CN101616855A - 基板输送装置 - Google Patents

基板输送装置 Download PDF

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Publication number
CN101616855A
CN101616855A CN200880002757A CN200880002757A CN101616855A CN 101616855 A CN101616855 A CN 101616855A CN 200880002757 A CN200880002757 A CN 200880002757A CN 200880002757 A CN200880002757 A CN 200880002757A CN 101616855 A CN101616855 A CN 101616855A
Authority
CN
China
Prior art keywords
supporting mass
substrate
belt conveyor
processing equipment
transfer unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200880002757A
Other languages
English (en)
Chinese (zh)
Inventor
平田贤辅
和田芳幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Publication of CN101616855A publication Critical patent/CN101616855A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)
  • Robotics (AREA)
  • Intermediate Stations On Conveyors (AREA)
CN200880002757A 2007-04-11 2008-02-04 基板输送装置 Pending CN101616855A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007103757A JP5152469B2 (ja) 2007-04-11 2007-04-11 基板搬送装置
JP103757/2007 2007-04-11

Publications (1)

Publication Number Publication Date
CN101616855A true CN101616855A (zh) 2009-12-30

Family

ID=39863612

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200880002757A Pending CN101616855A (zh) 2007-04-11 2008-02-04 基板输送装置

Country Status (5)

Country Link
JP (1) JP5152469B2 (fr)
KR (1) KR20090130038A (fr)
CN (1) CN101616855A (fr)
TW (1) TW200844027A (fr)
WO (1) WO2008126454A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102280397A (zh) * 2010-06-10 2011-12-14 致茂电子(苏州)有限公司 一种晶圆输送分配装置及其方法
CN102442542A (zh) * 2010-09-09 2012-05-09 东京毅力科创株式会社 衬底交接装置以及衬底交接方法
CN102514971A (zh) * 2011-12-08 2012-06-27 深圳市鑫联达包装机械有限公司 一种能够连续传送纸张的传输系统及其传输方法
CN103183233A (zh) * 2011-12-29 2013-07-03 黄正栋 基板输送装置
CN108439781A (zh) * 2014-05-29 2018-08-24 塔工程有限公司 划线装置用输送带及具备其的划线装置
CN115175880A (zh) * 2020-01-27 2022-10-11 康宁公司 用于直列处理期间修整玻璃基板的边缘的方法和设备

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101172764B1 (ko) 2009-10-08 2012-08-09 로체 시스템즈(주) 기판 처리장치 및 이를 운용하는 기판 이송방법
CN102602695A (zh) * 2011-01-25 2012-07-25 佶新科技股份有限公司 基板输送分类装置
KR101824571B1 (ko) 2011-04-21 2018-03-15 주식회사 포틱스 기판 이송 장치
TWI467687B (zh) * 2011-11-29 2015-01-01 Tera Automation Corp Ltd Glass substrate transfer device
JP6456177B2 (ja) * 2015-02-12 2019-01-23 株式会社ディスコ ウェーハ処理システム
CN105661603B (zh) * 2015-12-26 2017-11-03 河南勃达微波装备股份有限公司 一种枣片玻璃连续自动进出装置及方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140831U (fr) * 1988-03-22 1989-09-27
JP4052826B2 (ja) * 2001-10-22 2008-02-27 株式会社日立ハイテクノロジーズ マスクと露光対象基板との搬送に兼用できる搬送アーム及びそれを備えた露光装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102280397A (zh) * 2010-06-10 2011-12-14 致茂电子(苏州)有限公司 一种晶圆输送分配装置及其方法
CN102442542A (zh) * 2010-09-09 2012-05-09 东京毅力科创株式会社 衬底交接装置以及衬底交接方法
CN102514971A (zh) * 2011-12-08 2012-06-27 深圳市鑫联达包装机械有限公司 一种能够连续传送纸张的传输系统及其传输方法
CN103183233A (zh) * 2011-12-29 2013-07-03 黄正栋 基板输送装置
CN108439781A (zh) * 2014-05-29 2018-08-24 塔工程有限公司 划线装置用输送带及具备其的划线装置
CN115175880A (zh) * 2020-01-27 2022-10-11 康宁公司 用于直列处理期间修整玻璃基板的边缘的方法和设备

Also Published As

Publication number Publication date
WO2008126454A1 (fr) 2008-10-23
KR20090130038A (ko) 2009-12-17
JP5152469B2 (ja) 2013-02-27
JP2008260605A (ja) 2008-10-30
TW200844027A (en) 2008-11-16

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RJ01 Rejection of invention patent application after publication

Application publication date: 20091230