KR900700862A - 실리콘 베이스 질량 기류 센서 및 그 조립방법 - Google Patents

실리콘 베이스 질량 기류 센서 및 그 조립방법

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Publication number
KR900700862A
KR900700862A KR1019890701586A KR890701586A KR900700862A KR 900700862 A KR900700862 A KR 900700862A KR 1019890701586 A KR1019890701586 A KR 1019890701586A KR 890701586 A KR890701586 A KR 890701586A KR 900700862 A KR900700862 A KR 900700862A
Authority
KR
South Korea
Prior art keywords
sensor
semiconductor
heating element
sensor according
semiconductor substrate
Prior art date
Application number
KR1019890701586A
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English (en)
Other versions
KR960015067B1 (ko
Inventor
이기원
최일현
Original Assignee
원본미기재
지멘스 악티엔게젤샤프트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22476729&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR900700862(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 원본미기재, 지멘스 악티엔게젤샤프트 filed Critical 원본미기재
Publication of KR900700862A publication Critical patent/KR900700862A/ko
Application granted granted Critical
Publication of KR960015067B1 publication Critical patent/KR960015067B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

내용없음

Description

실리콘 베이스 질량 기류 센서 및 그 조립방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일 실시예에 따른 질량 기류 센서의 평면도,
제2도는 제1도에 도시된 발명의 실시예에 따라 질량 기류센서의 간략화된 단면도,
제3a도는 제1도에 도시된 질량 기류 센서에 대한 조립공정을 나타낸다.

Claims (10)

  1. 절연성 다이아프램(1); 상기 다이아프램(1)에 배치된 박막가열소자(3); 상기 절연성 다이아프램(1)의 최소한의 주요부를 포함하는 열전도성 반도체 림(2); 및 상기 다이아프램(1)상의 배치된 최소한 일 박막센싱소자 (4,5)로 구성되는 것을 특징으로 하는 질량기류센서.
  2. 제1항에 있어서, 상기 절연성 다이아프램(1)이 상이한 열확산 계수를 가진 절연성 물질의 샌드위치 구조(32)를 포함하는 것을 특징으로 하는 센서.
  3. 제1항에 있어서, 최소한 일 센싱 소자(6,7)가 최소한 상기 반도체 림(2)에 부분적으로 배치되어 가열소자의 온도에 관련된 온도와 상기 최소한의 일 센싱 소자의 온도간의 차이가 모니터되어 기류율을 결정하는 것을 특징으로 하는 센서.
  4. 제1항에 있어서, 질량기류센서가 반도체 기판(8)으로부터 조립되고 절연성 다이아프램(1)아래에 반도체 기판이 제거되는 것을 특징으로 하는 센서.
  5. 제4항에 있어서, 반도체 기판 영역(8)이 반도체 림(2)아래에 배치되는 것을 특징으로 하는 센서.
  6. 제1항에 있어서, 상기 가열소자와 상기 반도체 림 간에 배치된 최소한 일 박막 센싱소자(4,5)를 더 포함하는 것을 특징으로 하는 센서.
  7. 제1항에 있어서, 상기 가열소자(3)가 센서의 세로축을 따라 중앙에 배치되고 다수의 센싱소자(5,6,4,7)는 상기 가열소자의 양측에 배치되는 것을 특징으로 하는 센서.
  8. 제1항에 있어서, 상기 반도체 림(2)이 p형 에칭된 스톱 실리콘을 포함하는 것을 특징으로 하는 센서.
  9. 제1항에 있어서, 상기 센서가 반도체기판에 조립되고 ; 상기 가열소자(3)에 에너지를 공급하고 상기 최소한 일 센싱소자(4,6)로부터 신호를 수신하는 상기 반도체 기판(8)에 조립된 판독 및 제어수단(20)을 더 포함하는 것을 특징으로 하는 센서.
  10. 제1항에 있어서, 상기 센서가 반도체 기판(8)에 조립되고 살기 가열소자(3)가 상기 기판의 전면에 배치되며 기판의 최소한 일측(18)이 가늘어진 것을 특징으로 하는 센서.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890701586A 1987-12-23 1988-12-16 실리콘 베이스 질량 기류 센서 및 그 조립방법 KR960015067B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US07/137,299 US4888988A (en) 1987-12-23 1987-12-23 Silicon based mass airflow sensor and its fabrication method
US137,299 1987-12-23
US137.299 1987-12-23
PCT/US1988/004511 WO1989005963A1 (en) 1987-12-23 1988-12-16 Silicon-based mass airflow sensor

Publications (2)

Publication Number Publication Date
KR900700862A true KR900700862A (ko) 1990-08-17
KR960015067B1 KR960015067B1 (ko) 1996-10-24

Family

ID=22476729

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890701586A KR960015067B1 (ko) 1987-12-23 1988-12-16 실리콘 베이스 질량 기류 센서 및 그 조립방법

Country Status (7)

Country Link
US (1) US4888988A (ko)
EP (1) EP0393141B1 (ko)
JP (1) JPH03502966A (ko)
KR (1) KR960015067B1 (ko)
CA (1) CA1325342C (ko)
DE (1) DE3872715T2 (ko)
WO (1) WO1989005963A1 (ko)

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Also Published As

Publication number Publication date
EP0393141A1 (en) 1990-10-24
JPH03502966A (ja) 1991-07-04
DE3872715T2 (de) 1992-12-03
US4888988A (en) 1989-12-26
EP0393141B1 (en) 1992-07-08
KR960015067B1 (ko) 1996-10-24
CA1325342C (en) 1993-12-21
DE3872715D1 (de) 1992-08-13
WO1989005963A1 (en) 1989-06-29

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