The University Of Nevada, Reno Cantilevered probe detector with piezoelectric element
US7340944B2 (en) * 2005-08-19 2008-03-11 Arthur Beyder Oscillator and method of making for atomic force microscope and other applications
US20100294927A1 (en) * 2005-09-12 2010-11-25 Nanolnk, Inc. High throughput inspecting
JP4694629B2 (ja) * 2005-11-09 2011-06-08 メトグラス・インコーポレーテッド カレントトランスおよび電力計
US7526949B1 (en) 2006-07-21 2009-05-05 The United States Of America As Represented By The Secretary Of The Army High resolution coherent dual-tip scanning probe microscope
DE102007023435A1 (de) * 2007-05-16 2008-11-20 Jpk Instruments Ag Verfahren zum rastersondenmikroskopischen Untersuchen einer Messprobe, Messsystem und Messsondensystem
US7569077B2 (en) * 2007-06-15 2009-08-04 Rhk Technology, Inc. Position control for scanning probe spectroscopy
US7597717B1 (en) * 2007-06-25 2009-10-06 The United States Of America As Represented By The Secretary Of The Navy Rotatable multi-cantilever scanning probe microscopy head
US7958776B2 (en) * 2007-09-06 2011-06-14 Chunhai Wang Atomic force gradient microscope and method of using this microscope
US20090287120A1 (en) 2007-12-18 2009-11-19 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Circulatory monitoring systems and methods
US8636670B2 (en) 2008-05-13 2014-01-28 The Invention Science Fund I, Llc Circulatory monitoring systems and methods
US9717896B2 (en) 2007-12-18 2017-08-01 Gearbox, Llc Treatment indications informed by a priori implant information
DE102008022230A1 (de) * 2008-05-06 2009-11-19 Photonik Zentrum Hessen In Wetzlar Ag Vorrichtung zur referenzbezogenen Messung von Form und Struktur
US10566169B1 (en) 2008-06-30 2020-02-18 Nexgen Semi Holding, Inc. Method and device for spatial charged particle bunching
CN101629885B (zh) * 2009-07-07 2011-06-29 清华大学 双探针微纳米力学检测系统
US20110167913A1 (en) * 2009-10-15 2011-07-14 Nexgen Semi Holding, Inc. Imaging devices for measuring the structure of a surface
US8549660B2 (en) 2010-04-09 2013-10-01 Boise State University Cantilever-based optical fiber probe interfacial force microscope for partial immersion in liquid
US20120047610A1 (en) 2010-04-09 2012-02-23 Boise State University Cantilever-based optical interface force microscope
JP5525377B2 (ja) * 2010-08-17 2014-06-18 株式会社ミツトヨ 高ダイナミックレンジプローブ
US8479309B2 (en) 2011-04-28 2013-07-02 The Board Of Trustees Of The University Of Illinois Ultra-low damping imaging mode related to scanning probe microscopy in liquid
EP2761357B1 (de) 2011-09-28 2022-09-07 Bruker Nano, Inc. Testanordnung mit einer plattform mit mehreren freiheitsgraden
WO2014144018A2 (en) 2013-03-15 2014-09-18 Bruker Nano, Inc. Dual-probe scanning probe microscope
EP3087400B1 (de) * 2014-08-15 2019-11-13 Bogazici Universitesi Rasterkraftmikroskop, mit einem magnetischen aktor mit mehreren freiheitsgraden integriert
US20180321276A1 (en) * 2015-11-03 2018-11-08 Board Of Regents, The University Of Texas System Metrology devices and methods for independently controlling a plurality of sensing probes
WO2017079374A1 (en) 2015-11-03 2017-05-11 Board Of Regents, The University Of Texas System Metrology devices for rapid specimen setup
CN105424697B (zh) * 2015-11-05 2018-02-09 清华大学 对微米纤维进行检测的方法
CN110596428B (zh) * 2019-08-20 2021-06-01 电子科技大学 应用于近场扫描微波显微镜的扫描区域平面纠斜的方法
CN112924275B (zh) * 2021-01-25 2022-06-24 武汉大学 一种微力测量装置、其制备方法及原位力学测试的方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE33387E (en) 1985-11-26 1990-10-16 International Business Machines Corporation Atomic force microscope and method for imaging surfaces with atomic resolution
US5220555A (en) 1988-09-30 1993-06-15 Canon Kabushiki Kaisha Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof
US5304924A (en) 1989-03-29 1994-04-19 Canon Kabushiki Kaisha Edge detector
JP3074579B2 (ja) 1992-01-31 2000-08-07 キヤノン株式会社 位置ずれ補正方法
US5262643A (en) * 1992-06-12 1993-11-16 International Business Machines Corp. Automatic tip approach method and apparatus for scanning probe microscope
JPH08129875A (ja) * 1994-10-28 1996-05-21 Hewlett Packard Co <Hp> 導電性針の位置ずれを低減したプローブ装置
US5929643A (en) 1995-12-07 1999-07-27 Olympus Optical Co., Ltd. Scanning probe microscope for measuring the electrical properties of the surface of an electrically conductive sample
US6028305A (en) * 1998-03-25 2000-02-22 Board Of Trustees Of The Leland Stanford Jr. University Dual cantilever scanning probe microscope
AU6400099A (en) 1998-09-26 2000-04-17 Xidex Corporation Multidimensional sensing system for atomic force miscroscopy

Also Published As

Publication number Publication date
EP1189240B1 (de) 2008-01-23
US6583411B1 (en) 2003-06-24
DE60037884T2 (de) 2009-01-15
ATE385032T1 (de) 2008-02-15
EP1189240A1 (de) 2002-03-20

Similar Documents

Publication Publication Date Title
DE60037884D1 (de) Mehrfachsonden-Messgerät und zugehöriges Anwendungsverfahren
WO2001090738A3 (de) Verfahren und vorrichtung zur detektion und bewertung von oberflächenschäden an verlegten schienen und weichenbauteilen
DE69928474D1 (de) Optiche sonde für nahfeld-messungen
KR940006232A (ko) 프로우브 장치
DE69939486D1 (de) Verfahren und vorrichtung für querflussassay
DE59907031D1 (de) Verfahren und anordnung zum kalibrieren einer laserbearbeitungsmaschine zum bearbeiten von werkstücken
ATE528659T1 (de) Verfahren und gerät zum messen des kapillardrucks in einer probe
ATE377248T1 (de) Verfahren und vorrichtung zum messen einer probe mit hilfe eines rastersondenmikroskops
ATE214805T1 (de) System zur bestimmung mindestens eines parameters mindestens einer probe einer physiologischen flüssigkeit und kassette dafür
DE69942066D1 (de) Eine substanzabgabevorrichtung zum gebrauch eines eingriffsinstruments
DE69939357D1 (de) Probenabbildungsvorrichtung für Untersuchungen mit hohem Durchsatz mittels Fluoreszenzmessungen
SG158187A1 (en) Lithographic apparatus with multiple alignment arrangements and alignment measurement method
BR9902790A (pt) Interface de usuário para um sistema analisador biomédico
NO20033391D0 (no) NMR-fluidkarakteriseringsanordning for bruk med elektriske kabelformasjonstesteinstrumenter
DE69940313D1 (de) Vorrichtung zur vorkühlung für joule-thomson sonde
EP2492636A3 (de) Verfahren zur Kalibrierung eines Abtastsystems
ATE441858T1 (de) Multichemie-messvorrichtung und teststreifen
ATE434178T1 (de) Oberflächenprüfung unter verwendung einer nicht vibrierenden kontaktpotenzialsonde
ATE286261T1 (de) Datenoptimierungsverfahren für sondenkartenanalyse und riebmarkanalyse
WO2004063696A3 (en) Measuring and testing continuous elongated textile material
ATE282833T1 (de) Methode und apparat zur lokalen temperaturmessung für hochauflösende in-situ messung
DE69916511D1 (de) Vorrichtung zum optischen Detektieren der Anwesenheit eines Gegenstandes
EP1329687A3 (de) Optischer Dilatometer
WO2007063029A3 (en) Nanoscale fault isolation and measurement system
ATE387395T1 (de) Vorrichtung und verfahren zur überwachung einer papierbahn oder dergleichen

Legal Events

Date Code Title Description
8364 No opposition during term of opposition