KR20080068523A - 다수―정크션 태양 전지 그리고 그 제조 방법 및 장치 - Google Patents

다수―정크션 태양 전지 그리고 그 제조 방법 및 장치 Download PDF

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Publication number
KR20080068523A
KR20080068523A KR1020070107740A KR20070107740A KR20080068523A KR 20080068523 A KR20080068523 A KR 20080068523A KR 1020070107740 A KR1020070107740 A KR 1020070107740A KR 20070107740 A KR20070107740 A KR 20070107740A KR 20080068523 A KR20080068523 A KR 20080068523A
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KR
South Korea
Prior art keywords
sccm
silicon layer
forming
junction
amorphous silicon
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Ceased
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KR1020070107740A
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English (en)
Korean (ko)
Inventor
수영 최
용-기 채
슈란 솅
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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Priority claimed from US11/624,677 external-priority patent/US20080173350A1/en
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20080068523A publication Critical patent/KR20080068523A/ko
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/17—Photovoltaic cells having only PIN junction potential barriers
    • H10F10/172—Photovoltaic cells having only PIN junction potential barriers comprising multiple PIN junctions, e.g. tandem cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/121—The active layers comprising only Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/70—Surface textures, e.g. pyramid structures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/548—Amorphous silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Photovoltaic Devices (AREA)
KR1020070107740A 2007-01-18 2007-10-25 다수―정크션 태양 전지 그리고 그 제조 방법 및 장치 Ceased KR20080068523A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11/624,677 2007-01-18
US11/624,677 US20080173350A1 (en) 2007-01-18 2007-01-18 Multi-junction solar cells and methods and apparatuses for forming the same
US11/671,988 2007-02-06
US11/671,988 US7582515B2 (en) 2007-01-18 2007-02-06 Multi-junction solar cells and methods and apparatuses for forming the same

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020090115721A Division KR20090130219A (ko) 2007-01-18 2009-11-27 다수―정크션 태양 전지 그리고 그 제조 방법 및 장치

Publications (1)

Publication Number Publication Date
KR20080068523A true KR20080068523A (ko) 2008-07-23

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020070107740A Ceased KR20080068523A (ko) 2007-01-18 2007-10-25 다수―정크션 태양 전지 그리고 그 제조 방법 및 장치
KR1020090115721A Withdrawn KR20090130219A (ko) 2007-01-18 2009-11-27 다수―정크션 태양 전지 그리고 그 제조 방법 및 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020090115721A Withdrawn KR20090130219A (ko) 2007-01-18 2009-11-27 다수―정크션 태양 전지 그리고 그 제조 방법 및 장치

Country Status (6)

Country Link
US (2) US7582515B2 (enExample)
EP (1) EP2104955A4 (enExample)
JP (1) JP2010517271A (enExample)
KR (2) KR20080068523A (enExample)
TW (1) TWI369788B (enExample)
WO (1) WO2008089043A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250151069A (ko) 2024-04-13 2025-10-21 나세림 늘어나라 고무고무 반창고

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KR20250151069A (ko) 2024-04-13 2025-10-21 나세림 늘어나라 고무고무 반창고

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