JP5310103B2 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP5310103B2 JP5310103B2 JP2009049239A JP2009049239A JP5310103B2 JP 5310103 B2 JP5310103 B2 JP 5310103B2 JP 2009049239 A JP2009049239 A JP 2009049239A JP 2009049239 A JP2009049239 A JP 2009049239A JP 5310103 B2 JP5310103 B2 JP 5310103B2
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- semiconductor device
- wiring layer
- insulating layer
- semiconductor element
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- Engineering & Computer Science (AREA)
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Description
2、102、202 絶縁層
2a、2b 下穴
3、103、203 配線層
4、104、204 ビア接続部
5、105、205 接着層
6 窪み
7 凹部
8 第2配線層
9 第2絶縁層
9b 下穴
10 追加絶縁層
11 追加配線層
12 貫通ビア
13 配線接続ビア
14 ソルダーレジスト
15 外部端子
16 第2半導体素子
17 接続部
18 アンダーフィル樹脂
19 支持体
Claims (25)
- 片面のみにパッドを有する半導体素子と、
前記半導体素子を内蔵する絶縁層と、
前記絶縁層上に配設された配線層と、
前記絶縁層に埋め込まれるとともに、対応する前記配線層と前記半導体素子の前記パッドとを電気的に接続するビア接続部と、
前記半導体素子の前記パッド側の反対側の裏面上に配設された接着層と、
を備え、
前記半導体素子の前記裏面は、少なくとも一部に窪みを有し、
前記接着層は、前記窪みに完全に充填されており、
前記窪みは、前記裏面の中央部の前記半導体素子の厚さが最も薄く、前記裏面の周辺部に行くに従って厚くなるように形成されていることを特徴とする半導体装置。 - 前記絶縁層の前記配線層側の反対側に配設された第2配線層を備えることを特徴とする請求項1記載の半導体装置。
- 前記第2配線層の一部は、前記接着層と接しており、
前記接着層に接している前記第2配線層の部分の面積は、前記接着層の面積よりも大きいことを特徴とする請求項2記載の半導体装置。 - 前記絶縁層に埋め込まれるとともに、対応する前記配線層と前記第2配線層を電気的に接続する貫通ビアを備えることを特徴とする請求項2又は3記載の半導体装置。
- 前記絶縁層の前記配線層側の反対側に配設された第2絶縁層と、
前記第2絶縁層の前記絶縁層側の反対側に配設された第2配線層と、
を備えることを特徴とする請求項1記載の半導体装置。 - 前記第2絶縁層は、前記接着層と接しており、
前記第2配線層は、前記第2絶縁層と前記接着層が重なる領域にも配設されていることを特徴とする請求項5記載の半導体装置。 - 前記絶縁層及び前記第2絶縁層に埋め込まれるとともに、対応する前記配線層と前記第2配線層を電気的に接続する貫通ビアを備えることを特徴とする請求項5又は6記載の半導体装置。
- 前記配線層と前記第2配線層は、同一材料よりなることを特徴とする請求項2乃至7のいずれか一に記載の半導体装置。
- 前記配線層を含む前記絶縁層上に、少なくとも1層以上の追加絶縁層と追加配線層が配設されるとともに、対応する配線層間が配線接続ビアを介して電気的に接続された多層配線層を有することを特徴とする請求項1乃至8のいずれか一に記載の半導体装置。
- 前記第2配線層を含む前記絶縁層上に、少なくとも1層以上の追加絶縁層と追加配線層が配設されるとともに、対応する配線層間が配線接続ビアを介して電気的に接続された多層配線層を有することを特徴とする請求項2乃至4のいずれか一に記載の半導体装置。
- 前記第2配線層を含む前記第2絶縁層上に、少なくとも1層以上の追加絶縁層と追加配線層が配設されるとともに、対応する配線層間が配線接続ビアを介して電気的に接続された多層配線層を有することを特徴とする請求項5乃至7のいずれか一に記載の半導体装置。
- 前記半導体装置の少なくとも片面にソルダーレジスト層が配設されていることを特徴とする請求項1乃至11のいずれか一に記載の半導体装置。
- 前記半導体装置の少なくとも片面に外部端子が配設されていることを特徴とする請求項1乃至12のいずれか一に記載の半導体装置。
- 前記半導体装置の少なくとも片面に第2半導体装置又は受動素子が実装されていることを特徴とする請求項1乃至13のいずれか一に記載の半導体装置。
- 支持体上に、片面のみにパッドを有する半導体素子の前記パッド側の反対側の裏面を前記支持体側に向けて、接着層を介して前記半導体素子を搭載する工程と、
前記半導体素子を含む前記支持体上に絶縁層を形成する工程と、
前記ビア接続部を含む前記絶縁層上に配線層を形成する工程と、
前記支持体を除去する工程と、
を含み、
前記半導体素子を搭載する工程の前に、
前記半導体素子の裏面の少なくとも一部に窪みを形成する工程と、
前記半導体素子の裏面上に前記接着層を前記窪みを完全に充填するように設ける工程と、
を含み、
前記窪みを形成する工程では、前記窪みを、前記裏面の中央部の前記半導体素子の厚さが最も薄く、前記裏面の周辺部に行くに従って厚くなるように形成することを特徴とする半導体装置の製造方法。 - 前記絶縁層を形成する工程と前記配線層を形成する工程の間に、
前記絶縁層において前記半導体素子のパッドに通ずる下穴を形成する工程と、
前記下穴内にビア接続部を形成する工程と、
を含み、
前記配線層を形成する工程では、前記ビア接続部を含む前記絶縁層上に配線層を形成することを特徴とする請求項15記載の半導体装置の製造方法。 - 前記支持体上に第2配線層を形成する工程を含み、
前記半導体素子を搭載する工程では、前記支持体上における前記第2配線層上に、前記半導体素子の裏面を前記支持体側に向けて、接着層を介して前記半導体素子を搭載することを特徴とする請求項15又は16記載の半導体装置の製造方法。 - 前記下穴を形成する工程では、前記絶縁層において前記第2配線層に通ずる第2下穴も形成し、
前記ビア接続部を形成する工程では、前記第2下穴内に貫通ビアも形成し、
前記配線層を形成する工程では、前記ビア接続部及び前記貫通ビアを含む前記絶縁層上に配線層を形成することを特徴とする請求項17記載の半導体装置の製造方法。 - 前記支持体上に第2配線層を形成する工程と、
前記第2配線層を含む前記支持体上に第2絶縁層を形成する工程と、
を含み、
前記半導体素子を搭載する工程では、前記支持体上における前記第2絶縁層上に、半導体素子の裏面を前記支持体側に向けて、接着層を介して前記半導体素子を搭載することを特徴とする請求項15又は16記載の半導体装置の製造方法。 - 前記下穴を形成する工程では、前記絶縁層及び前記第2配線層において前記第2配線層に通ずる第2下穴も形成し、
前記ビア接続部を形成する工程では、前記第2下穴内に貫通ビアも形成し、
前記配線層を形成する工程では、前記ビア接続部及び前記貫通ビアを含む前記絶縁層上に配線層を形成することを特徴とする請求項19記載の半導体装置の製造方法。 - 前記支持体を除去した後、前記第2配線層を含む前記第2絶縁層上に多層配線層を形成する工程を含むことを特徴とする請求項19又は20記載の半導体装置の製造方法。
- 前記支持体上に多層配線層を形成する工程を含み、
前記半導体素子を搭載する工程では、前記多層配線層上に、前記半導体素子の裏面を前記支持体側に向けて、接着層を介して前記半導体素子を搭載することを特徴とする請求項15又は16記載の半導体装置の製造方法。 - 前記配線層を含む前記絶縁層上に多層配線層を形成する工程を含むことを特徴とする請求項15乃至22のいずれか一に記載の半導体装置の製造方法。
- 前記半導体装置の少なくとも片面にソルダーレジスト層を形成する工程を含むことを特徴とする請求項15乃至23のいずれか一に記載の半導体装置の製造方法。
- 前記半導体装置の少なくとも片面に外部端子を形成する工程を含むことを特徴とする請求項15乃至24のいずれか一に記載の半導体装置の製造方法。
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