KR900700860A - 질량기류센서용 제어 및 검출회로 - Google Patents
질량기류센서용 제어 및 검출회로Info
- Publication number
- KR900700860A KR900700860A KR1019890701584A KR890701584A KR900700860A KR 900700860 A KR900700860 A KR 900700860A KR 1019890701584 A KR1019890701584 A KR 1019890701584A KR 890701584 A KR890701584 A KR 890701584A KR 900700860 A KR900700860 A KR 900700860A
- Authority
- KR
- South Korea
- Prior art keywords
- temperature
- temperature sensing
- sensing element
- slave
- heating element
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B43/00—Forming, feeding, opening or setting-up containers or receptacles in association with packaging
- B65B43/12—Feeding flexible bags or carton blanks in flat or collapsed state; Feeding flat bags connected to form a series or chain
- B65B43/123—Feeding flat bags connected to form a series or chain
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B31—MAKING ARTICLES OF PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER; WORKING PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER
- B31B—MAKING CONTAINERS OF PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER
- B31B2155/00—Flexible containers made from webs
- B31B2155/001—Flexible containers made from webs by folding webs longitudinally
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B31—MAKING ARTICLES OF PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER; WORKING PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER
- B31B—MAKING CONTAINERS OF PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER
- B31B2155/00—Flexible containers made from webs
- B31B2155/001—Flexible containers made from webs by folding webs longitudinally
- B31B2155/0014—Flexible containers made from webs by folding webs longitudinally having their openings facing transversally to the direction of movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B31—MAKING ARTICLES OF PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER; WORKING PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER
- B31B—MAKING CONTAINERS OF PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER
- B31B70/00—Making flexible containers, e.g. envelopes or bags
- B31B70/14—Cutting, e.g. perforating, punching, slitting or trimming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B31—MAKING ARTICLES OF PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER; WORKING PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER
- B31B—MAKING CONTAINERS OF PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER
- B31B70/00—Making flexible containers, e.g. envelopes or bags
- B31B70/60—Uniting opposed surfaces or edges; Taping
- B31B70/64—Uniting opposed surfaces or edges; Taping by applying heat or pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B31—MAKING ARTICLES OF PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER; WORKING PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER
- B31B—MAKING CONTAINERS OF PAPER, CARDBOARD OR MATERIAL WORKED IN A MANNER ANALOGOUS TO PAPER
- B31B70/00—Making flexible containers, e.g. envelopes or bags
- B31B70/74—Auxiliary operations
- B31B70/92—Delivering
- B31B70/94—Delivering singly or in succession
- B31B70/946—Delivering singly or in succession the bags being interconnected
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Measuring Volume Flow (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
내용없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본발명의 예시적인 실시예에 따른 열 및 온도감지소자구성을 묘사하는 질량기류센서으 평면도이다.
제2도는 제1도에 표시된 본 발명의 예시적인 실시예에 따른 질량기류센서의 간이화된 단면도이다,
제3도는 본 발명의 판독 및 검출회로와 함께 제1도에 표시된 열 및 온도감지소자의 회로도이다.
Claims (10)
- 가열소자(RH), 주대기온도감지소자(RCI), 슬레이브 온도 감지소자(RC2), 상기 가열소자(RH)와 상기 주대기온도감지소자(RCI)에 접속되어 상기 가열소자(RH)의 온도에 관련이 있는 온도와 상기 대기온도 감지소자(RCI)의 온도사이의 일정한 온도차를 유지하기 위한 주회로 수단, 상기 슬레이브온도감지소자(RS2)에 접속되어 상기 슬레이브온도 감지소자(RS2)와 대기사이의 온도변화를 검출하여 대기온도와 곤계없는 기류를 나타내는 출력신호(Vout)를 발생하기 위한 슬레이브 회로 수단으로 구성되는 것을 특징으로 하는 질량 기류센서.
- 제1항에 있어서, 더욱이 가열된 주 온도감지소자(RSI)를 포함하며, 상기 가열소자의 온도에 관련된 상기 온도는 상기 가열된 주 온도 감지소자(RSI)의 온도인 것을 특징으로 하는 질량기류센서.
- 제1항에 있어서, 더욱이 유전 다이아프램(1)을 더 포함하며, 상기 가열소자(RH)와 상기 슬레이브온도 감지소자(RS2)는 상기 유전 다이아프램(1)위에 배치되는 것을 특징으로 하는 질량기류센서.
- 제3항에 있어서, 더욱이 상기 유전 다이아프램(1)을 둘러싸는 고도우핑된 열도전성 반도체 림(2)을 더 포함하는 것을 특징으로 하는 질량기류센서.
- 제1항에 있어서, 상기 주회로수단은 가열소자(RH)의 온도에 관련된 온도와 주대기온도감지소자(RC1)의 온도사이의 온도차를 감지하며, 제1 입력이 상기 주대기온도감지소자(RC1)에 접속되고 출력이 상기 가열소자에 접속되어 상기 온도차를 일정하게 유지하기 위해 상기 가열소자를 통해 흐르는 전류를 제어하기 위한 수단(10)을 포함하는 것을 특징으로 하는 질량기류센서.
- 제5항에 있어서, 더욱이 온도차를 감지하기 위한 상기 수단의 제2 입력에 접속되며, 주 온도감지소자(RC1)가 상기 가열소자(RH)와 실직적으로 동일한 온도로 가열되도록 상기 가열소자(RH)에 열적으로 결합되는 주 온도감지소자(RC1)를 더 포함하는 것을 특징으로 하는 질량기류센서.
- 제5항에 있어서, 상기 주대기온도감지소자(RC1)는 상기 가열소자(RH)와 상기 주대기온도 감지소자(RC1)사이의 소정온도차를 설정하기 위한 오프셋수단(RD1)을 통하여 상기 제1 입력에 접속되는 것을 특징으로 하는 질량기류센서.
- 제1항에 있어서, 상기 발생수단은 상기 출력신호(Vout)를 발생하기 위한 슬레이브 온도차 감지수단(12)을 포함하며, 상기 출력신호는 기류를 표시하는 것을 특징으로 하는 질량기류센서.
- 제8항에 있어서, 상기 슬레이브 온도차 감지수단은 상기 슬레이브 온도 감지소자(RS2)에 접속되는 제1입력을 포함하는 것을 특징으로 하는 질량기류센서.
- 제9항에 있어서, 더욱이 슬레이브 대기 온도감지수단(RC2)을 더 포함하며, 상기 슬레이브 대기온도감지 수단은 상기 슬레이브 온도차 감지수단(12)의 제2 입력에 접속되는 것을 특징으로 하는 질량기류센서.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/137,220 US4884443A (en) | 1987-12-23 | 1987-12-23 | Control and detection circuitry for mass airflow sensors |
US137,220 | 1987-12-23 | ||
PCT/US1988/004509 WO1989005967A1 (en) | 1987-12-23 | 1988-12-16 | Control and detection circuitry for mass airflow sensors |
Publications (2)
Publication Number | Publication Date |
---|---|
KR900700860A true KR900700860A (ko) | 1990-08-17 |
KR960015065B1 KR960015065B1 (ko) | 1996-10-24 |
Family
ID=22476340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019890701584A KR960015065B1 (ko) | 1987-12-23 | 1988-12-16 | 질량기류센서용 제어 및 검출회로 |
Country Status (7)
Country | Link |
---|---|
US (1) | US4884443A (ko) |
EP (1) | EP0395721B1 (ko) |
JP (1) | JPH06105178B2 (ko) |
KR (1) | KR960015065B1 (ko) |
CA (1) | CA1325530C (ko) |
DE (1) | DE3870252D1 (ko) |
WO (1) | WO1989005967A1 (ko) |
Families Citing this family (32)
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DE4009833C2 (de) * | 1989-03-31 | 1996-09-26 | Aisan Ind | Luftmengenmeßeinrichtung für Ansaugluft |
US4970497A (en) * | 1989-11-22 | 1990-11-13 | Westinghouse Electric Corp. | Method and apparatus for sensing thermal stress in integrated circuits |
DE4012081A1 (de) * | 1990-04-14 | 1991-10-17 | Bosch Gmbh Robert | Verfahren und anordnung zum messen von luftmengen |
US5582628A (en) * | 1991-05-29 | 1996-12-10 | Wood; Tony J. | Unit and system for sensing fluid velocity |
US5243858A (en) * | 1991-08-12 | 1993-09-14 | General Motors Corporation | Fluid flow sensor with thermistor detector |
JP2784286B2 (ja) * | 1991-12-09 | 1998-08-06 | 三菱電機株式会社 | 半導体センサー装置の製造方法 |
GB9127337D0 (en) * | 1991-12-24 | 1992-02-19 | Toleman Bernard J | System for measuring fluid flow |
US5311772A (en) * | 1992-01-02 | 1994-05-17 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Active thermal isolation for temperature responsive sensors |
DE4219454C2 (de) * | 1992-06-13 | 1995-09-28 | Bosch Gmbh Robert | Massenflußsensor |
US5369994A (en) * | 1992-07-21 | 1994-12-06 | Robert Bosch Gmbh | Flow sensor |
US6290388B1 (en) * | 1998-03-06 | 2001-09-18 | The Trustees Of The University Of Pennsylvania | Multi-purpose integrated intensive variable sensor |
US6408698B1 (en) | 1998-09-03 | 2002-06-25 | Board Of Trustees Operating - Michigan State University | Sensors and method for measurement of flow rates and cumulative flow in ducts |
JP3981907B2 (ja) * | 1998-10-21 | 2007-09-26 | 株式会社デンソー | 流量測定装置 |
GB9904428D0 (en) * | 1999-02-26 | 1999-04-21 | Delphi Tech Inc | Mass flow sensor with ambient sensor |
GB9904429D0 (en) * | 1999-02-26 | 1999-04-21 | Delphi Tech Inc | Mass flow with air temperature sensor |
LU90485B1 (de) * | 1999-12-13 | 2001-06-14 | Delphi Tech Inc | Massendurchflussmesser |
LU90492B1 (de) * | 1999-12-16 | 2001-06-18 | Delphi Tech Inc | Massendurchflussmesser |
JP4474771B2 (ja) | 2000-12-20 | 2010-06-09 | 株式会社デンソー | 流量測定装置 |
JP3658321B2 (ja) * | 2000-12-28 | 2005-06-08 | オムロン株式会社 | フローセンサ及びその製造方法 |
DE10065723A1 (de) * | 2000-12-29 | 2002-07-04 | Bosch Gmbh Robert | Anordnung zur Temperaturmessung und -regelung |
JP5138134B2 (ja) * | 2001-07-16 | 2013-02-06 | 株式会社デンソー | 薄膜式センサの製造方法ならびにフローセンサの製造方法 |
DE10324292B4 (de) * | 2003-05-21 | 2018-03-15 | Robert Bosch Gmbh | Messelement für einen Durchflusssensor, insbesondere einen Luftmassensensor für Brennkraftmaschinen |
JP4966526B2 (ja) | 2005-09-07 | 2012-07-04 | 日立オートモティブシステムズ株式会社 | 流量センサ |
EP1840535B1 (en) * | 2006-03-31 | 2011-01-12 | Sensirion Holding AG | Flow sensor with thermocouples |
DE602006019688D1 (de) * | 2006-03-31 | 2011-03-03 | Sensirion Holding Ag | Durchflusssensor mit durchflussanpassbarem Analog-Digital-Wandler |
US20070295082A1 (en) * | 2006-06-06 | 2007-12-27 | Honeywell International Inc. | Flow sensor transducer with dual spiral wheatstone bridge elements |
JP4341651B2 (ja) * | 2006-07-28 | 2009-10-07 | 株式会社日立製作所 | 熱式ガス流量計 |
GB2446414A (en) * | 2007-02-06 | 2008-08-13 | Thorn Security | A Detector |
DE102008020874B4 (de) | 2008-04-25 | 2010-02-25 | Eads Deutschland Gmbh | Strömungs- oder Wirbelmessfühler |
JP5542505B2 (ja) * | 2010-04-01 | 2014-07-09 | 日立オートモティブシステムズ株式会社 | 熱式流量センサ |
JP5961592B2 (ja) * | 2013-08-06 | 2016-08-02 | 日立オートモティブシステムズ株式会社 | 熱式質量流量計 |
DE102023205862A1 (de) | 2023-06-22 | 2024-04-04 | Vitesco Technologies GmbH | Verfahren und Gassensor zum Ermitteln der Konzentration einer Gaskomponente in einem Gasgemisch und/oder der Temperatur des Gasgemischs und Batterieanordnung |
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US3361041A (en) * | 1964-01-13 | 1968-01-02 | Equitable Paper Bag Co | Method and apparatus for making gusseted header bags |
US3552278A (en) * | 1967-10-09 | 1971-01-05 | Lion Packaging Products Co Inc | Method and apparatus for making interconnected bags having closure flaps and bottom gussets |
US3623364A (en) * | 1968-12-16 | 1971-11-30 | Robert B Withrow | Probe for indicating the flow of fluid |
US3992940A (en) * | 1973-11-02 | 1976-11-23 | Chrysler Corporation | Solid state fluid flow sensor |
JPS5312875A (en) * | 1976-07-20 | 1978-02-04 | Banyu Pharmaceut Co Ltd | Preparation of uracil derivatives |
US4135396A (en) * | 1978-04-24 | 1979-01-23 | The Trane Company | Temperature compensating fluid velocity sensing apparatus |
US4244217A (en) * | 1978-12-18 | 1981-01-13 | Ledbetter R K | Gas flow monitor |
DE2904154A1 (de) * | 1979-02-03 | 1980-08-14 | Bosch Gmbh Robert | Vorrichtung zur messung der masse eines stroemenden mediums |
US4471647A (en) * | 1980-04-18 | 1984-09-18 | Board Of Regents Of Stanford University | Gas chromatography system and detector and method |
JPS5813339A (ja) * | 1981-07-13 | 1983-01-25 | 旭電化工業株式会社 | ベ−カリ−製品の製造方法 |
US4478076A (en) * | 1982-09-30 | 1984-10-23 | Honeywell Inc. | Flow sensor |
DE3248603A1 (de) * | 1982-12-30 | 1984-07-12 | Robert Bosch Gmbh, 7000 Stuttgart | Einrichtung zur messung des massendurchsatzes eines stroemenden mediums |
DE3369000D1 (en) * | 1983-03-18 | 1987-02-12 | Putten Antonius Ferdinandus Pe | Device for measuring the flow velocity of a medium |
JPS6013220A (ja) * | 1983-07-04 | 1985-01-23 | Esutetsuku:Kk | ガス流量センサ−及びその製造方法 |
US4733559A (en) * | 1983-12-01 | 1988-03-29 | Harry E. Aine | Thermal fluid flow sensing method and apparatus for sensing flow over a wide range of flow rates |
US4566320A (en) * | 1984-05-07 | 1986-01-28 | Honeywell, Inc. | Fluid flow sensing means with ambient temperature compensation |
US4637253A (en) * | 1984-05-22 | 1987-01-20 | Kabushiki Kaisha Toshiba | Semiconductor flow detector for detecting the flow rate and flowing direction of fluid |
CA1236931A (en) * | 1984-07-25 | 1988-05-17 | Philip J. Bohrer | Semiconductor device structure and processing by means of preferential etch undercutting |
JPH0690062B2 (ja) * | 1984-07-27 | 1994-11-14 | 株式会社日立製作所 | 熱式流速検出装置 |
US4596140A (en) * | 1984-09-21 | 1986-06-24 | Tsi Incorporated | Constant overheat anemometer with sensor lead wire impedance compensation |
JPS61170618A (ja) * | 1985-01-24 | 1986-08-01 | Toyota Central Res & Dev Lab Inc | 流速検出用半導体センサ |
-
1987
- 1987-12-23 US US07/137,220 patent/US4884443A/en not_active Expired - Fee Related
-
1988
- 1988-12-16 WO PCT/US1988/004509 patent/WO1989005967A1/en active IP Right Grant
- 1988-12-16 EP EP89901387A patent/EP0395721B1/en not_active Expired - Lifetime
- 1988-12-16 KR KR1019890701584A patent/KR960015065B1/ko active IP Right Grant
- 1988-12-16 DE DE8989901387T patent/DE3870252D1/de not_active Expired - Fee Related
- 1988-12-16 JP JP1501346A patent/JPH06105178B2/ja not_active Expired - Lifetime
- 1988-12-21 CA CA000586589A patent/CA1325530C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO1989005967A1 (en) | 1989-06-29 |
EP0395721A1 (en) | 1990-11-07 |
DE3870252D1 (de) | 1992-05-21 |
KR960015065B1 (ko) | 1996-10-24 |
JPH03500687A (ja) | 1991-02-14 |
US4884443A (en) | 1989-12-05 |
EP0395721B1 (en) | 1992-04-15 |
CA1325530C (en) | 1993-12-28 |
JPH06105178B2 (ja) | 1994-12-21 |
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