KR20220012850A - 열전도성 실리콘 조성물, 반도체 장치 및 그의 제조방법 - Google Patents

열전도성 실리콘 조성물, 반도체 장치 및 그의 제조방법 Download PDF

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KR20220012850A
KR20220012850A KR1020217037727A KR20217037727A KR20220012850A KR 20220012850 A KR20220012850 A KR 20220012850A KR 1020217037727 A KR1020217037727 A KR 1020217037727A KR 20217037727 A KR20217037727 A KR 20217037727A KR 20220012850 A KR20220012850 A KR 20220012850A
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South Korea
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group
component
thermally conductive
conductive silicone
composition
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Korean (ko)
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쇼타 아키바
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신에쓰 가가꾸 고교 가부시끼가이샤
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Publication of KR20220012850A publication Critical patent/KR20220012850A/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08—Materials not undergoing a change of physical state when used
    • C09K5/14—Solid materials, e.g. powdery or granular
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04—Polysiloxanes
    • C08G77/06—Preparatory processes
    • C08G77/08—Preparatory processes characterised by the catalysts used
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/02—Elements
    • C08K3/04—Carbon
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/02—Elements
    • C08K3/08—Metals
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/54—Silicon-containing compounds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04—Polysiloxanes
    • H01L23/373—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/22—Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/25—Arrangements for cooling characterised by their materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/25—Arrangements for cooling characterised by their materials
    • H10W40/251—Organics
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04—Polysiloxanes
    • C08G77/12—Polysiloxanes containing silicon bound to hydrogen
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04—Polysiloxanes
    • C08G77/20—Polysiloxanes containing silicon bound to unsaturated aliphatic groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/02—Elements
    • C08K3/08—Metals
    • C08K2003/0806—Silver
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00—Specific properties of additives
    • C08K2201/001—Conductive additives
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00—Specific properties of additives
    • C08K2201/002—Physical properties
    • C08K2201/003—Additives being defined by their diameter
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00—Specific properties of additives
    • C08K2201/002—Physical properties
    • C08K2201/005—Additives being defined by their particle size in general
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00—Specific properties of additives
    • C08K2201/002—Physical properties
    • C08K2201/006—Additives being defined by their surface area
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00—Specific properties of additives
    • C08K2201/014—Additives containing two or more different additives of the same subgroup in C08K
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00—Specific properties of additives
    • C08K2201/016—Additives defined by their aspect ratio
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2205/00—Polymer mixtures characterised by other features
    • C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
    • C08L2205/025—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/351—Materials of die-attach connectors
    • H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
    • H10W72/354—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
KR1020217037727A 2019-05-27 2020-04-06 열전도성 실리콘 조성물, 반도체 장치 및 그의 제조방법 Ceased KR20220012850A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019098441A JP7076400B2 (ja) 2019-05-27 2019-05-27 熱伝導性シリコーン組成物、半導体装置及びその製造方法
JPJP-P-2019-098441 2019-05-27
PCT/JP2020/015462 WO2020241054A1 (ja) 2019-05-27 2020-04-06 熱伝導性シリコーン組成物、半導体装置及びその製造方法

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KR20220012850A true KR20220012850A (ko) 2022-02-04

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KR1020217037727A Ceased KR20220012850A (ko) 2019-05-27 2020-04-06 열전도성 실리콘 조성물, 반도체 장치 및 그의 제조방법

Country Status (7)

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US (1) US12060517B2 (https=)
EP (1) EP3979314A4 (https=)
JP (1) JP7076400B2 (https=)
KR (1) KR20220012850A (https=)
CN (1) CN113853676A (https=)
TW (1) TWI834860B (https=)
WO (1) WO2020241054A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102318181B1 (ko) 2017-02-08 2021-10-27 엘켐 실리콘즈 유에스에이 코포레이션 열 관리가 개선된 이차 배터리 팩
WO2023276846A1 (ja) * 2021-07-02 2023-01-05 信越化学工業株式会社 熱伝導性シリコーン組成物、半導体装置及びその製造方法

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02153995A (ja) 1988-12-05 1990-06-13 Shin Etsu Chem Co Ltd シリコーングリース組成物
JPH0314873A (ja) 1989-02-08 1991-01-23 Dow Corning Corp 熱伝導性オルガノシロキサン組成物
JPH10110179A (ja) 1996-08-09 1998-04-28 Shin Etsu Chem Co Ltd 熱伝導性シリコーン組成物、熱伝導性材料及び熱伝導性シリコーングリース
JP2000063873A (ja) 1998-08-21 2000-02-29 Shin Etsu Chem Co Ltd 熱伝導性グリース組成物及びそれを使用した半導体装置
JP2000063872A (ja) 1998-08-18 2000-02-29 Shin Etsu Chem Co Ltd 熱伝導性グリース組成物
JP2002030217A (ja) 2000-07-17 2002-01-31 Fujitsu Ltd 熱伝導性シリコーン組成物
JP3677671B2 (ja) 1999-04-30 2005-08-03 東レ・ダウコーニング株式会社 シリコーンゴム用銀粉末の製造方法
JP3130193U (ja) 2006-12-28 2007-03-15 ライオン株式会社 エアゾール缶用押しボタン
JP2008222776A (ja) 2007-03-09 2008-09-25 Shin Etsu Chem Co Ltd 熱伝導性シリコーングリース組成物
JP2017066406A (ja) 2015-10-02 2017-04-06 信越化学工業株式会社 熱伝導性シリコーン組成物及び半導体装置
JP2017159252A (ja) 2016-03-10 2017-09-14 株式会社キャタラー 排ガス浄化用触媒
JP2018058953A (ja) 2016-10-03 2018-04-12 信越化学工業株式会社 熱伝導性シリコーン組成物及び半導体装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3130193B2 (ja) 1993-10-06 2001-01-31 東レ・ダウコーニング・シリコーン株式会社 シリコーンゴム用銀粉末、その製造方法、およびシリコーンゴム組成物
JP2002299534A (ja) 2001-04-02 2002-10-11 Denso Corp 放熱材およびその製造方法
JP2004111253A (ja) 2002-09-19 2004-04-08 Noda Screen:Kk 電子デバイスの電気的接続用導電性組成物および電子デバイス
JP4551074B2 (ja) * 2003-10-07 2010-09-22 信越化学工業株式会社 硬化性オルガノポリシロキサン組成物および半導体装置
JP6318137B2 (ja) 2015-09-30 2018-04-25 Ｄｏｗａエレクトロニクス株式会社 導電性ペースト及び導電膜
WO2017159252A1 (ja) 2016-03-18 2017-09-21 信越化学工業株式会社 熱伝導性シリコーン組成物及び半導体装置

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02153995A (ja) 1988-12-05 1990-06-13 Shin Etsu Chem Co Ltd シリコーングリース組成物
JPH0314873A (ja) 1989-02-08 1991-01-23 Dow Corning Corp 熱伝導性オルガノシロキサン組成物
JPH10110179A (ja) 1996-08-09 1998-04-28 Shin Etsu Chem Co Ltd 熱伝導性シリコーン組成物、熱伝導性材料及び熱伝導性シリコーングリース
JP2000063872A (ja) 1998-08-18 2000-02-29 Shin Etsu Chem Co Ltd 熱伝導性グリース組成物
JP2000063873A (ja) 1998-08-21 2000-02-29 Shin Etsu Chem Co Ltd 熱伝導性グリース組成物及びそれを使用した半導体装置
JP3677671B2 (ja) 1999-04-30 2005-08-03 東レ・ダウコーニング株式会社 シリコーンゴム用銀粉末の製造方法
JP2002030217A (ja) 2000-07-17 2002-01-31 Fujitsu Ltd 熱伝導性シリコーン組成物
JP3130193U (ja) 2006-12-28 2007-03-15 ライオン株式会社 エアゾール缶用押しボタン
JP2008222776A (ja) 2007-03-09 2008-09-25 Shin Etsu Chem Co Ltd 熱伝導性シリコーングリース組成物
JP2017066406A (ja) 2015-10-02 2017-04-06 信越化学工業株式会社 熱伝導性シリコーン組成物及び半導体装置
JP2017159252A (ja) 2016-03-10 2017-09-14 株式会社キャタラー 排ガス浄化用触媒
JP2018058953A (ja) 2016-10-03 2018-04-12 信越化学工業株式会社 熱伝導性シリコーン組成物及び半導体装置

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Publication number Publication date
EP3979314A1 (en) 2022-04-06
US20220213370A1 (en) 2022-07-07
JP2020193250A (ja) 2020-12-03
JP7076400B2 (ja) 2022-05-27
TW202106810A (zh) 2021-02-16
TWI834860B (zh) 2024-03-11
WO2020241054A1 (ja) 2020-12-03
CN113853676A (zh) 2021-12-28
EP3979314A4 (en) 2023-08-09
US12060517B2 (en) 2024-08-13

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