KR20170081195A - 수지 조성물, 반도체 장치의 제조 방법 및 반도체 장치 - Google Patents
수지 조성물, 반도체 장치의 제조 방법 및 반도체 장치 Download PDFInfo
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- KR20170081195A KR20170081195A KR1020177014316A KR20177014316A KR20170081195A KR 20170081195 A KR20170081195 A KR 20170081195A KR 1020177014316 A KR1020177014316 A KR 1020177014316A KR 20177014316 A KR20177014316 A KR 20177014316A KR 20170081195 A KR20170081195 A KR 20170081195A
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- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
- H01L2224/16146—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked the bump connector connecting to a via connection in the semiconductor or solid-state body
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- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
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- H01L2224/73201—Location after the connecting process on the same surface
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- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/81001—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector involving a temporary auxiliary member not forming part of the bonding apparatus
- H01L2224/81005—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector involving a temporary auxiliary member not forming part of the bonding apparatus being a temporary or sacrificial substrate
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- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L2924/1816—Exposing the passive side of the semiconductor or solid-state body
- H01L2924/18161—Exposing the passive side of the semiconductor or solid-state body of a flip chip
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Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2014226745A JP5976073B2 (ja) | 2014-11-07 | 2014-11-07 | 半導体装置の製造方法 |
JPJP-P-2014-226745 | 2014-11-07 | ||
PCT/JP2015/079172 WO2016072236A1 (ja) | 2014-11-07 | 2015-10-15 | 樹脂組成物、半導体装置の製造方法及び半導体装置 |
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KR20170081195A true KR20170081195A (ko) | 2017-07-11 |
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JP (1) | JP5976073B2 (ja) |
KR (1) | KR20170081195A (ja) |
CN (1) | CN107109069A (ja) |
SG (1) | SG11201703288UA (ja) |
TW (1) | TW201621000A (ja) |
WO (1) | WO2016072236A1 (ja) |
Cited By (1)
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JP2019532488A (ja) * | 2017-07-14 | 2019-11-07 | エルジー・ケム・リミテッド | 絶縁層の製造方法及び半導体パッケージの製造方法 |
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JP2018104649A (ja) * | 2016-12-28 | 2018-07-05 | 日東電工株式会社 | 樹脂シート |
KR102073295B1 (ko) * | 2018-06-22 | 2020-02-04 | 삼성전자주식회사 | 반도체 패키지 |
JP7286676B2 (ja) | 2018-12-18 | 2023-06-05 | ローム株式会社 | 半導体装置 |
DE112021002956T5 (de) | 2020-05-26 | 2023-03-09 | Rohm Co., Ltd. | Halbleiterbauteil und verfahren zum herstellen eines halbleiterbauteils |
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JP2816882B2 (ja) * | 1990-01-11 | 1998-10-27 | 東洋ゴム工業株式会社 | 電子部品封止用成形体 |
JP3378374B2 (ja) * | 1993-09-14 | 2003-02-17 | 株式会社東芝 | 樹脂封止型半導体装置の製造方法、樹脂封止型半導体装置及び封止用樹脂シート |
JP3768920B2 (ja) * | 2001-06-07 | 2006-04-19 | 松下電器産業株式会社 | 回路基板の製造方法およびその回路基板を用いた電力変換モジュール |
JP5035580B2 (ja) * | 2001-06-28 | 2012-09-26 | ナガセケムテックス株式会社 | 弾性表面波デバイスおよびその製法 |
JP4417122B2 (ja) * | 2004-01-21 | 2010-02-17 | 日東電工株式会社 | シート状半導体封止用樹脂組成物 |
JP4730652B2 (ja) * | 2004-06-02 | 2011-07-20 | ナガセケムテックス株式会社 | 電子部品の製造方法 |
JP5354841B2 (ja) * | 2005-12-28 | 2013-11-27 | 日東電工株式会社 | 半導体装置及びその製造方法 |
JP4872587B2 (ja) * | 2006-10-12 | 2012-02-08 | 日立化成工業株式会社 | 封止フィルム、及びこれを用いた半導体装置 |
JP5310103B2 (ja) * | 2009-03-03 | 2013-10-09 | 日本電気株式会社 | 半導体装置及びその製造方法 |
JP5180162B2 (ja) * | 2009-08-05 | 2013-04-10 | 日東電工株式会社 | 電子部品封止用シート状エポキシ樹脂組成物およびそれにより得られた電子部品装置集合体ならびに電子部品装置 |
JP5354200B2 (ja) * | 2009-11-19 | 2013-11-27 | 株式会社村田製作所 | 電子部品内蔵樹脂基板および電子回路モジュール |
JP5042297B2 (ja) * | 2009-12-10 | 2012-10-03 | 日東電工株式会社 | 半導体装置の製造方法 |
JP2011148959A (ja) * | 2010-01-25 | 2011-08-04 | Kyocera Chemical Corp | 半導体封止用樹脂シートおよび樹脂封止型半導体装置 |
JP2013007028A (ja) * | 2011-05-20 | 2013-01-10 | Nitto Denko Corp | 封止用シートおよび電子部品装置 |
JP2013004823A (ja) * | 2011-06-20 | 2013-01-07 | Panasonic Corp | 半導体装置の製造方法 |
JP6044137B2 (ja) * | 2011-07-08 | 2016-12-14 | 日立化成株式会社 | コンプレッション成形用半導体封止樹脂材料及び半導体装置 |
JP6051630B2 (ja) * | 2011-07-13 | 2016-12-27 | 味の素株式会社 | 半導体パッケージ |
JP2013147589A (ja) * | 2012-01-20 | 2013-08-01 | Nitto Denko Corp | 電子部品封止用樹脂組成物シートおよびそれを用いた電子部品装置の製法 |
JP6171280B2 (ja) * | 2012-07-31 | 2017-08-02 | 味の素株式会社 | 半導体装置の製造方法 |
JP6228734B2 (ja) * | 2013-02-14 | 2017-11-08 | 日東電工株式会社 | 電子部品封止用樹脂シート、樹脂封止型半導体装置、及び、樹脂封止型半導体装置の製造方法 |
JP2014179593A (ja) * | 2013-02-15 | 2014-09-25 | Nitto Denko Corp | 半導体素子用封止シート、半導体装置及び半導体装置の製造方法 |
JP6456027B2 (ja) * | 2013-03-27 | 2019-01-23 | 日東電工株式会社 | 封止シート、封止シートの製造方法及び電子部品パッケージの製造方法 |
JP5735029B2 (ja) * | 2013-03-28 | 2015-06-17 | 日東電工株式会社 | 電子デバイス封止用樹脂シート及び電子デバイスパッケージの製造方法 |
JP5793160B2 (ja) * | 2013-03-28 | 2015-10-14 | 日東電工株式会社 | 電子デバイス封止用樹脂シート及び電子デバイスパッケージの製造方法 |
JP2014210909A (ja) * | 2013-04-02 | 2014-11-13 | 日東電工株式会社 | 半導体装置の製造方法 |
JP2014203971A (ja) * | 2013-04-04 | 2014-10-27 | 日東電工株式会社 | アンダーフィルフィルム、封止シート、半導体装置の製造方法及び半導体装置 |
JP2014201703A (ja) * | 2013-04-08 | 2014-10-27 | 日東電工株式会社 | セパレータ付き樹脂シート、電子部品装置の製造方法及び電子部品装置 |
JP2014204040A (ja) * | 2013-04-08 | 2014-10-27 | 日東電工株式会社 | 電子部品装置の製造方法 |
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- 2015-11-03 TW TW104136221A patent/TW201621000A/zh unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019532488A (ja) * | 2017-07-14 | 2019-11-07 | エルジー・ケム・リミテッド | 絶縁層の製造方法及び半導体パッケージの製造方法 |
US11361878B2 (en) | 2017-07-14 | 2022-06-14 | Lg Chem, Ltd. | Method for manufacturing insulating film and semiconductor package |
Also Published As
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JP2016089081A (ja) | 2016-05-23 |
SG11201703288UA (en) | 2017-05-30 |
TW201621000A (zh) | 2016-06-16 |
CN107109069A (zh) | 2017-08-29 |
WO2016072236A1 (ja) | 2016-05-12 |
JP5976073B2 (ja) | 2016-08-23 |
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