KR20070116068A - Ⅲ족 질화물 반도체 소자의 제조방법 - Google Patents
Ⅲ족 질화물 반도체 소자의 제조방법 Download PDFInfo
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- KR20070116068A KR20070116068A KR1020077022677A KR20077022677A KR20070116068A KR 20070116068 A KR20070116068 A KR 20070116068A KR 1020077022677 A KR1020077022677 A KR 1020077022677A KR 20077022677 A KR20077022677 A KR 20077022677A KR 20070116068 A KR20070116068 A KR 20070116068A
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- layer
- group iii
- iii nitride
- nitride semiconductor
- growth
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 115
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 76
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 230000002829 reductive effect Effects 0.000 claims abstract description 22
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 51
- 238000000034 method Methods 0.000 claims description 36
- 238000005253 cladding Methods 0.000 claims description 26
- 229910052757 nitrogen Inorganic materials 0.000 claims description 25
- 239000007789 gas Substances 0.000 claims description 18
- 239000012159 carrier gas Substances 0.000 claims description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 239000013078 crystal Substances 0.000 description 36
- 230000015556 catabolic process Effects 0.000 description 20
- 238000000407 epitaxy Methods 0.000 description 13
- 239000011777 magnesium Substances 0.000 description 13
- 239000012071 phase Substances 0.000 description 11
- 239000002994 raw material Substances 0.000 description 10
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 9
- 239000010408 film Substances 0.000 description 9
- 239000012535 impurity Substances 0.000 description 9
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 8
- 229910052594 sapphire Inorganic materials 0.000 description 7
- 239000010980 sapphire Substances 0.000 description 7
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 7
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 7
- 230000004888 barrier function Effects 0.000 description 6
- 229910052732 germanium Inorganic materials 0.000 description 6
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 229910052733 gallium Inorganic materials 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- ZRLCXMPFXYVHGS-UHFFFAOYSA-N tetramethylgermane Chemical compound C[Ge](C)(C)C ZRLCXMPFXYVHGS-UHFFFAOYSA-N 0.000 description 3
- 229910002704 AlGaN Inorganic materials 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 229910021478 group 5 element Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 2
- OTRPZROOJRIMKW-UHFFFAOYSA-N triethylindigane Chemical compound CC[In](CC)CC OTRPZROOJRIMKW-UHFFFAOYSA-N 0.000 description 2
- IFTRQJLVEBNKJK-UHFFFAOYSA-N Aethyl-cyclopentan Natural products CCC1CCCC1 IFTRQJLVEBNKJK-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910010093 LiAlO Inorganic materials 0.000 description 1
- 229910020068 MgAl Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 150000001639 boron compounds Chemical class 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910000078 germane Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- QBJCZLXULXFYCK-UHFFFAOYSA-N magnesium;cyclopenta-1,3-diene Chemical compound [Mg+2].C1C=CC=[C-]1.C1C=CC=[C-]1 QBJCZLXULXFYCK-UHFFFAOYSA-N 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- QQXSEZVCKAEYQJ-UHFFFAOYSA-N tetraethylgermanium Chemical compound CC[Ge](CC)(CC)CC QQXSEZVCKAEYQJ-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
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Abstract
Description
Claims (15)
- 기판상에 Ⅲ족 질화물 반도체로 이루어지는, n-형 층, 활성층 및 p-형 층을 이 순서대로 갖는 Ⅲ족 질화물 반도체 소자의 제조방법으로서: n-형 층의 성장 도중 또는/및 성장 후 및 활성층의 성장 전에 상기 반도체의 성장속도를 저하시키는 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 1 항에 있어서,상기 Ⅲ족 질화물 반도체의 저하된 성장속도는 1㎛/시 이하인 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 2 항에 있어서,상기 반도체의 성장이 중단되는 것(저하된 성장속도가 0이다)을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 3 항에 있어서,상기 중단 중의 분위기는 질소원 및 캐리어 가스를 포함하는 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 1 항에 있어서,상기 n-형 층은 n-형 접촉층 및 n-형 클래드층을 포함하고, 상기 n-형 클래드층은 In을 함유하는 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 5 항에 있어서,상기 반도체의 성장속도는 상기 n-형 클래드층의 성장 전에 저하시키는 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 6 항에 있어서,상기 n-형 접촉층의 성장 후 및 n-형 클래드층의 성장 전에 상기 반도체의 성장을 중단시키는 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 1 항에 있어서,상기 성장속도를 저하시키는 시간은 30초 이상 4시간 이하인 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 1 항에 있어서,상기 반도체의 성장속도를 저하시킨 저성장 속도층의 두께가 100㎚ 이하인 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 1 항에 있어서,상기 성장속도가 저하되어 있는 사이의 기판 온도가 성장속도를 저하시키기 직전 n-형 층이 성장하는 동안의 기판 온도 이상인 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 1 항에 있어서,상기 성장속도가 저하되어 있는 사이의 기판 온도가 900~1400℃인 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 1 항에 있어서,캐리어 가스는 수소함유 가스인 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 1 항에 있어서,질소원의 유량은 1~20ℓ/min인 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자의 제조방법.
- 제 1 항 내지 제 13 항 중 어느 한 항에 기재된 제조방법으로 제조된 것을 특징으로 하는 Ⅲ족 질화물 반도체 소자.
- 제 14 항에 기재된 상기 Ⅲ족 질화물 반도체 소자는 n-형 층에 부극이, p-형 층에 정극이 각각 형성된 것을 특징으로 하는 Ⅲ족 질화물 반도체 발광소자.
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JPJP-P-2005-00139596 | 2005-05-12 | ||
JP2005139596 | 2005-05-12 |
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US (1) | US20090140286A1 (ko) |
EP (1) | EP1869717B1 (ko) |
KR (1) | KR101008856B1 (ko) |
TW (1) | TWI360234B (ko) |
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TWI415295B (zh) * | 2008-06-24 | 2013-11-11 | Advanced Optoelectronic Tech | 半導體元件的製造方法及其結構 |
JP5136437B2 (ja) * | 2009-01-23 | 2013-02-06 | 住友電気工業株式会社 | 窒化物系半導体光素子を作製する方法 |
JP2011054935A (ja) * | 2009-06-19 | 2011-03-17 | Rohm & Haas Electronic Materials Llc | ドーピング方法 |
JP7043802B2 (ja) * | 2017-11-16 | 2022-03-30 | 住友電気工業株式会社 | 垂直共振型面発光レーザ、垂直共振型面発光レーザを作製する方法 |
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JP3721674B2 (ja) * | 1996-12-05 | 2005-11-30 | ソニー株式会社 | 窒化物系iii−v族化合物半導体基板の製造方法 |
JPH10214959A (ja) * | 1997-01-29 | 1998-08-11 | Furukawa Electric Co Ltd:The | 半導体装置 |
US6147363A (en) * | 1997-12-25 | 2000-11-14 | Showa Denko K.K. | Nitride semiconductor light-emitting device and manufacturing method of the same |
JP2000156544A (ja) * | 1998-09-17 | 2000-06-06 | Matsushita Electric Ind Co Ltd | 窒化物半導体素子の製造方法 |
JP3591710B2 (ja) * | 1999-12-08 | 2004-11-24 | ソニー株式会社 | 窒化物系iii−v族化合物層の成長方法およびそれを用いた基板の製造方法 |
JP2001057442A (ja) | 1999-08-19 | 2001-02-27 | Sharp Corp | Iii−v族窒化物半導体の製造方法 |
JP2001196702A (ja) * | 2000-01-11 | 2001-07-19 | Toyoda Gosei Co Ltd | Iii族窒化物系化合物半導体発光素子 |
GB2372635B (en) | 2000-08-18 | 2005-01-19 | Showa Denko Kk | Method of fabricating group-III nitride semiconductor crystals. |
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JP4331906B2 (ja) * | 2001-12-26 | 2009-09-16 | 日本碍子株式会社 | Iii族窒化物膜の製造方法 |
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- 2006-04-06 KR KR1020077022677A patent/KR101008856B1/ko active IP Right Grant
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TW200701527A (en) | 2007-01-01 |
EP1869717B1 (en) | 2017-01-04 |
EP1869717A1 (en) | 2007-12-26 |
EP1869717A4 (en) | 2012-07-25 |
TWI360234B (en) | 2012-03-11 |
WO2006109840A1 (en) | 2006-10-19 |
KR101008856B1 (ko) | 2011-01-19 |
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