ATE385032T1 - Mehrfachsonden-messgerät und zugehöriges anwendungsverfahren - Google Patents
Mehrfachsonden-messgerät und zugehöriges anwendungsverfahrenInfo
- Publication number
- ATE385032T1 ATE385032T1 AT00127692T AT00127692T ATE385032T1 AT E385032 T1 ATE385032 T1 AT E385032T1 AT 00127692 T AT00127692 T AT 00127692T AT 00127692 T AT00127692 T AT 00127692T AT E385032 T1 ATE385032 T1 AT E385032T1
- Authority
- AT
- Austria
- Prior art keywords
- local
- probes
- measurements
- sample
- application method
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q40/00—Calibration, e.g. of probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/06—Probe tip arrays
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/874—Probe tip array
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
- Measuring And Recording Apparatus For Diagnosis (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/660,885 US6583411B1 (en) | 2000-09-13 | 2000-09-13 | Multiple local probe measuring device and method |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE385032T1 true ATE385032T1 (de) | 2008-02-15 |
Family
ID=24651352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00127692T ATE385032T1 (de) | 2000-09-13 | 2000-12-18 | Mehrfachsonden-messgerät und zugehöriges anwendungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (1) | US6583411B1 (de) |
EP (1) | EP1189240B1 (de) |
AT (1) | ATE385032T1 (de) |
DE (1) | DE60037884T2 (de) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MY112320A (en) * | 1995-06-19 | 2001-05-31 | Qualcomm Inc | Method and appatratus for managing load conditions in a local wireless loop system |
US6545492B1 (en) * | 1999-09-20 | 2003-04-08 | Europaisches Laboratorium Fur Molekularbiologie (Embl) | Multiple local probe measuring device and method |
JP2003202284A (ja) * | 2002-01-09 | 2003-07-18 | Hitachi Ltd | 走査プローブ顕微鏡およびこれを用いた試料観察方法およびデバイス製造方法 |
AU2003206679A1 (en) * | 2002-02-08 | 2003-09-02 | Cantion A/S Scion.Dtu | A sensor comprising mechanical amplification of surface stress sensitive cantilever |
US6850050B2 (en) * | 2002-05-24 | 2005-02-01 | Intel Corporation | Reticle inspection |
US6880389B2 (en) * | 2002-07-08 | 2005-04-19 | Multiprobe, Inc. | Software synchronization of multiple scanning probes |
US6835589B2 (en) * | 2002-11-14 | 2004-12-28 | International Business Machines Corporation | Three-dimensional integrated CMOS-MEMS device and process for making the same |
US7260980B2 (en) * | 2003-03-11 | 2007-08-28 | Adams Jesse D | Liquid cell and passivated probe for atomic force microscopy and chemical sensing |
US7460462B2 (en) * | 2003-12-17 | 2008-12-02 | Hewlett-Packard Development Company, L.P. | Contact probe storage fet sensor and write heater arrangements |
JP2005266650A (ja) * | 2004-03-22 | 2005-09-29 | Sii Nanotechnology Inc | スクラッチ修正加工方法及びそれに用いるspm |
EP1617293A1 (de) * | 2004-07-14 | 2006-01-18 | Universität Kassel | Verfahren und Vorrichtung zum Ausrichten von einem ersten Gegenstand zu einem zweiten Gegenstand |
JP2006039260A (ja) * | 2004-07-28 | 2006-02-09 | Sii Nanotechnology Inc | 原子間力顕微鏡を用いたフォトマスクのパーティクル除去方法 |
US7694346B2 (en) | 2004-10-01 | 2010-04-06 | Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada | Cantilevered probe detector with piezoelectric element |
EP1938334A2 (de) * | 2005-08-19 | 2008-07-02 | BEYDER, Arthur | Oszillator und herstellungsverfahren für ein mikroskop atomischer kräfte und andere anwendungen |
US20100294927A1 (en) * | 2005-09-12 | 2010-11-25 | Nanolnk, Inc. | High throughput inspecting |
CN101305284B (zh) * | 2005-11-09 | 2011-06-08 | 梅特格拉斯公司 | 变流器与电能表 |
US7526949B1 (en) | 2006-07-21 | 2009-05-05 | The United States Of America As Represented By The Secretary Of The Army | High resolution coherent dual-tip scanning probe microscope |
DE102007023435A1 (de) * | 2007-05-16 | 2008-11-20 | Jpk Instruments Ag | Verfahren zum rastersondenmikroskopischen Untersuchen einer Messprobe, Messsystem und Messsondensystem |
US7569077B2 (en) * | 2007-06-15 | 2009-08-04 | Rhk Technology, Inc. | Position control for scanning probe spectroscopy |
US7597717B1 (en) * | 2007-06-25 | 2009-10-06 | The United States Of America As Represented By The Secretary Of The Navy | Rotatable multi-cantilever scanning probe microscopy head |
US7958776B2 (en) * | 2007-09-06 | 2011-06-14 | Chunhai Wang | Atomic force gradient microscope and method of using this microscope |
US20090287120A1 (en) | 2007-12-18 | 2009-11-19 | Searete Llc, A Limited Liability Corporation Of The State Of Delaware | Circulatory monitoring systems and methods |
US9717896B2 (en) | 2007-12-18 | 2017-08-01 | Gearbox, Llc | Treatment indications informed by a priori implant information |
US8636670B2 (en) | 2008-05-13 | 2014-01-28 | The Invention Science Fund I, Llc | Circulatory monitoring systems and methods |
DE102008022230A1 (de) * | 2008-05-06 | 2009-11-19 | Photonik Zentrum Hessen In Wetzlar Ag | Vorrichtung zur referenzbezogenen Messung von Form und Struktur |
US10566169B1 (en) | 2008-06-30 | 2020-02-18 | Nexgen Semi Holding, Inc. | Method and device for spatial charged particle bunching |
CN101629885B (zh) * | 2009-07-07 | 2011-06-29 | 清华大学 | 双探针微纳米力学检测系统 |
WO2011047336A1 (en) * | 2009-10-15 | 2011-04-21 | Nexgen Semt Holding, Inc. | Imaging devices for measuring the structure of a surface |
US8549660B2 (en) | 2010-04-09 | 2013-10-01 | Boise State University | Cantilever-based optical fiber probe interfacial force microscope for partial immersion in liquid |
US20120047610A1 (en) | 2010-04-09 | 2012-02-23 | Boise State University | Cantilever-based optical interface force microscope |
JP5525377B2 (ja) * | 2010-08-17 | 2014-06-18 | 株式会社ミツトヨ | 高ダイナミックレンジプローブ |
US8479309B2 (en) | 2011-04-28 | 2013-07-02 | The Board Of Trustees Of The University Of Illinois | Ultra-low damping imaging mode related to scanning probe microscopy in liquid |
US9472374B2 (en) | 2011-09-28 | 2016-10-18 | Hysitron, Inc. | Testing assembly including a multiple degree of freedom stage |
WO2014144018A2 (en) | 2013-03-15 | 2014-09-18 | Bruker Nano, Inc. | Dual-probe scanning probe microscope |
WO2016024931A1 (en) * | 2014-08-15 | 2016-02-18 | Boğaziçi Üni̇versi̇tesi̇ | An atomic force microscope integrated with a multiple degrees-of-freedom magnetic actuator |
WO2017079374A1 (en) | 2015-11-03 | 2017-05-11 | Board Of Regents, The University Of Texas System | Metrology devices for rapid specimen setup |
WO2017079375A1 (en) * | 2015-11-03 | 2017-05-11 | Board Of Regents, The University Of Texas System | Metrology devices and methods for independently controlling a plurality of sensing probes |
CN105424697B (zh) * | 2015-11-05 | 2018-02-09 | 清华大学 | 对微米纤维进行检测的方法 |
CN110596428B (zh) * | 2019-08-20 | 2021-06-01 | 电子科技大学 | 应用于近场扫描微波显微镜的扫描区域平面纠斜的方法 |
CN112924275B (zh) * | 2021-01-25 | 2022-06-24 | 武汉大学 | 一种微力测量装置、其制备方法及原位力学测试的方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE33387E (en) | 1985-11-26 | 1990-10-16 | International Business Machines Corporation | Atomic force microscope and method for imaging surfaces with atomic resolution |
US5220555A (en) | 1988-09-30 | 1993-06-15 | Canon Kabushiki Kaisha | Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof |
US5304924A (en) | 1989-03-29 | 1994-04-19 | Canon Kabushiki Kaisha | Edge detector |
JP3074579B2 (ja) | 1992-01-31 | 2000-08-07 | キヤノン株式会社 | 位置ずれ補正方法 |
US5262643A (en) * | 1992-06-12 | 1993-11-16 | International Business Machines Corp. | Automatic tip approach method and apparatus for scanning probe microscope |
JPH08129875A (ja) * | 1994-10-28 | 1996-05-21 | Hewlett Packard Co <Hp> | 導電性針の位置ずれを低減したプローブ装置 |
US5929643A (en) | 1995-12-07 | 1999-07-27 | Olympus Optical Co., Ltd. | Scanning probe microscope for measuring the electrical properties of the surface of an electrically conductive sample |
US6028305A (en) * | 1998-03-25 | 2000-02-22 | Board Of Trustees Of The Leland Stanford Jr. University | Dual cantilever scanning probe microscope |
AU6400099A (en) | 1998-09-26 | 2000-04-17 | Xidex Corporation | Multidimensional sensing system for atomic force miscroscopy |
-
2000
- 2000-09-13 US US09/660,885 patent/US6583411B1/en not_active Expired - Lifetime
- 2000-12-18 EP EP00127692A patent/EP1189240B1/de not_active Expired - Lifetime
- 2000-12-18 AT AT00127692T patent/ATE385032T1/de not_active IP Right Cessation
- 2000-12-18 DE DE60037884T patent/DE60037884T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE60037884D1 (de) | 2008-03-13 |
EP1189240B1 (de) | 2008-01-23 |
EP1189240A1 (de) | 2002-03-20 |
US6583411B1 (en) | 2003-06-24 |
DE60037884T2 (de) | 2009-01-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |