KR900001034A - 반도체장치 - Google Patents
반도체장치 Download PDFInfo
- Publication number
- KR900001034A KR900001034A KR1019890006455A KR890006455A KR900001034A KR 900001034 A KR900001034 A KR 900001034A KR 1019890006455 A KR1019890006455 A KR 1019890006455A KR 890006455 A KR890006455 A KR 890006455A KR 900001034 A KR900001034 A KR 900001034A
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- electrical
- wiring member
- insulating film
- semiconductor material
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims 7
- 239000000463 material Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000009429 electrical wiring Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910021332 silicide Inorganic materials 0.000 claims 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42304—Base electrodes for bipolar transistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Bipolar Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 구조를 도시하는 단면도,
제2도는 종래의 구조를 도시하는 단면도,
제3A도. 제3B도 및 제3C도는 본 발명을 실시하기 위한 제조공정 단면도.
Claims (1)
- 하이포라 트랜지스터를 기판의 일부 또는 전영역에 형성함으로서 구성된 반도체 장치에 있어서, 전기 하이포라 트랜지스터에 베이스 영역의 일부로 전기 베이스 영역의 확산층의 상부에 직접 전기적으로 접속된 반도체 재료를 성분으로 하는 제1의 배선재 또는 금속 실리사이드를 성분으로 하는 제1의 배선재와, 전기 바이포라 트랜시스터의 에미터 영역과 직접 전기적으로 접속된 반도체 재료를 성분으로 하는 제2배선재와 전기 제1배선재를 분리하는 전기 제1배선재의 상부에 있는 제1절연막 및 전기 제2배선재 형성전에 전기 기판전면에 피착한 제2절연막을 전면 부식함으로서 형성한 측벽 절연막을 가지는 것을 특징으로 하는 반도체 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP158799 | 1988-06-27 | ||
JP15879988A JPH027528A (ja) | 1988-06-27 | 1988-06-27 | 半導体装置 |
JP15879888A JPH027527A (ja) | 1988-06-27 | 1988-06-27 | トランジスター |
JP158798 | 1988-06-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR900001034A true KR900001034A (ko) | 1990-01-31 |
Family
ID=26485805
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019890006455A KR900001034A (ko) | 1988-06-27 | 1989-05-15 | 반도체장치 |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR900001034A (ko) |
GB (1) | GB2220102B (ko) |
HK (1) | HK41194A (ko) |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8103032A (nl) * | 1980-08-04 | 1982-03-01 | Fairchild Camera Instr Co | Werkwijze voor het vervaardigen van een snelwerkende bipolaire transistor en transistor vervaardigd volgens deze werkwijze. |
US4492717A (en) * | 1981-07-27 | 1985-01-08 | International Business Machines Corporation | Method for forming a planarized integrated circuit |
US4495512A (en) * | 1982-06-07 | 1985-01-22 | International Business Machines Corporation | Self-aligned bipolar transistor with inverted polycide base contact |
US4545114A (en) * | 1982-09-30 | 1985-10-08 | Fujitsu Limited | Method of producing semiconductor device |
JPS5975661A (ja) * | 1982-10-22 | 1984-04-28 | Fujitsu Ltd | 半導体装置及びその製造方法 |
EP0170250B1 (en) * | 1984-07-31 | 1990-10-24 | Kabushiki Kaisha Toshiba | Bipolar transistor and method for producing the bipolar transistor |
JPS6146063A (ja) * | 1984-08-10 | 1986-03-06 | Hitachi Ltd | 半導体装置の製造方法 |
EP0231740A3 (en) * | 1986-01-30 | 1989-07-12 | Texas Instruments Incorporated | A polysilicon self-aligned bipolar device and process of manufacturing same |
JPH0628266B2 (ja) * | 1986-07-09 | 1994-04-13 | 株式会社日立製作所 | 半導体装置の製造方法 |
JPS6473766A (en) * | 1987-09-16 | 1989-03-20 | Oki Electric Ind Co Ltd | Manufacture of semiconductor integrated circuit |
-
1989
- 1989-05-15 KR KR1019890006455A patent/KR900001034A/ko not_active Application Discontinuation
- 1989-06-15 GB GB8913801A patent/GB2220102B/en not_active Expired - Fee Related
-
1994
- 1994-04-28 HK HK41194A patent/HK41194A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
GB2220102A (en) | 1989-12-28 |
GB2220102B (en) | 1992-01-29 |
GB8913801D0 (en) | 1989-08-02 |
HK41194A (en) | 1994-05-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |