KR900011045A - 반도체장치의 제조방법 - Google Patents

반도체장치의 제조방법

Info

Publication number
KR900011045A
KR900011045A KR1019890019286A KR890019286A KR900011045A KR 900011045 A KR900011045 A KR 900011045A KR 1019890019286 A KR1019890019286 A KR 1019890019286A KR 890019286 A KR890019286 A KR 890019286A KR 900011045 A KR900011045 A KR 900011045A
Authority
KR
South Korea
Prior art keywords
manufacturing
semiconductor device
semiconductor
Prior art date
Application number
KR1019890019286A
Other languages
English (en)
Other versions
KR930003558B1 (ko
Inventor
마사카즈 가쿠무
Original Assignee
가부시키가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 도시바 filed Critical 가부시키가이샤 도시바
Publication of KR900011045A publication Critical patent/KR900011045A/ko
Application granted granted Critical
Publication of KR930003558B1 publication Critical patent/KR930003558B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/2658—Bombardment with radiation with high-energy radiation producing ion implantation of a molecular ion, e.g. decaborane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/28008—Making conductor-insulator-semiconductor electrodes
    • H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H01L21/28035—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities
    • H01L21/28044—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
    • H01L21/823835—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes silicided or salicided gate conductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Ceramic Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
KR1019890019286A 1988-12-23 1989-12-22 반도체장치의 제조방법 KR930003558B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63-324925 1988-12-23
JP63324925A JPH02170528A (ja) 1988-12-23 1988-12-23 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
KR900011045A true KR900011045A (ko) 1990-07-11
KR930003558B1 KR930003558B1 (ko) 1993-05-06

Family

ID=18171142

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890019286A KR930003558B1 (ko) 1988-12-23 1989-12-22 반도체장치의 제조방법

Country Status (3)

Country Link
US (1) US5654241A (ko)
JP (1) JPH02170528A (ko)
KR (1) KR930003558B1 (ko)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08264660A (ja) * 1995-03-24 1996-10-11 Nec Corp 半導体装置の製造方法
KR100202633B1 (ko) * 1995-07-26 1999-06-15 구본준 반도체 소자 제조방법
US5798296A (en) * 1996-05-17 1998-08-25 Micron Technology, Inc. Method of fabricating a gate having a barrier of titanium silicide
US5918141A (en) * 1997-06-20 1999-06-29 National Semiconductor Corporation Method of masking silicide deposition utilizing a photoresist mask
KR100273987B1 (ko) * 1997-10-31 2001-02-01 윤종용 디램 장치 및 제조 방법
US5924001A (en) * 1998-01-08 1999-07-13 Taiwan Semiconductor Manufacturing Company, Ltd. Ion implantation for preventing polycide void
US6399458B1 (en) * 1999-09-21 2002-06-04 International Business Machines Corporation Optimized reachthrough implant for simultaneously forming an MOS capacitor
KR100487521B1 (ko) * 2002-03-19 2005-05-03 삼성전자주식회사 부동체 효과를 제거하는 스태틱 랜덤 억세스 메모리 셀 및그 제조방법
EP1634325A1 (en) * 2003-06-03 2006-03-15 Koninklijke Philips Electronics N.V. Formation of junctions and silicides with reduced thermal budget
FR2864336B1 (fr) * 2003-12-23 2006-04-28 Commissariat Energie Atomique Procede de scellement de deux plaques avec formation d'un contact ohmique entre celles-ci
US7439123B2 (en) * 2005-10-31 2008-10-21 International Business Machines Corporation Low resistance contact semiconductor device structure
US7776675B1 (en) * 2007-10-29 2010-08-17 Newport Fab, Llc Method for forming a reduced resistivity poly gate and related structure
RU2757539C1 (ru) * 2021-01-19 2021-10-18 Федеральное государственное бюджетное образовательное учреждение высшего образования "Кабардино-Балкарский государственный университет им. Х.М. Бербекова" (КБГУ) Способ изготовления мелкозалегающих переходов

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE32613E (en) * 1980-04-17 1988-02-23 American Telephone And Telegraph Company, At&T Bell Laboratories Method of making contact electrodes to silicon gate, and source and drain regions, of a semiconductor device
US4622735A (en) * 1980-12-12 1986-11-18 Tokyo Shibaura Denki Kabushiki Kaisha Method for manufacturing a semiconductor device utilizing self-aligned silicide regions
JPS59110115A (ja) * 1982-12-16 1984-06-26 Nec Corp 半導体装置の製造方法
JPS59181672A (ja) * 1983-03-31 1984-10-16 Toshiba Corp 半導体装置の製造方法
JPS59210642A (ja) * 1983-05-16 1984-11-29 Hitachi Ltd 半導体装置の製造方法
JPS60175456A (ja) * 1984-02-20 1985-09-09 Matsushita Electronics Corp 半導体装置の製造方法
JPS61114524A (ja) * 1984-11-09 1986-06-02 Nec Corp 半導体装置の製造方法
US4731318A (en) * 1985-02-26 1988-03-15 Societe Pour L'etude Et La Fabrication Des Circuits Integres Speciaux - E.F.C.I.S. Integrated circuit comprising MOS transistors having electrodes of metallic silicide and a method of fabrication of said circuit
US4677736A (en) * 1986-04-17 1987-07-07 General Electric Company Self-aligned inlay transistor with or without source and drain self-aligned metallization extensions
US4816421A (en) * 1986-11-24 1989-03-28 American Telephone And Telegraph Company, At&T Bell Laboratories Method of making a heteroepitaxial structure by mesotaxy induced by buried implantation
JPS63313818A (ja) * 1987-06-17 1988-12-21 Hitachi Ltd 半導体装置の製造方法
US4912061A (en) * 1988-04-04 1990-03-27 Digital Equipment Corporation Method of forming a salicided self-aligned metal oxide semiconductor device using a disposable silicon nitride spacer
US4908334A (en) * 1989-01-24 1990-03-13 The United States Of America As Represented By The United States Department Of Energy Method for forming metallic silicide films on silicon substrates by ion beam deposition

Also Published As

Publication number Publication date
KR930003558B1 (ko) 1993-05-06
JPH02170528A (ja) 1990-07-02
US5654241A (en) 1997-08-05

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