KR20080104372A - 전자 장치 제조 시스템의 압력 제어 방법 및 장치 - Google Patents

전자 장치 제조 시스템의 압력 제어 방법 및 장치 Download PDF

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Publication number
KR20080104372A
KR20080104372A KR1020087025069A KR20087025069A KR20080104372A KR 20080104372 A KR20080104372 A KR 20080104372A KR 1020087025069 A KR1020087025069 A KR 1020087025069A KR 20087025069 A KR20087025069 A KR 20087025069A KR 20080104372 A KR20080104372 A KR 20080104372A
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South Korea
Prior art keywords
electronic device
device manufacturing
pump
parameter
manufacturing system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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KR1020087025069A
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English (en)
Korean (ko)
Inventor
마크 더블유. 커리
세바스티앙 라욱스
피터 포르시네브
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20080104372A publication Critical patent/KR20080104372A/ko
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Drying Of Semiconductors (AREA)
  • General Factory Administration (AREA)
  • Treating Waste Gases (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Measuring Fluid Pressure (AREA)
  • User Interface Of Digital Computer (AREA)
  • Control Of Fluid Pressure (AREA)
  • Incineration Of Waste (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
KR1020087025069A 2006-03-16 2007-03-14 전자 장치 제조 시스템의 압력 제어 방법 및 장치 Ceased KR20080104372A (ko)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US78337406P 2006-03-16 2006-03-16
US78337006P 2006-03-16 2006-03-16
US78333706P 2006-03-16 2006-03-16
US60/783,370 2006-03-16
US60/783,337 2006-03-16
US60/783,374 2006-03-16
US89060907P 2007-02-19 2007-02-19
US60/890,609 2007-02-19

Publications (1)

Publication Number Publication Date
KR20080104372A true KR20080104372A (ko) 2008-12-02

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ID=38522928

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020087025069A Ceased KR20080104372A (ko) 2006-03-16 2007-03-14 전자 장치 제조 시스템의 압력 제어 방법 및 장치
KR1020087025085A Expired - Fee Related KR101126413B1 (ko) 2006-03-16 2007-03-14 전자 디바이스 제조 시스템의 동작을 향상시키는 방법 및 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020087025085A Expired - Fee Related KR101126413B1 (ko) 2006-03-16 2007-03-14 전자 디바이스 제조 시스템의 동작을 향상시키는 방법 및 장치

Country Status (7)

Country Link
US (3) US7532952B2 (https=)
EP (3) EP1994457B1 (https=)
JP (4) JP2009530819A (https=)
KR (2) KR20080104372A (https=)
CN (1) CN101495925B (https=)
TW (3) TWI407997B (https=)
WO (3) WO2007109081A2 (https=)

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JP6030278B2 (ja) 2016-11-24
CN101495925A (zh) 2009-07-29
WO2007109082A3 (en) 2008-11-20
JP2015015480A (ja) 2015-01-22
WO2007109082A2 (en) 2007-09-27
JP6034546B2 (ja) 2016-11-30
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US7532952B2 (en) 2009-05-12
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US7970483B2 (en) 2011-06-28
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