KR20090130038A - 기판 반송장치 - Google Patents
기판 반송장치 Download PDFInfo
- Publication number
- KR20090130038A KR20090130038A KR1020097021163A KR20097021163A KR20090130038A KR 20090130038 A KR20090130038 A KR 20090130038A KR 1020097021163 A KR1020097021163 A KR 1020097021163A KR 20097021163 A KR20097021163 A KR 20097021163A KR 20090130038 A KR20090130038 A KR 20090130038A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- conveyor
- support
- board
- transfer
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Specific Conveyance Elements (AREA)
- Robotics (AREA)
- Intermediate Stations On Conveyors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007103757A JP5152469B2 (ja) | 2007-04-11 | 2007-04-11 | 基板搬送装置 |
JPJP-P-2007-103757 | 2007-04-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20090130038A true KR20090130038A (ko) | 2009-12-17 |
Family
ID=39863612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020097021163A KR20090130038A (ko) | 2007-04-11 | 2008-02-04 | 기판 반송장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5152469B2 (fr) |
KR (1) | KR20090130038A (fr) |
CN (1) | CN101616855A (fr) |
TW (1) | TW200844027A (fr) |
WO (1) | WO2008126454A1 (fr) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101172764B1 (ko) | 2009-10-08 | 2012-08-09 | 로체 시스템즈(주) | 기판 처리장치 및 이를 운용하는 기판 이송방법 |
CN102280397A (zh) * | 2010-06-10 | 2011-12-14 | 致茂电子(苏州)有限公司 | 一种晶圆输送分配装置及其方法 |
JP5224612B2 (ja) * | 2010-09-09 | 2013-07-03 | 東京エレクトロン株式会社 | 基板受渡装置及び基板受渡方法 |
CN102602695A (zh) * | 2011-01-25 | 2012-07-25 | 佶新科技股份有限公司 | 基板输送分类装置 |
KR101824571B1 (ko) | 2011-04-21 | 2018-03-15 | 주식회사 포틱스 | 기판 이송 장치 |
TWI467687B (zh) * | 2011-11-29 | 2015-01-01 | Tera Automation Corp Ltd | Glass substrate transfer device |
CN102514971A (zh) * | 2011-12-08 | 2012-06-27 | 深圳市鑫联达包装机械有限公司 | 一种能够连续传送纸张的传输系统及其传输方法 |
CN103183233A (zh) * | 2011-12-29 | 2013-07-03 | 黄正栋 | 基板输送装置 |
KR101651253B1 (ko) * | 2014-05-29 | 2016-08-26 | 주식회사 탑 엔지니어링 | 스크라이브 장치용 이송 밸트 및 이를 갖는 스크라이브 장치 |
JP6456177B2 (ja) * | 2015-02-12 | 2019-01-23 | 株式会社ディスコ | ウェーハ処理システム |
CN105661603B (zh) * | 2015-12-26 | 2017-11-03 | 河南勃达微波装备股份有限公司 | 一种枣片玻璃连续自动进出装置及方法 |
KR20220134587A (ko) * | 2020-01-27 | 2022-10-05 | 코닝 인코포레이티드 | 인라인 가공 중 유리 기판의 에지를 트리밍하기 위한 방법 및 장치 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01140831U (fr) * | 1988-03-22 | 1989-09-27 | ||
JP4052826B2 (ja) * | 2001-10-22 | 2008-02-27 | 株式会社日立ハイテクノロジーズ | マスクと露光対象基板との搬送に兼用できる搬送アーム及びそれを備えた露光装置 |
-
2007
- 2007-04-11 JP JP2007103757A patent/JP5152469B2/ja active Active
-
2008
- 2008-02-04 WO PCT/JP2008/051779 patent/WO2008126454A1/fr active Application Filing
- 2008-02-04 CN CN200880002757A patent/CN101616855A/zh active Pending
- 2008-02-04 KR KR1020097021163A patent/KR20090130038A/ko not_active Application Discontinuation
- 2008-02-14 TW TW97105129A patent/TW200844027A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
WO2008126454A1 (fr) | 2008-10-23 |
CN101616855A (zh) | 2009-12-30 |
JP5152469B2 (ja) | 2013-02-27 |
JP2008260605A (ja) | 2008-10-30 |
TW200844027A (en) | 2008-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR20090130038A (ko) | 기판 반송장치 | |
JP4896112B2 (ja) | 基板搬送装置 | |
JP4711770B2 (ja) | 搬送装置、真空処理装置および搬送方法 | |
KR100740955B1 (ko) | 기판반송장치 및 기판반송방법 | |
KR101495241B1 (ko) | 반송 로봇, 그의 기판 반송 방법 및 기판 반송 중계 장치 | |
KR101213529B1 (ko) | 기판 반송 장치 | |
KR101424017B1 (ko) | 기판 검사 장치 | |
JP2012059798A (ja) | 部品実装装置 | |
KR101199778B1 (ko) | 기판처리장치 및 기판처리방법 | |
KR101859279B1 (ko) | 기판 처리 장치 및 기판 처리 방법 | |
KR20130017443A (ko) | 기판 도포 장치, 부상식 기판 반송 장치 및 부상식 기판 반송 방법 | |
JP2008260604A (ja) | 基板搬送装置 | |
KR101543678B1 (ko) | 전자부품 실장장치 | |
JP4711771B2 (ja) | 搬送装置および真空処理装置 | |
JP4133489B2 (ja) | 基板待機装置およびそれを備えた基板処理装置 | |
KR101199779B1 (ko) | 기판처리장치 | |
CN101882565B (zh) | 一种在线处理设备 | |
KR100483824B1 (ko) | 기판반송장치 및 이를 이용한 기판처리장치와 기판처리방법 | |
KR101386297B1 (ko) | 기판 처리 시스템 및 기판 반송 방법 | |
JP2009043846A (ja) | 基板搬送装置 | |
KR101496444B1 (ko) | 유리 기판 이송 방법 및 이를 이용하는 열처리 장치 | |
CN111792328B (zh) | 基板传送装置 | |
JP4631433B2 (ja) | 基板搬送装置及び基板搬送方法 | |
KR101052750B1 (ko) | 기판 이송 모듈 및 이를 포함하는 기판 처리 장치 | |
JP4237017B2 (ja) | 基板搬送装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |